Microlens arrays formed by melting photoresist and ion beam milling [3276-27] (English)
- New search for: Yi, X.-J.
- New search for: Zhang, X.-Y.
- New search for: Li, Y.
- New search for: Zhao, X.-R.
- New search for: SPIE
- New search for: Yi, X.-J.
- New search for: Zhang, X.-Y.
- New search for: Li, Y.
- New search for: Zhao, X.-R.
- New search for: Motamedi, M. E.
- New search for: Goring, R.
- New search for: SPIE
In:
Miniaturized systems with micro-optics and micromechanics
;
249-253
;
1998
-
ISBN:
-
ISSN:
- Conference paper / Print
-
Title:Microlens arrays formed by melting photoresist and ion beam milling [3276-27]
-
Contributors:Yi, X.-J. ( author ) / Zhang, X.-Y. ( author ) / Li, Y. ( author ) / Zhao, X.-R. ( author ) / Motamedi, M. E. / Goring, R. / SPIE
-
Conference:Conference; 3rd, Miniaturized systems with micro-optics and micromechanics ; 1998 ; San Jose; CA
-
Published in:PROCEEDINGS- SPIE THE INTERNATIONAL SOCIETY FOR OPTICAL ENGINEERING ; 3276 ; 249-253
-
Publisher:
- New search for: SPIE
-
Publication date:1998-01-01
-
Size:5 pages
-
ISBN:
-
ISSN:
-
Type of media:Conference paper
-
Type of material:Print
-
Language:English
-
Keywords:
-
Source:
© Metadata Copyright the British Library Board and other contributors. All rights reserved.
Table of contents conference proceedings
The tables of contents are generated automatically and are based on the data records of the individual contributions available in the index of the TIB portal. The display of the Tables of Contents may therefore be incomplete.
- 2
-
Application of micro- and nanotechnologies for the fabrication of optical devicesEhrfeld, Wolfgang / Bauer, Hans-Dieter et al. | 1998
- 2
-
Application of micro- and nanotechnologies for the fabrication of optical devices [3276-100]Ehrfeld, W. / Bauer, H.-D. / SPIE et al. | 1998
- 16
-
Polymer waveguides for telecom, datacom, and sensor applications (Invited Paper) [3276-01]Paatzsch, T. / Smaglinski, I. / Bauer, H.-D. / Ehrfeld, W. / SPIE et al. | 1998
- 16
-
Polymer waveguides for telecom, datacom, and sensor applicationsPaatzsch, Thomas / Smaglinski, Ingo / Bauer, Hans-Dieter / Ehrfeld, Wolfgang et al. | 1998
- 28
-
Optical measurement of LIGA milliengine performanceDickey, Fred M. / Holswade, Scott C. / Christenson, Todd R. / Garcia, Ernest J. / Polosky, Marc A. et al. | 1998
- 28
-
Optical measurement of LIGA milliengine performance [3276-02]Dickey, F. M. / Holswade, S. C. / Christenson, T. R. / Garcia, E. J. / SPIE et al. | 1998
- 37
-
Miniaturized fiber optical switches with nonmoving polymeric mirrors for tele- and data-communication networks fabricated using the LIGA technology [3276-03]Neumeier, M. / Ehrfeld, W. / Jaeger, J. / Picard, A. / SPIE et al. | 1998
- 37
-
Miniaturized fiber optical switches with nonmoving polymeric mirrors for tele- and data-communication networks fabricated using the LIGA technologyNeumeier, Michel / Ehrfeld, Wolfgang / Jaeger, Jutta / Picard, Antoni / Schulze, Jens et al. | 1998
- 48
-
Design and fabrication of optical MEMS using a four-level planarized surface-micromachined polycrystalline silicon process [3276-04]Michalicek, M. A. / Comtois, J. H. / Schriner, H. K. / SPIE et al. | 1998
- 48
-
Design and fabrication of optical MEMS using a four-level planarized surface-micromachined polycrystalline silicon processMichalicek, M. Adrian / Comtois, John H. / Schriner, Heather K. et al. | 1998
- 56
-
Hybridization, assembling, and testing of miniaturized optoelectronic modules for sensors and microsystems [3276-05]Kopola, H. K. / Karioja, P. / Rusanen, O. / Lehto, A. / SPIE et al. | 1998
- 56
-
