Remote sensing of tetrachloroethene with a micro-fibre optical gas sensor based on surface plasmon resonance spectroscopy (English)
- New search for: Niggemann, M.
- New search for: Katerkamp, A.
- New search for: Pellmann, M.
- New search for: Bolsmann, P.
- New search for: Niggemann, M.
- New search for: Katerkamp, A.
- New search for: Pellmann, M.
- New search for: Bolsmann, P.
In:
Solid state sensors and actuators
1/2
;
328-333
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ISBN:
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ISSN:
- Conference paper / Print
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Title:Remote sensing of tetrachloroethene with a micro-fibre optical gas sensor based on surface plasmon resonance spectroscopy
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Contributors:Niggemann, M. ( author ) / Katerkamp, A. ( author ) / Pellmann, M. ( author ) / Bolsmann, P. ( author )
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Conference:International conference; 8th, Solid state sensors and actuators ; 1995 ; Stockholm
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Published in:Solid state sensors and actuators , 1/2 ; 328-333SENSORS AND ACTUATORS B ; 34, 1/2 ; 328-333
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Publisher:
- New search for: Elsevier Science S. A.
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Place of publication:Netherlands
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Size:6 pages
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Remarks:Held in conjunction with Eurosensors IX. Also known as TRANSDUCERS '95; See also 8241.7852 vol 52 no 1-3, 53 no 1-3 and 54 no 1-3 1996 for further selected papers. See also 8241.78522 vol 33 no 1-3 for further selected papers and 9020.58285 for paper and programme
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ISBN:
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ISSN:
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Type of media:Conference paper
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Type of material:Print
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Language:English
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Keywords:
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Source:
© Metadata Copyright the British Library Board and other contributors. All rights reserved.
Table of contents conference proceedings
The tables of contents are generated automatically and are based on the data records of the individual contributions available in the index of the TIB portal. The display of the Tables of Contents may therefore be incomplete.
- 1
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The 8th International Conference On Solid-State Sensors And Actuators And Eurosensors IX [front matter]| 1995
- 1
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The 8th International Conference on Solid-State Sensors and Actuators and Actuators [front matter]| 1995
- 1
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Chemical Sensing with Laser SpectroscopySvanberg, S. et al. | 1995
- 2
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Biomimetic Sensing Systems with Arrayed Nonspecific SensorsMoriizumi, T. et al. | 1995
- 3
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Polysilicon Integrated Microsystems: Technologies and ApplicationsHowe, R. T. et al. | 1995
- 4
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Linking Sensors with Telemetry: Impact on the System DesignPuers, R. et al. | 1995
- 5
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CAD for Micromecheanical SystemsSenturia, S.D. et al. | 1995
- 5
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An Implantable Multichannel Digital Neural Recording System for a Micromachined Sieve ElectrodeAkin, T. / Najafi, K. / Bradley, R. M. et al. | 1995
- 6
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Self Tuning Inductive Powering for Implantable Telemetric Monitoring SystemsVan Schuylenbergh, K. / Puers, R. et al. | 1995
- 7
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A Multichannel Neuromuscular Microstimulator with Bidirectional TelemetryNardin, M. / Najafi, K. et al. | 1995
- 8
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Microfabrication and Characterization of Microelectrodearrays for In Vivo Nerve Signal RecordingValderrama, E. / Garrido, P. / Cabruja, E. / Heiduschka, P. et al. | 1995
- 9
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An Active Microfabricated Scalp Electrode-Array for EEG RecordingAlizadeh-Taheri, B. / Smith, R. L. / Knight, R. T. et al. | 1995
- 10
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Fabrication of SOI Wafers with Buried Cavities Using Silicon Fusion Bonding and Electrochemical EtchbackNoworolski, J. M. / Klasses, E. / Logan, J. / Petersen, K. et al. | 1995
- 11
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Automatic Etch Stop Buried Oxide Using Epitaxial Lateral OvergrowthGennissen, P. T. J. / Bartek, M. / French, P. J. / Sarro, P. M. et al. | 1995
- 12
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A CMOS Dissolved Wafer Process for Integrated P++ Micro Electro Mechanical SystemsGianchandani, Y. / Ma, K. / Najafi, K. et al. | 1995
- 13
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pH-Controlled TMAH Etchants for Silicon MicromachiningTabata, O. et al. | 1995
- 14
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A New Etching Method for Single Crystal AL~2O~3 Film on Si Using Si Ion ImplantationIshida, M. / Kim, H. / Kimura, T. / Nakamura, T. et al. | 1995
- 15
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Confined Selective Epitaxial Growth: Potential for Smart Silicon Sensor FabricationBartek, M. / Gennissen, P. T. J. / French, P. J. / Wolffenbuttel, R. F. et al. | 1995
- 16
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Selective Seeding of Copper Films on Polyimide Patterned Silicon Substrate, Using Ion ImplantationBhansali, S. / Sood, D. K. et al. | 1995
- 17
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Hexsil Bimorphs for Vertical ActuationKeller, C. G. / Howe, R. T. et al. | 1995
- 18
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Parallel Processing Architecture for Sensor InformationIshikawa, M. et al. | 1995
- 19
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A Low Power Wireless Microinstrumentation System for Environmental MonitoringMason, A. / Yazdi, N. / Najafi, K. / Wise, K. D. et al. | 1995
- 20
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An Advanced Engine Knock Detection Module Performances Higher Accurate MBT Control and Fuel Consumption ImprovementKaneyasu, M. / Kurihara, N. / Katogi, K. / Tabuchi, K. et al. | 1995
- 21
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Local Positioning System by Means of Enclosing Signal FieldOhyama, S. / Kobayashi, A. et al. | 1995
- 22
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Oversampled A/D Interface Circuit for Integrated AC-Power SensorMalcovati, P. / Maloberti, F. / Baltes, H. et al. | 1995
- 23
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A Reflected-Light Receiver with 2nA Sensitivity Using CDS and a Separate Lowpass-Filtering of the Input Signal at each Clock-PhaseKillat, D. / Schmitz, R. et al. | 1995
- 24
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Near-Sensor Image Processing, a VLSI RealizationEklund, J. E. / Svensson, C. / Aastroem, A. et al. | 1995
- 25
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A Simple Analytical Method For Modeling Field-sensitive Film TransducersManolescu, A. / Manolescu, A.M. et al. | 1995
- 25
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Integrated Electrostatic RMS-to-DC Converter Using IC-Compatible Surface MicromachiningVan Drieenhuizen, B. P. / Wolffenbuttel, R. F. et al. | 1995
- 26
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Contactless Angle Measurement by CMOS Magnetic Sensor with on Chip Read Out CircuitHaeberli, A. / Zimmerli, M. / Castagnetti, R. / Baltes, H. et al. | 1995
- 27
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CMOS RC-Oscillator Technique for Digital Read Out from an IR Bolometer Detector ArrayRingh, U. / Jansson, C. / Svensson, C. / Liddiard, K. et al. | 1995
- 28
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Low-Power Single-Chip CMOS PotentiostatKakerow, R. / Kappert, H. / Spiegel, E. / Manoli, Y. et al. | 1995
- 29
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An Oscillator Circuit for Electrostatically Driven Silicon-Based One-Port ResonatorsBienstman, J. / Tilmans, H. A. C. / Steyaert, M. / Puers, R. et al. | 1995
- 30
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On-Chip Integration of High-Voltage Generator Circuits for a Side-Drive Electrostatic MicromotorJiang, H. / Carr, W. N. et al. | 1995
- 31
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Diode Based Thermal RMS Converter with On-Chip Circuitry Built Using Standard CMOS TechnologyKlaassen, E. H. / Reay, R. J. / Kovacs, G. T. A. et al. | 1995
- 32
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High-Voltage Devices and Circuits Fabricated Using Foundry CMOS for Use with Electrostatic MEM ActuatorsMaluf, N. / Reay, R. J. / Kovacs, G. T. A. et al. | 1995
- 33
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Mixed Analog-Digital Highly Sensitive Sensor Interface Circuit for Low Cost MicrosensorsBurstein, A. / Kaiser, W. J. et al. | 1995
- 34
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Fast 3D Laser Micromachining of Silicon for Micromechanical and Microfluidic ApplicationsMuellenborn, M. / Dirac, H. / Petersen, J. W. / Bouwstra, S. et al. | 1995
- 35
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Micro Assembly by High Rate CVD Using CW UV LaserSugihara, M. / Minami, K. / Esashi, M. et al. | 1995
- 36
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A Reshaping Technology with Joule Heat for Three Dimensional Silicon Micro StructuresFukuta, Y. / Akiyama, T. / Fujita, H. et al. | 1995
