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Journal of vacuum science and technology : JVST ; an AVS journal
A , Vacuum, surfaces, & filmsTIBKAT | 2.Ser. 1.1983 -| -
Journal of vacuum science & technology : JVST ; the official journal of the American Vacuum Society
A , Vacuum, surfaces, and filmsTIBKAT | 1.1983 -| -
Chemical and structural study of electrically passivating Al2O3/Si interfaces prepared by atomic layer deposition
Free accessFraunhofer Publica | 2012| -
Direct wafer bonding of highly conductive GaSb/GaInAs and GaSb/GaInP heterojunctions prepared by argon-beam surface activation
Free accessFraunhofer Publica | 2016| -
Journal of vacuum science & technology : the official journal of the American Vacuum Society
TIBKAT | 1.1964 - 21.1982| -
Work function performance of a C12A7 electride surface exposed to low pressure low temperature hydrogen plasmas
Free accessFraunhofer Publica | 2021| -
Etching mechanism of the single-step through-silicon-via dry etch using SF6/C4F8 chemistry
Online Contents | 2014| -
Hydrogen traps in the outgassing model of a stainless steel vacuum chamber 031604
Online Contents | 2014| -
Plasma damage mechanisms in low k organosilicate glass and their inhibition by Ar ion bombardment
Online Contents | 2014|
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