JOURNAL OF MICROMECHANICS AND MICROENGINEERING
The tables of contents are generated automatically and are based on the data records of the individual contributions available in the index of the TIB portal. The display of the Tables of Contents may therefore be incomplete.
Table of contents
- 101
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Electrodeposition for the synthesis of microsystemsW Ruythooren / K Attenborough / S Beerten et al. | 2000
- 101
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MATERIALS AND PROCESS TECHNOLOGY - Electrodeposition for the synthesis of microsystemsRuythooren, W. et al. | 2000
- 108
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Thick-layer resists for surface micromachiningBernd Loechel et al. | 2000
- 108
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MATERIALS AND PROCESS TECHNOLOGY - Thick-layer resists for surface micromachiningLoechel, B. et al. | 2000
- 116
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MATERIALS AND PROCESS TECHNOLOGY - Effects of direct and pulse current on copper electrodeposition through photoresist moldsQuemper, J.-M. et al. | 2000
- 116
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Effects of direct and pulse current on copper electrodeposition through photoresist moldsJean-Marie Quemper / Elisabeth Dufour-Gergam / Nadège Frantz-Rodriguez et al. | 2000
- 120
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Additive electroplating technology as a post-CMOS process for the production of MEMS acceleration-threshold switches for transportation applicationsSven Michaelis / Hans-Jörg Timme / Michael Wycisk et al. | 2000
- 120
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MATERIALS AND PROCESS TECHNOLOGY - Additive electroplating technology as a post-CMOS process for the production of MEMS acceleration-threshold switches for transportation applicationsMichaelis, S. et al. | 2000
- 124
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Electrodeposited copper inductors for intraocular pressure telemetryR Puers / G Vandevoorde / D De Bruyker et al. | 2000
- 124
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MATERIALS AND PROCESS TECHNOLOGY - Electrodeposited copper inductors for intraocular pressure telemetryPuers, R. et al. | 2000
- 130
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MATERIALS AND PROCESS TECHNOLOGY - Polyimide based GaAs micromachined millimeter wave structuresMüller, A. et al. | 2000
- 130
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Polyimide based GaAs micromachined millimeter wave structuresA Müller / S Iordanescu / I Petrini et al. | 2000
- 136
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Ferroelectric thin films for micro-sensors and actuators: a reviewP Muralt et al. | 2000
- 136
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MATERIALS AND PROCESS TECHNOLOGY - Ferroelectric thin films for micro-sensors and actuators: A reviewMuralt, P. et al. | 2000
- 147
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MATERIALS AND PROCESS TECHNOLOGY - Composition and structure of NiTiCu shape memory thin filmsFrantz-Rodriguez, N. et al. | 2000
- 147
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Composition and structure of NiTiCu shape memory thin filmsNadège Frantz-Rodriguez / Alain Bosseboeuf / Elisabeth Dufour-Gergam et al. | 2000
- 152
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MATERIALS AND PROCESS TECHNOLOGY - Ion beam synthesis of polycrystalline SiC on SiO2 structures for MEMS applicationsSerre, C. et al. | 2000
- 152
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Ion beam synthesis of polycrystalline SiC on SiO2 structures for MEMS applicationsChristophe Serre / Alejandro Pérez-Rodríguez / Joan Ramón Morante et al. | 2000
- 157
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A silicon shadow mask for deposition on isolated areasA Tixier / Y Mita / J P Gouy et al. | 2000
- 157
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MATERIALS AND PROCESS TECHNOLOGY - A silicon shadow mask for deposition on isolated areasTixier, A. et al. | 2000
- 163
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A new model for Si{100} convex corner undercutting in anisotropic KOH etchingH Schröder / E Obermeier et al. | 2000
- 163
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MATERIALS AND PROCESS TECHNOLOGY - A new model for Si(100) convex corner undercutting in anisotropic KOH etchingSchröder, H. et al. | 2000
- 171
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Wet and dry etching techniques for the release of sub-micrometre perforated membranesStein Kuiper / Meint de Boer / Cees van Rijn et al. | 2000
- 171
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MATERIALS AND PROCESS TECHNOLOGY - Wet and dry etching techniques for the release of sub-micrometre perforated membranesKuiper, S. et al. | 2000
- 175
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MATERIALS AND PROCESS TECHNOLOGY - Mask materials for powder blastingWensink, H. et al. | 2000
- 175
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Mask materials for powder blastingHenk Wensink / Henri V Jansen / J W Berenschot et al. | 2000
- 181
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MATERIALS AND PROCESS TECHNOLOGY - Focused ion beam induced deposition: Fabrication of three-dimensional microstructures and Young's modulus of the deposited materialReyntjens, S. et al. | 2000
- 181
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Focused ion beam induced deposition: fabrication of three-dimensional microstructures and Young's modulus of the deposited materialS Reyntjens / R Puers et al. | 2000
- 189
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MATERIALS AND PROCESS TECHNOLOGY - Integrating electro-discharge machining and photolithography: Work in progressReynaerts, D. et al. | 2000
- 189
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Integrating electro-discharge machining and photolithography: work in progressDominiek Reynaerts / Wim Meeusen / Xiaozhong Song et al. | 2000
- 196
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DEVICES - High-temperature piezoresistive gauge fabricated on commercially available silicon-on-insulator wafersVallin, Ö et al. | 2000
