Year of publication
Type of media
Type of material
Licence
Synonyms were used for: Elektronenstrahllithografie
Search without synonyms: keywords:("Elektronenstrahllithografie")
Used synonyms:
- e beam lithography
- electron beam lithography
- elektronenlithografie
- elektronenlithographie
- elektronenstrahllithographie
-
Patterning Magnetic Regions in Hydrogenated Graphene Via E‐Beam Irradiation
Wiley | 2015|Keywords: e‐beam lithography -
Proximity effect correction using pattern shape modification and area density map for electron-beam projection lithography
American Institute of Physics | 2001|Keywords: ELECTRON BEAM LITHOGRAPHY -
Sub-5keV electron-beam lithography in hydrogen silsesquioxane resist
Elsevier | 2011|Keywords: Low-energy electron-beam lithography, Low-voltage electron-beam lithography -
Comprehensive model of electron energy deposition
American Institute of Physics | 2002|Keywords: ELECTRON BEAM LITHOGRAPHY -
Nanostructure formation on metal-chalcogenide surface using electron beam irradiation
Elsevier | 2010|Keywords: Electron beam lithography -
Advances in arrayed microcolumn lithography
American Institute of Physics | 2000|Keywords: ELECTRON BEAM LITHOGRAPHY -
Electron-Beam Lithography for Patterning Biomolecules at the Micron and Nanometer Scale
American Chemical Society | 2012|Keywords: e-beam lithography -
Plasmonic Color Palettes for Photorealistic Printing with Aluminum Nanostructures
American Chemical Society | 2014|Keywords: electron-beam lithography -
A negative tone lift-off method for small metal holes using PMMA/$ SiO_{2} $ double layer
Online Contents | 2021|Keywords: E-beam lithography -
Optical confinement in TiO2 waveguides fabricated by resist free electron beam lithography
Elsevier | 2019|Keywords: Electron beam lithography -
Fabrication of nanoparticles with 3D shape control for X-ray scattering experiments
Elsevier | 2014|Keywords: E-beam lithography -
Nanopatterning on Nonplanar and Fragile Substrates with Ice Resists
American Chemical Society | 2012|Keywords: e-beam lithography -
“Sketch and Peel” Lithography for High-Resolution Multiscale Patterning
American Chemical Society | 2016|Keywords: electron-beam lithography -
Projection reduction exposure with variable axis immersion lenses: Next generation lithography
American Institute of Physics | 1999|Keywords: ELECTRON BEAM LITHOGRAPHY -
Spray coating of PMMA for pattern transfer via electron beam lithography on surfaces with high topography
Elsevier | 2010|Keywords: Electron beam lithography -
Electron optical column for a multicolumn, multibeam direct-write electron beam lithography system
American Institute of Physics | 2000|Keywords: ELECTRON BEAM LITHOGRAPHY -
Performance of the Raith 150 electron-beam lithography system
American Institute of Physics | 2001|Keywords: ELECTRON BEAM LITHOGRAPHY -
Design, fabrication and characterization of plasmonic gratings for SERS
Elsevier | 2011|Keywords: Electron beam lithography -
Influence of sub-100 nm scattering on high-energy electron beam lithography
American Institute of Physics | 2001|Keywords: ELECTRON BEAM LITHOGRAPHY -
Newly developed electron beam stepper for nanoimprint mold fabrication
American Institute of Physics | 2010|Keywords: electron beam lithography
Send my search to (beta)
Send your search query (search terms without filters) to other databases, portals and catalogues to find more interesting hits.
Dimensions is a database for abstracts and citations that links information on research funding with the resulting publications, studies and patents.
In the TIB AV-Portal, audiovisual media from science and teaching can be foundand own scientific videos can be published.
The FID move can be used to search for subject-specific literature, research data and other information from mobility and transport research.
The Open Research Knowledge Graph provides structured descriptions of research content and makes it comparable.
Freely accessible part of the collaborative K10plus catalogue with materials relevant for interlibrary loan and direct delivery services.