Wafer lever packaging for gyroscope by Au/Si eutectic bonding [4928-26] (English)
- New search for: Ruan, Y.
- New search for: Zhang, D. C.
- New search for: Yang, Z. C.
- New search for: Wang, X.
- New search for: Yu, X. M.
- New search for: International Society for Optical Engineering
- New search for: Ruan, Y.
- New search for: Zhang, D. C.
- New search for: Yang, Z. C.
- New search for: Wang, X.
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- New search for: Hane, K.
- New search for: International Society for Optical Engineering
In:
MEMS/MOEMS technologies and applications
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155-159
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2002
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ISBN:
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ISSN:
- Conference paper / Print
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Title:Wafer lever packaging for gyroscope by Au/Si eutectic bonding [4928-26]
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Contributors:Ruan, Y. ( author ) / Zhang, D. C. ( author ) / Yang, Z. C. ( author ) / Wang, X. ( author ) / Yu, X. M. ( author ) / Jin, G. / McKillop, J. S. / Hane, K. / International Society for Optical Engineering
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Conference:Conference, MEMS/MOEMS technologies and applications ; 2002 ; Shanghai, China
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Published in:MEMS/MOEMS technologies and applications ; 155-159PROCEEDINGS- SPIE THE INTERNATIONAL SOCIETY FOR OPTICAL ENGINEERING ; 4928 ; 155-159
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Publisher:
- New search for: SPIE
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Publication date:2002-01-01
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Size:5 pages
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ISBN:
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ISSN:
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Type of media:Conference paper
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Type of material:Print
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Language:English
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Keywords:
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Source:
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Table of contents conference proceedings
The tables of contents are generated automatically and are based on the data records of the individual contributions available in the index of the TIB portal. The display of the Tables of Contents may therefore be incomplete.
- 1
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Novel device of passive and fixed alignment of optical fiber using SU-8 photoresist (Invited Paper) [4928-02]Liu, J.-Q. / Cai, B.-C. / Zhu, J. / Chen, D. / Li, Y.-G. / Zhang, J.-L. / Ding, G.-P. / Zhao, X.-L. / Yang, C.-S. / International Society for Optical Engineering et al. | 2002
- 1
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Novel device of passive and fixed alignment of optical fiber using SU-8 photoresistLiu, Jingquan / Cai, Bingchu / Zhu, Jun / Chen, Di / Li, Yigui / Zhang, Jiliang / Ding, Guipu / Zhao, Xiaolin / Yang, Chunsheng et al. | 2002
- 6
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Optical MEMS for high-end microspectrometers (Invited Paper) [4928-03]Riesenberg, R. / Wuttig, A. / Nitzsche, G. / Harnisch, B. / International Society for Optical Engineering et al. | 2002
- 6
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Optical MEMS for high-end microspectrometersRiesenberg, Rainer / Wuttig, Andreas / Nitzsche, Guenter / Harnisch, Bernd et al. | 2002
- 15
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Intelligent vision systemsClark, Natalie / Singh, Upendra N. et al. | 2002
- 15
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Intelligent vision systems (Invited Paper) [4928-04]Clark, N. / Singh, U. N. / International Society for Optical Engineering et al. | 2002
- 27
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Subwavelength antireflection structure for optical detector fabricated by fast atom beam etching [4928-05]Kanamori, Y. / Ishimori, M. / Hane, K. / International Society for Optical Engineering et al. | 2002
- 27
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Subwavelength antireflection structure for optical detector fabricated by fast atom beam etchingKanamori, Yoshiaki / Ishimori, Masahiro / Hane, Kazuhiro et al. | 2002
- 35
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Micro translation table for near-field data storage using inverted-scratch-drive actuators [4928-06]Kanamori, Y. / Yahagi, H. / Sasaki, M. / Ono, T. / Hane, K. / International Society for Optical Engineering et al. | 2002
