Shutterless deposition of phosphorous doped microcrystalline silicon by Cat-CVD (English)
- New search for: Fonrodona, M.
- New search for: Gordijn, A.
- New search for: van Veen, M. K.
- New search for: van der Werf, C. H. M.
- New search for: Bertomeu, J.
- New search for: Andreu, J.
- New search for: Schropp, R. E. I.
- New search for: Fonrodona, M.
- New search for: Gordijn, A.
- New search for: van Veen, M. K.
- New search for: van der Werf, C. H. M.
- New search for: Bertomeu, J.
- New search for: Andreu, J.
- New search for: Schropp, R. E. I.
- New search for: Mahan, A. H.
In:
International conference on Cat-CVD (hot wire CVD) process
1-2
;
145-148
;
2003
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ISSN:
- Conference paper / Print
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Title:Shutterless deposition of phosphorous doped microcrystalline silicon by Cat-CVD
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Contributors:Fonrodona, M. ( author ) / Gordijn, A. ( author ) / van Veen, M. K. ( author ) / van der Werf, C. H. M. ( author ) / Bertomeu, J. ( author ) / Andreu, J. ( author ) / Schropp, R. E. I. ( author ) / Mahan, A. H.
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Conference:2nd, International conference on Cat-CVD (hot wire CVD) process ; 2002 ; Denver, CO
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Published in:International conference on Cat-CVD (hot wire CVD) process , 1-2 ; 145-148THIN SOLID FILMS ; 430, 1-2 ; 145-148
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Publisher:
- New search for: Elsevier
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Publication date:2003-01-01
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Size:4 pages
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ISSN:
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Type of media:Conference paper
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Type of material:Print
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Language:English
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Keywords:
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Source:
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