- 37
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Process-Dependent Thermophysical Properties of CMOS IC Thin FilmsPaul, O. / Baltes, H. et al. | 1995
- 38
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Mistic 1.1: A Process Compiler for Micromachined DevicesHasanuzzaman, M. / Mastrangelo, C. H. et al. | 1995
- 39
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Alignment of Mask Patterns to Crystal OrientationEnsell, G. et al. | 1995
- 40
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Gas-sensitive GaAs-MESFETsJaegle, M. / Steiner, K. et al. | 1995
- 40
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Boron Etch-Stop in TMAHBernstein, R. W. / Hanneborg, A. / Meringdal, F. / Nese, M. et al. | 1995
- 41
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Gallium Doping for Silicon Etch Stop in KOHSenna, J. R. / Smith, R. L. et al. | 1995
- 42
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In-Situ Phosphorus-Doped Polysilicon for MEMSBiebl, M. / Mulhern, G. T. / Howe, R. T. et al. | 1995
- 43
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Thick Polycristalline Silicon for Surface Micromechanical Applications: Deposition, Structuring and Mechanical CharacterizationLange, P. / Kirsten, M. / Riethmueller, W. / Wenk, B. et al. | 1995
- 44
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Polysilicon Surface Modification Technique to Reduce Sticking of MicrostructureYee, Y. / Chun, K. / Lee, J. D. et al. | 1995
- 45
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Ammonium Fluoride Anti-Stiction Surface Treatments for Polysilicon MicrostructuresHouston, M. R. / Maboudian, R. / Howe, R. T. et al. | 1995
- 46
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Post-Processing Release of Microstructures by Electromagnetic PulsesGogoi, B. / Mastrangelo, C. H. et al. | 1995
- 47
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Differential Adhesion Method for Microstructure Release: An Alternative to the Sacrificial LayerSmela, E. / Inganaes, O. / Lundstroem, I. et al. | 1995
- 47
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Linking sensors with telemetry: impact of the system designPuers, R. et al. | 1995
- 48
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A Novel Method to Avoid Sticking of Surface Micromachined StructuresKozlowski, F. / Lindmair, N. / Scheiter, T. / Hierold, C. et al. | 1995
- 49
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Permeable Polysilicon Etch-Access Windows for Microshell FabricationLebouitz, K. S. / Howe, R. T. / Pisano, A. P. et al. | 1995
- 50
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Silicon to Silicon Anodic Bonding Using Evaporated GlassKrause, P. / Sporys, M. / Obermeier, E. et al. | 1995
- 50
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Surface-micromachining of resonant silicon structuresFunk, K. / Schilp, A. / Offenberg, M. / Elsner, B. / Lärmer, F. et al. | 1995
- 51
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Quality of the Aluminium Press-On Contacts for Glass to Silicon BondingKadar, Z. / Bossche, A. / Mollinger, J. et al. | 1995
- 52
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In-Situ Investigation of Precise High Strength Micro Assembly Using Au-Si Eutectic BondingTiensuu, A.-L. / Schweitz, J.-A. / Johansson, S. et al. | 1995
- 52
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Micro-instrumentation for tribological measurementPrasad, R. / MacDonald, N. / Taylor, D. et al. | 1995
- 53
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Cavity Pressure Control for Critical Damping of Packaged Micro Mechanical DevicesMoriuchi, T. / Minami, K. / Esashi, M. et al. | 1995
- 54
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Hermeticity Testing of Glass-Silicon Packages with On-Chip FeedthroughsVon Arx, J. / Ziaie, B. / Dokmeci, M. / Najafi, K. et al. | 1995
- 55
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Packaging of ISFETs at the Wafer Level by Photopatternable Encapsulant ResinsMunoz, J. / Bratov, A. / Mas, R. / Abramova, N. et al. | 1995
- 56
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Proposal for New Multichip-on-Silicon Packaging SchemeGuerin, L. / Schaer, M. A. / Sachot, R. / Dutoit, M. et al. | 1995
- 57
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Basic Micro Module for Chemical Sensors with on Chip Heater and Buried Sensor StructureMutschall, D. / Scheibe, C. / Obermeier, E. et al. | 1995
- 58
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New Method for Testing Hermeticity of Silicon Sensor StructuresNese, M. / Bernstein, R. W. / Johansen, I.-R. / Hanneborg, A. et al. | 1995
- 59
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Microvalves with bistable buckled polymer diaphragmsGoll, C. / Bacher, W. / Büstgens, B. / Mass, D. / Menz, W. / Schomburg, W.K. et al. | 1995
- 59
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Flexible Polysiloxane Interconnection Between Two Substrates for Microsystem AssemblyArquint, P. / Van der Wal, P. D. / Van der Schoot, B. H. / De Rooij, N. F. et al. | 1995
- 59
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A multichannel neuromuscular Microsimulator with bi-directinal telemetryNardin, M. / Najafi, K. et al. | 1995
- 60
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An Initial Experimental Study of Rotating Micromechanical Liquid O-Ring Pressure SealsCohen, S. / Muntz, E. P. et al. | 1995
- 61
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Monitoring Plasma Over-Etching of Wafer-Bonded MicrostructuresGupta, R. K. / Schmidt, C. H. / Hsu, M. A. / Senturia, S. D. et al. | 1995
- 62
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A Multilayer Ceramic Package for Silicon Micromachined AccelerometersPourahmadi, F. / Koen, E. / Terry, S. et al. | 1995
- 63
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A Rapid and Selective Anodic Bonding MethodIto, N. / Yamada, K. / Okada, H. / Nishimura, M. et al. | 1995
- 63
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Microfabrication and characterisation of microelectrode arrays for in vivo nerve signal recordingValderrana, E. / Garrido, P. / Cabruja, E. / Heiduschka, P. / Harsch, A. / Göpel, W. et al. | 1995
- 64
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Integrated Optical EncoderSawada, R. et al. | 1995
- 65
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A Silicon Optical Modulator with 5 MHz Operation for Fiber-in-the-Loop ApplicationsWalker, J. A. / Goossen, K. W. / Arney, S. C. et al. | 1995
- 66
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MHz Opto-Mechanical ModulatorMarxer, C. / Gretillat, M. A. / Jaecklin, V. P. / Baettig, R. et al. | 1995
- 67
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Two Dimensional Silicion Micromachined Optical Scanner Integrated with Photo Detector and PiezoresistorIkeda, M. / Goto, H. / Sakata, M. / Wakabayashi, S. et al. | 1995
- 68
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An Electrostatically Operated Torsion Mirror for Optical Switching DeviceToshiyoshi, H. / Fujita, H. et al. | 1995
- 69
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Deformable Micromirror Devices as Phase Modulating High Resolution Light ValvesDoleschal, W. / Gehner, A. / Grundke, W. / Kuck, H. et al. | 1995
- 70
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Integration of Surface Micromachined Polysilicon Mirrors and a Standard CMOS ProcessFischer, M. / Naegele, M. / Eichner, D. / Schoellhorn, C. et al. | 1995
- 71
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A High-Resolution Laser-Based Deflection Measurement System for Characterizing Aluminum Electrostatic ActuatorsHoner, K. A. / Maluf, N. I. / Martinez, E. / Kovacs, G. T. A. et al. | 1995
- 72
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Design and Fabrication of Micro Mirror Supported by Electroplated Nickel PostsChung, S. W. / Shin, J. W. / Kim, Y. K. / Han, B. S. et al. | 1995
- 73
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Magnetic Small Flying MachinesArai, K. I. / Sugawara, W. / Honda, T. et al. | 1995
- 74
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Fully Batch Fabricated Magnetic Microactuators Using a Two Layer Liga ProcessRogge, B. / Menz, W. / Mohr, J. / Schulz, J. et al. | 1995
- 75
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Automatic etch stop on buried oxide using epitaxial lateral overgrowthGennissen, P.T.J. / Bartek, M. / French, P.J. / Sarro, P.M. / Wolffenbuttel, R.F. et al. | 1995
- 75
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Progress toward a bulk micromachined tunneling tip microaccelerometerHartley, F.T. / Dolgen, B. / Zavracky, P.M. et al. | 1995
- 75
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Electromagnetic Linear Actuators with Inductive Position Sensing for Micro Relay, Micro Valve and Precision Positioning ApplicationsGuckel, H. / Earle, S. T. / Klein, J. / Zook, D. et al. | 1995
- 76
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A Micromachined Permalloy Magnetic Actuator Array for Micro-Robotics Assembly SystemsLiu, C. / Tsao, T. / Will, P. / Tai, Y.-C. et al. | 1995
- 77
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Magnetic Microactuation of Torsional Polysilicon StructuresJudy, J. W. / Muller, R. S. et al. | 1995
- 78
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Electrostatic and Magnetoelastic Microactuation of Si~xN~y BridgesShearwood, C. / Pate, M. A. / Gibbs, M. R. J. / Whitehouse, C. R. et al. | 1995
- 79
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Micromachined Devices for Optical ApplicationsDeimel, P. P. et al. | 1995
- 80
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Micromachined 1X2 Optical Fiber SwitchField, L. A. / Burriesci, D. L. / Robrish, P. R. / Ruby, R. C. et al. | 1995
- 81
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A thermally actuated micropumpYue Yang / Ye, Xionggying / Zhou, Zhaoying / Wei Fang / Yong Li et al. | 1995