- 35
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Micro translation table for near-field data storage using inverted-scratch-drive actuatorsKanamori, Yoshiaki / Yahagi, Hiroto / Sasaki, Minoru / Ono, Takahito / Hane, Kazuhiro et al. | 2002
- 43
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Optical-electromechanical performance of MEMS tilting micromirrors for AON communication system [4928-08]Li, D. C. / Wu, W. G. / Jin, S. J. / Shi, J. J. / Hao, Y. L. / International Society for Optical Engineering et al. | 2002
- 43
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Optical-electromechanical performance of MEMS tilting micromirrors for AON communication systemLi, Dachao / Wu, Wen-Gang / Jin, Shijiu / Shi, Jinjie / Hao, Yilong et al. | 2002
- 50
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Nano-stepper-driven optical shutter for applications in free-space micro-opticsZawadzka, Justyna / Li, Lijie / Unamuno, Anartz / Uttamchandani, Deepak G. et al. | 2002
- 50
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Nano-stepper-driven optical shutter for applications in free-space micro-optics [4928-09]Zawadzka, J. / Li, L. / Unamuno, A. / Uttamchandani, D. / International Society for Optical Engineering et al. | 2002
- 58
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Error-compensation technology to deal with axis misalignment of multi MEMS sensors (Invited Paper) [4928-10]Zhu, R. / Zhou, Z. Y. / International Society for Optical Engineering et al. | 2002
- 58
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Error-compensation technology to deal with axis misalignment of multi MEMS sensorsZhu, Rong / Zhou, Zhaoying et al. | 2002
- 63
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Microgripper for handling and assembly in MEMS produced by SU-8 technology (Invited Paper) [4928-11]Petrovic, D. / Popovic, G. / Petrovic, T. / Schneider, A. / Huq, E. / Detter, H. / Franek, F. / International Society for Optical Engineering et al. | 2002
- 63
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Microgripper for handling and assembly in MEMS produced by SU-8 technologyPetrovic, Dragan / Popovic, Gordana / Petrovic, Tatjana / Schneider, Andreas / Huq, Ejaz / Detter, Helmut / Franek, Friedrich et al. | 2002
- 73
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Fabrication of 1.3-mum Si-based MEMS tunable optical filter [4928-12]Zuo, Y. H. / Huang, C. J. / Cheng, B. W. / Mao, R. W. / Luo, L. P. / Gao, J. H. / Bai, Y. X. / Wang, L. C. / Yu, J. Z. / Wang, Q. M. et al. | 2002
- 73
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Fabrication of 1.3-μm Si-based MEMS tunable optical filterZuo, Yuhua / Huang, Changjun / Cheng, Buwen / Mao, Rongwei / Luo, Liping / Gao, Junhua / Bai, Y. X. / Wang, Liangchen / Yu, Jinzhong / Wang, Qiming et al. | 2002
- 77
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Microfabrication of color filter for liquid crystal display by inkjet-based method [4928-13]Chen, C.-T. / International Society for Optical Engineering et al. | 2002
- 77
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Microfabrication of color filter for liquid crystal display by inkjet-based methodChen, Chin-Tai et al. | 2002
- 85
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Fabrication of integrated microlens array mold and mold insert for mass productionShyu, Ruey F. / Weng, Feng-Tsai / Pan, Chengtang / Yang, Hsiharng et al. | 2002
- 85
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Fabrication of integrated microlens array mold and mold insert for mass production [4928-14]Shyu, R. F. / Weng, F.-T. / Pan, C.-T. / Yang, H. H. / International Society for Optical Engineering et al. | 2002
- 93
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Laser fabrication technology for micromachinesChen, Jiming / Chen, Tao / Wang, Xubao / Zuo, Tiechuan et al. | 2002
- 93
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Laser fabrication technology for micromachines [4928-15]Chen, J. M. / Chen, T. / Wang, X. B. / Zuo, T. C. / International Society for Optical Engineering et al. | 2002
- 98
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Excimer laser micromachining technology in biochipChen, Tao / Chen, Jiming / Zhang, Yu / Ying, Bohua / Jing, Tao / Zuo, Tiechuan et al. | 2002
- 98
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Excimer laser micromachining technology in biochip [4928-16]Chen, T. / Chen, J. M. / Zhang, Y. / Ying, B. H. / Jing, T. / Zuo, T. C. / International Society for Optical Engineering et al. | 2002
- 103
