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Detailed simulation study of embedded SiGe and Si:C source/drain stressors in nanoscaled silicon on insulator metal oxide semiconductor field effect transistors
British Library Conference Proceedings | 2010|Keywords: Semiconductor device fabrication -
Quantitative dopant profiling of p-n junction in InGaAs/AlGaAs light-emitting diode using off-axis electron holography
British Library Conference Proceedings | 2010|Keywords: Semiconductor device fabrication -
Nondestructive extraction of junction depths of active doping profiles from photomodulated optical reflectance offset curves
British Library Conference Proceedings | 2010|Keywords: Semiconductor device fabrication -
Simulation of p-n junctions: Present and future challenges for technologies beyond 32 nm
British Library Conference Proceedings | 2010|Keywords: Semiconductor device fabrication -
Parameter study for silicon grass formation in Bosch process
British Library Conference Proceedings | 2010|Keywords: Semiconductor device fabrication -
Dopant measurements in semiconductors with atom probe tomography
British Library Conference Proceedings | 2010|Keywords: Semiconductor device fabrication -
Sensitivity study of micro four-point probe measurements on small samples
British Library Conference Proceedings | 2010|Keywords: Semiconductor device fabrication -
Study of submelt laser induced junction nonuniformities using Therma-Probe
British Library Conference Proceedings | 2010|Keywords: Semiconductor device fabrication -
Roller-reversal imprint process for preparation of large-area microstructures
British Library Conference Proceedings | 2010|Keywords: Semiconductor device fabrication -
Analysis and metrology with a focused helium ion beam
British Library Conference Proceedings | 2010|Keywords: Semiconductor device fabrication -
Improvement of Ohmic contacts to In~0~.~6~5Ga~0~.~3~5Sb using Mo refractory metal and surface preparation for 6.3 A heterojunction bipolar transistors
British Library Conference Proceedings | 2010|Keywords: Semiconductor device fabrication -
Experimental studies of dose retention and activation in fin field-effect-transistor-based structures
British Library Conference Proceedings | 2010|Keywords: Semiconductor device fabrication -
Advanced secondary ion mass spectroscopy quantification in the first few nanometer of B, P, and As ultrashallow implants
British Library Conference Proceedings | 2010|Keywords: Semiconductor device fabrication -
Indium oxide thin film transistors fabricated by low-energetic ion bombardment technique at room temperature
British Library Conference Proceedings | 2010|Keywords: Semiconductor device fabrication -
Effect of process related and haze defects on 193 nm immersion lithography
British Library Conference Proceedings | 2010|Keywords: Semiconductor device fabrication -
Integration, gap formation, and sharpening of III-V heterostructure nanowires by selective etching
British Library Conference Proceedings | 2010|Keywords: Semiconductor device fabrication -
Fluorine clustering and diffusion in silicon: Ab initio calculations and kinetic Monte Carlo model
British Library Conference Proceedings | 2010|Keywords: Semiconductor device fabrication -
Passivation of AlN/GaN high electron mobility transistor using ozone treatment
British Library Conference Proceedings | 2010|Keywords: Semiconductor device fabrication -
Fully automated hot embossing processes utilizing high resolution working stamps
British Library Conference Proceedings | 2010|Keywords: Semiconductor device fabrication -
Interdependence of optimum exposure dose regimes and the kinetics of resist dissolution for electron beam nanolithography of polymethylmethacrylate
British Library Conference Proceedings | 2010|Keywords: Semiconductor device fabrication
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