WP27 FABRICATION OF 3D MICROSTRUCTURES AND MICROACTUATORS ON (100) SOI WAFER USING THE DAWN PROCESS (English)
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- New search for: Chu, H.-Y.
- New search for: Fang, W.
- New search for: IEEE
In:
Micro electro mechanical systems
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753-756
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2004
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ISBN:
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ISSN:
- Conference paper / Print
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Title:WP27 FABRICATION OF 3D MICROSTRUCTURES AND MICROACTUATORS ON (100) SOI WAFER USING THE DAWN PROCESS
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Contributors:
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Conference:International conference; 17th, Micro electro mechanical systems ; 2004 ; Maastricht, The Netherlands
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Published in:Micro electro mechanical systems ; 753-756
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Publisher:
- New search for: IEEE
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Publication date:2004-01-01
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Size:4 pages
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Remarks:Also known as MEMS 2004. IEEE cat no 04CH37517
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ISBN:
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ISSN:
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Type of media:Conference paper
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Type of material:Print
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Language:English
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Keywords:
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Source:
© Metadata Copyright the British Library Board and other contributors. All rights reserved.
Table of contents conference proceedings
The tables of contents are generated automatically and are based on the data records of the individual contributions available in the index of the TIB portal. The display of the Tables of Contents may therefore be incomplete.
- 1
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MEMS for a watchesNoell, W. / Clerc, P.-A. / Jeanneret, S. / Hoogerwerf, A. / Niedermann, P. / Perret, A. / de Rooij, N.F. et al. | 2004
- 1
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MEMS FOR WATCHESNoell, W. / Clerc, P.-A. / Jeanneret, S. / Hoogerwerf, A. / Niedermann, P. / Perret, A. / de Rooij, N. / IEEE et al. | 2004
- 5
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Sequential self-assembly by controlling interactive forces between microparticlesOnoe, H. / Matsumoto, K. / Shimoyama, I. et al. | 2004
- 9
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TOWARDS OPTIMAL DESIGNS FOR SELF-ALIGNMENT IN SURFACE TENSION DRIVEN MIRCO-ASSEMBLYLiang, S.-H. / Xiong, X. / Bohringer, K. F. / IEEE et al. | 2004
- 9
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Towards optimal designs for self-alignment in surface tension driven micro-assemblySheng-Hsiung Liang, / Xiaorong Xiong, / Bohringer, K.F. et al. | 2004
- 13
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A mold and transfer technique for lead-free fluxless soldering and application to wafer-level low-temperature thin-film packagesStark, B.H. / Najafi, K. et al. | 2004
- 17
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Polymer MEMS-based microgripper for single cell manipulationChronis, N. / Lee, L.P. et al. | 2004
- 21
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Cell addressing and trapping using novel optoelectronic tweezersPei Yu Chiou, / Wilson Wong, / Liao, J.C. / Wu, M.C. et al. | 2004
- 25
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A microfluidic device for electrofusion of biological membranesTresset, G. / Takeuchi, S. et al. | 2004
- 29
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A continuous cell separation chip using hydrodynamic dielectrophoresis processIl Doh, / Kyoung-Sun Seo, / Young-Ho Cho, et al. | 2004
- 33
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Pinched flow fractionation (PFF) for continuous particle separation in a microfluidic deviceNakashima, M. / Yamada, M. / Seki, M. et al. | 2004
- 37
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Tunable microdoublet lens arrayKi-Hun Jeong, / Liu, G.L. / Chronis, N. / Lee, L.P. et al. | 2004
- 41