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Fabrication of reflective micromirror in micromechanical optical switchesDong, Wei / Chen, Weiyou / Yang, Han / Zhang, Long / Ji, Ping / Guo, Wenbin / Liu, Caixia / Zhang, Xindong / Sun, Dongming / Jia, Cuiping et al. | 2002
- 103
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Fabrication of reflective micromirror in micromechanical optical switches [4928-17]Dong, W. / Chen, W. Y. / Yang, H. / Zhang, L. / Ji, P. / Guo, W. B. / Liu, C. X. / Zhang, X. D. / Sun, D. M. / Jia, C. P. et al. | 2002
- 108
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Laterally driven variable capacitor for displacement measurement of microactuators [4928-18]Liu, Q. Q. / Huang, Q.-A. / International Society for Optical Engineering et al. | 2002
- 108
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Laterally driven variable capacitor for displacement measurement of microactuatorsLiu, Qingquan / Huang, Qing-An et al. | 2002
- 113
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Optimum design of levitating coil and stability coils in the micromachined gyroscope of electromagnetic levitated rotor [4928-19]Wu, X. S. / Chen, W. Y. / Zhang, W. P. / International Society for Optical Engineering et al. | 2002
- 113
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Optimum design of levitating coil and stability coils in the micromachined gyroscope of electromagnetic levitated rotorWu, Xiaosheng / Chen, Wenyuan / Zhang, Weiping et al. | 2002
- 118
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Design and simulation of integrated CMOS-compatible capacitive absolute pressure-sensing microsystemsZhou, Minxin / Huang, Qing-An / Qin, Ming et al. | 2002
- 118
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Design and simulation of integrated CMOS-compatible capacitive absolute pressure-sensing microsystems [4928-20]Zhou, M.-X. / Huang, Q.-A. / Qin, M. / International Society for Optical Engineering et al. | 2002
- 127
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Development of microvision system for manipulation robot [4928-21]Sun, L. N. / Chen, L. G. / Rong, W. B. / International Society for Optical Engineering et al. | 2002
- 127
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Development of microvision system for manipulation robotSun, Lining / Chen, Li guo / Rong, Weibin et al. | 2002
- 133
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Micro mobile robot system for inspection between pipes [4928-22]Liu, F. M. / Chen, J. P. / Liu, J. H. / Cheng, J. S. / Zhang, C. / International Society for Optical Engineering et al. | 2002
- 133
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Micro mobile robot system for inspection between pipesLiu, Faming / Chen, Jiapin / Liu, Jianghua / Cheng, Junshi / Zhang, Chen et al. | 2002
- 139
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MEMS microrotor technology and aerodynamics for a hovering micro air vehicleLiu, Yang / Chen, Jiapin / Xiao, Yongli et al. | 2002
- 139
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MEMS microrotor technology and aerodynamics for a hovering micro air vehicle [4928-23]Liu, Y. / Chen, J. P. / Xiao, Y. L. / International Society for Optical Engineering et al. | 2002
- 148
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Designing, fabrication, and test of a MEMS colloid thruster [4928-24]Zhou, Z. Y. / Xiong, J. J. / Ye, X. Y. / Wang, X. H. / Feng, Y. Y. / International Society for Optical Engineering et al. | 2002
- 148
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Designing, fabrication, and test of a MEMS colloid thrusterZhou, Zhaoying / Xiong, Jijun / Ye, Xiongying / Wang, Xiaohao / Feng, Yanyin et al. | 2002
- 155
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Wafer lever packaging for gyroscope by Au/Si eutectic bondingRuan, Yong / Zhang, Dacheng / Yang, Zhenchuan / Wang, Xiang / Yu, Xiaomei et al. | 2002
- 155
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Wafer lever packaging for gyroscope by Au/Si eutectic bonding [4928-26]Ruan, Y. / Zhang, D. C. / Yang, Z. C. / Wang, X. / Yu, X. M. / International Society for Optical Engineering et al. | 2002
- 160
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Design optimization and fabrication process of MEMS micro-magnetometer based on tunneling effectZhou, Zhaoying / Yang, Xing / Zhu, Junhua / Ye, Xiongying et al. | 2002
- 160
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Design optimization and fabrication process of MEMS micro-magnetometer based on tunneling effect [4928-27]Zhou, Z. Y. / Yang, X. / Zhu, J. H. / Ye, X. Y. / International Society for Optical Engineering et al. | 2002
- 168
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Reduction of thermal nonreciprocity in fiber-optic Sagnac interferometer via hybrid winding patternDai, Xuhan / Zhao, Xiaolin / Cai, Bingchu et al. | 2002
