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101–120 of 483,431 hits
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Alignment solutions on FBEOL layers using ASML scanners [10147-65]
British Library Conference Proceedings | 2017 -
Resist 3D aware mask solution with ILT for hotspot repair [10147-25]
British Library Conference Proceedings | 2017 -
Enhanced OPC recipe coverage and early hotspot detection through automated layout generation and analysis [10147-26]
British Library Conference Proceedings | 2017 -
Ultra-low numerical aperture counter-propagating intracavity optical tweezers
British Library Conference Proceedings | 2023| -
Femtosecond inscription of a spectral array of four fiber Bragg gratings at the same spot, using a single uniform phase-mask
British Library Conference Proceedings | 2023| -
Optical fiber-based probe for detection of magnetic field
British Library Conference Proceedings | 2023| -
Electrical characterization of plasmonic nanopores excited with light
British Library Conference Proceedings | 2023| -
Fe3O4@Au core satellite magnetic nanoparticles to enhance colorimetric immunosensor response
British Library Conference Proceedings | 2023| -
Optochemical sensor-based systems for the analysis of cell metabolism and bioenergetics: an overview
British Library Conference Proceedings | 2023| -
Fiber management for high-density connectivity In co-packaged switches
British Library Conference Proceedings | 2022| -
Inverse designed broadband on-chip photonic couplers and polarization-independent wavelength demultiplexing
British Library Conference Proceedings | 2022| -
Glass-molded optical interposers for wafer scale photonic integrated circuit packaging in 800G modules and co-packaged optics
British Library Conference Proceedings | 2022| -
Chip-to-chip optical interconnect using direct optical wire bonding
British Library Conference Proceedings | 2022| -
Reticle heating feed-forward control (RHC2) on NXT:1980Di immersion scanner for enhanced on-product overlay [10147-42]
British Library Conference Proceedings | 2017 -
Scanner-to-scanner CD analysis and control in an HVM environment [10147-9]
British Library Conference Proceedings | 2017 -
Effective use of aerial image metrology for calibration of OPC models [10147-33]
British Library Conference Proceedings | 2017 -
Constructing freeform source through the combination of neural network and binary ant colony optimization [10147-58]
British Library Conference Proceedings | 2017 -
A physical model for innovative laser direct write lithography [10147-28]
British Library Conference Proceedings | 2017 -
The ultra-violet partial coherence modulation transfer function for lithography [10147-57]
British Library Conference Proceedings | 2017 -
Process margin improvement through finger-print removal based on scanner leveling data [10147-8]
British Library Conference Proceedings | 2017
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