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A vertically-supported two-axial torsional micromirrorKi Bang Lee, / Liwei Lin, et al. | 2004
- 45
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Diffraction grating scanner using a micromachined resonatorGuangya Zhou, / Logeeswaran, V.J. / Tay, F.E.H. / Fook Siong Chau, et al. | 2004
- 49
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Electro-static trapping and deposition of nanoparticles in a submicron narrow gap for a lateral-electrode LEDYamada, K. / Hoshino, K. / Matsumoto, K. / Shimoyama, I. et al. | 2004
- 53
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Reactive oxide micro molding of diffractive optical elements in glass and transparent ceramicsParashar, V.K. / Sayah, A. / Gijs, M.A.M. et al. | 2004
- 53
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MP1 REACTIVE OXIDE MICRO MOLDING OF DIFFRACTIVE OPTICAL ELEMENTS IN GLASS AND TRANSPARENT CERAMICSParashar, V. K. / Sayah, A. / Gijs, M. A. M. / IEEE et al. | 2004
- 57
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MP2 A SURFACE MICROMACHINED LIGHT MODULATOR BASED ON VANADIUM DIOXIDE ARRAYJiang, L. / Carr, W. N. / IEEE et al. | 2004
- 57
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A surface micromachined light modulator based on vanadium dioxide arrayLijun Jiang, / Carr, W.N. et al. | 2004
- 61
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MP3 LARGE DISPLACEMENT OPTICAL SWITCHING MECHANISM USING SMA MICROACTUATOR AND MAGNETIC LATCHBhuiyan, M. M. I. / Haga, Y. / Esashi, M. / IEEE et al. | 2004
- 61
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Large displacement optical switching mechanism using SMA microactuator and magnetic latchBhuiyan, M.M.I. / Haga, Y. / Esashi, M. et al. | 2004
- 65
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MP4 MEMS-BASED DIRECT METHANOL FUEL CELLS AND THEIR STACKS USING A COMMON ELECTROLYTE SANDWICHED BY REINFORCED MICROCOLUMN ELECTRODESSeo, Y. H. / Cho, Y.-H. / IEEE et al. | 2004
- 65
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MEMS-based direct methanol fuel cells and their stacks using a common electrolyte sandwiched by reinforced microcolumn electrodesYoung Ho Seo, / Young-Ho Cho, et al. | 2004
- 69
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MP5 A FULL-TIME ACCELERATED VERTICAL COMB-DRIVEN MICROMIRROR FOR HIGH SPEED 30-DEGREE SCANNINGTsuboi, O. / Mi, X. / Kouma, N. / Okuda, H. / Soneda, H. / Ueda, S. / Ikai, Y. / IEEE et al. | 2004
- 69
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A full-time accelerated vertical comb-driven micromirror for high speed 30-degree scanningTsuboi, O. / Mi, X. / Kouma, N. / Okuda, H. / Soneda, H. / Ueda, S. / Ikai, Y. et al. | 2004
- 73
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A scanning mirror with extremely high resonance frequency up to 0.51 MHz using both torsion and buckling springsXiaoyu Mi, / Tsuboi, O. / Okuda, H. / Soneda, H. / Koma, N. / Ueda, S. / Sawaki, I. et al. | 2004
- 73
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MP6 A SCANNING MIRROR WITH EXTREMELY HIGH RESONANCE FREQUENCY UPTO 0.51MHz USING BOTH TORSION AND BUCKLING SPRINGSMi, X. / Tsuboi, O. / Okuda, H. / Soneda, H. / Koma, N. / Ueda, S. / Sawaki, I. / IEEE et al. | 2004
- 77
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MP7 ULTRA-THIN MULTILAYER NANOMEMBRANES FOR SHORT WAVELENGTH DEFORMABLE OPTICSTripp, M. K. / Herrmann, C. F. / George, S. M. / Bright, V. M. / IEEE et al. | 2004
- 77
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Ultra-thin multilayer nanomembranes for short wavelength deformable opticsTripp, M.K. / Herrmann, C.F. / George, S.M. / Bright, V.M. et al. | 2004
- 81
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Path-invariant fiber-based interferometric scanners for OCTBowen Cheng, / Jing-Yi Huang, / Ting-Ta Yen, / Yuan-Peng Huang, / Yeh, J.A. et al. | 2004
- 81
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MP8 PATH-INVARIANT FIBER-BASED INTERFEROMETRIC SCANNERS FOR OCTCheng, B. / Huang, J.-Y. / Yen, T.-T. / Huang, Y.-P. / Yeh, J. A. / IEEE et al. | 2004
- 85
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MP9 A MICRO OPTICAL FLYING HEAD FOR A PCMCIA-SIZED OPTICAL DATA STORAGEKim, S.-H. / Yee, Y. / Choi, J. / Kwon, H. / Ha, M.-H. / Oh, C. / Bu, J. U. / IEEE et al. | 2004
- 85
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A micro optical flying head for a PCMCIA-sized optical data storageSeong-Hyok Kim, / Youngjoo Yee, / Junghoon Choi, / Hyouk Kwon, / Man-Hyo Ha, / Changhoon Oh, / Jong Uk Bu, et al. | 2004
