Thermal Cycling Fatigue in Aluminum-Alloy Thin Films on Silicon Substrate (English)
- New search for: Koike, J.
- New search for: Utsunomiya, S.
- New search for: Maruyama, K.
- New search for: Materials Research Society
- New search for: Koike, J.
- New search for: Utsunomiya, S.
- New search for: Maruyama, K.
- New search for: Cammarata, R. C.
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In:
Thin films: stresses and mechanical properties
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319-324
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1998
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ISBN:
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ISSN:
- Conference paper / Print
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Title:Thermal Cycling Fatigue in Aluminum-Alloy Thin Films on Silicon Substrate
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Contributors:Koike, J. ( author ) / Utsunomiya, S. ( author ) / Maruyama, K. ( author ) / Cammarata, R. C. / Materials Research Society
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Conference:Symposium NN, Thin films: stresses and mechanical properties ; 1997 ; Boston; MA
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Published in:MATERIALS RESEARCH SOCIETY OF SYMPOSIUM PROCEEDINGS ; 505 ; 319-324
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Publisher:
- New search for: Materials Research Society
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Publication date:1998-01-01
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Size:6 pages
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Remarks:Held as part of the 1997 MRS Fall meeting
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ISBN:
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ISSN:
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Type of media:Conference paper
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Type of material:Print
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Language:English
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Keywords:
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Source:
© Metadata Copyright the British Library Board and other contributors. All rights reserved.
Table of contents conference proceedings
The tables of contents are generated automatically and are based on the data records of the individual contributions available in the index of the TIB portal. The display of the Tables of Contents may therefore be incomplete.
- 3
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Polycapillary X-ray Optics for Thin-Film Strain and Texture AnalysisHofmann, F. A. / Gibson, W. M. / Lee, S. M. / MacDonald, C. A. / Materials Research Society et al. | 1998
- 15
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Full Field Measurements of Curvature Using Coherent Gradient Sensing: Application to Thin-Film CharacterizationRosakis, A. J. / Singh, R. P. / Tsuji, Y. / Kolawa, E. / Materials Research Society et al. | 1998
- 21
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FEM Simulation of Microrotating Structures and Their Applications in Measurement of Residual Stresses in Thin FilmsZhang, X. / Zhang, T.-Y. / Zohar, Y. / Materials Research Society et al. | 1998
- 27
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A Novel Method to Measure Poisson's Ratio of Thin FilmsZiebart, V. / Paul, O. / Muench, U. / Baltes, H. / Materials Research Society et al. | 1998
- 33
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A Method for Independent Measurement of Elastic Modulus and Poisson's Ratio of Diamondlike Carbon FilmsCho, S.-J. / Lee, K.-R. / Kwang Yong Eun / Jun Hee Han / Materials Research Society et al. | 1998
- 39
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Fatigue Strength of Thin Films by Means of Impact TesterLugscheider, E. / Knotek, O. / Wolff, C. / Baerwulf, S. / Materials Research Society et al. | 1998
- 51
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Fracture Tests of Polysilicon FilmSharpe, W. N. / Yuan, B. / Edwards, R. L. / Materials Research Society et al. | 1998
- 57
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High-Temperature Tensile Behavior of Freestanding Gold FilmsEmery, R. / Simons, C. / Mazin, B. / Povirk, G. L. / Materials Research Society et al. | 1998
- 65
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Critical Issues in Measuring the Mechanical Properties of Hard Films on Soft Substrates by Nanoindentation TechniquesHay, J. C. / Pharr, G. M. / Materials Research Society et al. | 1998
- 71
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A New Technique for Visualizing the Displacement Field of Indentations: The Case of a Soft Film on a Hard SubstrateVlassak, J. J. / Tsui, T. Y. / Nix, W. D. / Materials Research Society et al. | 1998
- 77