- 81
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Surface-Micromachined Movable SOI Optical WaveguidesEng, T. T. H. / Sin, S. S. Y. / Kan, S. C. / Wong, G. K. L. et al. | 1995
- 82
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Micromachined Optical Circular Gratings for Surface Light-Emitting DevicesSasaki, A. / Noda, S. / Ishikawa, T. et al. | 1995
- 83
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An Antenna-Coupled Electric Wave Detector for Microwave and Infrared RayOnoe, Y. / Kishi, N. / Hara, H. / Yamagishi, H. et al. | 1995
- 84
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High sensitive internal film stress measurements by an improved micromachined indicator structureEricson, F. / Greek, S. / Söderkvist, J. / Schweitz, J.A. et al. | 1995
- 84
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A Mechanical Splice for Fiber RibbonsElderstig, H. / Vieider, C. / Lindstroem, B. et al. | 1995
- 85
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Thermally Controlled Magnetization MicrorelayHashimoto, E. / Uenishi, Y. / Watanabe, A. et al. | 1995
- 86
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Surface Micromachined Microengine as the Driver for Micromechanical GearsGarcia, E. J. / Sniegowski, J. J. et al. | 1995
- 87
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Analysis of a Micro-Electric Generator for MicrosystemsWilliams, C. B. / Yates, R. B. et al. | 1995
- 88
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A Precision Flow Restrictor for Medical Infusion TherapyDrake, J. / Jerman, H. et al. | 1995
- 89
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Design of a Biological Cell Fusion DeviceLee, S. W. / Choi, J. H. / Kim, Y. K. et al. | 1995
- 90
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Generating a Microplasma with Porous SiliconKozlowski, F. / Huber, B. / Steiner, P. / Lang, W. et al. | 1995
- 91
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Gas Bubbles Electrolytically Generated at Microcavity Electrodes (MCE) Used for the Measurement of the Dynamic Surface Tension in LiquidsVolanschi, A. / Olthuis, W. / Bergveld, P. et al. | 1995
- 92
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A Piezoelectric Pseudo-Static Actuator for Large Displacement Under AC VoltageToshiyoshi, H. / Kobayashi, D. / Fujita, H. / Ueda, T. et al. | 1995
- 93
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Bending and Expanding Motion ActuatorsIdogaki, T. / Tominaga, T. / Ohya, N. / Senda, K. et al. | 1995
- 94
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Fabrication and Characterization of PZT Thin Films for MicromotorsMuralt, P. / Kohli, M. / Maeder, T. / Brooks, K. et al. | 1995
- 95
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Direct Frictional Driven Surface Acoustic Wave MotorTakahashi, M. / Kurosawa, M. / Higuchi, T. et al. | 1995
- 96
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Silicon Microfabricated Horns for Power UltrasonicsLal, A. / White, R. M. et al. | 1995
- 97
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Positioning to Nanometer Resolution with Ultrasonic ActuatorsSnitka, V. / Mizariene, V. / Zukauskas, D. et al. | 1995
- 98
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Piezoelectric Cantilever Beams Actuated by PZT Sol-Gel Thin FilmLuginbuhl, P. / Racine, G.-A. / De Rooij, N. F. et al. | 1995
- 99
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Self-Excited Piezoelectric Cantilever OscillatorsLee, S. S. / White, R. M. et al. | 1995
- 101
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Basic Characteristics of a Piezoelectric Type of ActuatorSakata, M. / Wakabayashi, S. / Totani, H. / Ikeda, M. et al. | 1995
- 102
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Fabrication of an Electrostatic Microactuator with an S-Shaped FilmShikada, M. / Sato, K. / Harada, T. et al. | 1995
- 103
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Parallel processing architecture for sensory informationIshikawa, M. et al. | 1995
- 103
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Electrostatically Excited Diaphragm Driven as a LoudspeakerRangsten, P. / Smith, L. / Rosengren, L. / Hoek, B. et al. | 1995
- 104
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Batch Fabrication of Mechanical Platforms for High Density Data StorageFan, L.-S. / Woodman, S. / Reiley, T. C. / Zappe, H. H. et al. | 1995
- 105
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Capacitance Based Tunable Micromechanical ResonatorsAdams, S. / Bertsch, F. / Macdonald, N. C. / Moon, F. C. et al. | 1995
- 106
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Electrical Levitation for Micromotors and MicroaccelerometersHe, G. H. / Chen, K. S. / Tan, S. S. / Wang, W. Y. et al. | 1995
- 107
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Double V-Beam Suspension for Linear MicroactuatorsKota, S. / Saggere, L. / Crary, S. B. et al. | 1995
- 108
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Human Information SensorYoshiike, N. / Morinaka, K. / Hashimoto, K. / Kawaguri, M. / Yoshinomoto, T.M. / Matsueda, S. / Sasald, K. et al. | 1995
- 108
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Non-Invasive Blood Glucose MonitoringKuriyama, T. et al. | 1995
- 109
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Ultrasensitive BiosensorsScheller, F. W. / Makower, A. / Bier, F. F. / Wollenberger, U. et al. | 1995
- 110
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Optimization and Stabilization of an Ultra Sensitive Biosensor for the Determination of Inorganic Phosphate by Enzymatic AmplificationConrath, N. / Huewel, S. / Gruendig, B. / Haalck, L. et al. | 1995
- 111
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Transcutaneous Lactate Monitoring with a Micro-Planar Amperometric BiosensorIto, N. / Matsumoto, T. / Nakamoto, S. / Fujiwara, H. et al. | 1995
- 112
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Flow-Calorimetric Biosensing of Zinc (II) Ions with Use of Thermolysin-Immobilized BeadsSatoh, I. et al. | 1995
- 113
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Improvements in the Stability Characteristics of Biosensors Using Protein-Polyelectrolyte ComplexesGibson, T. D. / Pierce, B. L. J. / Hulbert, J. N. / Gillespie, S. et al. | 1995
- 114
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Microdialysis System for Continuous Glucose MonitoringHinkers, H. / Dumschat / Steinkuhl, R. / Cammann, K. et al. | 1995
- 115
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Two Amperometric Biosensors as Liquid Chromatographic Detectors for On-Line Monitoring of Carbohydrate Consumption and Ethanol Production in BioprocessesLiden, H. / Buttler, T. / Jeppsson, H. / Volc, J. et al. | 1995
- 116
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Kinetics of Electron Transfer Between Horseradish Peroxidase and Potassium Hexacyanoferrate (II) in Organic Media and Aqueous SolutionSurareungchai, W. / Turner, A. P. F. / Saini, S. et al. | 1995
- 117
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Organophosphorus Pesticides Analysis by Solid State SensorsCampanella, L. / Colapicchioni, C. / Favero, G. / Sammartino, M. P. et al. | 1995
- 118
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Immobilization of Enzymes onto Thienoviologen-Modified Gold ElectrodesAlberts, W. M. / Lekkala, J. / Evans, P. E. / Turner, A. P. F. et al. | 1995
- 119
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Self-Doped Polyaniline as a Transducer for Potentiometric BiosensorsKaryakin, A. et al. | 1995
- 120
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Enzyme Electrodes for Determination of Phenol ConcentrationKaisheva, A. / Iliev, I. / Christov, S. / Kazareva, R. et al. | 1995
- 121
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A New Method for the Controlled Immobilization of Enzyme in Inorganic Gels (Laponite) for Amperometric Glucose BiosensorPoyard, S. / Jaffrezic-Renault, N. / Martelet, C. / Labbe, P. et al. | 1995
- 122
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Electron Transfer Principles in Amperometric Biosensors: Direct Electron Transfer Between Enzymes and an ElectrodeLoetzbeyer, T. / Schuhmann, W. / Schmidt, H.-L. et al. | 1995
- 123
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An Integrated Thermal Sensor Array for Multianalyte Determination Demonstrated with Glucose, Urea and PenicillinXie, B. / Danielsson, B. et al. | 1995
- 124
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A New Monolithic Temperature Sensor: The Thermal Feedback OscillatorSzekely, V. / Rencz, M. et al. | 1995
- 124
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On Line Monitoring of Glucose, Lactate, Glutamine and Glutamate during Mammalian Cell Cultivations with Integrated Micro Biosensor ArrayMoser, I. / Jobst, G. / Svasek, P. / Varahram, M. et al. | 1995
- 125
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Microstructured Polymer-Based Transistors Obtained by means of Scanning Electrochemical Microscopy. Applications as Transducers in BiosensorsSchuhmann, W. / Kranz, C. / Hiller, M. / Baeuerle, P. et al. | 1995
- 126
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A Holographic BiosensorMillington, R. / Mayes, A. / Blyth, J. / Lowe, C. et al. | 1995
- 127
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A Disposable Sensor and its Applications in the Measurements of Glucose and LeadYu, P. / Dong, S. et al. | 1995
- 128
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God Films by Pulsed Laser AblationApte, P. R. / Patel, A. B. / Agarwal, G. / Pai, S. P. et al. | 1995
- 263
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Surface Micromachined Metallic Microactuator with Buckling CharacteristicsQuenzer, H. J. / Maciossek, A. / Wagner, B. et al. | 1995
- 128
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Surface Micromachined Metallic Microactuator Wit14 Buckling CharacteristicsQuenzer, H.J. / Maciossek, A. / Wagner, B. / Pott, H. et al. | 1995
