Ultrathin thickness and spacing measurement by interferometry and correction method [2542-18] (English)
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- New search for: Wang, D.
- New search for: Zhang, H.
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In:
Optomechanical and precision instrument design
2542
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129-135
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1995
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ISBN:
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ISSN:
- Conference paper / Print
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Title:Ultrathin thickness and spacing measurement by interferometry and correction method [2542-18]
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Contributors:
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Conference:Meeting, Optomechanical and precision instrument design ; 1995 ; San Diego; CA
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Published in:Optomechanical and precision instrument design , 2542 ; 129-135PROCEEDINGS- SPIE THE INTERNATIONAL SOCIETY FOR OPTICAL ENGINEERING , 2542 ; 129-135
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Publisher:
- New search for: SPIE
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Publication date:1995-01-01
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Size:7 pages
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ISBN:
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ISSN:
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Type of media:Conference paper
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Type of material:Print
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Language:English
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Keywords:
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Source:
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Table of contents conference proceedings
The tables of contents are generated automatically and are based on the data records of the individual contributions available in the index of the TIB portal. The display of the Tables of Contents may therefore be incomplete.
- 2
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Slit diaphragm flexures for optomechanicsVukobratovich, Daniel / Richard, Ralph M. / McNiven, J. P. / Sinclair, R. Lawrence et al. | 1995
- 2
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Slit diaphragm flexures for optomechanics [2542-01]Vukobratovich, D. / Richard, R. M. / McNiven, J. P. / Sinclair, L. / SPIE et al. | 1995
- 11
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Optimal structural design of the Airborne Infrared Imager [2542-02]Doyle, K. B. / Cerrati, V. J. / Forman, S. E. / Sultana, J. A. / SPIE et al. | 1995
- 11
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Optimal structural design of the Airborne Infrared ImagerDoyle, Keith B. / Cerrati, Vincent J. / Forman, Steven E. / Sultana, John A. et al. | 1995
- 23
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Gimbal mechanism for cryogenic alignment of 1-meter diameter optics [2542-03]Chave, R. G. / Nash, A. E. / Hardy, J. / SPIE et al. | 1995
- 23
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Gimbal mechanism for cryogenic alignment of 1-meter diameter opticsChave, Robert G. / Nash, Alfred E. / Hardy, James et al. | 1995
- 34
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Modal analysis tests on the supporting structure of the secondary mirror of the Large Binocular Telescope [2542-04]Miglietta, L. / SPIE et al. | 1995
- 34
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Modal analysis tests on the supporting structure of the secondary mirror of the Large Binocular TelescopeMiglietta, Luciano et al. | 1995
- 47
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Novel polymeric monofilament post-treatment study involving time-of-flight measurementsLo, Verna C. / Farris, Richard J. et al. | 1995
- 47
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Novel polymeric monofilament post-treatment study involving time-of-flight measurements [2542-05]Lo, V. C. / Farris, R. J. / SPIE et al. | 1995
- 58
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Contact stresses and their optical effects in biconvex optical elements [2542-06]Sawyer, K. A. / SPIE et al. | 1995
- 58
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Contact stresses and their optical effects in biconvex optical elementsSawyer, Kevin A. et al. | 1995
- 70
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Alignment of flexure stages for best rectilinear performance [2542-07]Hatheway, A. E. / SPIE et al. | 1995
- 70
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Alignment of flexure stages for best rectilinear performanceHatheway, Alson E. et al. | 1995
- 81
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Design of precision hydrodynamic bearings for a goniometer with radial gratings [2542-40]Wang, J. / Zhu, Y. / SPIE et al. | 1995
- 81
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Design of precision hydrodynamic bearings for goniometer with radial gratingsWang, Jianshe / Zhu, Yingshi et al. | 1995
- 92
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Challenges to optomechanical design from x-ray interferometry and gamma-ray diffractionDeslattes, Richard D. / Kessler, E. G. et al. | 1995
- 92
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Challenges to optomechanical design from x-ray interferometry and gamma-ray diffraction [2542-08]Deslattes, R. D. / Kessler, E. G. / SPIE et al. | 1995
- 103
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Design and fabrication of low-cost x-ray mirrorsAhmad, Anees / Engelhaupt, Darell E. / Feng, Chen / Li, Ye et al. | 1995
- 103
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Design and fabrication of low-cost x-ray mirrors [2542-11]Ahmad, A. / Engelhaupt, D. E. / Feng, C. / Li, Y. / SPIE et al. | 1995
- 112
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Novel ellipsometer design for the study of large thin films [2542-13]Lin, Y. / SPIE et al. | 1995
- 112
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Novel ellipsometer design for the study of large thin filmsLin, Yao et al. | 1995
- 121
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State-of-the-art CME measurement [2542-17]Gilmore, J. F. / SPIE et al. | 1995
- 121
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State-of-the-art CME measurementGilmore, James F. et al. | 1995
- 129
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Ultrathin thickness and spacing measurement by interferometry and correction methodWang, Dongsheng / Zhang, Hongcheng / Yang, Yunping / Zhang, Yunxiang et al. | 1995
- 129
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Ultrathin thickness and spacing measurement by interferometry and correction method [2542-18]Wang, D. / Zhang, H. / Yang, Y. / Zhang, Y. / SPIE et al. | 1995
