Ferroelectric thin films for micro-sensors and actuators: a review (English)
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In:
Journal of Micromechanics and Microengineering
;
10
, 2
;
136-146
;
2000
- Article (Journal) / Electronic Resource
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Title:Ferroelectric thin films for micro-sensors and actuators: a review
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Contributors:P Muralt ( author )
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Published in:Journal of Micromechanics and Microengineering ; 10, 2 ; 136-146
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Publication date:2000-06-01
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ISSN:
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DOI:
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Type of media:Article (Journal)
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Type of material:Electronic Resource
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Language:English
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Source:
Table of contents – Volume 10, Issue 2
The tables of contents are generated automatically and are based on the data records of the individual contributions available in the index of the TIB portal. The display of the Tables of Contents may therefore be incomplete.
- 101
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Electrodeposition for the synthesis of microsystemsW Ruythooren / K Attenborough / S Beerten / P Merken / J Fransaer / E Beyne / C Van Hoof / J De Boeck / J P Celis et al. | 2000
- 101
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MATERIALS AND PROCESS TECHNOLOGY - Electrodeposition for the synthesis of microsystemsRuythooren, W. et al. | 2000
- 108
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MATERIALS AND PROCESS TECHNOLOGY - Thick-layer resists for surface micromachiningLoechel, B. et al. | 2000
- 108
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Thick-layer resists for surface micromachiningBernd Loechel et al. | 2000
- 116
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Effects of direct and pulse current on copper electrodeposition through photoresist moldsJean-Marie Quemper / Elisabeth Dufour-Gergam / Nadège Frantz-Rodriguez / Jean-Paul Gilles / Jean-Paul Grandchamp / Alain Bosseboeuf et al. | 2000
- 116
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MATERIALS AND PROCESS TECHNOLOGY - Effects of direct and pulse current on copper electrodeposition through photoresist moldsQuemper, J.-M. et al. | 2000
- 120
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Additive electroplating technology as a post-CMOS process for the production of MEMS acceleration-threshold switches for transportation applicationsSven Michaelis / Hans-Jörg Timme / Michael Wycisk / Josef Binder et al. | 2000
- 120
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MATERIALS AND PROCESS TECHNOLOGY - Additive electroplating technology as a post-CMOS process for the production of MEMS acceleration-threshold switches for transportation applicationsMichaelis, S. et al. | 2000
- 124
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MATERIALS AND PROCESS TECHNOLOGY - Electrodeposited copper inductors for intraocular pressure telemetryPuers, R. et al. | 2000
- 124
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Electrodeposited copper inductors for intraocular pressure telemetryR Puers / G Vandevoorde / D De Bruyker et al. | 2000
- 130
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MATERIALS AND PROCESS TECHNOLOGY - Polyimide based GaAs micromachined millimeter wave structuresMüller, A. et al. | 2000
- 130
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Polyimide based GaAs micromachined millimeter wave structuresA Müller / S Iordanescu / I Petrini / V Avramescu / G Simion / D Vasilache / V Badilita / D Dascalu / G Konstantinidis / R Marcelli et al. | 2000
- 136
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MATERIALS AND PROCESS TECHNOLOGY - Ferroelectric thin films for micro-sensors and actuators: A reviewMuralt, P. et al. | 2000
- 136
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Ferroelectric thin films for micro-sensors and actuators: a reviewP Muralt et al. | 2000
- 147
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Composition and structure of NiTiCu shape memory thin filmsNadège Frantz-Rodriguez / Alain Bosseboeuf / Elisabeth Dufour-Gergam / Valérie Stambouli-Séné / Gérard Nouet / Wilfrid Seiler / Jean-Lou Lebrun et al. | 2000
- 147
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MATERIALS AND PROCESS TECHNOLOGY - Composition and structure of NiTiCu shape memory thin filmsFrantz-Rodriguez, N. et al. | 2000
- 152