- 89
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MP10 FULLY INTEGRATED OPTICAL SYSTEM FOR LAB-ON-A-CHIP APPLICATIONSBalslev, S. / Bilenberg, B. / Geschke, O. / Jorgensen, A. M. / Kristensen, A. / Kutter, J. P. / Mogensen, K. B. / Snakenborg, D. / IEEE et al. | 2004
- 89
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Fully integrated optical system for lab-on-a-chip applicationsBalslev, S. / Bilenberg, B. / Geschke, O. / Jorgensen, A.M. / Kristensen, A. / Kutter, J.P. / Mogensen, K.B. / Snakenborg, D. et al. | 2004
- 93
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A wide range linearly-tunable optical filter using magnetic actuationHyung-Kew Lee, / Kyu-Sang Kim, / Il-Joo Cho, / Euisik Yoon, et al. | 2004
- 93
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MP11 A WIDE RANGE LINEARLY-TUNABLE OPTICAL FILTER USING MAGNETIC ACTUATIONLee, H.-K. / Kim, K.-S. / Cho, I.-J. / Yoon, E. / IEEE et al. | 2004
- 97
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Integration of the DRIE, MUMPs, and bulk micromachining for superior micro-optical systemsMingching Wu, / Chun-Feng Lai, / Weileun Fang, et al. | 2004
- 97
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MP12 INTEGRATION OF THE DRIE, MUMPs, AND BULK MICROMACHINING FOR SUPERIOR MICRO-OPTICAL SYSTEMSWu, M. / Lai, C.-F. / Fang, W. / IEEE et al. | 2004
- 101
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High fill-factor two-axis analog micromirror array for 1/spl times/N/sup 2/ wavelength-selective switchesJui-Che Tsai, / Huang, S. / Wu, M.C. et al. | 2004
- 101
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MP13 HIGH FILL-FACTOR TWO-AXIS ANALOG MICROMIRROR ARRAY FOR 1XN^2 WAVELENGTH-SELECTIVE SWITCHESTsai, J.-C. / Huang, S. / Wu, M. C. / IEEE et al. | 2004
- 105
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MP14 THE STRUCTURAL-COLOR BASED ON THE MECHANISM OF BUTTERFLY WING COLORING FOR WIDE VIEWING ANGLE REFLECTIVE DISPLAYIwase, E. / Matsumoto, K. / Shimoyama, I. / IEEE et al. | 2004
- 105
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The structural-color based on the mechanism of butterfly wing coloring for wide viewing angle reflective displayIwase, E. / Matsumoto, K. / Shimoyama, I. et al. | 2004
- 109
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MP15 ZERO-POWER MAGNETOMETERS WITH REMOTE OPTICAL INTERROGATIONVasquez, D. J. / Judy, J. W. / IEEE et al. | 2004
- 109
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Zero-power magnetometers with remote optical interrogationVasquez, D.J. / Judy, J.W. et al. | 2004
- 113
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MP16 MICROMACHINED ALKALI ATOM VAPOR CELLS FOR CHIP-SCALE ATOMIC CLOCKSLiew, L.-A. / Knappe, S. / Moreland, J. / Robinson, H. / Hollberg, L. / Kitching, J. / IEEE et al. | 2004
- 113
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Micromachined alkali atom vapor cells for chip-scale atomic clocksLiew, L.-A. / Knappe, S. / Moreland, J. / Robinson, H. / Hollberg, L. / Kitching, J. et al. | 2004
- 117
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NiW-micro springs for chip connectionKruger, C. / Mokwa, W. / Schnakenberg, U. et al. | 2004
- 117
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MP17 NiW-MICRO SPRINGS FOR CHIP CONNECTIONKruger, C. / Mokwa, W. / Schnakenberg, U. / IEEE et al. | 2004
- 121
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Monolithic integration of microfluidic channels and optical waveguides using a photodefinable epoxyRuano, J.M. / Aguirregabiria, M. / Tijero, M. / Arroyo, M. / Garcia, J. / Berganzo, J. / Aramburu, I. / Blanco, F.J. / Mayora, K. et al. | 2004
- 121
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MP18 MONOLITHIC INTEGRATION OF MICROFLUIDIC CHANNELS AND OPTICAL WAVEGUIDES USING A PHOTODEFINABLE EPOXYRuano, J. M. / Aguirregabiria, M. / Tijero, M. / Arroyo, M. / Garcia, J. / Berganzo, J. / Aramburu, I. / Blanco, F. J. / Mayora, K. / IEEE et al. | 2004
- 125
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Conductive SU8-silver composite photopolymerJiguet, S. / Bertsch, A. / Hofmann, H. / Renaud, P. et al. | 2004
- 125
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MP19 CONDUCTIVE SU8-SILVER COMPOSITE PHOTOPOLYMERJiguet, S. / Bertsch, A. / Hofmann, H. / Renaud, P. / IEEE et al. | 2004
- 129
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On-chip tensile test for epitaxial polysiliconDe Masi, B. / Villa, A. / Corigliano, A. / Frangi, A. / Comi, C. / Marchi, M. et al. | 2004
- 129
