Defect density in non-selective and selective Si/SiGe structures (English)
- New search for: Menon, C.
- New search for: Bentzen, A.
- New search for: Landgren, G.
- New search for: Radamson, H. H.
- New search for: Menon, C.
- New search for: Bentzen, A.
- New search for: Landgren, G.
- New search for: Radamson, H. H.
- New search for: Hibiya, T.
- New search for: Mullin, J. B.
- New search for: Uwaha, M.
In:
Crystal growth; ICCG-13 / ICVGE-11
;
259-263
;
2002
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ISSN:
- Conference paper / Print
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Title:Defect density in non-selective and selective Si/SiGe structures
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Contributors:Menon, C. ( author ) / Bentzen, A. ( author ) / Landgren, G. ( author ) / Radamson, H. H. ( author ) / Hibiya, T. / Mullin, J. B. / Uwaha, M.
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Conference:International conference; 13th, Crystal growth; ICCG-13 / ICVGE-11 ; 2001 ; Kyoto, Japan
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Published in:Crystal growth; ICCG-13 / ICVGE-11 ; 259-263JOURNAL OF CRYSTAL GROWTH ; 237-239 ; 259-263
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Publisher:
- New search for: Elsevier
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Publication date:2002-01-01
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Size:5 pages
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Remarks:Held with the 11th International conference on vapor growth and epitaxy. Conferences also known as ICVGE-11 and ICCG-13
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ISSN:
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Type of media:Conference paper
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Type of material:Print
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Language:English
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Keywords:
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Source:
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