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Ion beam synthesis of polycrystalline SiC on SiO2 structures for MEMS applicationsChristophe Serre / Alejandro Pérez-Rodríguez / Joan Ramón Morante / Jaume Esteve / María-Cruz Acero / Reinhard Kögler / Wolfgang Skorupa et al. | 2000
- 152
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MATERIALS AND PROCESS TECHNOLOGY - Ion beam synthesis of polycrystalline SiC on SiO2 structures for MEMS applicationsSerre, C. et al. | 2000
- 157
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A silicon shadow mask for deposition on isolated areasA Tixier / Y Mita / J P Gouy / H Fujita et al. | 2000
- 157
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MATERIALS AND PROCESS TECHNOLOGY - A silicon shadow mask for deposition on isolated areasTixier, A. et al. | 2000
- 163
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A new model for Si{100} convex corner undercutting in anisotropic KOH etchingH Schröder / E Obermeier et al. | 2000
- 163
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MATERIALS AND PROCESS TECHNOLOGY - A new model for Si(100) convex corner undercutting in anisotropic KOH etchingSchröder, H. et al. | 2000
- 171
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MATERIALS AND PROCESS TECHNOLOGY - Wet and dry etching techniques for the release of sub-micrometre perforated membranesKuiper, S. et al. | 2000
- 171
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Wet and dry etching techniques for the release of sub-micrometre perforated membranesStein Kuiper / Meint de Boer / Cees van Rijn / Wietze Nijdam / Gijs Krijnen / Miko Elwenspoek et al. | 2000
- 175
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Mask materials for powder blastingHenk Wensink / Henri V Jansen / J W Berenschot / Miko C Elwenspoek et al. | 2000
- 175
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MATERIALS AND PROCESS TECHNOLOGY - Mask materials for powder blastingWensink, H. et al. | 2000
- 181
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Focused ion beam induced deposition: fabrication of three-dimensional microstructures and Young's modulus of the deposited materialS Reyntjens / R Puers et al. | 2000
- 181
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MATERIALS AND PROCESS TECHNOLOGY - Focused ion beam induced deposition: Fabrication of three-dimensional microstructures and Young's modulus of the deposited materialReyntjens, S. et al. | 2000
- 189
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MATERIALS AND PROCESS TECHNOLOGY - Integrating electro-discharge machining and photolithography: Work in progressReynaerts, D. et al. | 2000
- 189
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Integrating electro-discharge machining and photolithography: work in progressDominiek Reynaerts / Wim Meeusen / Xiaozhong Song / Hendrik Van Brussel / Steve Reyntjens / Dirk De Bruyker / Robert Puers et al. | 2000
- 196
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DEVICES - High-temperature piezoresistive gauge fabricated on commercially available silicon-on-insulator wafersVallin, Ö et al. | 2000
- 196
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High-temperature piezoresistive gauge fabricated on commercially available silicon-on-insulator wafersÖrjan Vallin / Ylva Bäcklund et al. | 2000
- 200
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Low-cost piezoresistive silicon load cell independent of force distributionRobert A F Zwijze / Remco J Wiegerink / Gijs J M Krijnen / Theo S J Lammerink / Miko Elwenspoek et al. | 2000
- 200
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DEVICES - Low-cost piezoresistive silicon load cell independent of force distributionZwijze, R.A.F. et al. | 2000
- 204
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Optimized technology for the fabrication of piezoresistive pressure sensorsA Merlos / J Santander / M D Alvarez / F Campabadal et al. | 2000
- 204
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DEVICES - Optimized technology for the fabrication of piezoresistive pressure sensorsMerlos, A. et al. | 2000
- 209
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DEVICES - A low-pressure encapsulated deep reactive ion etched resonant pressure sensor electrically excited and detected using 'burst' technologyMelin, J. et al. | 2000
- 209
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A low-pressure encapsulated deep reactive ion etched resonant pressure sensor electrically excited and detected using `burst' technologyJessica Melin / Peter Enoksson / Thierry Corman / Göran Stemme et al. | 2000
- 218
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DEVICES - Resistive pressure sensing structures on polyimide membranes on GaAs substratePetrini, I. et al. | 2000
- 218