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MP20 ON-CHIP TENSILE TEST FOR EPITAXIAL POLYSILICONDe Masi, B. / Villa, A. / Corigliano, A. / Frangi, A. / Comi, C. / Marchi, M. / IEEE et al. | 2004
- 133
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MP21 THE EFFECTS OF IONIZING RADIATION ON MICROELECTROMECHANICAL SYSTEMS (MEMS) ACTUATORS: ELECTROSTATIC, ELECTROTHERMAL AND BIMORPHCaffey, J. R. / Kladitis, P. E. / IEEE et al. | 2004
- 133
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The effects of ionizing radiation on microelectromechanical systems (MEMS) actuators: electrostatic, electrothermal, and bimorphCaffey, J.R. / Kladitis, P.E. et al. | 2004
- 137
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Force dependence of RF MEMS switch contact heatingJensen, B.D. / Chow, L.W. / Webbink, R.F. / Saitou, K. / Volakis, J.L. / Kurabayashi, K. et al. | 2004
- 137
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MP22 FORCE DEPENDENCE OF RF MEMS SWITCH CONTACT HEATINGJensen, B. D. / Chow, L. W. / Webbink, R. F. / Saitou, K. / Volakis, J. L. / Kurabayashi, K. / IEEE et al. | 2004
- 141
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MP23 INVESTIGATION OF DIELECTRIC DEGRADATION OF MICROWAVE CAPACITIVE MICROSWITCHESMelle, S. / Flourens, F. / Dubuc, D. / Grenier, K. / Pons, P. / Muraro, J.-L. / Segui, Y. / Plana, R. / IEEE et al. | 2004
- 141
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Investigation of dielectric degradation of microwave capacitive microswitchesMelle, S. / Flourens, F. / Dubuc, D. / Grenier, K. / Pons, P. / Muraro, J.L. / Segui, Y. / Plana, R. et al. | 2004
- 145
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MP24 PREDICTIVE MODELING OF THE FATIGUE PHENOMENON FOR POLYCRYSTALLINE STRUCTURAL LAYERSMillet, O. / Bertrand, P. / Legrand, B. / Collard, D. / Buchaillot, L. / IEEE et al. | 2004
- 145
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Predictive modeling of the fatigue phenomenon for polycrystalline structural layersMillet, O. / Bertrand, P. / Legrand, B. / Collard, D. / Buchaillot, L. et al. | 2004
- 149
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MP25 HIGH-CYCLE FATIGUE DAMAGE EVALUATION FOR MICRO-NANOSCALE SINGLE CRYSTAL SILICON UNDER BENDING AND TENSILE STRESSINGNamazu, T. / Isono, Y. / IEEE et al. | 2004
- 149
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High-cycle fatigue damage evaluation for micro-nanoscale single crystal silicon under bending and tensile stressingNamazu, T. / Isono, Y. et al. | 2004
- 153
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MP26 NANOMETER-THIN TITANIA FILMS WITH SAM-LEVEL STICTION AND SUPERIOR WEAR RESISTANCE FOR RELIABLE MEMS PERFORMANCEAshurst, W. R. / Jang, Y. J. / Magagnin, L. / Carraro, C. / Sung, M. M. / Maboudian, R. / IEEE et al. | 2004
- 153
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Nanometer-thin titania films with SAM-level stiction and superior wear resistance for reliable MEMS performanceAshurst, W.R. / Jang, Y.J. / Magagnin, L. / Carraro, C. / Sung, M.M. / Maboudian, R. et al. | 2004
- 157
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MP27 DIRECT MEASUREMENT TECHNIQUE OF STRAIN IN XRD TENSILE TEST FOR EVALUATING POISSON'S RATIO OF MICRON-THICK TIN FILMSNamazu, T. / Inoue, S. / Ano, D. / Koterazawa, K. / IEEE et al. | 2004
- 157
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Direct measurement technique of strain in XRD tensile test for evaluating Poisson's ratio of micron-thick TiN filmsNamazu, T. / Inoue, S. / Ano, D. / Koterazawa, K. et al. | 2004
- 161
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MP28 PARYLENE-PYROLYZED CARBON FOR MEMS APPLICATIONSKonishi, S. / Liger, M. / Harder, T. A. / Tai, Y.-C. / IEEE et al. | 2004
- 161
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Parylene-pyrolyzed carbon for MEMS applicationsLiger, M. / Harder, T.A. / Yu-Chong Tai, / Konishi, S. et al. | 2004
- 165
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MP29 A MICRO DIFFERENTIAL THERMAL ANALYSIS (muDTA) SYSTEMRuther, P. / Herrscher, M. / Paul, O. / IEEE et al. | 2004
- 165
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A micro differential thermal analysis (/spl mu/DTA) systemRuther, P. / Herrscher, M. / Paul, O. et al. | 2004
- 165
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A micro differential thermal analysis ( mu DTA) systemRuther, P. / Herrscher, M. / Paul, O. et al. | 2004
- 169
