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Fabrication of Ferroelectric BLT Thin Films by Direct Liquid Injection MOCVD
British Library Conference Proceedings | 2008| -
Ruthenium Films Deposited by Liquid-Delivery MOCVD Using Bis(ethylcyclopentadienyl)ruthenium with Toluene as the Solvent
British Library Online Contents | 2006| -
A simple two-step phosphorus doping process for shallow junctions by applying a controlled adsorption and a diffusion in an oxidising ambient
British Library Online Contents | 2004| -
Electrical characterization of zirconium oxide layers grown by liquid delivery MOCVD
Tema Archive | 2005| -
Hot wire chemical vapor deposition of germanium selenide thin films for nonvolatile random access memory applications
National licenceAmerican Institute of Physics | 2011| -
Deposition of PZT Thin Films on Three-Dimensional Trench Structures
British Library Conference Proceedings | 2008| -
Application of atomic layer deposited dopant sources for ultra-shallow doping of silicon
British Library Online Contents | 2014| -
1.5 S-Butyl 1.5 N-Butyl Bismuth and 1.5-Butyl 1.5-Isopropyl Bismuth as New Liquid Bismuth Precursors for SBT Thin Film Deposition
British Library Conference Proceedings | 2006| -
Phosphorus diffusion into silicon after vapor phase surface adsorption of phosphine
British Library Online Contents | 2005| -
Reliable metal-graphene contact formation process flows in a CMOS-compatible environment
Free accessDataCite | 2022| -
Reliable metal–graphene contact formation process flows in a CMOS-compatible environment
Free accessRoyal Society of Chemistry | 2022| -
P-type Doping of Silicon Suitable for Structures with High Aspect Ratios by Using a Dopant Source of Boron Oxide Grown by Atomic Layer Deposition
British Library Conference Proceedings | 2012| -
Sub-Atmospheric Chemical Vapor Deposition of SiO~2 for Dielectric Layers in High Aspect Ratio TSVs
British Library Conference Proceedings | 2011| -
Hot Wire Chemical Vapor Deposition of Ge~2Sb~2Te~5 Thin Films
British Library Online Contents | 2011| -
Shallow Doping of Silicon from an Adsorbed Phosphorus Surface Layer
British Library Conference Proceedings | 2005| -
Gallium Assisted PECVD Synthesis of Silicon Nanowires
British Library Conference Proceedings | 2010| -
Liquid delivery MOCVD of Ruthenium Films from Ru(EtCp)2 with Toluene Solvent
British Library Conference Proceedings | 2007| -
Hot wire chemical vapor deposition of germanium selenide thin films for nonvolatile random access memory applications (3 pages)
British Library Online Contents | 2011|
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