Year of publication
Type of material
Licence
Language
1–20 of 527 hits
Sort by:
Sort by:
-
External control of electron energy distributions in a dual tandem inductively coupled plasma
Online Contents | 2015| -
PL-6 - ENABLING TECHNOLOGY INNOVATION THROUGH PLASMA MODELING: BIOTECHNOLOGY AS THE NEXT FRONTIER
British Library Conference Proceedings | 2016| -
Modeling of microdischarge devices: Pyramidal structures
National licenceAmerican Institute of Physics | 2004| -
Molecular admixtures and impurities in atmospheric pressure plasma jets
American Institute of Physics | 2018| -
Plasma atomic layer etching using conventional plasma equipment
American Institute of Physics | 2009| -
Damage by radicals and photons during plasma cleaning of porous low-k SiOCH. II. Water uptake and change in dielectric constant
American Institute of Physics | 2012| -
Modeling of magnetically enhanced capacitively coupled plasma sources: Ar discharges
National licenceAmerican Institute of Physics | 2003| -
High energy electron fluxes in dc-augmented capacitively coupled plasmas. II. Effects on twisting in high aspect ratio etching of dielectrics
National licenceAmerican Institute of Physics | 2010| -
450 mm dual frequency capacitively coupled plasma sources: Conventional, graded, and segmented electrodes
National licenceAmerican Institute of Physics | 2010| -
Mechanisms for sealing of porous low-k SiOCH by combined He and NH3 plasma treatment
American Institute of Physics | 2011| -
A model for the discharge kinetics and plasma chemistry during plasma enhanced chemical vapor deposition of amorphous silicon
National licenceAmerican Institute of Physics | 1988| -
Modeling of implantation and mixing damage during etching of SiO2 over Si in fluorocarbon plasmas
American Institute of Physics | 2011| -
Plasma formation in diode pumped alkali lasers sustained in Cs
American Institute of Physics | 2016| -
Electron energy distributions and electron impact source functions in Ar/N2 inductively coupled plasmas using pulsed power
American Institute of Physics | 2015| -
High energy electron fluxes in dc-augmented capacitively coupled plasmas I. Fundamental characteristics
National licenceAmerican Institute of Physics | 2010| -
Role of the blocking capacitor in control of ion energy distributions in pulsed capacitively coupled plasmas sustained in Ar/CF4/O2
American Institute of Physics | 2014|
Send my search to (beta)
Send your search query (search terms without filters) to other databases, portals and catalogues to find more interesting hits.
Dimensions:
full data search
or
title and abstract search
Dimensions is a database for abstracts and citations that links information on research funding with the resulting publications, studies and patents.
TIB AV portal
In the TIB AV-Portal, audiovisual media from science and teaching can be foundand own scientific videos can be published.
Specialised Information Service for Mobility and Transport Research (FID move)
Open Research Knowledge Graph (ORKG)
The FID move can be used to search for subject-specific literature, research data and other information from mobility and transport research.
The Open Research Knowledge Graph provides structured descriptions of research content and makes it comparable.
Common Union Catalogue (GVK)
Freely accessible part of the collaborative K10plus catalogue with materials relevant for interlibrary loan and direct delivery services.