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Atomic Force Microscopy characterization of electromechanical properties of RF acoustic bulk wave resonatorsPaulo, A.S. / Liu, X. / Bokor, J. et al. | 2004
- 169
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MP30 ATOMIC FORCE MICROSCOPY CHARACTERIZATION OF ELECTROMECHANICAL PROPERTIES OF RF ACOUSTIC BULK WAVE RESONATORSPaulo, A. S. / Liu, X. / Bokor, J. / IEEE et al. | 2004
- 173
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MP31 THE PATTERNING OF GLUTARALDEHYDE-CROSSLINKED GELATINLin, W.-C. / Yang, L.-J. / IEEE et al. | 2004
- 173
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The patterning of glutaraldehyde-crosslinked gelatinWei-Chih Lin, / Lung-Jieh Yang, et al. | 2004
- 177
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Effect of crystal orientation on fracture strength and fracture toughness of single crystal siliconAndo, T. / Xueping Li, / Nakao, S. / Kasai, T. / Shikida, M. / Sato, K. et al. | 2004
- 177
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MP32 EFFECT OF CRYSTAL ORIENTATION ON FRACTURE STRENGTH AND FRACTURE TOUGHNESS OF SINGLE-CRYSTAL SILICONAndo, T. / Li, X. / Nakao, S. / Kasai, T. / Shikida, M. / Sato, K. / IEEE et al. | 2004
- 181
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MP33 AN AFM-BASED DEVICE FOR IN-SITU CHARACTERIZATION OF NANO-WEARDeladi, S. / Berenschot, J. W. / de Boer, M. J. / Krijnen, G. J. M. / Elwenspoek, M. C. / IEEE et al. | 2004
- 181
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An AFM-based device for in-situ characterization of nano-wearDeladi, S. / Berenschot, J.W. / de Boer, M.J. / Krijnen, G.J.M. / Elwenspoek, M.C. et al. | 2004
- 185
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Annealing temperature dependent strength of polysilicon measured using a novel tensile test structureKamiya, S. / Kuypers, J. / Trautmann, A. / Ruther, P. / Paul, O. et al. | 2004
- 185
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MP34 ANNEALING TEMPERATURE DEPENDENT STRENGTH OF POLYSILICON MEASURED USING A NOVEL TENSILE TEST STRUCTUREKamiya, S. / Kuypers, J. / Trautmann, A. / Ruther, P. / Paul, O. / IEEE et al. | 2004
- 189
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MP35 THERMAL OXIDATION-INDUCED STRAIN IN SILICON NANOBEAMSPyzyna, A. M. / Clarke, D. R. / MacDonald, N. C. / IEEE et al. | 2004
- 189
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Thermal oxidation-induced strain in silicon nanobeamsPyzyna, A.M. / Clarke, D.R. / MacDonald, N.C. et al. | 2004
- 193
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MP36 SILICON CARBIDE MEMBRANE RELATIVE HUMIDITY SENSOR WITH ALUMINIUM ELECTRODESConnolly, E. J. / Pham, H. T. M. / Groeneweg, J. / Sarro, P. M. / French, P. / IEEE et al. | 2004
- 193
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Silicon carbide membrane relative humidity sensor with aluminium electrodesConnolly, E.J. / Pham, H.T.M. / Groeneweg, J. / Sarro, P.M. / French, P.J. et al. | 2004
- 197
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Highly symmetric tri-axis piezoelectric bimorph accelerometerQiang Zou, / Wei Tan, / Eun Sok Kim, / Loeb, G.E. et al. | 2004
- 197
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MP37 HIGHLY SYMMETRIC TRI-AXIS PIEZOELECTRIC BIMORPH ACCELEROMETERZou, Q. / Tan, W. / Kim, E. S. / Loeb, G. E. / IEEE et al. | 2004
- 201
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INVITED SPEAKER MEASUREMENT OF TASTE AND SMELL USING BIOMIMETIC SENSORToko, K. / IEEE et al. | 2004
- 201
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Measurement of taste and smell using biomimetic sensorToko, K. et al. | 2004
- 208
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Parylene flexible neural probe with micro fluidic channelTakeuchi, S. / Yoshida, Y. / Ziegler, D. / Mabuchi, K. / Suzuki, T. et al. | 2004
- 212
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Ion liquid chromatography on-a-chip with beads-packed parylene columnQing He, / Changlin Pang, / Yu-Chong Tai, / Lee, T.D. et al. | 2004
- 216
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A wireless microsensor for monitoring flow and pressure in a blood vessel utilizing a dual-inductor antenna stent and two pressure sensorsTakahata, K. / DeHennis, A. / Wise, K.D. / Gianchandani, Y.B. et al. | 2004
- 220
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A bio-solar cell powered by sub-cellular plant photosystemsLam, K.B. / Johnson, E. / Lin, L. et al. | 2004
- 224
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Bubble-free priming of blind channelsSteinert, C.P. / Sandmaier, H. / Daub, M. / de Heij, B. / Zengerle, R. et al. | 2004