- 129
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The Studies for the Malate Tissue Biosensor Using Malic Enzyme in the Bundle Sheath Cell of the Corn LeafKim, U. R. / Roh, K. S. / Ha, Y. D. / Hong, Y. S. et al. | 1995
- 130
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A Microsensor with Integrated Heat Sink & Flow Guide for Gas Flow Sensing ApplicationsQiu, L. / Obermeier, E. et al. | 1995
- 131
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Response Speed Optimization of Thermal Gas-Flow Sensors for Medical ApplicationVink, J. / Verhoeven, H. J. / Huijsing, J. H. et al. | 1995
- 264
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A Novel Micromechanical Temperature Memory SensorGoldman, K. / Mehregany, M. et al. | 1995
- 132
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Influence of Design Geometry and Packaging on the Response of Thermal CMOS Flow SensorsMayer, F. / Baltes, H. et al. | 1995
- 133
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Design of Integrated Thermal Flow Sensors Using Thermal Sigma-Delta ModulationVerhoeven, H. J. / Huijsing, J. H. et al. | 1995
- 134
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The U-Flown, a Novel Device Measuring Acoustical FlowsDe Bree, H.-E. / Leussink, P. / Korthorst, T. / Jansen, H. et al. | 1995
- 135
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Silicon Tube Structures for Fluid Density SensorsEnoksson, P. / Stemme, G. / Stemme, E. et al. | 1995
- 136
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A Battery Operated Microsystem for Flow MeasurementsPierre, M. / Steenis, B. / Hermann, J. / Bourgeois, C. et al. | 1995
- 136
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A Multi-layer Eddy Current Micro Sensor For Non-destructive Inspection Of Small Diameter PipesHamasaki, Y. / Takahiro Ide, et al. | 1995
- 137
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A Polysilicon Flow Sensor for Gas Flow MetersNeda, T. / Nakamura, K. / Takumi, T. et al. | 1995
- 138
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Liga and Related Technologies for Industrial ApplicationsMenz, W. et al. | 1995
- 139
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Silicon Fusion Bonding and Deep Reactive Ion Etching: A New Process for MicrostructuresPetersen, K. / Logan, J. / Klaassen, E. / Noworolski, M. et al. | 1995
- 140
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Photonic Microsystem For Solar Illumination MonitoringDebergh, P. / Venier, P. / Landolt, O. / Arreguit, X. / Roze, P. / Biton, P. et al. | 1995
- 140
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A Novel Etch/Diffusion Process for Fabricating High Aspect Ratio Si MicrostructuresJuan, W. H. / Pang, S. W. et al. | 1995
- 141
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Silicon - Bulk Micromachining by Low Temperature Etching in High Density SF~8/O~2 - PlasmaBartha, J. W. / Greschner, J. / Junginger, R. / Puech, M. et al. | 1995
- 142
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The Black Silicon Method V: A Study of the Fabricating of Movable Structures for Micro Electromechanical SystemsDe Boer, M. / Jansen, H. / Elwenspoek, M. et al. | 1995
- 143
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Low-Cost Technology for Multilayer Electroplated Parts Using Laminated Dry Film ResistLorenz, H. / Paratte, L. / Luthier, R. / Renaud, P. et al. | 1995
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High Resolution Shadow Mask Patterning in Deep Holes and its Application to an Electrical Wafer Feed-ThroughBurger, G. J. / Smulders, E. J. T. / Berenschot, J. W. / Lammerink, T. S. J. et al. | 1995
- 144
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Integration Of A Smart Selective UV DetectorBofliger, D. / Popovic, R.S. / Baltes, H. et al. | 1995
- 145
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The Formation of Electroplating Molds by Reactive Ion EtchingChang, S.-C. / Putty, M. W. / Hicks, D. B. et al. | 1995
- 146
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Diode Integrated Capacitive Accelerometer with Reduced Structural DistortionShoji, Y. / Yoshida, M. / Minami, K. / Esashi, M. et al. | 1995
- 147
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ISAAC (Integrated Silicon Automotive Accelerometer)Spangler, L. / Kemp, C. J. et al. | 1995
- 148
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Novel Process for a Monolithical Integrated AccelerometerOffenberg, M. / Laermer, F. / Elsner, B. / Muenzel, H. et al. | 1995
- 268
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Microfabricated High Energy Particle DetectorHan, J. / Smith, R. L. / Lander, R. / Burden, C. et al. | 1995
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An Integrated Force-Balanced Capacitive Accelerometer for Low-G ApplicationsChau, K. H.-L. / Lewis, S. R. / Zhao, Y. / Howe, R. T. et al. | 1995
- 150
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On-chip integration of high-voltage generator circuits for an electrostatic micromotorHong Jiang / Carr, W.N. et al. | 1995
- 150
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A Piezoresistive Silicon Accelerometer with Monolithically Integrated CMOS-CircuitrySeidel, H. / Fritsch, U. / Gottinger, R. / Schalk, J. et al. | 1995
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A High-Performance, Low Cost Capacitive Accelerometer Trimmed Using Nonvolatile Potentiometers (EEPOT's)Tschan, T. / Urbanek, W. / Lim, M. / Allen, H. et al. | 1995
- 269
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An Integrated Multi-Channel Charged Particle Sensing SystemHatfield, J. V. / Lomas, D. / Goldfinch, J. / Hicks, P. J. et al. | 1995
- 152
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Improvement of Novel NRLM Method for Accelerometers' Characterization to the Range of 100m/s^2Ueda, K. / Umeda, A. et al. | 1995
- 153
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A High-Accuracy Multi-Element Silicon Barometric Pressure SensorZhang, Y. / Wise, K. D. et al. | 1995
- 154
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Surface Micromachined Capacitive Differential Pressure Sensor with Lithographically Defined Silicon DiaphragmMastrangelo, C. H. / Zhang, X. / Tang, W. C. et al. | 1995
- 155
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A Fully Integrated Surface Micromachined Pressure Sensor with Low Temperature DependenceDudaicevs, H. / Manoli, Y. / Mokwa, W. / Schmidt, M. et al. | 1995
- 156
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Capacitive Silicon Differential Pressure SensorHermann, J. / Bourgeois, C. / Porret, F. / Kloeck, B. et al. | 1995
- 156
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A New CdZnTe Detector System For Low Energy Gamma-ray MeasurementJohansen, G.A. / Abro, E. et al. | 1995
- 157
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Integrated Pressure Sensor with Remote Power Source and Remote ReadoutCarr, W. N. / Chamarti, S. / Gu, X. et al. | 1995
- 158
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Capacitive Pressure Sensor Mock-Up Without Compensation CircuitsBlasquez, G. / Pons, P. / Menini, P. / Herbst, D. et al. | 1995
- 159
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Self-Excited Force Sensing Microcantilevers with Piezoelectric Thin Films for Dynamic Scanning Force MicroscopyItoh, T. / Suga, T. et al. | 1995
- 160
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Lateral Force Measurements in a Scanning Force Microscope with Piezoresistive SensorsBrugger, J. / Binggeli, M. / Burger, J. / Imura, R. et al. | 1995
- 160
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Miniaturised Polarisation Sensor As A Concept For New Optical MicrosystemsStenkamp, B. / Abraham, M. / Amato, J.P. / Zetterer, T. / Pokrowsky, P. et al. | 1995
- 161
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Microelectromechanical Scanning Tunneling MicroscopeXu, Y. / Miller, S. A. / Macdonald, N. C. et al. | 1995
- 162
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An Acoustic Tactile Sensing Element with Five Dimensional SensitivityAndo, S. / Shinoda, H. et al. | 1995
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A CMOS Compatible Traction Stress Sensing Element for Use in High Resolution Tactile ImagingKane, B. J. / Kovacs, G. T. A. et al. | 1995
- 164
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Integration of a Large Tip with High Aspect Ratio on an XY-Microstage for AFM ImagingIndermuehle, P.-F. / De Rooij, N. F. et al. | 1995
- 165
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Silicon Three-Axial Tactile SensorChu, Z. / Sarro, P. M. / Middelhoek, S. et al. | 1995
- 166
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A Miniaturised Fabry-Perot AFM-SensorRuf, A. / Abraham, M. / Lacher, M. / Mayr, K. et al. | 1995
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A Non-Contact Inductive Position Sensor for Use in Micro MachinesZmood, R. B. / Sood, D. K. / Bhansali, S. / Zhang, Y. C. et al. | 1995
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A Micromachined Sub-Micrometer Photodiode for Scanning Probe MicroscopyDavis, R. C. / Williams, C. C. / Neuzil, P. et al. | 1995
- 169
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Performance Definition and Standardisation of Electronic NosesGardner, J. et al. | 1995
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Analysis of Complex Gas Mixtures by Pattern Recognition with Polymer Based Quartz Microbalance Sensor ArraysKraus, G. / Hierlemann, A. / Gauglitz, G. / Goepel, W. et al. | 1995
- 171
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Evaluation of Dynamic Sensor Signals by Artificial Neural NetworksKerner, T. / Goeppert, J. / Hierlemann, A. / Mitrovics, J. et al. | 1995
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Photo Detection and Light Emission of GaAs Negative-Resistance Switching DeviceNakagomi, S. / Shimizu, S. / Yamamoto, T. et al. | 1995