- 136
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Laser instrument for straightness measurements [2542-15]Butenko, L. N. / Etsin, I. S. / SPIE et al. | 1995
- 136
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Laser instrument for straightness measurementsButenko, Lev N. / Etsin, Ilya S. et al. | 1995
- 142
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Design and construction of a metal matrix composite ultra-lightweight optical systemVukobratovich, Daniel / Valente, Tina M. / Ma, Guolin et al. | 1995
- 142
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Design and construction of a metal matrix composite ultra-lightweight optical system [2542-20]Vukobratovich, D. / Valente, T. M. / Ma, G. / SPIE et al. | 1995
- 154
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Design study of a KAO telescope with a 1-m double-arch primary mirror [2542-21]Moon, I. K. / Han, I. W. / Chang, B. S. / Kim, H. K. / SPIE et al. | 1995
- 154
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Design study of a KAO telescope with a 1-m double-arch primary mirrorMoon, Il Kweon / Han, In Woo / Chang, Byung-Soo / Kim, Hyun Kyu / Cho, Myung K. et al. | 1995
- 167
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Robust and miniature optical fiber pH sensor based on methylene blue dye adsorption [2542-23]Deboux, B. J.-C. / Lewis, E. / Scully, P. J. / Edwards, R. / SPIE et al. | 1995
- 167
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Robust and miniature optical fiber pH sensor based on methylene blue dye adsorptionDeBoux, Bruno J. / Lewis, Elfed / Scully, Patricia J. / Edwards, Robert et al. | 1995
- 177
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Controlling nonlinearities in elastic actuatorsHatheway, Alson E. et al. | 1995
- 177
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Controlling nonlinearities in elastic actuators [2542-24]Hatheway, A. E. / SPIE et al. | 1995
- 185
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Design and mounting of the gratings for the Far Ultraviolet Spectroscopic Explorer (FUSE) [2542-25]Shipley, A. F. / Green, J. C. / Andrews, J. P. / SPIE et al. | 1995
- 185
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Design and mounting of the gratings for the Far Ultraviolet Spectroscopic Explorer (FUSE)Shipley, Ann F. / Green, James C. / Andrews, John P. et al. | 1995
- 197
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Design of a stereo multispectral CCD camera for Mars Pathfinder [2542-39]Reynolds, R. O. / Smith, P. H. / Crowe, D. G. / Bigler, M. / SPIE et al. | 1995
- 197
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Design of a stereo multispectral CCD camera for Mars PathfinderReynolds, Robert O. / Smith, Peter H. / Crowe, Devon G. / Bigler, Mark / Pollard, Mike et al. | 1995
- 207
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Several designs for ultrahigh-resolution optical positioning components [2542-26]Zhu, J. / SPIE et al. | 1995
- 207
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Several designs for ultrahigh-resolution optical positioning componentsZhu, Jianqiang et al. | 1995
- 212
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Discussion on transverse and longitudinal size for a compact laser designZhu, Jianqiang et al. | 1995
- 212
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Discussion on transverse and longitudinal size for a compact laser design [2542-27]Zhu, J. / SPIE et al. | 1995
- 216
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Novel integrated silicon micromechanical/optical pressure sensor [2542-28]Wen, Z. / Fei, L. / Zhong, X. / Li, Y. / SPIE et al. | 1995
- 216
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Novel integrated silicon micromechanical/optical pressure sensorWen, Zhiyu / Fei, Long / Zhong, Xianxin / Li, Youli et al. | 1995
- 220
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Aspheric surface figuring of fused silica using plasma-assisted chemical etching [2542-29]Hoskins, S. J. / SPIE et al. | 1995
- 220
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Aspheric surface figuring of fused silica using plasma-assisted chemical etchingHoskins, Steven J. et al. | 1995
- 231
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Aspheric surface figuring of silicon using plasma-assisted chemical etching [2542-30]Hoskins, S. J. / Scott, B. A. / SPIE et al. | 1995
- 231
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Aspheric surface figuring of silicon using plasma-assisted chemical etchingHoskins, Steven J. / Scott, Bradley A. et al. | 1995
- 236
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Electrochemically deposited nickel alloys with controlled thermal expansion for optical applications [2542-31]Hibbard, D. L. / SPIE et al. | 1995
- 236
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Electrochemically deposited nickel alloys with controlled thermal expansion for optical applicationsHibbard, Douglas L. et al. | 1995
- 244
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Design and analysis of 1-m beryllium space telescopeHsu, Ying W. / Johnston, Roger A. et al. | 1995
- 244
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Design and analysis of 1-m beryllium space telescope [2542-32]Hsu, Y. W. / Johnston, R. A. / SPIE et al. | 1995
- 258
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Fabrication of a large-aperture beryllium telescope for space application [2542-33]Delatte, M. L. / Hibbard, D. L. / SPIE et al. | 1995
- 258
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Fabrication of a large-aperture beryllium telescope for space applicationDelatte, Michelle L. / Hibbard, Douglas L. et al. | 1995
- 265
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Design for drop-in assembly employed in an off-axis cryogenic telescope for spaceborne applications [2542-34]Telkamp, A. R. / Von Handorf, R. J. / Hoskins, S. J. / Hull, A. B. / SPIE et al. | 1995
- 265
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Design for drop-in assembly employed in an off-axis cryogenic telescope for spaceborne applicationsTelkamp, Arthur R. / von Handorf, Robert J. / Hoskins, Steven J. / Hull, Anthony B. / Macenka, Steven A. et al. | 1995
- 278
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Techniques in using UV adhesives for optomechanical designsNorland, Eric A. et al. | 1995
- 278
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Techniques in using UV adhesives for optomechanical designs [2542-35]Norland, E. A. / SPIE et al. | 1995
- 282
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Plastic-molded SC module consisting of a single-mode fiber [2542-37]Warashina, Y. / Iida, T. / Ikeya, T. / Kyomasu, M. / SPIE et al. | 1995
- 282
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Plastic-molded SC module consisting of a single-mode fiberWarashina, Yoshihisa / Iida, Takashi / Ikeya, Takeshi / Kyomasu, Mikio et al. | 1995