- 224
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TPa1 BUBBLE-FREE PRIMING OF BLIND CHANNELSSteinert, C. P. / Sandmaier, H. / Daub, M. / de Heij, B. / Zengerle, R. / IEEE et al. | 2004
- 229
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TPa2 NEW CONCEPT AND FABRICATION OF SURFACE MICRO MACHINED VERTICAL STRUCTUREIshizuya, T. / Suzuki, J. / Ohuchi, Y. / Konishi, H. / Akagawa, K. / Suzuki, Y. / IEEE et al. | 2004
- 229
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New concept and fabrication of surface micro machined vertical structureIshizuya, T. / Suzuki, J. / Ohuchi, Y. / Konishi, H. / Akagawa, K. / Suzuki, Y. et al. | 2004
- 233
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A seat microvalve nozzle for optimal gas flow capacity at large controlled pressurevan der Wijngaart, W. / Thorsen, A. / Stemme, G. et al. | 2004
- 233
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TPa3 A SEAT MICROVALVE NOZZLE FOR OPTIMAL GAS FLOW CAPACITY AT LARGE CONTROLLED PRESSUREvan der Wijngaart, W. / Thorsen, A. / Stemme, G. / IEEE et al. | 2004
- 237
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TPa4 AN ELECTROMAGNETIC MICRO POWER GENERATOR FOR LOW-FREQUENCY ENVIRONMENTAL VIBRATIONSKulah, H. / Najafi, K. / IEEE et al. | 2004
- 237
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An electromagnetic micro power generator for low-frequency environmental vibrationsKulah, H. / Najafi, K. et al. | 2004
- 241
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Analysis and experimental verification of thermal drift in a constant temperature control type three-axis accelerometer for high temperatures with a novel composition of Wheatstone bridgeKyung Il Lee, / Takao, H. / Sawada, K. / Ishida, M. et al. | 2004
- 241
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TPa5 ANALYSIS AND EXPERIMENTAL VERIFICATION OF THERMAL DRIFT IN A CONSTANT TEMPERATURE CONTROL TYPE THREE-AXIS ACCELEROMETER FOR HIGH TEMPERATURES WITH A NOVEL COMPOSITION OF WHEATSTONE BRIDGELee, K. I. / Takao, H. / Sawada, K. / Ishida, M. / IEEE et al. | 2004
- 245
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Modelling of the RF self-actuation of electrostatic RF-MEMS devicesRottenberg, X. / Brebels, S. / Nauwelaers, B. / Mertens, R.P. / De Raedt, W. / Tilmans, H.A.C. et al. | 2004
- 245
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TPa6 MODELLING OF THE RF SELF-ACTUATION OF ELECTROSTATIC RF-MEMS DEVICESRottenberg, X. / Brebels, S. / Nauwelaers, B. / Mertens, R. P. / De Raedt, W. / Tilmans, H. A. C. / IEEE et al. | 2004
- 249
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TPa7 PULL-IN DYNAMICS: ANALYSIS AND MODELING OF THE TRANSITIONAL REGIMERocha, L. A. / Cretu, E. / Wolffenbuttel, R. F. / IEEE et al. | 2004
- 249
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Pull-in dynamics: analysis and modeling of the transitional regimeRocha, L.A. / Cretu, E. / Wolffenbuttel, R.F. et al. | 2004
- 253
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A novel convex corner compensation for wet anisotropic etching on (100) silicon waferHuai-Yuan Chu, / Weileun Fang, et al. | 2004
- 253
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TPa8 A NOVEL CONVEX CORNER COMPENSATION FOR WET ANISOTROPIC ETCHING ON (100) SILICON WAFERChu, H.-Y. / Fang, W. / IEEE et al. | 2004
- 257
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TPa9 A FREQUENCY-TUNABLE MICROACTUATOR WITH A VARIED COMB-WIDTH PROFILELee, K. B. / Lin, L. / Cho, Y.-H. / IEEE et al. | 2004
- 257
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A frequency-tunable microactuator with a varied comb-width profileKi Bang Lee, / Lin, L. / Young-Ho Cho, et al. | 2004
- 261
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TPa10 A UNIPOLAR CORONA DISCHARGE MICROFABRICATED IONIZER STRUCTURE FOR GASES AT ATMOSPHERIC PRESSURE AND COMPOSITIONChua, B. L. / Li, Z. / McCormick, D. T. / Shih, W.-P. / Tien, N. C. / Wexler, A. S. / Niemeier, D. A. / Holmen, B. / IEEE et al. | 2004
- 261
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A unipolar corona discharge microfabricated ionizer structure for gases at atmospheric pressure and compositionChua, B.L. / Li, Z. / McCormick, D.T. / Shih, W.P. / Tien, N.C. / Wexler, A.S. / Niemeier, D.A. / Holmen, B. et al. | 2004
- 265
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Mechanical response of single living cells by bio-MEMS sensorsShengyuan Yang, / Saif, T. et al. | 2004
- 265
