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Reactive sputtering of SiO2–TiO2 thin film from composite Si x /TiO2 targets
Online Contents | 2010| -
Synthesis and characterization of (0001)-textured wurtzite Al1-xBxN thin films
Online Contents | 2011| -
Reactive sputtering of SiO2-TiO2 thin film from composite Six/TiO2 targets
British Library Online Contents | 2010| -
Influence of the target composition on reactively sputtered titanium oxide films
Tema Archive | 2009| -
Shear mode AlN thin film electro-acoustic resonant sensor operation in viscous media
British Library Online Contents | 2007| -
Synthesis and characterization of (0001)-textured wurtzite Al1-xBxN thin films
British Library Online Contents | 2011| -
Fabrication and characterization of a shear mode AlN solidly mounted resonator-silicone microfluidic system for in-liquid sensor applications
British Library Online Contents | 2010| -
Influence of the target composition on reactively sputtered titanium oxide films
British Library Online Contents | 2009| -
Influence of the target composition on reactively sputtered titanium oxide films
British Library Conference Proceedings | 2009| -
Experiments and modeling of dual reactive magnetron sputtering using two reactive gases
American Institute of Physics | 2008|
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