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High-k oxides by atomic layer deposition—Applications in biology and medicine
American Institute of Physics | 2017| -
Circular Ion Sources for Plasma Enhanced Atomic Layer Deposition Applications
British Library Conference Proceedings | 2015| -
Atomic layer deposition applications 8 : [papers ... presented in the Symposium "Atomic Layer Deposition Applications 8", held during the PRiME 2012 joint international meeting of the Electrochemical Society and the Electrochemical Society of Japan ... in Honolulu, Hawaii, from October 7 to 12, 2012]
TIBKAT | 2012| -
Atomic layer deposition : [First Symposium on Atomic Layer Deposition Applications: Challenges and Opportunities, held on October 17 through October 19, 2005 as part of the 208th meeting of the Electrochemical Society, ECS meeting, October 16 - 21, 2005, Los Angeles, California, USA]
TIBKAT | 2006| -
(Invited) Atomic Layer Deposition of Tungsten-Rich Tungsten Carbide Films Using WCl~6 and AlH~2(tBuNCH~2CH~2NMe~2) as Precursors
British Library Conference Proceedings | 2018|
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