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TPa11 MECHANICAL RESPONSE OF SINGLE LIVING CELLS BY BIO-MEMS SENSORSYang, S. / Saif, T. / IEEE et al. | 2004
- 268
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Preparation of microstructured pellistors and their application for fast fuel vapor discriminationEngel, M. / Baumbach, M. / Kammerer, T. / Schutze, A. et al. | 2004
- 268
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TPa12 PREPARATION OF MICROSTRUCTURED PELLISTORS AND THEIR APPLICATION FOR FAST FUEL VAPOR DISCRIMINATIONEngel, M. / Baumbach, M. / Kammerer, T. / Schutze, A. / IEEE et al. | 2004
- 272
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TPa13 PLANAR LIPID MEMBRANE ARRAY FOR MEMBRANE PROTEIN CHIPSuzuki, H. / Kato-Yamada, Y. / Noji, H. / Takeuchi, S. / IEEE et al. | 2004
- 272
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Planar lipid membrane array for membrane protein chipSuzuki, H. / Kato-Yamada, Y. / Noji, H. / Takeuchi, S. et al. | 2004
- 276
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TPa14 PICO LITER DISPENSER WITH 128 INDEPENDENT NOZZLES FOR HIGH THROUGHPUT BIOCHIP FABRICATIONTakagi, F. / Kurosawa, R. / Sawaki, D. / Kamisuki, S. / Takai, M. / Ishihara, K. / Atobe, M. / IEEE et al. | 2004
- 276
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Pico liter dispenser with 128 independent nozzles for high throughput biochip fabricationTakagi, F. / Kurosawa, R. / Sawaki, D. / Kamisuki, S. / Takai, M. / Ishihara, K. / Atobe, M. et al. | 2004
- 280
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TPa15 DROPLET BASED MICRO OSCILLATING FLOW-THROUGH PCR CHIPWang, W. / Li, Z. X. / Yang, Y. J. / Guo, Z. Y. / IEEE et al. | 2004
- 280
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Droplet based micro oscillating flow-through PCR chipWang, W. / Li, Z.X. / Yang, Y.J. / Guo, Z.Y. et al. | 2004
- 284
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Digital microflow controllers using fluidic Digital-to-Analog Converters with binary-weighted flow resistor networkSang-Hee Yoon, / Young-Ho Cho, et al. | 2004
- 284
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TPa16 DIGITAL MICROFLOW CONTROLLERS USING FLUIDIC DIGITAL-TO-ANALOG CONVERTERS WITH BINARY-WEIGHTED FLOW RESISTOR NETWORKYoon, S.-H. / Cho, Y.-H. / IEEE et al. | 2004
- 288
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A polymer-based microfluidic controllerKohl, M. / Liu, Y. / Dittmann, D. et al. | 2004
- 288
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TPa17 A POLYMER-BASED MICROFLUIDIC CONTROLLERKohl, M. / Liu, Y. / Dittmann, D. / IEEE et al. | 2004
- 292
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Viscosity effects on micro bubble actuator in ssDNA solutionsPeigang Deng, / Yi-Kuen Lee, / Ping Cheng, et al. | 2004
- 292
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TPa18 VISCOSITY EFFECTS ON MICRO BUBBLE ACTUATOR IN SSDNA SOLUTIONSDeng, P. / Lee, Y.-K. / Cheng, P. / IEEE et al. | 2004
- 296
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Size-dependent flow separation in microchannels with cavitiesZeta Tak For Yu, / Yi-Kuen Lee, / Wong, M. / Zohar, Y. et al. | 2004
- 296
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TPa19 SIZE-DEPENDENT FLOW SEPARATION IN MICROCHANNELS WITH CAVITIESYu, Z. T. F. / Lee, Y.-K. / Wong, M. / Zohar, Y. / IEEE et al. | 2004
- 300
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Height effect on nucleation-site activity in microchannel convective boilingMan Lee, / Luthur Siu Lun Cheung, / Yi-Kuen Lee, / Man Wong, / Zohar, Y. et al. | 2004
- 300
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TPa20 HEIGHT EFFECT ON NUCLEATION-SITE ACTIVITY IN MICROCHANNEL CONVECTIVE BOILINGLee, M. / Cheung, L. S. L. / Lee, Y.-K. / Wong, M. / Zohar, Y. / IEEE et al. | 2004
- 304
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High-throughput micro capillary electrophoresis chip for bio-analytical application utilizing multi-wavelength detectionChe-Hsin Lin, / Suz-Kai Hsiung, / Gwo-Bin Lee, et al. | 2004
- 304
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TPa21 HIGH-THROUGHPUT MICRO CAPILLARY ELECTROPHORESIS CHIP FOR BIOANALYTICAL APPLICATION UTILIZING MULTI-WAVELENGTH DETECTIONLin, C.-H. / Hsiung, S. K. / Lee, G.-B. / IEEE et al. | 2004
- 308
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DNA detection based on capacitive AL/sub 2/O/sub 3//AL microelectrodesMoreno-Hagelsieb, L. / Lobert, P.E. / Pampin, R. / Remacle, J. / Flandre, D. et al. | 2004
- 308
