Journal of vacuum science and technology / B
The tables of contents are generated automatically and are based on the data records of the individual contributions available in the index of the TIB portal. The display of the Tables of Contents may therefore be incomplete.
Table of contents
-
Fabrication and comparative study of DC and low frequency noise characterization of GaN/AlGaN based MOS-HEMT and HEMTHasan, Md Rezaul / Motayed, Abhishek / Fahad, Md Shamiul et al. | 2017
-
In situ resistance measurements during physical vapor deposition of ultrathin metal films on Si(111) at room temperatureLutzer, Bernhard / Bethge, Ole / Zimmermann, Christina et al. | 2017
-
Influence of different conditions on the electrical performance of amorphous InGaZnO thin-film transistors with HfO2/SiNx stacked dielectricsWang, RuoZheng / Wu, ShengLi / Jia, DongBo et al. | 2017
-
Extracting scaled barrier field from experiments with conducting large-area field emitters: Considerations by inclusion of the dependence between area of emission and the applied fieldA. de Assis, Thiago / P. de Castro, Caio et al. | 2017
-
Enhanced recrystallization and dopant activation of P+ ion-implanted super-thin Ge layers by RF hydrogen plasma treatmentNazarov, Alexei N. / Yukhymchuk, Volodymyr O. / Gomeniuk, Yurii V. et al. | 2017
-
Electron beam lithography using fixed beam moving stageKhodadad, Iman / Nelson-Fitzpatrick, Nathan / Burcham, Kevin et al. | 2017
-
Thermoelectric and optical properties of advanced thermoelectric devices from Ni/Bi2Te3/Ni and Ni/Sb2Te3/Ni thin filmsBudak, Satilmis / Xiao, Zhigang / Cole, Jorden et al. | 2017
-
Near-infrared laser annealing of Ge layers epitaxially grown on Si for high-performance photonic devicesNagatomo, Sho / Ishikawa, Yasuhiko / Hoshino, Satohiko et al. | 2017
-
Fabrication of tungsten Fresnel zone plates for hard x-rays using wet etchingTiwari, Pragya / Mondal, Puspen / Srivastava, A. K. et al. | 2017
-
Unexpected validity of Schottky's conjecture for two-stage field emitters: A response via Schwarz–Christoffel transformationMarcelino, Edgar / A. de Assis, Thiago / C. de Castilho, Caio M. et al. | 2017
-
Anodic porous alumina with square holes through lattice conversion of naturally occurring ordered structuresKondo, Toshiaki / Miyazaki, Hayato / Yanagishita, Takashi et al. | 2017
-
Bottom profile degradation mechanism in high aspect ratio feature etching based on pattern transfer observationNegishi, Nobuyuki / Miyake, Masatoshi / Yokogawa, Ken'etsu et al. | 2017
-
Review Article: Tunneling-based graphene electronics: Methods and examplesKatkov, Vsevolod L. / Osipov, Vladimir A. et al. | 2017
-
Electrical analyses of GaN PIN diodes grown on patterned sapphire substratesShan, Li-Wei / Liu, Zhe-Yu / Lin, Min-Pang et al. | 2017
-
Minimizing open-loop piezoactuator nonlinearity artifacts in atomic force microscope measurementsYen, Chi-Fu / Sivasankar, Sanjeevi et al. | 2017
-
Annealing of dry etch damage in metallized and bare (-201) Ga2O3Yang, Jiancheng / Ren, Fan / Khanna, Rohit et al. | 2017
-
Proximity effect correction in electron-beam lithography based on computation of critical-development time with swarm intelligenceNien, Chun / Chang, Li-Cheng / Ye, Jia-Hao et al. | 2017
-
Impact of fast transient charging and ambient on mobility of WS2 field-effect transistorPark, Junghak / Woo, Hyunsuk / Jeon, Sanghun et al. | 2017
-
ScAlN etch mask for highly selective silicon etchingDavid Henry, Michael / Young, Travis R. / Griffin, Ben et al. | 2017
-
Analysis of strain induced carrier confinement with varying passivation thickness of the Al0.3Ga0.7N/GaN heterostructure with graded AlxGa1-xN buffer on Si (111) substrateDinara, Syed Mukulika / Ghosh, Saptarsi / Jana, Sanjay Kr. et al. | 2017
-
Effect of composition in Si1−xGex seed layer on the solid phase crystallization of ultrathin amorphous silicon layerKim, Youngmo / Baek, Seungbeom / Jang, Yongwoon et al. | 2017
-
Nitride etching with hydrofluorocarbons. I. Selective etching of nitride over silicon and oxide materials by gas discharge optimization and selective deposition of fluorocarbon polymerEngelmann, Sebastian U. / Bruce, Robert L. / Joseph, Eric A. et al. | 2017