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Resistive pressure sensing structures on polyimide membranes on GaAs substrateIoana Petrini / A Müller / V Avramescu / G Simion / N Nitescu / D Vasilache / D Dascalu / G Konstantinidis / F Giacomozzi et al. | 2000
- 223
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Investigation of the effect of processing steps on stress in a polysilicon structural membraneH Berney / M Hill / A-M Kelleher / E Hynes / M O'Neill / W A Lane et al. | 2000
- 223
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DEVICES - Investigation of the effect of processing steps on stress in a polysilicon structural membraneBerney, H. et al. | 2000
- 235
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Micro-systems in biomedical applicationsPaolo Dario / Maria Chiara Carrozza / Antonella Benvenuto / Arianna Menciassi et al. | 2000
- 235
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DEVICES - Micro-systems in biomedical applicationsDario, P. et al. | 2000
- 245
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DEVICES - Industrial MEMS on SOIRenard, S. et al. | 2000
- 245
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Industrial MEMS on SOIStéphane Renard et al. | 2000
- 250
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Application of a microflown as a low-cost level sensorJ van Honschoten / J van Baar / H E de Bree / T Lammerink / G Krijnen / M Elwenspoek et al. | 2000
- 250
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DEVICES - Application of a microflown as a low-cost level sensorHonschoten, J.van et al. | 2000
- 254
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An electromechanical mixer using silicon micromechanical capacitors and radio-frequency functionsG Bazin / J P Gilles / P Crozat / P Sangouard / A Bosseboeuf / I Dufour / R Yahiaoui / P Bildstein et al. | 2000
- 254
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DEVICES - An electromechanical mixer using silicon micromechanical capacitors and radio-frequency functionsBazin, G. et al. | 2000
- 260
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DEVICES - Coupled U-shaped cantilever actuators for 1 x 4 and 2 x 2 optical fibre switchesKopka, P. et al. | 2000
- 260
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Coupled U-shaped cantilever actuators for 1×4 and 2×2 optical fibre switchesPeter Kopka / Martin Hoffmann / Edgar Voges et al. | 2000
- 260
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Coupled U-shaped cantilever actuator for 1 x 4 and 2 x 2 optical fibre switchesKopka, P. / Hoffmann, M. / Voges, E. et al. | 2000
- 265
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Mechanical nonlinearities in a magnetically actuated resonatorT Bourouina / A Garnier / H Fujita / T Masuzawa / J-C Peuzin et al. | 2000
- 265
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DEVICES - Mechanical nonlinearities in a magnetically actuated resonatorBourouina, T. et al. | 2000
- 271
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DEVICES - Towards a force-controlled microgripper for assembling biomedical microdevicesCarrozza, M.C. et al. | 2000
- 271
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Towards a force-controlled microgripper for assembling biomedical microdevicesMaria Chiara Carrozza / Anna Eisinberg / Arianna Menciassi / Domenico Campolo / Silvestro Micera / Paolo Dario et al. | 2000
- 277
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DEVICES - Modelling of micropumps using unimorph piezoelectric actuator and ball valvesAccoto, D. et al. | 2000
- 277
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Modelling of micropumps using unimorph piezoelectric actuator and ball valvesD Accoto / M C Carrozza / P Dario et al. | 2000
- 282
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DEVICES - Enhancement of elementary displaced volume with electrostatically actuated diaphragms: Application to electrostatic micropumpsFrançais, O. et al. | 2000
- 282
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Enhancement of elementary displaced volume with electrostatically actuated diaphragms: application to electrostatic micropumpsOlivier Français / Isabelle Dufour et al. | 2000
- 287
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InP-based MOEMS and related topicsJean-Louis Leclercq / Michel Garrigues / Xavier Letartre / Christian Seassal / Pierre Viktorovitch et al. | 2000
- 287
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DEVICES - InP-based MOEMS and related topicsLeclercq, J.-L. et al. | 2000
- 293
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DEVICES - Thermal actuation of a GaAs cantilever beamLalinsky, T. et al. | 2000
- 293
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Thermal actuation of a GaAs cantilever beamT Lalinský / E Burian / M Drzík / S Hascík / Z Mozolová / J Kuzmík et al. | 2000
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Editorial| 2000