Microsystem technologies : sensors, actuators, system integration ; research journal
The tables of contents are generated automatically and are based on the data records of the individual contributions available in the index of the TIB portal. The display of the Tables of Contents may therefore be incomplete.
Table of contents
- 833
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Special issue of the conference ‘Smart Sensors, Actuators and MEMS’, within the SPIE EUROPE Symposium ‘MICROTECHNOLOGIES’ Prague, Czech Republic, 18–20 April 2011Schmid, Ulrich / Becker, Thomas / Michel, Bernd et al. | 2012
- 835
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Cleaning of structured templates from nanoparticle accumulation using siliconeMerzsch, S. / Wasisto, H. S. / Waag, A. et al. | 2011
- 843
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Low-cost fiber-optic waveguide sensor for the colorimetric detection of ammoniaSchmitt, Katrin / Rist, Jonas / Peter, Carolin et al. | 2011
- 849
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Thermopile-based THz antennaSzentpáli, Béla / Matyi, Gábor / Fürjes, Péter et al. | 2011
- 857
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Nanowire silicon as a material for thermoelectric energy conversionStranz, A. / Kähler, J. / Merzsch, S. et al. | 2011
- 863
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Platinated ultrathin films made of carbon nanotubesBohnenberger, Timo / Steinhäußer, Frank / Matovic, Jovan et al. | 2011
- 869
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Fabrication, packaging, and characterization of p-SOI Wheatstone bridges for harsh environmentsKähler, J. / Stranz, A. / Doering, L. et al. | 2011
- 879
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Long-term stability of Ag and Cu thin films on glass, LTCC and alumina substratesBittner, A. / Pagel, N. / Seidel, H. et al. | 2011
- 885
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Microfabricated self-resonant structure as a passive wireless dielectric constant and conductivity sensorZhang, Sheng / Pasupathy, Praveenkumar / Neikirk, Dean P. et al. | 2011
- 893
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Design and evaluation process of a robust pressure sensor for measurements in boundary layers of liquid fluidsBeutel, T. / Leester-Schädel, M. / Büttgenbach, S. et al. | 2011
- 905
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Determination of exposure to engineered carbon nanoparticles using a self-sensing piezoresistive silicon cantilever sensorWasisto, H. S. / Merzsch, S. / Waag, A. et al. | 2012
- 917
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Selective modal excitation in coupled piezoelectric microcantileversGil, M. / Manzaneque, T. / Hernando-García, J. et al. | 2012
- 925
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Metallo-porphyrin zinc as gas sensitive material for colorimetric gas sensors on planar optical waveguidesPeter, Carolin / Schmitt, Katrin / Apitz, Martin et al. | 2012
- 931
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Micro harvester using isotropic charging of electrets deposited on vertical sidewalls for conversion of 3D vibrational energyMescheder, Ulrich / Nimo, Antwi / Müller, Bernhard et al. | 2012
- 945
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Measurement of Young’s modulus and residual stress of thin SiC layers for MEMS high temperature applicationsPabst, Oliver / Schiffer, Michael / Obermeier, Ernst et al. | 2012
- 955
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Hardware implementation of an electrostatic MEMS-actuator linearizationMair, F. / Egretzberger, M. / Kugi, A. et al. | 2012
- 965
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Gold-based thin multilayers for ohmic contacts in RF-MEMS switchesMulloni, V. / Iannacci, J. / Bartali, R. et al. | 2012
- 973
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Measurement technique for the thermal properties of thin-film diaphragms embedded in calorimetric flow sensorsBeigelbeck, Roman / Cerimovic, Samir / Talic, Almir et al. | 2012
- 983
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Role of the electro-thermo-mechanical multiple coupling on the operation of RF-microswitchBrusa, Eugenio / Munteanu, Mircea Gheorghe et al. | 2012
- 997
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Modelling and characterization of AlN-actuated microcantilevers vibrating in the first in-plane modeRuiz, V. / Hernando-García, J. / Ababneh, A. et al. | 2012
- 1003
