Did you mean: person:("mogi, S.") • person:("onogi, S.") • person:("yogi, S.") • person:("nogi, S.") • person:("ohgi, S.") • person:("ooki, S.")
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Proximity Effect Correction for Electron Beam Lithography
British Library Conference Proceedings | 1997| -
High-Speed Convolution System for Real-Time Proximity Effect Correction
British Library Conference Proceedings | 1998| -
Nanofabrication techniques for a 100 nm-scale tungsten polycide gate structure
British Library Online Contents | 1993| -
Nanofabrication techniques for a 100 nm‐scale tungsten polycide gate structure
American Institute of Physics | 1993| -
Proximity effect correction for reticle fabrication [3096-53]
British Library Conference Proceedings | 1997| -
Fabrication of I-Line Halftone Phase Shifting Mask with Programmed Defects
British Library Conference Proceedings | 1996| -
Global Critical Dimension Correction: I. Fogging Effect Correction [published June 6, 2007]
British Library Online Contents | 2007| -
Electron beam mask writer EBM-7000 for hp 32nm generation [7488-48]
British Library Conference Proceedings | 2009| -
Nanofabrication techniques for a 100 nm-scale tungsten polycide gate structure
British Library Conference Proceedings | 1993| -
Nanofabrication techniques for a 100 nm-scale tungsten polycide gate structure
Online Contents | 1993|Contributors: Oogi, S.
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