- 168
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Reduction of thermal nonreciprocity in fiber-optic Sagnac interferometer via hybrid winding pattern [4928-29]Dai, X. H. / Zhao, X. L. / Cai, B. C. / International Society for Optical Engineering et al. | 2002
- 172
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Three-degrees-of-freedom precision stage [4928-31]Wu, Y. F. / Zhou, Z. Y. / International Society for Optical Engineering et al. | 2002
- 172
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Three-degrees-of-freedom precision stageWu, Yingfei / Zhou, Zhaoying et al. | 2002
- 180
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Comparison of theoretical and experimental determination of the flexing of scratch drive actuator plates [4928-32]Li, L. J. / Brown, J. G. / Uttamchandani, D. / International Society for Optical Engineering et al. | 2002
- 180
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Comparison of theoretical and experimental determination of the flexing of scratch drive actuator platesLi, Lijie / Brown, James G. / Uttamchandani, Deepak G. et al. | 2002
- 190
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Microfluidics-related research and applicationsZhou, Zhaoying / Feng, Yanyin et al. | 2002
- 190
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Microfluidics-related research and applications (Invited Paper) [4928-56]Zhou, Z. Y. / Feng, Y. Y. / International Society for Optical Engineering et al. | 2002
- 199
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Important theory of array microjet based on MEMSYuan, Songmei / Zhou, Zhaoying / Wang, Guohui / Liu, Changgeng et al. | 2002
- 199
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Important theory of array microjet based on MEMS [4928-36]Yuan, S. M. / Zhou, Z. Y. / Wang, G. H. / Liu, C. G. / International Society for Optical Engineering et al. | 2002
- 204
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Pd/Ni bilayer electrochemical microactuatorYao, Jinyuan / Ding, Guifu / Cao, Ying / Yang, Chunsheng / Shen, Tianhui et al. | 2002
- 204
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Pd/Ni bilayer electrochemical microactuator [4928-37]Yao, J. Y. / Ding, G. F. / Cao, Y. / Yang, C. S. / Shen, T. H. / International Society for Optical Engineering et al. | 2002
- 209
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Microstructures of PMMA sheet fabricated by RIE [4928-38]Huang, L. W. / Yang, C. S. / Ding, G. F. / International Society for Optical Engineering et al. | 2002
- 209
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Microstructures of PMMA sheet fabricated by RIEHuang, Longwang / Yang, Chunsheng / Ding, Guifu et al. | 2002
- 215
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Optimal design for the alignment of single mode-fibers using thermal microactuatorsYao, Jun / Uttamchandani, Deepak G. et al. | 2002
- 215
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Optimal design for the alignment of single-mode fibers using thermal microactuators [4928-39]Yao, J. / Uttamchandani, D. / International Society for Optical Engineering et al. | 2002
- 222
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Low-voltage micromachining-based scalable optical switch [4928-40]Bao, J. F. / Yuan, Y. / Cao, Z. H. / Wu, X. / International Society for Optical Engineering et al. | 2002
- 222
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Low-voltage micromachining-based scalable optical switchBao, Junfeng / Yuan, Ye / Cao, Zhonghui / Wu, Xiaodong et al. | 2002
- 225
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Micromechanical variable optical attenuator based on EDM micromachiningCao, Zhonghui / Yuan, Ye / Bao, Junfeng / Wu, Xiaodong et al. | 2002
- 225
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Micromechanical variable optical attenuator based on EDM micromachining [4928-41]Cao, Z. H. / Yuan, Y. / Bao, J. F. / Wu, X. / International Society for Optical Engineering et al. | 2002
- 228
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Optimization and simulation of the surface acoustic wave motorCui, Xiquan / Wu, Lan / Zhang, Hai-jun et al. | 2002
- 228
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Optimization and simulation of the surface acoustic wave motor [4928-42]Cui, X. Q. / Wu, L. / Zhang, H. J. / International Society for Optical Engineering et al. | 2002
- 237
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Silicon microchannel array based on MEMS process [4928-43]Duanmu, Q. D. / Li, Y. / Jiang, D. L. / Gao, Y. J. / Fu, L. C. / Tian, J. Q. / International Society for Optical Engineering et al. | 2002
- 237
