Year of publication
Subject
Type of material
Licence
Language
Synonyms were used for: ENGINEERING • FOR • OPTICAL ENGINEERING • SOCIETY
Search without synonyms: journal:(PROCEEDINGS - SPIE THE INTERNATIONAL SOCIETY FOR OPTICAL ENGINEERING)
Used synonyms:
- industrielle technik
- ingenieurwesen
- ingenieurwissenschaft
- ingenieurwissenschaften
- technik
- technikwissenschaften
- technique
- technische wissenschaften
Used synonyms:
- fur
Used synonyms:
- angewandte optik
- optische technik
- technische optik
Used synonyms:
- gesellschaft
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Process of opto-mechanical design and assembly for reflective mirror subsystem of lithographic projection lens [10147-68]
British Library Conference Proceedings | 2017 -
The thermal aberration analysis of a lithography projection lens [10147-61]
British Library Conference Proceedings | 2017 -
Using heuristic optimization to set SRAF rules [10147-5]
British Library Conference Proceedings | 2017 -
Neuroelectronic device process development and challenge [10147-31]
British Library Conference Proceedings | 2017 -
Excimer laser gas usage reduction technology for semiconductor manufacturing [10147-60]
British Library Conference Proceedings | 2017 -
Study of aging behaviour on 193nm phase-shift masks [10147-74]
British Library Conference Proceedings | 2017 -
Alignment solutions on FBEOL layers using ASML scanners [10147-65]
British Library Conference Proceedings | 2017 -
Enhanced OPC recipe coverage and early hotspot detection through automated layout generation and analysis [10147-26]
British Library Conference Proceedings | 2017 -
Si-photonics waveguides manufacturability using advanced RET solutions [10147-36]
British Library Conference Proceedings | 2017 -
Optochemical sensor-based systems for the analysis of cell metabolism and bioenergetics: an overview
British Library Conference Proceedings | 2023| -
Reticle heating feed-forward control (RHC2) on NXT:1980Di immersion scanner for enhanced on-product overlay [10147-42]
British Library Conference Proceedings | 2017 -
Scanner-to-scanner CD analysis and control in an HVM environment [10147-9]
British Library Conference Proceedings | 2017 -
Effective use of aerial image metrology for calibration of OPC models [10147-33]
British Library Conference Proceedings | 2017 -
Constructing freeform source through the combination of neural network and binary ant colony optimization [10147-58]
British Library Conference Proceedings | 2017 -
Process margin improvement through finger-print removal based on scanner leveling data [10147-8]
British Library Conference Proceedings | 2017 -
Elimination of temperature cross-sensitivity for polymer FBG-based humidity sensor by gamma radiation treatment
British Library Conference Proceedings | 2023| -
Nucleolin protein-mediated specific detection of circulating cancer cells by U-bent optical fiber sensor
British Library Conference Proceedings | 2023|
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