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Ultra-shallow junctions formed by quasi-epitaxial growth of boron and phosphorous-doped silicon films at 175°C by rf-PECVD
Elsevier | 2009|Keywords: Shallow junction -
Shallow Heavily Doped n++ Germanium by Organo-Antimony Monolayer Doping
American Chemical Society | 2017|Keywords: shallow junction -
A study on NiGe-contacted Ge n+/p Ge shallow junction prepared by dopant segregation technique
Elsevier | 2015|Keywords: Shallow junction -
Modeling source/drain lateral Gaussian doping profile of DG-MOSFET using Green’s function approach
Elsevier | 2020|Keywords: Ultra shallow junction (USJ) -
Exploring the Limits of N‑Type Ultra-Shallow Junction Formation
American Chemical Society | 2013|Keywords: ultra-shallow junction -
Improved subthreshold characteristics in tunnel field-effect transistors using shallow junction technologies
Elsevier | 2012|Keywords: Shallow junction technology -
Damage control of ion implantation for advanced doping process by using in-situ temperature control
Elsevier | 2020|Keywords: Shallow junction -
Silicon isotope superlattices: Ideal SIMS standards for shallow junction characterization
Elsevier | 2008|Keywords: Shallow junction -
Ultrashallow depth profiling using SIMS and ion scattering spectroscopy
Wiley | 2007|Keywords: shallow junction -
Dopant profile model in a shallow germanium $ n^{+} $/p junction
Online Contents | 2013|Keywords: Shallow junction -
Characteristics of fast ions from laser-induced plasma and their applicability to shallow junction doping
Elsevier | 2013|Keywords: Shallow junction -
Boron diffusion in silicon: the anomalies and control by point defect engineering
Elsevier | 2003|Keywords: Shallow junction -
Calibration correction of ultra low energy SIMS profiles based on MEIS analysis of shallow arsenic implants in silicon
Wiley | 2013|Keywords: ultra‐shallow junction -
Systematic study of shallow junction formation on germanium substrates
Elsevier | 2010|Keywords: Ultra Shallow Junction -
Transient activation model for antimony in relaxed and strained silicon
Elsevier | 2009|Keywords: Ultra-shallow junction -
Realization of ultra shallow junctions by PIII: application to solar cells
Elsevier | 2004|Keywords: Ultra shallow junction -
Photocarrier Radiometry Characterization of Ultra-shallow Junctions (USJ) in Silicon with Excimer Laser Irradiation
Online Contents | 2014|Keywords: Ultra-shallow junction -
Application of extra‐low impact energy SIMS and data reduction algorithm to USJ profiling
Wiley | 2013|Keywords: ultra‐shallow junction
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