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Cl2 plasma etching of Si(100): Nature of the chlorinated surface layer studied by angle-resolved x-ray photoelectron spectroscopy
National licenceAmerican Institute of Physics | 1997| -
Experimental study of the planar-to-cellular transition during thin-film directional solidification: Observations of the long-time-scale dynamics of microstructure formation
National licenceAmerican Physical Society | 1993| -
Dynamic images of plasma processes: Use of Fourier blobs for endpoint detection during plasma etching of patterned wafers
British Library Online Contents | 1998| -
Cl~2 plasma etching of Si(100): Nature of the chlorinated surface layer studied by angle-resolved x-ray photoelectron spectroscopy
British Library Online Contents | 1997| -
Plasma etching of submicron devices: in situ monitoring and control by multi-wavelength ellipsometry
British Library Conference Proceedings | 1998| -
Cl2 plasma etching of Si(100): Damaged surface layer studied by in situ spectroscopic ellipsometry
American Institute of Physics | 1997| -
Plasma etching of submicron devices: in situ monitoring and control by multi-wavelength ellipsometry
British Library Online Contents | 1998| -
Comparison of advanced plasma sources for etching applications. II. Langmuir probe studies of a helicon and a multipole electron cyclotron resonance source
American Institute of Physics | 1994| -
Cl~2 Plasma Etching of Si(100): Surface Chemistry and Damage
British Library Conference Proceedings | 1997| -
The role of feedgas chemistry, mask material, and processing parameters in profile evolution during plasma etching of Si(100)
American Institute of Physics | 2000| -
New Applications of In Situ Ellipsometry for Materials Characterization and ULSI Device Process Control
British Library Conference Proceedings | 1994| -
Cl~2 plasma etching of Si(100): Damaged surface layer studied by in situ spectroscopic ellipsometry
British Library Online Contents | 1997| -
Chemical and Physical Nature of the Surface Layer Formed During Plasma Etching of Si
British Library Conference Proceedings | 1997|
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