- 172
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A Calibration Technique for an Electronic NoseHolmberg, M. / Fryder, M. / Winquist, F. / Lundstroem, I. et al. | 1995
- 173
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Gas Identification Using Oxides Semiconductor Gas Sensor Array and Neural-Network Pattern RecognitionHong, H.-K. / Shin, H. W. / Park, H. S. / Yun, D. H. et al. | 1995
- 174
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Screening of Irradiated Tomatoes by Means of an Electronic NoseWinquist, F. / Arwin, H. / Forster, R. / Day, C. et al. | 1995
- 174
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A reshaping technology with Joule heating for three dimensional silicon structuresFukuta, Y. / Akiyama, T. / Fujita, H. et al. | 1995
- 175
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A Practical Use of Electronic Noses: Quality Estimation of COD Fillet Bought Over the CounterWinquist, F. / Sundgren, H. / Lundstroem, I. et al. | 1995
- 176
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Multisensor Microsystem for Contaminants in AirAlthainz, P. / Goschnick, J. / Ehrmann, S. / Ache, H. J. et al. | 1995
- 177
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Fuzzy Neural Networks for Gas SensingVlachos, D. S. / Avaritsiotis, J. N. et al. | 1995
- 178
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Linearisation in Multicomponent Analysis Based on a Hybrid Sensor-Array with 19 Sensor ElementsMitrovics, J. / Weimar, U. / Goepel, W. et al. | 1995
- 178
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High temperature microsensors on polycristalline diamond thin filmsObermeier, E. et al. | 1995
- 178
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High Temperature Microsensors Based On Polycrystalline Diamond Thin FilmsObermeier, E. et al. | 1995
- 179
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Sensor Array Recognition of Varieties of a Same WineDi Natale, C. / Davide, F. / D'Amico, A. / Nelli, P. et al. | 1995
- 180
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Study of Flexible Neural Network for Olfactory Sensor SystemPing, W. / Rong, L. / Weixue, L. et al. | 1995
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Hydrogen-Sensitive Breakdown Voltage in the I-V Characteristics of Tin Dioxide-Based SemiconductorsEgashira, M. / Shimizu, Y. / Takao, Y. / Fukuyama, Y. et al. | 1995
- 182
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Influence of the Interaction Between Molecules on the Response of a Metal Oxide Silicon Carbide (MOSIC) SensorBaranzahi, A. / Lloyd Spetz, A. / Johansson, R. / Hamrefors, G. et al. | 1995
- 183
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In Situ Modification of the NOx and CO Sensitivity of Thin Pt-Gate MOSFET'sZubkans, J. / Spetz, A. L. / Sundgren, H. / Winquist, F. et al. | 1995
- 184
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The Detection of Mixtures of NOx's with Hydrogen Using Catalytic Metal Films on the Sandia Robust Sensor with Pattern RecognitionHughes, R. C. / Osbourn, G. C. / Bartholomew, J. W. et al. | 1995
- 185
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Langmuir-Analysis on Hydrogen Gas Response of Palladium-Gate FET SensorsMorita, Y. / Nakamura, K. / Kim, C. et al. | 1995
- 186
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Thin Platinum Gate Field Effect Transistors as Ammonia Sensors in LiquidHedborg, E. / Winquist, F. / Lundstroem, I. et al. | 1995
- 278
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Silicon Carbide as a Mechanical MaterialKroetz, G. / Legner, W. / Wagner, C. / Mueller, G. et al. | 1995
- 187
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Fast Responding High Temperature Sensors for Combustion ControlBaranzahi, A. / Spetz, A. L. / Glavmo, M. / Nytomt, J. et al. | 1995
- 188
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Diamond Microelectronic Gas SensorsGurbuz, Y. / Kang, W. P. / Davidson, J. L. / Kinser, D. L. et al. | 1995
- 189
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Detection of Hydrogen from Gases Dissolved in Transformer Oil by Pd/Pt MISFETBaek, T. S. / Lee, J. G. / Kang, S. W. / Choi, S. Y. et al. | 1995
- 190
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Micromachining Chemical and Biochemical Analysis and Reaction Systems on Glass SubstratesHarrison, J. et al. | 1995
- 190
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Properties Of Heteroepitaxial 3c-SiC Films Grown by LPCVDYamaguchi, Y. / Nagasawa, H. / Shoki, T. / Annaka, N. et al. | 1995
- 191
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Integration of a Micro Liquid Chromatograph onto a Silicon ChipOcvirk, G. / Verpoorte, E. / Manz, A. / Widmer, H. M. et al. | 1995
- 192
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Continuous Sample Preparation Using Free-Flow Electrophoresis on a Silicon MicrostructureManz, A. / Raymond, D. / Widmer, H. M. et al. | 1995
- 193
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A MEMS-Based Miniature DNA Analysis SystemNorthrup, M. A. / Hills, R. F. / Landre, P. / Lehew, S. et al. | 1995
- 194
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Applications Of Crystalline-amorphous Phase Transitions In Silicon CarbideWagner, C. / Krotz, G. / Sonntag, H. / Muller, H. / Midler, G. / Kalbitzer, S. et al. | 1995
- 194
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A Microfabricated, Electrochemiluminescence Cell for the Detection of Amplified DNAHsueh, Y.-T. / Smith, R. L. / Northrup, M. A. et al. | 1995
- 195
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Different Couplings of Electrochemical Chip Sensors with Actuators in Microanalytical Fluidic SystemsHintsche, R. / Paeschke, M. / Uhlig, A. / Kruse, C. et al. | 1995
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Sensor Controlled Processes in Chemical MicroreactorsEhrfeld, W. / Hessel, V. / Moebius, H. / Richter, T. et al. | 1995
- 197
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A Planar Microfabricated Fluid FilterBrody, J. P. / Osborn, T. D. / Foster, F. K. / Yager, P. et al. | 1995
- 198
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Odor-Source Localization in Clean Room by Autonomous Mobile Sensing SystemIshida, H. / Kagawa, Y. / Nakamoto, T. / Moriizumi, T. et al. | 1995
- 199
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The Mechanism of the Response of Lipids Mimicking Olfactory Sensors to OdorantsSun, A. / Sun, J. L. / Jiang, Y. L. / Cui, L. et al. | 1995
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Pattern Recognition Using GasmodulationAuerbach, F. et al. | 1995
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Application of Plasma Polymer Film Coated Sensors to Gas Identification Using Linear FiltersNakamura, M. / Sugimoto, I. / Kuwano, H. et al. | 1995
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Solid Electrolytes for Gas Sensing at High Temperatures. Multi Electrode Setup to Analyze Gas MixturesReinhardt, G. / Somov, S. I. / Schoenauer, U. / Guth, U. et al. | 1995
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Sputter Deposition Of TiNi And TiNiPd Films Displaying The Two Way Shape Memory EffectQuandt, E. / Halene, C. / Holleck, H. / Feit, K. / Kohl, M. / Schlossmacher, P. et al. | 1995
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Integrated Sensor Array for Gas Analysis in Combustion AtmospheresGentino, J. / Gutirrez, J. / Ares, L. / Robla, J. I. et al. | 1995
- 204
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Multisensor System for Partial Pressure Ratios of Gas SpeciesKohl, D. / Kelleter, J. et al. | 1995
- 205
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Multi-Frequency Measurements of Organic Conducting Polymers for Sensing of Gases and VapoursAmrani, M. E. / Payne, P. A. / Persaud, K. C. et al. | 1995
- 206
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Preparation And Properties Of New Thick Film Magnetoresistive MaterialsGusmano, G. / Bianco, A. / Montesperelli, G. / Morten, B. / De Cicco, G. / Masoer, A. / Tornbe, P. / Prudenziati, M. et al. | 1995
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Nonlinear Preprocessing for Smart Chemical Sensing SystemsWilson, D. M. / Deweerth, S. O. et al. | 1995
- 207
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Thermal Analysis and Design of a Micro-Hotplate for Integrated Gas Sensor ApplicationsFung, S. K. H. / Tang, Z. / Chan, P. C. H. / Sin, J. K. O. et al. | 1995
- 209
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Selected-area deposition of multiple active films for conductometric microsensor arraysSemancik, S. / Cavicchi, R. E. / Kreider, K. G. / Suehle, J. S. et al.
- 209
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Optimized Temperature Pulse Sequences for the Enhancement of Chemically-Specific Response Patterns from Micro-Hotplate Gas SensorsCavicchi, R. E. / Suehle, J. S. / Kreider, K. G. / Gaitan, M. et al. | 1995
- 210
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Thin Film Boron Doped Polycrystalline Silicon/sub70%/-germanium/sub30%/ For ThermopilesVan Gerwen, P. / Slater, T. / Chevrier, J.B. / Baert, K. / Mertens, R. et al. | 1995
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Low Power Micro Gas SensorLee, D.-D. / Chung, W.-Y. / Kim, T.-H. / Baek, J.-M. et al. | 1995
- 212
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Design of the Interface Electronics for an Integrated Microsensor for the Preventive Detection of Water CondensationVancauwenberghe, O. / Short, J. / Giehler, E. / Bildstein, P. et al. | 1995
- 213
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Si-Planar-Pellistor: Design for Temperature Modulated OperationAigner, R. / Dietl, M. / Katterloher, R. / Klee, V. et al. | 1995
- 213
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Different strategies for the identification of gas sensing systemsMarco, S. / Pardo, A. / Davide, F. A. M. / Di Natale, C. et al.
