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Handbook on physical properties of semiconductors / [ed. by] Sadao Adachi ; Vol. 1: Group-IV semiconductors
TIBKAT | 2004|Contributors: Adachi, Sadao -
Handbook on physical properties of semiconductors / [ed. by] Sadao Adachi ; Vol. 3: II-VI compound semiconductors
TIBKAT | 2004|Contributors: Adachi, Sadao -
Handbook on physical properties of semiconductors / [ed. by] Sadao Adachi ; Vol. 2: III-V compound semiconductors
TIBKAT | 2004|Contributors: Adachi, Sadao -
Wafer temperature adjusting apparatus, wafer processing apparatus, and wafer temperature adjusting method
Free accessEuropean Patent Office | 2022| -
WAFER TEMPERATURE ADJUSTING DEVICE, WAFER PROCESSING APPARATUS, AND WAFER TEMPERATURE ADJUSTING METHOD
Free accessEuropean Patent Office | 2022| -
MANAGEMENT DEVICE, MANAGEMENT SYSTEM, MANAGEMENT METHOD, AND MANAGEMENT PROGRAM
Free accessEuropean Patent Office | 2021| -
Treatment system, heating control method, and heating device
Free accessEuropean Patent Office | 2024|
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