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Nanoindentation of Atomically Modified SurfacesCorcoran, S. G. / Brankovic, S. R. / Dimitrov, N. / Sieradzki, K. / Materials Research Society et al. | 1998
- 85
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The Effects of Residual Stress on Modulus Measurements by IndentationBahr, D. F. / Crowson, D. A. / Robach, J. S. / Gerberich, W. W. / Materials Research Society et al. | 1998
- 91
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Practical Limitations to Indentation Testing of Thin FilmsSchneider, J. A. / McCarty, K. F. / Heffelfinger, J. R. / Moody, N. R. / Materials Research Society et al. | 1998
- 97
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Mechanical Characterization of Submicron Polytetrafluoroethylene (PTFE) Thin FilmsLucas, B. N. / Rosenmayer, C. T. / Oliver, W. C. / Materials Research Society et al. | 1998
- 103
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Nanoscale Viscoelastic Properties of Polymer MaterialsSyed Asif, S. A. / Pethica, J. B. / Materials Research Society et al. | 1998
- 109
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Nanoindentation of Soft Films on Hard Substrates: Experiments and Finite-Element SimulationsPharr, G. M. / Bolshakov, A. / Tsui, T. Y. / Hay, J. C. / Materials Research Society et al. | 1998
- 123
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Million-Line Failure Distributions for Narrow InterconnectsBartelt, M. C. / Hoyt, J. J. / Bartelt, N. C. / Dike, J. J. / Materials Research Society et al. | 1998
- 131
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Simulations of Electromigration at a Tungsten/Aluminum JunctionEnver, A. / Povirk, G. L. / Materials Research Society et al. | 1998
- 137
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Microstructure and Mechanical Properties of Electroplated Cu Films for Damascene ULSI MetallizationDubin, V. M. / Morales, G. / Ryu, C. / Wong, S. S. / Materials Research Society et al. | 1998
- 143
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Under Bump Metallization Development for High Sn SoldersKorhonen, T. M. / Hong, S. J. / Su, P. / Zhou, C. / Materials Research Society et al. | 1998
- 149
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Observation of Dislocation Disappearance in Aluminum Thin Films and Consequences for Thin-Film PropertiesMuellner, P. / Arzt, E. / Materials Research Society et al. | 1998
- 157
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Interfacial Free Energies and the Creep of Multilayer Thin FilmsJosell, D. / Carter, W. C. / Materials Research Society et al. | 1998
- 167
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Macro- and Microstrain Relaxation in Annealed Ag Films During Aging at Room TemperatureCurrie, R. C. / Delhez, R. / Mittemeijer, E. J. / Materials Research Society et al. | 1998
- 173
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Aging Effects on the Durability of Tantalum Nitride FilmsMoody, N. R. / Medlin, D. / Boehme, D. / Norwood, D. / Materials Research Society et al. | 1998
- 179
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Coherency and Loss of Coherency in MultilayersHazzledine, P. M. / Grinfeld, M. A. / Rao, S. I. / Materials Research Society et al. | 1998
- 185
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Strain Relaxation in IV-VI Semiconductor Layers Grown on Silicon (100) SubstratesSachar, H. K. / McCann, P. J. / Fang, X. M. / Materials Research Society et al. | 1998
- 191
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Interfacial Stability and Misfit Dislocation Formation in InAs/GaAs(110) HeteroepitaxyZepeda-Ruiz, L. A. / Maroudas, D. / Weinberg, W. H. / Materials Research Society et al. | 1998
- 199
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Dynamic Hardness of Thin Films and Its Thickness DependenceIwasa, M. / Tanaka, K. / Barnard, J. A. / Bradt, R. C. / Materials Research Society et al. | 1998
- 205
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Indentation Creep Analysis of Amorphous Nitrogen-Containing Carbon FilmsTanaka, D. / Ohshio, S. / Saitoh, H. / Materials Research Society et al. | 1998
- 211
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The Hardness and Wear of Electrochemically Grown Tantalum OxideMulivor, A. W. / Mann, A. B. / Searson, P. C. / Weihs, T. P. / Materials Research Society et al. | 1998
- 217
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Nanoindentation and Nanowear Studies of Thin Carbon CoatingsKulkarni, A. V. / Wyrobek, J. T. / Qian, Z. / Siversten, J. M. / Materials Research Society et al. | 1998
- 223
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Curves of Elastoplastic Deformation of Thin Coatings Obtained in Depth-Sensing Indentation ExperimentsDub, S. N. / Materials Research Society et al. | 1998
- 229