- 214
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A New Method to Measure the Absolute-Humidity Independently of the Ambient TemperatureKimura, M. et al. | 1995
- 215
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Selective and Sensitive Detection of Volatile Organic Compounds in Plasma Film Technology with Amino Acids and FluoropolymersSugimoto, I. / Nakamura, M. / Kuwano, H. et al. | 1995
- 216
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Enhanced Electrochemical Performance of Solid-State Sensors with Silicone Rubber Based MembranesMalinowska, E. / Oklejas, V. / Hower, R. W. / Brown, R. B. et al. | 1995
- 217
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Improved EMF Stability of Solid State Ion-Selective Sensors by Incorporation of Lipophilic Silver-Calixarene Complexes within Polymeric FilmsMeruva, R. K. / Malinowska, E. R. / Hower, R. W. / Brown, R. B. et al. | 1995
- 218
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New Solvent System for the Improved Electrochemical Performance of Screen Printed Polyurethane Membrane-Based Solid-State SensorsHower, R. W. / Shin, J. H. / Meruva, R. K. / Brown, R. B. et al. | 1995
- 219
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Formation of Self-Assembled Monolayer of Heme and Synthetic Hemopeptide on Gold: Interaction with Nitric Oxide and Carbon MonoxidePilloud, D. L. / Moser, C. C. / Farid, R. S. / Rabanal, F. et al. | 1995
- 220
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Nitrate and Bicarbonate Selective CHEMFETSAntonisse, M. M. G. / Stauthamer, W. P. R. V. / Rudkevich, D. M. / Engbersen, J. F. J. et al. | 1995
- 221
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Application of Sol-Gel and Laser Evaporation Methods to Obtain Thin Gas Sensitive FilmsVaivars, G. / Kleperis, J. / Vitins, A. / Liberts, G. et al. | 1995
- 222
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Technology Of Diamond Microelctromechanical SystemsAslam, M. / Schulz, D. et al. | 1995
- 222
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Acrylated Polyurethane as an Alternative Ion-Selective Membrane Matrix for Chemical SensorsBratov, A. / Abramova, N. / Munoz, J. / Dominguez, C. et al. | 1995
- 287
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Technology of Diamond Microelectromechanical SystemsAslam, M. / Schulz, D. et al. | 1995
- 223
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Introduction of Electrically Conducting Molecularly Imprinted Composite Polymers as Recognition Elements in Chemical SensorsKriz, D. / Khayyami, M. / Danielsson, B. / Larsson, P.-O. et al. | 1995
- 224
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Behaviour of Cryptophane Molecules in Gas MediaSouteyrand, E. / Nicolas, D. / Martin, J. R. / Chauvet, J. P. et al. | 1995
- 224
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Accurate sensors offering unrestricted recalibration and long-term stability for determining high temperatures on the basis of gas-sensitive effects of different gases on metal oxidesGerblinger, J. / Heppel, U. / Meixner, H. et al.
- 225
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Micro-hall Devices With High Resolution Made Of 6-doped Inalas/ingaas Pseudomorphic HeterostructuresSugiyarna, Y. / Sano, K. / Sugaya, T. / Nakagawa, T. et al. | 1995
- 225
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Mass Sensitive Detection of CO~2 by Aminogroup-Functionalized PolymersZhou, R. / Schmeisser, D. / Hierlemann, A. / Weimar, U. et al. | 1995
- 226
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Organic Vapor Sensitivity in a Porous Silicon DeviceChoe, I. / Watanabe, K. / Okada, T. / Satoh, Y. et al. | 1995
- 227
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MEMS: What Lies Ahead?Petersen, K. et al. | 1995
- 228
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Special Features of Automotive Onboard SensorsIgarashi, I. et al. | 1995
- 229
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Auto-regulated osmotic pump for insulin therapy by sensing glucose concentration without energy supplyNagakura, T. / Ishihara, K. / Furukawa, T. / Masuda, K. et al.
- 229
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A Miniaturized Magnetic Field Sensor System Consisting Of A Planar Fluxgate Sensor And A Cmos Readout CircuitryGottfried-Gottfried, R. / Budde, W. / Mae, R. / Mick, H. / Sauer, B. / Ulbricht, S. / Wende, U. et al. | 1995
- 229
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Pharmacia Biosensor - A Technological Success with Commercial PotentialAndren, L. G. et al. | 1995
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Industrialization of an R&D Sensor CompanyHorntvedt, S. et al. | 1995
- 231
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Metal Oxide SensorsMeixner, H. / Lampe, U. et al. | 1995
- 232
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CAD for Micromechanical SystemsSenturia, S. et al. | 1995
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CAD from Micromechanical SystemsSenturia, S. et al. | 1995
- 233
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Magnetostatic Modeling of an Integrated MicroconcentratorSchneider, M. / Korvink, J. G. / Baltes, H. et al. | 1995
- 233
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Micro-fluxgate Magnetic Sensing Elements Using Closely-coupled Excitation And Pickup CoilsKawahito, S. / Satoh, H. / Sutoh, M. / Tadokoro, Y. et al. | 1995
- 234
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On the Electromechanical Behaviour of Thin Perforated Backplates in Silicon Condenser MicrophonesPedersen, M. / Olthuis, W. / Bergveld, P. et al. | 1995
- 234
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High-resolution pH imaging sensor for microscopic observation of microorganismsNakao, M. / Inoue, S. / Yoshinobu, T. / Iwasaki, H. et al.
- 235
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Static and Dynamic Flow Simulation of a KOH-Etched Micro ValveUlrich, J. / Fueller, H. / Zengerle, R. et al. | 1995
- 236
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Membuilder: An Automated 3D Solid Model Construction Program for Microelectromechanical Structures from Mask and Process DataOsterberg, P. M. / Senturia, S. D. et al. | 1995
- 238
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Calculation of the Quality Factor of Torsional Resonators in the Low-Pressure RegionKadar, Z. / Kindt, W. / Bossche, A. / Mollinger, J. et al. | 1995
- 239
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Simulation of a Complex Sensor System Using Coupled Simulation ProgramsSchroth, A. / Blochwitz, T. / Gerlach, G. et al. | 1995
- 240
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Circuit Simulation Model of Gas Damping in Microstructures with Non-Trivial GeometriesVeijola, T. / Ryhaenen, T. / Kuisma, H. / Lahdenperae, J. et al. | 1995
- 240
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Blowfly olfactory biosensor's sensitivity and specificityHuotari, M. / Mela, M. et al.
- 241
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Modelling and Simulation of a Diffusion Limited Glucose SensorCambiaso, A. / Delfino, L. / Grattarola, G. / Verreschi, G. et al. | 1995
- 242
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Different Strategies for the Non-Linear Dynamical Calibration of Gas SensorsDavide, F. A. M. / Di Natale, C. / D'Amico, A. / Marco, S. et al. | 1995
- 242
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Different Strategies for the Non-Linar Dynamical Calibration of Gas SensorsDavide, F. A. M. / Di Natale, C. / D'Amico, A. / Marco, S. et al. | 1995
- 243
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Bayesian Optimal Design of Experiments for Sensor CalibrationCrary, S. B. / Jeong, Y. et al. | 1995
- 244
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Micro-Instrumentation for Tribological MeasurementsPrasad, R. / MacDonald, N. C. / Taylor, D. et al. | 1995
- 245
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In Situ Tensile Strength Measurement of Thick-Film and Thin-Film Micromachined StructuresGreek, S. / Ericson, F. / Johansson, S. / Schweitz, J.-A. et al. | 1995
- 245
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A Cross-sensitivity Free 2-D Sensor For Magnetic FieldRoumenin, C. et al. | 1995
- 245
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An H^+-FET-based system for on-line detection of microorganisms in watersCambiaso, A. / Chiarugi, S. / Grattarola, M. / Lorenzelli, L. et al.
- 246
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A Milli Newton Micro Loading DeviceSaif, M. T. A. / MacDonald, N. C. et al. | 1995
- 247
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Measurement of Piezoelectricity of Thin Film by Using Laser Interferometry and Davies' BarUmeda, A. / Ueda, K. / Usuda, T. / Tanaka, K. et al. | 1995
- 248
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A New Technique for Quantitative Determination of the Stress Profile Along the Depth of P+ Silicon FilmsYang, E. H. / Yang, S. S. et al. | 1995
- 248
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Packaging of ISFETs at the wafer level by photopatternable encapsulation resinsMunoz, J. / Bratov, A. / Mas, R. / Abramova, N. / Dominguez, C. / Bartroli, J. et al. | 1995
- 249
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Fracture Strength of Doped and Undoped PolysiliconBiebl, M. / Von Philipsborn, H. et al. | 1995
- 249
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Scaling Down An Inductive Proximity SensorPasseraub, P.A. / Besse, P.-A. / Popovic, R.S. et al. | 1995
- 250
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Electrical and Piezoresistive Characterization of Boron Doped LPCVD Polycrystalline Silicon Under Rapid Thermal AnnealingLe Berre, M. / Kleimann, P. / Semmache, B. / Barbier, D. et al. | 1995
- 251
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Young's Modulus of In-Situ Phosphorus-Doped PolysiliconBiebl, M. / Brandl, G. / Howe, R. T. et al. | 1995
- 252
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Miniaturised ion-selective sensor chip for potassium measurement in a biomedical applicationUhlig, A. / Dietrich, F. / Lindner, E. / Schnakenberg, U. et al.