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Silicon microchannel array based on MEMS processDuanmu, Qingduo / Li, Ye / Jiang, Delong / Gao, Yanjun / Fu, Lichen / Tian, Jingquan et al. | 2002
- 241
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Error analysis of micro strain gauge with a mechanical amplifierLiu, Zutao / Huang, Qing-An / Jiang, Yanfeng et al. | 2002
- 241
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Error analysis of micro strain gauge with a mechanical amplifier [4928-44]Liu, Z. T. / Huang, Q.-A. / Jiang, Y. F. / International Society for Optical Engineering et al. | 2002
- 248
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Capacitive rf MEMS switch with composite beamMiao, Min / Xiao, Zhiyong / Wu, Guoying / Hao, Yilong / Zhang, Haixia et al. | 2002
- 248
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Capacitive rf MEMS switch with composite beam [4928-45]Miao, M. / Xiao, Z. Y. / Wu, G. Y. / Hao, Y. L. / Zhang, H. X. / International Society for Optical Engineering et al. | 2002
- 256
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Equivalent circuit macromodel for a beam-structure electromechanical system in F-I analogy [4928-46]Rong, H. / Huang, Q.-A. / Li, W. H. / International Society for Optical Engineering et al. | 2002
- 256
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Equivalent circuit macromodel for a beam-structure electromechanical system in F-I analogyRong, Hua / Huang, Qing-An / Li, Weihua et al. | 2002
- 264
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Silicon micromechanical accelerometer using an optical fiberWang, Tongyu / Zhang, Shuren et al. | 2002
- 264
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Silicon micromechanical accelerometer using an optical fiber [4928-47]Wang, T. Y. / Zhang, S. R. / International Society for Optical Engineering et al. | 2002
- 267
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New test structure for measuring thermal conductivity of polysilicon thin films [4928-48]Xu, G. B. / Huang, Q.-A. / Jiang, Y. F. / International Society for Optical Engineering et al. | 2002
- 267
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New test structure for measuring thermal conductivity of polysilicon thin filmsXu, Gaobin / Huang, Qing-An / Jiang, Yanfeng et al. | 2002
- 272
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Design and simulation of a bulk micromachined relay with lateral contact [4928-49]Yang, Z. C. / Li, Z. H. / Hao, Y. L. / Wu, G. Y. / International Society for Optical Engineering et al. | 2002
- 272
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Design and simulation of a bulk micromachined relay with lateral contactYang, Zhenchuan / Li, Zhihong / Hao, Yilong / Wu, Guoying et al. | 2002
- 276
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Simulation and optimization of dynamic passive valve micropump [4928-50]Zhang, W. P. / Chen, W. Y. / Chen, X. M. / Wu, X. S. / Xu, Z. F. / International Society for Optical Engineering et al. | 2002
- 276
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Simulation and optimization of dynamic passive valve micropumpZhang, Weiping / Chen, Wenyuan / Chen, Xiaomei / Wu, Xiaosheng / Xu, Zhengfu et al. | 2002
- 282
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Structural design of novel low-actuation MEMS switches for X-band applicationZheng, Weibin / Huang, Qing-An / Li, Fu-Xiao et al. | 2002
- 282
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Structural design of novel low-actuation MEMS switches for X-band application [4928-51]Zheng, W.-B. / Huang, Q.-A. / Li, F.-X. / International Society for Optical Engineering et al. | 2002
- 288
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Designing a diffractive optical element used as a ring-beam convertor to control the wavefront propagation in a three-dimensional spaceLu, Junfeng / Zhang, JingJuan / Zhang, Yan / Situ, Guo Hai et al. | 2002
- 288
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Designing a diffractive optical element used as a ring-beam convertor to control the wavefront propagation in a three-dimensional space [4928-53]Lu, J. F. / Zhang, J. J. / Zhang, Y. / SiTu, G. H. / International Society for Optical Engineering et al. | 2002
- 297
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Novel structure of passive ring waveguide resonator on silicon substrateGuo, Wei / Ma, Huilian / Jin, Zhonghe / Tang, Yanzhe / Wang, Yuelin et al. | 2002
- 297
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Novel structure of passive ring waveguide resonator on silicon substrate [4928-55]Guo, W. / Ma, H. L. / Jin, Z. H. / Tang, Y. Z. / Wang, Y. L. / International Society for Optical Engineering et al. | 2002