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Advanced Bulge Test SystemKeiner, H. / Von Preissig, F. J. / Zeng, H. / Nejhad, M. N. G. / Materials Research Society et al. | 1998
- 235
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Stress-Strain Curves by Tensile Testing of Thin Metallic Films on Thin Polyimide Foils: Al, AlCu, CuNi(Mn)Macionczyk, F. / Brueckner, W. / Reiss, G. / Materials Research Society et al. | 1998
- 241
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The Use of X-ray Topography to Map Mechanical, Thermomechanical, and Wire-Bond Strain Fields in Packaged Integrated CircuitsMcNally, P. J. / Rantamaeki, R. / Curley, J. W. / Tuomi, T. / Materials Research Society et al. | 1998
- 249
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Theoretical Analysis of Electromigration-Induced Failure of Metallic Thin FilmsMaroudas, D. / Gungor, M. R. / Ho, H. S. / Enmark, M. N. / Materials Research Society et al. | 1998
- 255
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Nucleation of Voids in Thin-Film Interconnects Through Crystallographic SlipShen, Y.-L. / Materials Research Society et al. | 1998
- 261
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Mechanical and Tribological Properties of ZrC/VC Alloy Films Deposited by Sputtering and Pulsed Laser DepositionBrock, W. F. / Krzanowski, J. E. / Leuchtner, R. E. / Legore, L. J. / Materials Research Society et al. | 1998
- 267
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Diamond Coatings on Surface-Modified Carbide Tools Using KrF Pulsed LaserLee, D.-G. / Singh, R. K. / Materials Research Society et al. | 1998
- 273
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Optimization of Blend Toughness by Simultaneous Measurement of Heat and Work of DeformationAgarwal, N. / Farris, R. J. / Materials Research Society et al. | 1998
- 279
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Creation and Motion of Edge Dislocations in Copper Single CrystalsDoyama, M. / Kogure, Y. / Nozaki, T. / Materials Research Society et al. | 1998
- 285
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Tensile Strength and Fracture Toughness of Surface-Micromachined Polycrystalline Silicon Thin Films Prepared Under Various ConditionsTsuchiya, T. / Sakata, J. / Taga, Y. / Materials Research Society et al. | 1998
- 291
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In Situ TEM Observations of Surface Roughening and Defect Formation in Lattice-Mismatched, Heteroepitaxial Thin FilmsOzkan, C. S. / Nix, W. D. / Gao, H. / Materials Research Society et al. | 1998
- 299
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Internal Mechanical Stresses and Conductivity Mechanisms of p-n-InAsPSb/InAs HeterostructuresSidorov, V. G. / Sokolov, V. I. / Sidorov, D. V. / Materials Research Society et al. | 1998
- 307
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The Relationship Between Near-Surface Mechanical Properties, Loading Rate, and Surface ChemistryMann, A. B. / Searson, P. C. / Pethica, J. B. / Weihs, T. P. / Materials Research Society et al. | 1998
- 319
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Thermal Cycling Fatigue in Aluminum-Alloy Thin Films on Silicon SubstrateKoike, J. / Utsunomiya, S. / Maruyama, K. / Materials Research Society et al. | 1998
- 325
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Mechanical Characterization of Ultrathin, Hard-Disk Overcoats Using Scratch Testing and Depth-Sensing IndentationHay, J. L. / White, R. L. / Lucas, B. N. / Oliver, W. C. / Materials Research Society et al. | 1998
- 331
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Microstructure and Wear Resistance of Doped Diamondlike Carbon Prepared by Pulsed Laser DepositionWei, Q. / Narayan, R. J. / Sharma, A. K. / Oktyabrsky, S. / Materials Research Society et al. | 1998
- 337
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Mechanical Properties of Ferroelectric Composite Thin FilmsFountzoulas, C. G. / Sengupta, S. / Materials Research Society et al. | 1998
- 343
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Improved Tribological Behavior of Boron-Implanted Ti-6Al-4VBaker, N. P. / Walter, K. C. / Nastasi, M. / Materials Research Society et al. | 1998
- 351
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Mechanical and Tribological Properties of a-GeC~x Films Deposited by dc Magnetron SputteringJacobsohn, L. G. / Reigada, D. C. / Freire, F. L. / Prioli, R. / Materials Research Society et al. | 1998
- 357
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Effects of Interface Nonplanarity on the Interface Fracture Energy of the TiN/SiO~2 SystemLane, M. / Ni, W. / Dauskardt, R. / Ma, Q. / Materials Research Society et al. | 1998
- 363
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Quantitative Measurement of the Effect of Annealing on the Adhesion of Thin Copper Films Using SuperlayersKriese, M. D. / Moody, N. R. / Gerberich, W. W. / Materials Research Society et al. | 1998