Hybridization, assembling, and testing of miniaturized optoelectronic modules for sensors and microsystemsKopola, Harri K. / Karioja, Pentti / Rusanen, Outi / Lehto, Heikki / Lammasniemi, Jorma et al. | 1998
- 66
-
MOEM scan engine for bar code reading and factory automation (Invited Paper) [3276-06]Motamedi, M. E. / Park, S. / Melendes, R. / Wang, A. / SPIE et al. | 1998
- 66
-
MOEM scan engine for bar code reading and factory automationMotamedi, M. Edward / Park, Sangtae / Melendes, Robert / Wang, A. / Andrews, Angus P. / Garcia-Nunez, Dawn S. / Jinar, Dan / Richardson, Patti D. / Studer, J. / Chen, J. K. et al. | 1998
- 81
-
MEMS-based diffractive optical-beam-steering technologyWinick, David A. / Duewer, Bruce E. / Chaudhury, Som / Wilson, John M. / Tucker, John / Eksi, Umut / Franzon, Paul D. et al. | 1998
- 81
-
MEMS-based diffractive optical-beam-steering technology [3276-07]Winick, D. A. / Duewer, B. / Chaudhury, S. / Wilson, J. / SPIE et al. | 1998
- 88
-
System integration of micro-optical systems for beam steering and modulation applicationsGloeckner, Steffen / Dannberg, Peter / Goering, Rolf / Bohrisch, Frank / Buecker, Peter et al. | 1998
- 88
-
System integration of micro-optical systems for beam steering and modulation applications [3276-08]Gloeckner, S. / Dannberg, P. / Goering, R. / Bohrisch, F. / SPIE et al. | 1998
- 96
-
Resonating large-angle and low-consumption micromachined optical scanner [3276-09]Calmes, S. / Schweizer, S. / Renaud, P. / SPIE et al. | 1998
- 96
-
Resonating large-angle and low-consumption micromachined optical scannerCalmes, Sam / Schweizer, Sandra / Renaud, Philippe et al. | 1998
- 103
-
Automatic test equipment for the micromirror arrayKim, Hoseong / Cho, Kwangwoo / Kim, Yong-Kweon / Shin, Jong-Woo / Shin, Hyungjae / Moon, Jae-Ho et al. | 1998
- 103
-
Automatic test equipment for the micromirror array [3276-10]Kim, H. / Cho, K. / Kim, Y.-K. / Shin, J.-W. / SPIE et al. | 1998
- 112
-
Polymer waveguide cointegration with microelectromechanical systems (MEMS) for integrated optical metrologyBrown, Kolin S. / Taylor, B. J. / Dawson, Jeremy M. / Hornak, Lawrence A. et al. | 1998
- 112
-
Polymer waveguide cointegration with microelectromechanical systems (MEMS) for integrated optical metrology [3276-11]Brown, K. S. / Taylor, B. J. / Dawson, J. M. / Hornak, L. A. / SPIE et al. | 1998
- 123
-
Fill factor improvement using microlens arraysWatson, Edward A. / Miller, Donald T. / Barnard, Kenneth J. et al. | 1998
- 123
-
Fill factor improvement using microlens arrays [3276-12]Watson, E. A. / Miller, D. T. / Barnard, K. J. / SPIE et al. | 1998
- 135
-
Fiber optic MEMS pressure sensors based on evanescent field interactionTabib-Azar, Massood / Sutapun, Boonsong / Glawe, Diana et al. | 1998
- 135
-
Fiber optic MEMS pressure sensors based on evanescent field interaction [3276-31]Tabib-Azar, M. / Sutapun, B. / Glawe, D. / SPIE et al. | 1998
- 147
-
Optimum design of GaAs waveguides intersecting modulator [3276-13]Xu, Z. / Rizzi, M. / Castagnolo, B. / SPIE et al. | 1998
- 147
-
Optimum design of GaAs waveguides intersecting modulatorXu, Zhene / Rizzi, Maria / Castagnolo, Beniamino et al. | 1998
- 156
-
Near-field scanning optical microscopy: electromagnetic coupling between the aperture tip and the sample [3276-15]Gu, B.-Y. / Li, Z.-Y. / Yang, G.-Z. / SPIE et al. | 1998
- 156
-
Near-field scanning optical microscopy: electromagnetic coupling between the aperture tip and the sampleGu, Ben-Yuan / Li, Zhi-Yuan / Yang, Guozhen et al. | 1998
- 166
-
Complex microprism structures and their application to multichannel fiber optic switches [3276-16]Goering, R. / Gloeckner, S. / Kley, E.-B. / Thoma, F. / SPIE et al. | 1998
- 166
-
Complex microprism structures and their application to multichannel fiber optic switchesGoering, Rolf / Gloeckner, Steffen / Kley, Ernst-Bernhard / Thoma, Frank et al. | 1998
