Microsystem technologies : sensors, actuators, system integration ; research journal
The tables of contents are generated automatically and are based on the data records of the individual contributions available in the index of the TIB portal. The display of the Tables of Contents may therefore be incomplete.
Table of contents
- 207
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HARMST, High Aspect Ratio Micro Structure Technology Workshop, Gyenogju, Korea, 10–13 June 2005Kwon, Tai Hun / Michel, Bernd et al. | 2006
- 209
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Geometrical strengthening and tip-sharpening of a microneedle array fabricated by X-ray lithographyKhumpuang, Sommawan / Horade, Mitsuhiro / Fujioka, Kazuya et al. | 2006
- 215
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Mask design compensation for sloped sidewall structures fabricated by X-ray lithographyHorade, Mitsuhiro / Khumpuang, Sommawan / Fujioka, Kazuya et al. | 2006
- 221
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Fabrication of high aspect ratio nano gratings using SR lithographyKato, Fumiki / Fujinawa, Shinya / Li, Yigui et al. | 2006
- 227
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Fabrication of microgratings on PMMA plate and curved surface by using copper mesh as X-ray lithography maskLi, Yigui / Sugiyama, Susumu et al. | 2006
- 231
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High aspect ratio tapered hollow metallic microneedle arrays with microfluidic interconnectorKim, Kabseog / Lee, Jeong-Bong et al. | 2006
- 237
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High aspect ratio air core solenoid inductors using an improved UV-LIGA process with contrast enhancement materialLu, Hong / Pillans, Brandon / Lee, Jong-Chang et al. | 2006
- 245
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SU-8 3D microoptic components fabricated by inclined UV lithography in waterLing, Z. / Lian, K. et al. | 2006
- 253
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In situ fabrication of SU-8 movable parts by using PAG-diluted SU-8 as the sacrificial layerLing, Z. / Lian, K. et al. | 2006
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Processing-microstructure-resulting materials properties of LIGA NiLian, K. / Jiang, J. C. / Ling, Z. G. et al. | 2006
- 265
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Method for polymer hot embossing process developmentDatta, Proyag / Goettert, Jost et al. | 2006
- 271
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Design and fabrication of a SU-8 based electrostatic microactuatorDai, Wen / Lian, Kun / Wang, Wanjun et al. | 2006
- 279
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Design and UV-LIGA microfabrication of an electro-statically actuated power relayJeong, S. J. / Wang, W. et al. | 2006
- 287
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Fabrication of a polymeric tapered HARMs array utilizing a low-cost nickel electroplated mold insertSong, In-Hyouk / Jin, Yoonyoung / Ajmera, Pratul K. et al. | 2006
- 293
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Different methods for the fabrication of UV-LIGA molds using SU-8 with tapered de-molding anglesFu, C. / Huang, H. et al. | 2006
- 299
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Effect of seed layer stress on the fabrication of monolithic MEMS microstructureChung, C. K. / Fang, Y. J. / Cheng, C. M. et al. | 2006
- 305
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Micro-specific design flow for tool-based microtechnologiesAlbers, Albert / Burkardt, Norbert / Deigendesch, Tobias et al. | 2006
- 311
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SU-8: promising resist for advanced direct LIGA applications for high aspect ratio mechanical micropartsKouba, J. / Engelke, R. / Bednarzik, M. et al. | 2006
- 319
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Investigations on possibilities of inline inspection of high aspect ratio microstructuresEngelke, Rainer / Ahrens, Gisela / Arndt-Staufenbiehl, Norbert et al. | 2006
- 327
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Direct LIGA service for prototyping: status reportLoechel, B. / Goettert, J. / Desta, Y. M. et al. | 2006
- 335
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A new removable resist for high aspect ratio applicationsSchirmer, Matthias / Perseke, Doris / Zena, Eva et al. | 2006
- 339
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Microlens fabrication using an etched glass masterZhang, P. / Londe, G. / Sung, J. et al. | 2006
- 343
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Fabrication of RF MEMS variable capacitors by deep X-ray lithography and electroplatingAchenbach, Sven / Klymyshyn, David / Haluzan, Darcy et al. | 2006
- 349
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Structure quality in deep X-ray lithography applying commercial polyimide-based masksAchenbach, Sven / Boerner, Martin / Kinuta, Seichin et al. | 2006
- 355
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Process conditions in X-ray lithography for the fabrication of devices with sub-micron feature sizesMappes, Timo / Achenbach, Sven / Mohr, Juergen et al. | 2006
- 361
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Fabrication of micro-gas chromatograph columns for fast chromatographyBhushan, Abhinav / Yemane, Dawit / Trudell, Dan et al. | 2006
- 369
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A hybrid approach for fabrication of polymeric BIOMEMS devicesSingh, Varshni / Desta, Yohannes / Datta, Proyag et al. | 2006
- 379
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Large area micro hot embossing of Pyrex glass with GC mold machined by dicingTakahashi, Masaharu / Murakoshi, Yoichi / Maeda, Ryutaro et al. | 2006
- 385
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Development of precision transfer technology of atmospheric hot embossing by ultrasonic vibrationMekaru, Harutaka / Nakamura, Osamu / Maruyama, Osamu et al. | 2006
- 393
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Fabrication of a spiral microcoil using a 3D-LIGA processMekaru, Harutaka / Kusumi, Shinji / Sato, Noriaki et al. | 2006
- 403
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Study of PMMA thermal bondingZhu, Xuelin / Liu, Gang / Guo, Yuhua et al. | 2006