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X-ray HRXRD measurements and TEM observations of the lattice damage in 0.70 and 0.74 MeV Si implanted GaAs crystal
British Library Conference Proceedings | 1995| -
Nitrogen ion mixed tungsten thin films for metal-organic chemical vapor deposited copper metallization
British Library Conference Proceedings | 1995| -
Electrical activation of Si implanted into GaAs through As-doped a-Si:H films
British Library Conference Proceedings | 1995| -
Formation of diamond phases in Si substrate by means of carbon ion implantation
British Library Conference Proceedings | 1995| -
In-situ monitoring of ion implantation in the high dose range by thermal wave analysis
British Library Conference Proceedings | 1995| -
Plasma flood guns - NV10, PI9000 - Old machine, new retrofit
British Library Conference Proceedings | 1995| -
Measurements of charge neutralization due to photoresist outgassing
British Library Conference Proceedings | 1995| -
Lognormal statistics for particles: models, causes and implications
British Library Conference Proceedings | 1995| -
A fast dual-crucible vaporizer for the Varian E220 and E500 medium current ion implanters
British Library Conference Proceedings | 1995| -
High current RF-plasma-sputter-type heavy negative-ion source for negative-ion implanter
British Library Conference Proceedings | 1995| -
Variation of end of range density with ion beam energy and the predictions of the "excess interstitials" model
British Library Conference Proceedings | 1995| -
Growth and characterisation of cobalt silicide on Si(100) using mass-selected ultra low energy Co^+ beams
British Library Conference Proceedings | 1995| -
Diamond-like films obtained by high energy density plasma
British Library Conference Proceedings | 1995|
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