- 252
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High Sensitive Internal Film Stress Measurement by an Improved Micromachined Indicator StructureEricson, F. / Greek, S. / Soederqvist, J. / Schweitz, J.-A. et al. | 1995
- 253
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Stress Profile Characterization and Test Structures Analysis of Single and Double Ion Implanted LPCVD Polycrystalline SiliconBenitez, M. A. / Esteve, J. / Benrakkad, M. S. / Morante, J. R. et al. | 1995
- 253
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A 2-D Vertical Hall Magnetic Field Sensor Using Active Carrier Confinement And Micromachining TechniquesParanjape, M. / Landsberger, L. / Kahrizi, M. et al. | 1995
- 254
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Determination of the Elastic Temperature Coefficients of Monocrystalline SiliconBourgeois, C. / Hermann, J. / Blanc, N. / De Rooij, N. F. et al. | 1995
- 255
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Tensile Testing of Epitaxial Silicon FilmsCunningham, S. J. / Suwito, W. / Read, D. T. et al. | 1995
- 256
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Determination of the Mechanical Properties of MicrostructuresYe, X. Y. / Zhou, Z. Y. / Yang, Y. / Zhang, J. H. et al. | 1995
- 257
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Minimum Detectable Signals Of Integrated Magnetic Sensors In Bulk Cmos And SOI Tech Nologies For Magnetic Read HeadsLau, J. / Cuong T. Nguyen, / Ping K. Ko, / Chan, P.C.H. et al. | 1995
- 257
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Silicon-Based Thermal Comfort Sensing DeviceBu, J.-U. / Kim, T.-Y. / Kim, I.-S. / Jun, Y.-S. et al. | 1995
- 258
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New design technique for planar conductometric haematocrit sensorsVarlan, A. R. / Jacobs, P. / Sansen, W. et al.
- 259
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Overall System Analysis of a CMOS Thermal ConverterJaeggi, D. / Funk, J. / Baltes, H. et al. | 1995
- 260
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Resistance-Temperature Characteristics of Polycrystalline SiC/Diamond StrutureYonekubo, S. / Kamimura, K. / Onuma, Y. et al. | 1995
- 261
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Accurate Sensors Offering Unrestricted Recalibration and Longterm Stability for Determining High Temperatures on the Basis of Gas-Sensitive Effects on Metal OxidesGerblinger, J. / Heppel, U. / Meixner, H. et al. | 1995
- 264
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Micro coils fabricated by UV depht lithography and galvanoplatingLöchel, B. / Maciossek, A. / Rothe, M. / Windbracke, W. et al. | 1995
- 265
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Performance of a thin film microelectrode array for monitoring electrogenic cells in vitroMohr, A. / Finger, W. / Foehr, K. J. / Goepel, W. et al.
- 299
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A New Fabrication Process of a Planar Coil Using Photosensitive Polyimide and ElectroplatingWatanabe, Y. / Endo, E. / Nakagawa, H. / Yonezawa, E. et al. | 1995
- 270
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Whole cell biosensorsBousse, L. et al.
- 271
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Miniaturized Polarisation Sensor as a Concept for New Optical MicrosystemsStenkamp, B. / Amato, J. P. / Abraham, M. / Zetterer, T. et al. | 1995
- 272
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Orientation Sensor Using a Decoding Scheme and a Winner-Take-All CircuitNishimura, M. / Van Der Spiegel, J. et al. | 1995
- 300
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Fabrication of Wrapped Micro Coils Wound Around a Magnetic CoreYamada, N. / Yokoyama, Y. / Tanaka, H. et al. | 1995
- 273
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A Highly Sensitive Pirani Vacuum GaugeChou, B. C. S. / Chen, Y. M. / Shie, J. S. et al. | 1995
- 275
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A Novel Image Storage Sensor Using Photostimulated Luminescence in SrS:Eu,Sm Phosphor for Electromagnetic Waves such as X-Ray,UV-Ray and Visible LightNanto, H. / Hirai, Y. / Ikeda, M. / Kadota, M. et al. | 1995
- 276
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Optimisation of IgG Langmuir film deposition for application as sensing elementsTronin, A. / Dubrovsky, T. / Radicchi, G. / Nicolini, C. et al.
- 301
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Silicon Microvalves for Gas Flow ControlBarth, P. W. et al. | 1995
- 277
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A Novel Low Field Electron Emission Polycrystalline Diamond Microtip Array for Sensor ApplicationsKang, W. P. / Davidson, J. L. / Xu, J. F. / Kinser, D. L. et al. | 1995
- 281
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New Effects in Electroactive Polymers - New Basic for SensorsLachinov, A. N. / Zherebov, A. Y. / Kornilov, V. M. et al. | 1995
- 283
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Polyaniline label-based conductometric sensor for IgG detectionSergeyeva, T. A. / Lavrik, N. V. / Piletsky, S. A. / Rachkov, A. E. et al.
- 284
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Thin Film Boron Doped Poly-Si70%Ge30% for ThermopilesVan Gerwen, P. / Slater, T. / Chevrier, J. B. / Baert, K. et al. | 1995
- 285
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Limitations to the Piezoelectric Effect for Materials with Finite ResistivitySoederkvist, J. et al. | 1995
- 286
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Instabilities in Piezoelectric Properties of Ceramic Sensors and Actuators Under Extreme ConditionsDamjanovic, D. / Shulman, H. / Testorf, M. / Demartin, M. et al. | 1995
- 288
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Micro-Hall Devices with High Resolution Made of - Doped in AlAs/InGaAs Pseudomorphic HeterostructuresSugiyama, Y. / Sano, K. / Sugaya, T. / Nakagawa, T. et al. | 1995
- 289
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The ISFET-based measurement of the streaming potential as a novel biosensor principleKoch, S. / Woias, P. / Kudlich, E. / Zimmerer, B. et al.
- 291
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Autocalibration of Silicon Hall DevicesSimon, P. L. C. / De Vries, P. H. S. / Middelhoek, S. et al. | 1995
- 292
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Magnetic Sensors for Nanotesla Detection Using Planar Hall EffectNguyen Van Dau, F. / Schuhl, A. / Childress, J. R. / Sussiau, M. et al. | 1995
- 293
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Two dimensional silicon micromachined optical scanner integrated with photo detector and piezoresistorIkeda, M. / Goto, H. / Sakata, M. / Wakabayashi, S. / Imanaka, K. / Takeuchi, M. / Yada, T. et al. | 1995
- 295
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Detection of supported lipid layers with the acoustic Love waveguide device: application to biosensorsGizeli, E. / Lowe, C. R. / Liley, M. / Vogel, H. et al.
- 297
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Highly Sensitive Magnetotransistor with Combined Phenomena of Hall Effect and Emitter Injection Modulation Operated in the Saturation ModeKang, U. S. / Lee, S. K. / Han, M. K. et al. | 1995
- 298
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Micro Coils Fabricated by UV Depth Lithography and GalvanoplatingLoechel, B. / Maciossek, A. / Rothe, M. / Windbracke, W. et al. | 1995
- 301
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A resonant poliyimide-based humidity sensorSchroth, A. / Sager, K. / Gerlach, G. / Haeberli, A. et al.
- 302
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Bakable Silicon Pneumatic MicrovalveSim, D. Y. / Kurabayashi, T. / Esashi, M. et al. | 1995
- 303
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A Pneumatically Actuated Micro Valve with a Silicone Rubber Membrane for Integration with Fluid-Handling SystemsVieider, C. / Oehman, O. / Elderstig, H. et al. | 1995
- 304
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Auto-Regulated Osmotic Pump by Sensing Glucose Concentration without Energy SupplyNagakura, T. / Ishihara, K. / Furukawa, T. / Masuda, K. et al. | 1995
- 305
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Supramolecular interactions on mass sensitive sensors in gas phases and liquidsHartmann, J. / Auge, J. / Lucklum, R. / Roesler, S. et al.
- 305
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A Valve-Less Planar Pump in SiliconOlsson, A. / Enoksson, P. / Stemme, G. / Stemme, E. et al. | 1995
- 306
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Fluid Dynamics in Micro Dosing ActuatorsFaehndrich, M. / Hochwind, B. / Zollner, A. et al. | 1995
- 307
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Flow Sensing and Pumping Using Flexible Permanent Magnet BeamsKruusing, A. / Mikli, V. et al. | 1995
- 308
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A Micromachined Flow-Through Cell for Continuous Picovolume Sampling in an Analytical FlowWallman, L. / Drott, J. / Nilsson, J. / Laurell, T. et al. | 1995
- 310
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A Bistable Pneumatic Microswitch for Driving Fluidic ComponentsLisec, T. / Kreutzer, M. / Wagner, B. et al. | 1995
- 309
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Silicon Active Microvalves Using Buckled Membranes for ActuationPopescu, D. S. / Dascalu, D. C. / Elwenspoek, M. / Lammerink, T. et al. | 1995
- 311
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A Silicon Microvalve with Integrated Flow SensorFranz, J. / Baumann, H. / Trah, H. P. et al. | 1995
- 312
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Micro-Fluid Flow in MicrochannelJiang, X. N. / Zhou, Z. Y. / Li, Y. / Ye, X. Y. et al. | 1995
- 312
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A novel chemical sensor using CH~3Si(OCH~3)~3 sol-gel thin film coated quartz-resonator microbalanceNanto, H. / Tsubakino, S. / Habara, M. / Kondo, K. et al.