- 196
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High-temperature piezoresistive gauge fabricated on commercially available silicon-on-insulator wafersÖrjan Vallin / Ylva Bäcklund et al. | 2000
- 200
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Low-cost piezoresistive silicon load cell independent of force distributionRobert A F Zwijze / Remco J Wiegerink / Gijs J M Krijnen et al. | 2000
- 200
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DEVICES - Low-cost piezoresistive silicon load cell independent of force distributionZwijze, R.A.F. et al. | 2000
- 204
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DEVICES - Optimized technology for the fabrication of piezoresistive pressure sensorsMerlos, A. et al. | 2000
- 204
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Optimized technology for the fabrication of piezoresistive pressure sensorsA Merlos / J Santander / M D Alvarez et al. | 2000
- 209
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DEVICES - A low-pressure encapsulated deep reactive ion etched resonant pressure sensor electrically excited and detected using 'burst' technologyMelin, J. et al. | 2000
- 209
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A low-pressure encapsulated deep reactive ion etched resonant pressure sensor electrically excited and detected using `burst' technologyJessica Melin / Peter Enoksson / Thierry Corman et al. | 2000
- 218
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DEVICES - Resistive pressure sensing structures on polyimide membranes on GaAs substratePetrini, I. et al. | 2000
- 218
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Resistive pressure sensing structures on polyimide membranes on GaAs substrateIoana Petrini / A Müller / V Avramescu et al. | 2000
- 223
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DEVICES - Investigation of the effect of processing steps on stress in a polysilicon structural membraneBerney, H. et al. | 2000
- 223
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Investigation of the effect of processing steps on stress in a polysilicon structural membraneH Berney / M Hill / A-M Kelleher et al. | 2000
- 235
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Micro-systems in biomedical applicationsPaolo Dario / Maria Chiara Carrozza / Antonella Benvenuto et al. | 2000
- 235
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DEVICES - Micro-systems in biomedical applicationsDario, P. et al. | 2000
- 245
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Industrial MEMS on SOIStéphane Renard et al. | 2000
- 245
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DEVICES - Industrial MEMS on SOIRenard, S. et al. | 2000
- 250
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Application of a microflown as a low-cost level sensorJ van Honschoten / J van Baar / H E de Bree et al. | 2000
- 250
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DEVICES - Application of a microflown as a low-cost level sensorHonschoten, J.van et al. | 2000
- 254
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An electromechanical mixer using silicon micromechanical capacitors and radio-frequency functionsG Bazin / J P Gilles / P Crozat et al. | 2000
- 254
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DEVICES - An electromechanical mixer using silicon micromechanical capacitors and radio-frequency functionsBazin, G. et al. | 2000
- 260
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Coupled U-shaped cantilever actuator for 1 x 4 and 2 x 2 optical fibre switchesKopka, P. / Hoffmann, M. / Voges, E. et al. | 2000
- 260
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Coupled U-shaped cantilever actuators for 1×4 and 2×2 optical fibre switchesPeter Kopka / Martin Hoffmann / Edgar Voges et al. | 2000
- 260
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DEVICES - Coupled U-shaped cantilever actuators for 1 x 4 and 2 x 2 optical fibre switchesKopka, P. et al. | 2000
- 265
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Mechanical nonlinearities in a magnetically actuated resonatorT Bourouina / A Garnier / H Fujita et al. | 2000
- 265
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DEVICES - Mechanical nonlinearities in a magnetically actuated resonatorBourouina, T. et al. | 2000
- 271
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DEVICES - Towards a force-controlled microgripper for assembling biomedical microdevicesCarrozza, M.C. et al. | 2000
- 271
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Towards a force-controlled microgripper for assembling biomedical microdevicesMaria Chiara Carrozza / Anna Eisinberg / Arianna Menciassi et al. | 2000
- 277
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Modelling of micropumps using unimorph piezoelectric actuator and ball valvesD Accoto / M C Carrozza / P Dario et al. | 2000
- 277
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DEVICES - Modelling of micropumps using unimorph piezoelectric actuator and ball valvesAccoto, D. et al. | 2000
- 282
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DEVICES - Enhancement of elementary displaced volume with electrostatically actuated diaphragms: Application to electrostatic micropumpsFrançais, O. et al. | 2000
- 282
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Enhancement of elementary displaced volume with electrostatically actuated diaphragms: application to electrostatic micropumpsOlivier Français / Isabelle Dufour et al. | 2000
- 287
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InP-based MOEMS and related topicsJean-Louis Leclercq / Michel Garrigues / Xavier Letartre et al. | 2000
- 287
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DEVICES - InP-based MOEMS and related topicsLeclercq, J.-L. et al. | 2000
- 293
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DEVICES - Thermal actuation of a GaAs cantilever beamLalinsky, T. et al. | 2000
- 293
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Thermal actuation of a GaAs cantilever beamT Lalinský / E Burian / M Drzík et al. | 2000
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Editorial| 2000