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PROCÉDÉ DE FABRICATION D'UNE STRUCTURE MICROMÉCANIQUE EN CARBURE DE SILICIUM COMPORTANT AU MOINS UNE CAVITÉ
Free accessEuropean Patent Office | 2019| -
PROCESS FOR FABRICATING A MICROMECHANICAL STRUCTURE MADE OF SILICON CARBIDE INCLUDING AT LEAST ONE CAVITY
Free accessEuropean Patent Office | 2019| -
PROCEDE DE FABRICATION D’UNE STRUCTURE MICROMECANIQUE EN CARBURE DE SILICIUM COMPORTANT AU MOINS UNE CAVITE
Free accessEuropean Patent Office | 2018| -
Process for fabricating a micromechanical structure made of silicon carbide including at least one cavity
Free accessEuropean Patent Office | 2019| -
PROCEDE DE FABRICATION D'UNE STRUCTURE MICROMECANIQUE EN CARBURE DE SILICIUM COMPORTANT AU MOINS UNE CAVITE
Free accessEuropean Patent Office | 2017| -
Turning the undesired voids in silicon into a tool: In-situ fabrication of free-standing 3C-SiC membranes
American Institute of Physics | 2017| -
Direct insight into grains formation in Si layers grown on 3C-SiC by chemical vapor deposition
British Library Online Contents | 2015| -
Toward high-quality 3C–SiC membrane on a 3C–SiC pseudo-substrate
British Library Online Contents | 2015| -
On the interplay between Si(110) epilayer atomic roughness and subsequent 3C-SiC growth direction
American Institute of Physics | 2016| -
Discrimination of Binary Gas Mixture Using CMUT Based Sound Attenuation Spectrum Gas Sensor
British Library Conference Proceedings | 2021| -
Room light anodic etching of highly doped n-type 4 H-SiC in high-concentration HF electrolytes: Difference between C and Si crystalline faces
Free accessSpringer Verlag | 2012|
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