- 369
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Picosecond Ultrasonics Studies of the Effect of Ion Implantation on Interfacial Bonding Between a Thin Film and a SubstrateTas, G. / Loomis, J. J. / Maris, H. J. / Bailes, A. A. / Materials Research Society et al. | 1998
- 377
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The Mechanical Response of Thin-Film Substrates Subject to Ultrasonic JoiningKrzanowski, J. E. / Razon, E. / Hmiel, A. F. / Materials Research Society et al. | 1998
- 383
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TEM Study of Yielding in Polycrystalline Gold Thin FilmsOwusu-Boahen, K. / King, A. H. / Materials Research Society et al. | 1998
- 391
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A Comparative Study of Residual Stresses in Single and Multilayer Composite Diamond CoatingsJagannadham, K. / Watkins, T. R. / Materials Research Society et al. | 1998
- 397
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Development of Mechanical Stress in CuNi(Mn) Films During Temperature Ramping: Related MechanismsBrueckner, W. / Baunack, S. / Pitschke, W. / Thomas, J. / Materials Research Society et al. | 1998
- 403
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Stress Characterization of Sputtered PZT FilmsMescher, M. J. / Reed, M. L. / Schlesinger, T. E. / Materials Research Society et al. | 1998
- 409
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Surface and Interface Strains Studied by X-ray DiffractionAkimoto, K. / Emoto, T. / Ichimiya, A. / Materials Research Society et al. | 1998
- 415
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Grain Impingement and Intrinsic Stresses in CVD DiamondNijhawan, S. / Rankin, J. / Walden, B. L. / Sheldon, B. W. / Materials Research Society et al. | 1998
- 421
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Correlation Between the Mechanical Stress and Microstructure in Reactive Bias Magnetron-Sputtered Silicon Nitride FilmsJoo Han Kim / Won Sang Lee / Ki Woong Chung / Materials Research Society et al. | 1998
- 427
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Influence of Target Structure on Film Stress in WTI SputteringLo, C.-F. / Wang, H. / Gilman, P. / Materials Research Society et al. | 1998
- 433
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Stress Evolution and Notch Formation During Polysilicon Gate Electrode EtchingVyvoda, M. A. / Graves, D. B. / Materials Research Society et al. | 1998
- 439
-
Interfacial Strain Reliefs in Epitaxial YBa~2Cu~3O~7~-~ Thin Films Grown on SrTiO~3 Buffered MgO SubstratesCui, X. / Chen, Q. Y. / Guo, Y. / Chu, W. K. / Materials Research Society et al. | 1998
- 445
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Correlation of Stress With Photodegradation in Hydrogenated Amorphous Silicon Prepared by Hot-Wire CVDHan, D. / Gotoh, T. / Nishio, M. / Sakamoto, T. / Materials Research Society et al. | 1998
- 451
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Two-Dimensional Distribution of the Residual Stress in MBE-Grown InGaAs/GaAs Strained-Layer SuperlatticesIizuka, K. / Watanabe, H. / Komatsu, M. / Suzuki, T. / Materials Research Society et al. | 1998
- 457
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Annealing Effects on the Microstructure of Electrodeposited Cu/Ag Multilayered NanocompositesKong, D. / Zhai, Q. / Ebrahimi, F. / Materials Research Society et al. | 1998
- 463
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Structure and Mechanical Properties of Reactive Sputter-Deposited TiN/TaN Multilayered FilmsSoe, W.-H. / Kitagaki, T. / Ueda, H. / Shima, N. / Materials Research Society et al. | 1998
- 469
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Comparison of AlN Films Synthesized by Pulsed Laser Ablation and Magnetron Sputtering TechniquesJagannadham, K. / Sharma, A. K. / Wei, Q. / Kalyanraman, R. / Materials Research Society et al. | 1998
- 475
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Surface Stress Effects on the Critical Thickness of Thin-Film SuperlatticesCammarata, R. C. / Sieradzki, K. / Materials Research Society et al. | 1998
- 481
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Micromechanical Properties of Silicate Glass Films on Sapphire SubstratesZagrebelny, A. V. / Carter, C. B. / Materials Research Society et al. | 1998
- 487
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Curling and Annealing Study of Sputtered Thin Spinel Films Delaminated From Lift-Off PolyimideDannenberg, R. / King, A. H. / Gambino, R. J. / Doctor, A. J. / Materials Research Society et al. | 1998
- 495
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Micro-Raman Study of Mechanical Stress in Polycrystalline Silicon BridgesTalaat, H. / Negm, S. / Schaffer, H. / Kaltsas, G. / Materials Research Society et al. | 1998
