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Deposition and characterization of silicon oxynitride for integrated optical applications
Elsevier | 2004|Keywords: 85.40.Sz -
Thin films of YBaCuO high-temperature superconductor grown in a simplified magnetron sputterer and their microwave application
Springer Verlag | 2007|Keywords: 85.40.Sz -
Magnetron sputtering of YBaCuO target: Effects of discharge voltage and deposition rate variation
Springer Verlag | 2009|Keywords: 85.40.Sz -
Si‐oxide/Si and Si‐oxynitride/Si interfaces analysed by ultra‐low energy SIMS
Wiley | 2006|Keywords: 85.40.Sz -
Numerical simulation of film growth during molecular-beam epitaxy
Springer Verlag | 2007|Keywords: 85.40.Sz -
Characteristics of a cylindrical magnetron and reactive sputtering of binary compound films
Springer Verlag | 2007|Keywords: 85.40.Sz -
On the theory of stoichiometric binary compound films by reactive magnetron sputtering
Springer Verlag | 2007|Keywords: 85.40.Sz -
Formation of titanium oxide films on the surface of porous silicon carbide
Springer Verlag | 2008|Keywords: 85.40.Sz -
Effect of rapid thermal annealing on the properties of thin dielectric films of gadolinium, titanium, and erbium oxides on the silicon carbide surface
Springer Verlag | 2007|Keywords: 85.40.Sz -
Low temperature–low hydrogen content silicon nitrides thin films deposited by PECVD using dichlorosilane and ammonia mixtures
Elsevier | 2004|Keywords: 85.40.Sz -
Temperature distribution around thin electroconductive layers created on composite textile substrates
Free accessDOAJ | 2018|Keywords: 85.40.sz -
Full-wafer mapping and response surface modeling techniques for thin film deposition processes
Elsevier | 2009|Keywords: 85.40.Sz -
Quarter micron BiCMOS technology platform with implanted-base- or SiGe-bipolar transistor for wireless communication ICs
Elsevier | 2004|Keywords: 85.40.Sz -
Growth and nucleation of diamond-like carbon (DLC) film on aluminum
Elsevier | 2003|Keywords: 85.40.Sz -
Development of an Indium bump bond process for silicon pixel detectors at PSI
Elsevier | 2006|Keywords: 85.40.Sz
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