- 176
-
MOEMS: a new European competence center-core competencies, additional technologies, and industrial objectives (Invited Paper) [3276-17]Clerc, J. F. / Mottier, P. L. / SPIE et al. | 1998
- 176
-
MOEMS: a new European competence center--core competencies, additional technologies, and industrial objectivesClerc, Jean F. / Mottier, Patrick L. et al. | 1998
- 185
-
Mechanical-optical analysis of InP-based Bragg membranes for selective tunable WDM receiversRiemenschneider, Rolf / Peerlings, Joachim / Pfeiffer, Joachim / Dehe, A. / Vogt, Andreas / Meissner, Peter M. / Hartnagel, Hans L. / Chitica, N. / Daleiden-, Juergen / Streubel, Klaus P. et al. | 1998
- 185
-
Mechanical-optical analysis of InP-based Bragg membranes for selective tunable WDM receivers [3276-18]Riemenschneider, R. / Peerlings, J. / Pfeiffer, J. / Dehe, A. / SPIE et al. | 1998
- 196
-
MEMS-based microgratings: preliminary results of novel configurationsCastracane, James / Gutin, Mikhail A. et al. | 1998
- 196
-
MEMS-based microgratings: preliminary results of novel configurations [3276-19]Castracane, J. / Gutin, M. / SPIE et al. | 1998
- 207
-
In-package active fiber optic micro-aligner [3276-20]Haake, J. M. / Wood, R. L. / Dhuler, V. R. / SPIE et al. | 1998
- 207
-
In-package active fiber optic micro-alignerHaake, John M. / Wood, Robert L. / Dhuler, Vijayakumar R. et al. | 1998
- 220
-
Evanescent field sensing: cavity-coupled refractive index sensor (CRIS)Lindvold, Lars R. / Lading, Lars et al. | 1998
- 220
-
Evanescent field sensing: cavity-coupled refractive index sensor (CRIS) [3276-21]Lindvoid, L. R. / Lading, L. / SPIE et al. | 1998
- 230
-
Piezoelectrical elements for micro-optical applicationsGoetz, Bernt / Martin, Thomas / Buecker, Peter et al. | 1998
- 230
-
Piezoelectrical elements for micro-optical applications (Invited Paper) [3276-22]Goetz, B. / Martin, T. / Buecker, P. / SPIE et al. | 1998
- 244
-
Ultrahigh-density optical recording using a scanning near-field optical microscopeLu, Yuan Ying / Tsai, Din Ping / Guo, Wen R. / Chen, Sheng-Chang / Liu, Jia Reuy / Shieh, Han-Ping D. et al. | 1998
- 244
-
Ultrahigh-density optical recording using a scanning near-field optical microscope [3276-26]Lu, Y. Y. / Tsai, D. P. / Guo, W. R. / Chen, S.-C. / SPIE et al. | 1998
- 249
-
Microlens arrays formed by melting photoresist and ion beam millingYi, Xinjian / Zhang, Xinyu / Li, Yi / Zhao, Xing-Rong et al. | 1998
- 249
-
Microlens arrays formed by melting photoresist and ion beam milling [3276-27]Yi, X.-J. / Zhang, X.-Y. / Li, Y. / Zhao, X.-R. / SPIE et al. | 1998
- 254
-
Fabrication of micro-optical surface profiles by using grayscale masks [3276-29]Kley, E.-B. / Thoma, F. / Zeitner, U. D. / Wittig, L. / SPIE et al. | 1998
- 254
-
Fabrication of micro-optical surface profiles by using grayscale masksKley, Ernst-Bernhard / Thoma, Frank / Zeitner, Uwe D. / Wittig, Lars-Christian / Aagedal, Harald et al. | 1998
- 263
-
Nonsilicon micromachining for MOEMS elementsChen, Yi-Xin / Zhao, Xiaolin / Wang, Zongguang et al. | 1998
- 263
-
Nonsilicon micromachining for MOEMS elements [3276-28]Chen, Y.-X. / Zhao, X.-L. / Wang, Z.-G. / SPIE et al. | 1998
- 271
-
Novel highly scalable and very high torque micromotor for MEMS and MOEMS applications using the mechanical rectification of oscillatory motion [3276-30]Tabib-Azar, M. / Sutapun, B. / Motamedi, M. E. / SPIE et al. | 1998
- 271
-
Novel highly scalable and very high torque micromotor for MEMS and MOEMS applications using the mechanical rectification of oscillatory motionTabib-Azar, Massood / Sutapun, Boonsong / Motamedi, M. Edward et al. | 1998