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Artificial intelligence based optimization for vibration energy harvesting applicationsHadas, Zdenek / Kurfurst, Jiri / Ondrusek, Cestmir et al. | 2012
- 1015
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New method for selectivity enhancement of SiC field effect gas sensors for quantification of $ NO_{x} $Bur, Christian / Reimann, Peter / Andersson, Mike et al. | 2012
- 1027
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Studies on SiC, DLC and $ TiO_{2} $ thin films as piezoresistive sensor materials for high temperature applicationFraga, M. A. / Furlan, H. / Pessoa, R. S. et al. | 2012
- 1035
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Modeling the performance of a micromachined piezoelectric energy harvesterAlamin Dow, Ali B. / Schneider, M. / Koo, David et al. | 2012
- 1045
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Sensing viscosity and density of glycerol–water mixtures utilizing a suspended plate MEMS resonatorCerimovic, Samir / Beigelbeck, Roman / Antlinger, Hannes et al. | 2012
- 1057
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Through wafer via holes manufacturing by variable isotropy Deep RIE process for RF applicationsVasilache, D. / Colpo, S. / Giacomozzi, F. et al. | 2012
- 1065
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CMOS: compatible wafer bonding for MEMS and wafer-level 3D integrationDragoi, Viorel / Pabo, Eric / Burggraf, Jürgen et al. | 2012
- 1077
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MEMS-based microthruster with integrated platinum thin film resistance temperature detector (RTD), heater meander and thermal insulation for operation up to 1,000°CMiyakawa, Natsuki / Legner, Wolfgang / Ziemann, Thomas et al. | 2012
- 1089
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Resonantly excited AlN-based microcantilevers for immunosensingOliver, M. J. / Hernando-García, J. / Ababneh, A. et al. | 2012
- 1095
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Micromechanical force sensors based on SU-8 resistJordan, A. / Büttgenbach, S. et al. | 2012
- 1103
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Multi-channel conical microstructures: perspectivesSukhoveyev, Sergey et al. | 2012
- 1109
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Novel 3D manufacturing method combining microelectrial discharge machining and electrochemical polishingRichter, Claudia / Krah, Thomas / Büttgenbach, Stephanus et al. | 2012
- 1119
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Cantilever probes for high speed AFMRichter, C. / Weinzierl, P. / Engl, W. et al. | 2012
- 1127
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Hysteresis correction of tactile sensor response with a generalized Prandtl–Ishlinskii modelSánchez-Durán, José A. / Oballe-Peinado, Óscar / Castellanos-Ramos, Julián et al. | 2012
- 1139
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Modeling of gold microbeams as strain and pressure sensors for characterizing MEMS packagesFaes, A. / Resta, G. / Solazzi, F. et al. | 2012
- 1147
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A MEMS-based thermal infrared emitter for an integrated NDIR spectrometerCalaza, C. / Salleras, M. / Sabaté, N. et al. | 2012
- 1155
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Flexible and large area pressure sensors for human-neuroprostheses and human-neurorobotic interface assessmentHerrán, J. / Fernández, I. / Ochoteco, E. et al. | 2012
- 1163
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Integration of impedance spectroscopy sensors in a digital microfluidic platformLederer, Thomas / Clara, Stefan / Jakoby, Bernhard et al. | 2012
- 1181
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Power supply sources based on resonant energy harvestingFiala, P. / Drexler, P. et al. | 2012
- 1193
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Smart ultrasonic sensors systems: potential of aluminum nitride thin films for the excitation of the ultrasound at high frequenciesWalter, Susan / Herzog, Thomas / Heuer, Henning et al. | 2012
- 1201
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Battery-and wire-less tire pressure measurement systems (TPMS) sensorMakki, Noaman / Pop-Iliev, Remon et al. | 2012
- 1213
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Thin-film electro-acoustic sensors based on AlN and its alloys: possibilities and limitationsWingqvist, Gunilla et al. | 2012
- 1225
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Binary Zero-Power Sensors: an alternative solution for power-free energy-autonomous sensor systemsFrank, Thomas / Gerlach, Gerald / Steinke, Arndt et al. | 2012