Year of publication
Type of material
Licence
Synonyms were used for: Reactive sputtering
Search without synonyms: keywords:("Reactive sputtering")
Used synonyms:
- reactive sputtering process
- reactive sputtering prozess
- reaktive kathodenzerstaubung
- reaktive katodenzerstaubung
- reaktives sputtern
-
Influence of substrate temperature and N2/Ar flow ratio on the stoichiometry, structure and hardness of TaNx coatings deposited by DC reactive sputtering
Wiley | 2015|Keywords: reactive sputtering -
Reactive sputtering of magnesium hydride thin films for photovoltaic applications
Tema Archive | 2010|Keywords: reaktive Kathodenzerstäubung -
The mechanism of growth of ZnO nanorods by reactive sputtering
Elsevier | 2016|Keywords: Reactive sputtering -
Effects of annealing temperature on characteristics of amorphous nickel carbon thin film alloys deposited on n-type silicon substrates by reactive sputtering
Elsevier | 2016|Keywords: Reactive sputtering -
Direct measurement of the nitrogen content by XPS in self-passivated TaN(x) thin films
Tema Archive | 2008|Keywords: reaktive Kathodenzerstäubung -
Soft and flexible piezoelectric smart patch for vascular graft monitoring based on Aluminum Nitride thin film
Free accessBASE | 2019|Keywords: Reactive Sputtering -
Robust passivation of CdSeTe based solar cells using reactively sputtered magnesium zinc oxide
Elsevier | 2021|Keywords: Reactive sputtering -
Influence of chemisorption on the double hysteresis phenomenon during reactive sputtering
Elsevier | 2022|Keywords: Reactive sputtering -
Characterization of traps in the transition region at the HfO2/SiOx interface by thermally stimulated currents
Tema Archive | 2011|Keywords: reaktive Kathodenzerstäubung -
Growth, interfacial microstructure and optical properties of NiO thin films with various types of texture
Elsevier | 2018|Keywords: Reactive sputtering -
Controlling surface segregation of reactively sputtered Ag/TiOx nanocomposites
Elsevier | 2014|Keywords: Reactive sputtering -
Parameters and stability analysis of reactive sputtering
Tema Archive | 2003|Keywords: reaktive Kathodenzerstäubung -
Thermoelectricity: High Thermoelectric zT in n‐Type Silver Selenide films at Room Temperature (Adv. Energy Mater. 8/2018)
Wiley | 2018|Keywords: reactive sputtering -
Sputter yield measurements to evaluate the target state during reactive magnetron sputtering
Elsevier | 2020|Keywords: Reactive sputtering -
A fast response/recovery of hydrophobic Pd/V2O5 thin films for hydrogen gas sensing
Elsevier | 2016|Keywords: Reactive sputtering -
The role of the erosion groove during reactive sputter deposition
Elsevier | 2014|Keywords: Reactive sputtering -
Study of columnar growth, texture development and wettability of reactively sputter-deposited TiN, ZrN and HfN thin films at glancing angle incidence
Elsevier | 2020|Keywords: Reactive sputtering -
Stability analysis of reactive sputtering process
Elsevier | 2003|Keywords: Reactive sputtering process
Send my search to (beta)
Send your search query (search terms without filters) to other databases, portals and catalogues to find more interesting hits.
Dimensions is a database for abstracts and citations that links information on research funding with the resulting publications, studies and patents.
In the TIB AV-Portal, audiovisual media from science and teaching can be foundand own scientific videos can be published.
The FID move can be used to search for subject-specific literature, research data and other information from mobility and transport research.
The Open Research Knowledge Graph provides structured descriptions of research content and makes it comparable.
Freely accessible part of the collaborative K10plus catalogue with materials relevant for interlibrary loan and direct delivery services.