- 313
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A High-Resolution Silicon Monolithic Nozzle Array for Inkjet PrintingChen, J. / Wise, K. D. et al. | 1995
- 314
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Backshooter - A New Smart Micromachined Single-Chip Inkjet PrintheadKrause, P. / Obermeier, E. / Wehl, W. et al. | 1995
- 315
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Addressable Micromachined Jet ArraysCoe, D. J. / Allen, M. G. / Trautman, M. A. / Glezer, A. et al. | 1995
- 316
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Characterization of Multi-Segment Organic Thermal ActuatorsSuh, J. W. / Kovacs, G. T. A. et al. | 1995
- 317
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Testing and Characterization of a Bistable Snapping Microactuator Based on Thermomechanical AnalysisYang, Y.-J. / Kim, C.-J. et al. | 1995
- 317
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Chemiluminescent chemical sensors for inorganic and organic vaporsCollins, G. E. / Rose-Pehrsson, S. L. et al.
- 318
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Thermo-Mechanical Characteristics of a Thermal SwitchSlater, T. / Van Gerwen, P. / Masure, E. / Preud'Homme, F. et al. | 1995
- 319
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Micromachined ZnO-ON-Si~3N~4 Bimorph Laser Beam Deflectors with Very Large Deflection Angles Caused by Thermally Assisted Piezoelectric BendingSmits, J. G. / Choi, W.-S. et al. | 1995
- 346
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Microelectromechanical Components For Articulated MicrorobotsYeh, R. / Kruglick, E.J.J. / Pister, K.S.J. et al. | 1995
- 321
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A High-resolution Silicon Monolithic Nozzle Array For Inikjet PrintingJingkuang Chen, / Wise, K.D. et al. | 1995
- 321
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Self-Opening and Closing Boxes and other Micromachined Folding StructuresSmela, E. / Inganaes, O. / Lundstroem, I. et al. | 1995
- 352
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Surface-micromachined Mirrors For Laser-beam PositioningTien, N.C. / Solgaard, O. / Kiang, M-H. / Daneman, M. / Lau, K.Y. / Muller, R.S. et al. | 1995
- 323
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Dynamics of Polysilicon Parallel-Plate Electrostatic ActuatorsChu, P. B. / Nelson, P. R. / Pister, K. S. J. et al. | 1995
- 323
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Gas monitoring instrument utilising fiber optic, piezoelectric and gas-sensitive polymer techniquesWatson, J. / Tamadoni, R. / McMurray, N. / Coles, G. S. V. et al.
- 324
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Double Pass Metallization for CMOS Aluminum ActuatorsBuhler, J. / Steiner, F.-P. / Baltes, H. et al. | 1995
- 325
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An Application of Mechanical Leverage to MicroactuationSniegowski, J. J. / Smith, C. et al. | 1995
- 326
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A Practical Microgripper by Fine Alignment, Eutectic Bonding and SMA ActionLee, A. P. / Ciarlo, D. R. / Krulevitch, P. A. / Lehew, S. et al. | 1995
- 327
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Tactile Microgripper for Automated Handling of MicropartsGreitmann, G. / Buser, R. A. et al. | 1995
- 328
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Remote sensing of tetrachloroethene with a micro-fibre optical gas sensor based on surface plasmon resonance spectroscopyNiggemann, M. / Katerkamp, A. / Pellmann, M. / Bolsmann, P. et al.
- 328
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Nickel-Filled Hexsil Thermally Actuated TweezersKeller, C. G. / Howe, R. T. et al. | 1995
- 329
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An Electrostatically Actuated Micro-RelayDrake, J. / Jerman, H. / Lutze, B. / Stuber, M. et al. | 1995
- 330
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A Surface Micromachined Miniature Switch for Telecommunications Applications with Signal Frequencies from DC Up to 4 GHZYao, J. J. / Chang, M. F. et al. | 1995
- 331
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Design and Fabrication of a Gripping Tool for MicromanipulationThornell, G. / Bexell, M. / Schweitz, J.-A. / Johansson, S. et al. | 1995
- 332
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Insect-Model Based MicrorobotMiura, H. et al. | 1995
- 333
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Object Positioning Using a Surface Micromachined Distributed SystemGoosen, J. F. L. / Wolffenbuttel, R. F. et al. | 1995
- 333
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Charakterization of Multi-Segment Organic Thermal ActuatorsSuh, J.W. / Storment, C.W. / Kovacs, G.T.A. et al. | 1995
- 334
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Verification of the Micromechanical Characteristics of Electrostatic Linear ActuatorsKohl, M. / Goettert, J. / Mohr, J. et al. | 1995
- 334
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Analytical detection system of mixed odor vapors using chemiluminescence-based gas sensorNakagawa, M. / Kawabata, S. / Nishiyama, K. / Utsunomiya, K. et al.
- 335
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An Electrostatic Axial Gap Wobble MotorLegtenberg, R. / Berenschot, E. / Lammerink, T. / Elwenspoek, M. et al. | 1995
- 336
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A Threaded Wobble Motor a Micro Motor Generating Large Linear DisplacementFujita, H. / Iizuka, T. et al. | 1995
- 337
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Static and Dynamic Properties of Active JointsElwenspoek, M. / Weustink, M. / Legtenberg, R. et al. | 1995
- 337
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Testing And Characterization Of A Bistable Snaoping Microactuator Based On Thermo-mechanical AnalysisYao-Joe Yang, / Chang-Jin Kim, et al. | 1995
- 338
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Design, Fabrication and Testing of a C-Shape ActuatorLin, G. / Kim, C.-J. / Konishi, S. / Fujita, H. et al. | 1995
- 339
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A new SO~2 sensor system with SAW and IDC elementsLeidl, A. / Hartinger, R. / Roth, M. / Endres, H.-E. et al.
- 339
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A Bi-Directional Silicon Orifice Flow Sensor Characterised for Fluid Temperature and PressureVan Der Wiel, A. J. / Boillat, M. A. / De Rooij, N. F. et al. | 1995
- 340
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A Non-Contacting Sensor System for Respiratory Air Flow DetectionHoek, B. / Bluckert, A. / Sandberg, G. et al. | 1995
- 341
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An Integrated Pressure-Flow Sensor for Correlation Measurements in Turbulent Gas FlowsKaelvesten, E. / Vieider, C. / Loefdahl, L. / Stemme, G. et al. | 1995
- 342
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An Invasive Catheter Flow Sensor with On-Chip CMOS Read-Out Electronics for the Online Determination of Blood FlowKersjes, R. / Liebscher, F. / Spiegel, E. / Manoli, Y. et al. | 1995
- 343
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A Silicon Micromachined Floating-Element Shear-Stress Sensor with Optical Position Sensing by PhotodiodesPadmanabhan, A. / Goldberg, H. D. / Breuer, K. S. / Schmidt, M. A. et al. | 1995
- 343
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A model for the relative environmental stability of a series of polyimide capacitance humidity sensorsRalston, A. R. K. / Klein, C. F. / Thoma, P. E. / Denton, D. D. et al.
- 344
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Micromachined 1x2-FaseroptikschalterField, L.A. / Burriesci, D.L. / Robrish, P.R. / Ruby, R.C. et al. | 1995
- 344
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Temperature and Supply Voltage Stabilized Power Driver for Flow SensorsHuang, Q. / Menolfi, C. / Baltes, H. et al. | 1995
- 345
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Calibration of Microfabricated Shear Stress SensorsPan, T. / Hyman, D. / Mehregany, M. / Reshotko, E. et al. | 1995
- 346
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Thermal Based Microflow Sensor Optimization Using Coupled Electro Thermal Numerical SimulationNagata, M. / Swart, N. / Stevens, M. / Nathan, A. et al. | 1995
- 348
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A Portable Non-Invasive Blood Glucose MonitorDuncan, A. / Hannigan, J. / Freeborn, S. S. / Rae, P. W. H. et al. | 1995
- 349
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Effect of the degree of cross-linking on the characteristics of a PVCA capacitive-type humidity sensorMatsuguchi, M. / Shinmoto, M. / Sadaoka, Y. / Kuroiwa, T. et al.
- 349
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Evaluation of a Microflow System with Integrated Biosensor Array in Undiluted Blood During Diabetological Provocation TestsUrban, G. / Jobst, G. / Svasek, P. / Varahram, M. et al. | 1995
- 350
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The Blowfly Olfactory Biosensor: Its Sensitivity and SpecificityHuotari, M. / Mela, M. et al. | 1995
- 351
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An H+ - FET Based System for the On-Line Detection of Micro-Organisms in WatersCambiaso, A. / Chiarugi, S. / Grattarola, M. / Lui, A. et al. | 1995
- 352
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Catheter System for Potassium Measurement in Medical ApplicationUhlig, A. / Schnakenberg, U. / Lisec, T. / Wagner, B. et al. | 1995
- 353
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Application of Miniaturized Liquid Handling System with Integrated Biosensor Array for Milk AnalysisJobst, G. / Moser, I. / Svasek, P. / Varahram, M. et al. | 1995