Year of publication
Type of media
Type of material
Licence
Language
1–10 of 10 hits
Sort by:
Sort by:
-
Possible application of laser-induced backside dry etching technique for fabrication of SERS substrate surfaces
Elsevier | 2012|Keywords: Backside etching -
Laser induced backside wet and dry etching of solar glass by short pulse ytterbium fiber laser irradiation
American Institute of Physics | 2012|Keywords: backside etching -
On the single-chip condenser miniature microphone using DRIE and backside etching techniques
Elsevier | 2003|Keywords: Backside etching techniques -
Laser backside etching of fused silica with ultra-short pulses
Online Contents | 2006|Keywords: Backside Etching -
Laser backside etching of fused silica with ultra-short pulses
Online Contents | 2006|Keywords: Backside Etching -
Laser backside etching of fused silica with ultra-short pulses
Springer Verlag | 2006|Keywords: Backside Etching -
Fabrication of low-cost and high-reflectivity bottom mirrors for Si-based micro-cavity devices
IET Digital Library Archive | 2004|Keywords: backside etching -
Membrane supported Yagi–Uda antennae for millimetre-wave applications
IET Digital Library Archive | 2004|Keywords: dry backside etching process -
Gyroscope and Micromirror Design Using Vertical-Axis CMOS-MEMS Actuation and Sensing
NTIS | 2002|Keywords: Backside etching
- ««
- «
- 1
- »»
Hits per page
Send my search to (beta)
Send your search query (search terms without filters) to other databases, portals and catalogues to find more interesting hits.
Dimensions:
full data search
or
title and abstract search
Dimensions is a database for abstracts and citations that links information on research funding with the resulting publications, studies and patents.
TIB AV portal
In the TIB AV-Portal, audiovisual media from science and teaching can be foundand own scientific videos can be published.
Specialised Information Service for Mobility and Transport Research (FID move)
Open Research Knowledge Graph (ORKG)
The FID move can be used to search for subject-specific literature, research data and other information from mobility and transport research.
The Open Research Knowledge Graph provides structured descriptions of research content and makes it comparable.
Common Union Catalogue (GVK)
Freely accessible part of the collaborative K10plus catalogue with materials relevant for interlibrary loan and direct delivery services.