- 501
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Evaluation of Residual Stresses in Thin Films by Means of Micro-Raman SpectroscopyMizuhara, K. / Takahashi, S. / Kurokawa, J. / Morita, N. / Materials Research Society et al. | 1998
- 507
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Measurement of Nonuniform Stresses in Semiconductors by the Micro-Raman MethodPinardi, K. / Jain, S. C. / Maes, H. E. / Van Overstraeten, R. / Materials Research Society et al. | 1998
- 513
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Measurement of Residual Stress in Thin Films Using the Optical MicroprobeAtkinson, A. / Clarke, D. R. / Jain, S. C. / Pinardi, K. / Materials Research Society et al. | 1998
- 519
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On the Measurement of Residual Stress in Thin FilmsZhao, Z. B. / Hershberger, J. / Yalisove, S. M. / Bilello, J. C. / Materials Research Society et al. | 1998
- 527
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Determination of Temperature-Dependent Unstressed Lattice Spacings in Crystalline Thin Films on SubstratesCornella, G. / Lee, S. / Kraft, O. / Nix, W. D. / Materials Research Society et al. | 1998
- 533
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Curvature of Rectangular Coated Foils With Different Wide-to-Length RatiosTran, M. D. / Vellinga, W. P. / Dautzenberg, J. H. / Materials Research Society et al. | 1998
- 539
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3D Discrete Dislocation Models of Thin-Film PlasticityHartmaier, A. / Fivel, M. C. / Canova, G. R. / Gumbsch, F. / Materials Research Society et al. | 1998
- 547
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Residual Stress Generation During Constrained Sintering of Layered Ceramic Thin-Film StructuresBusso, E. P. / Travis, R. P. / Chandra, L. / Materials Research Society et al. | 1998
- 553
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Computer Simulation of Stress Distribution in Amorphous SiO~2 Thin FilmsKogure, Y. / Doyama, M. / Materials Research Society et al. | 1998
- 559
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Interface Stress and an Apparent Negative Poisson's Ratio in Ag/Ni MultilayersSchweitz, K. O. / Geisler, H. / Chevallier, J. / Boettiger, J. / Materials Research Society et al. | 1998
- 571
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Dislocation-Based Models of Stress-Strain Behavior in Multilayered Thin FilmsAnderson, P. M. / Kreidler, E. R. / Materials Research Society et al. | 1998
- 577
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Nanoindentation Hardness of Compositionally Modulated Ti/TiN Multilayered FilmsKusano, E. / Kitagawa, M. / Nanto, H. / Kinbara, A. / Materials Research Society et al. | 1998
- 583
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Microstructures and Mechanical Properties of Sputtered Cu/Cr MultilayersMisra, A. / Kung, H. / Mitchell, T. E. / Jervis, T. R. / Materials Research Society et al. | 1998
- 589
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Stress Evolution in Sputtered FCC Metal MultilayersRamaswamy, V. / Nix, W. D. / Clemens, B. M. / Materials Research Society et al. | 1998
- 595
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Stress Controlled Magnetomechanical Instability in Terfenol-D Thin FilmsSu, Q. / Wen, Y. / Wuttig, M. / Materials Research Society et al. | 1998
- 605
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Energy Storage and Recovery in Thin Metal Films on SubstratesBaker, S. P. / Keller, R.-M. / Arzt, E. / Materials Research Society et al. | 1998
- 611
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Microstructural Effects on the Hardness, Elastic Modulus, and Fracture Toughness of CVD DiamondKant, A. / Drory, M. D. / Moody, N. R. / MoberlyChan, W. J. / Materials Research Society et al. | 1998
- 617
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Mechanical Testing and Microstructural Characterization of TiN Thin FilmsKarimi, A. / Shojael, O. R. / Martin, J. L. / Materials Research Society et al. | 1998
- 623
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Determination of the Mechanical Properties of Polysilicon Thin Films Using Bulge TestingJayaraman, S. / Edwards, R. L. / Hemker, K. J. / Materials Research Society et al. | 1998
- 629
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Structure and Stress Evaluation of Diamond Films Deposited on Ti-6Al-4V Alloy at Low Temperature Using CH~4/O~2/H~2 and CO/H~2 Gas MixturesCatledge, S. A. / Vohra, Y. K. / Materials Research Society et al. | 1998
- 635
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Structure Determination of B~4C and SiC Thin Films Via Synchrotron High-Resolution DiffractionHershberger, J. / Kustas, F. / Rek, Z. U. / Yalisove, S. M. / Materials Research Society et al. | 1998