Year of publication
Type of media
Source
Subject
Type of material
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Synonyms were used for: Microwaves
Search without synonyms: keywords:("Microwaves")
Used synonyms:
- hochstfrequenztechnik
- microwave
- mikrowelle
- mikrowellen
- mikrowellentechnik
-
Advanced electron cyclotron resonance plasma etching technology for precise ultra‐large‐scale integration patterning
American Institute of Physics | 1994|Keywords: MICROWAVE RADIATION -
Analysis of the possibility of performing microelectronic microwave vacuum devices with extended interaction on field emitter arrays
American Institute of Physics | 1993|Keywords: MICROWAVE EQUIPMENT -
An experimental system for surface reaction studies in microwave plasma etching
American Institute of Physics | 1984|Keywords: MICROWAVE RADIATION -
CERA‐V: Microwave plasma stream source with variable ion energy
American Institute of Physics | 1996|Keywords: MICROWAVE RADIATION -
Characterization of a permanent magnet electron cyclotron resonance plasma source
American Institute of Physics | 1991|Keywords: MICROWAVE RADIATION -
Classification of etching mechanism in reactive ion beam etch
American Institute of Physics | 1989|Keywords: MICROWAVE RADIATION -
Cleaning of silicon surfaces by hydrogen multipolar microwave plasma excited by distributed electron cyclotron resonance
American Institute of Physics | 1994|Keywords: MICROWAVE RADIATION -
laser treatment for stabilization of the superhydrophobicity of carbon nanotube surfaces
American Institute of Physics | 2010|Keywords: Microwave Plasma CVD -
Combined method of electron‐beam lithography and ion implantation techniques for the fabrication of high‐temperature superconductor Josephson junctions
American Institute of Physics | 1996|Keywords: MICROWAVE RADIATION -
Deflection microwave and millimeter‐wave amplifiers
American Institute of Physics | 1994|Keywords: MICROWAVE AMPLIFIERS -
Distributed generator with extended interaction on field emitter arrays
American Institute of Physics | 1997|Keywords: MICROWAVE AMPLIFIERS -
Distributed microwave amplifier on field emitter arrays with a nonhomogeneous energy collector
American Institute of Physics | 1995|Keywords: MICROWAVE AMPLIFIERS -
Dry etching of through substrate via holes for GaAs MMIC’s
American Institute of Physics | 1985|Keywords: MICROWAVE RADIATION -
Dry etching of via connections for GaAs monolithic microwave integrated circuits fabrication
American Institute of Physics | 1987|Keywords: MICROWAVE AMPLIFIERS -
Effect of epitaxial layer design on the microwave performance of high electron mobility transistors
American Institute of Physics | 1986|Keywords: MICROWAVE RADIATION, MICROWAVE AMPLIFIERS -
Electrostatic probe analysis of microwave plasmas used for polymer etching
American Institute of Physics | 1987|Keywords: MICROWAVE RADIATION -
Enhanced electrical performance of Ag–Cu thin films after low temperature microwave processing
American Institute of Physics | 2013|Keywords: microwave anneal -
Etching of GaAs and InP using a hybrid microwave and radio‐frequency system
American Institute of Physics | 1991|Keywords: MICROWAVE EQUIPMENT -
Experimental conditions for uniform anisotropic etching of silicon with a microwave electron cyclotron resonance plasma system
American Institute of Physics | 1988|Keywords: MICROWAVE RADIATION -
Experimental performance of a large‐diameter multipolar microwave plasma disk reactor
American Institute of Physics | 1990|Keywords: MICROWAVE RADIATION
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