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High-Quality AlN Layers Grown on Si(111) Substrates by Metalorganic Chemical Vapor Deposition
Springer Verlag | 2020| -
Controlled Formation of β-Si3N4 on Native Oxidized Silicon Wafers in Ammonia Flow
Springer Verlag | 2021| -
Growth of AlGaN under the conditions of significant gallium evaporation: Phase separation and enhanced lateral growth
American Institute of Physics | 2017|
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