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TPa22 DNA DETECTION BASED ON CAPACITIVE AL~2O~3/AL MICROELECTRODESMoreno-Hagelsieb, L. / Lobert, P. E. / Pampin, R. / Remacle, J. / Flandre, D. / IEEE et al. | 2004
- 308
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DNA detection based on capacitive AL2O3/AL microelectrodesMoreno-Hagelsieb, L. / Lobert, P.E. / Pampin, R. / Remacle, J. / Flandre, D. et al. | 2004
- 312
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Micro catalytic combustor with tailored porous aluminaSuzuki, Y. / Horii, Y. / Kasagi, N. / Matsuda, S. et al. | 2004
- 312
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TPa23 MICRO CATALYTIC COMBUSTOR WITH TAILORED POROUS ALUMINASuzuki, Y. / Horii, Y. / Kasagi, N. / Matsuda, S. / IEEE et al. | 2004
- 316
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TPa24 HIGH ENERGY DENSITY MINIATURE ELECTRICAL AND THERMAL POWER SOURCE USING CATALYTIC COMBUSTION OF BUTANEYoshida, K. / Tomonari, S. / Yoshioka, H. / Tanaka, S. / Satoh, D. / Esashi, M. / IEEE et al. | 2004
- 316
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High energy density miniature electrical and thermal power source using catalytic combustion of butaneYoshida, K. / Tomonari, S. / Yoshioka, H. / Tanaka, S. / Satoh, D. / Esashi, M. et al. | 2004
- 322
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TPa25 NANOFLUIDIC FLOWMETER USING CARBON SENSING ELEMENTMizuno, Y. / Liger, M. / Tai, Y. C. / IEEE et al. | 2004
- 322
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Nanofluidic flowmeter using carbon sensing elementMizuno, Y. / Liger, M. / Yu-Chong Tai, et al. | 2004
- 326
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TPa26 LOW COST DEVICE FOR PRECISE MICROLITER RANGE LIQUID DISPENSINGRoxhed, N. / Rydholm, S. / Samel, B. / van der Wijngaart, W. / Griss, P. / Stemme, G. / IEEE et al. | 2004
- 326
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Low cost device for precise microliter range liquid dispensingRoxhed, N. / Rydholm, S. / Samel, B. / van der Wijngaart, W. / Griss, P. / Stemme, G. et al. | 2004
- 330
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TPa27 PROTEIN PATTERNING WITH A PDMS SIEVEAtsuta, K. / Noji, H. / Takeuchi, S. / IEEE et al. | 2004
- 330
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Protein patterning with PDMS sieveAtsuta, K. / Noji, H. / Takeuchi, S. et al. | 2004
- 334
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An integrated LC-ESI chip with electrochemical-based gradient generationJun Xie, / Jason Shih, / Changlin Pang, / Yu-Chong Tai, / Yunan Miao, / Lee, T.D. et al. | 2004
- 334
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TPa28 AN INTEGRATED LC-ESI CHIP WITH ELECTROCHEMICAL-BASED GRADIENT GENERATIONXie, J. / Shih, J. / He, Q. / Pang, C. / Tai, Y. C. / Miao, Y. / Lee, T. D. / IEEE et al. | 2004
- 338
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TPa29 PCR-SLIDE: A MODULAR AND CASCADABLE PLATFORM FOR DNA SAMPLE PROCESSING WITH INTEGRATED NANOLITRE DOSAGEKaack, R. M. / Jung, A. / Wenz, H. M. / Zengerle, R. / Daub, M. / IEEE et al. | 2004
- 338
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PCR-slide: a modular and cascadable platform for DNA sample processing with integrated nanolitre dosageKaack, R.M. / Jung, A. / Wenz, H.M. / Zengerle, R. / Daub, M. et al. | 2004
- 343
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TPa30 MICROFLUIDIC IMPEDANCE SPECTROSCOPY FLOW CYTOMETER: PARTICLE SIZE CALIBRATIONCheung, K. / Gawad, S. / Renaud, P. / IEEE et al. | 2004
- 343
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Microfluidic impedance spectroscopy flow cytometer: particle size calibrationCheung, K. / Gawad, S. / Renaud, P. et al. | 2004
- 347
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TPa31 IMPLANTABLE RESONANT MASS SENSOR FOR LIQUID BIO CHEMICAL SENSINGZhang, H. / Marma, M. S. / Kim, E. S. / McKenna, C. E. / Thompson, M. E. / IEEE et al. | 2004
- 347
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Implantable resonant mass sensor for liquid biochemical sensingHao Zhang, / Marma, M.S. / Eun Sok Kim, / McKenna, C.E. / Thompson, M.E. et al. | 2004
- 351
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TPa32 DIGITAL MOS-TRANSISTOR-BASED MICROHOTPLATE ARRAY FOR SIMULTANEOUS DETECTION OF ENVIROMENTALLY RELEVANT GASESGraf, M. / Taschini, S. / Kaser, P. / Hagleitner, C. / Hierlemann, A. / Baltes, H. / IEEE et al. | 2004
- 351
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Digital MOS-transistor-based microhotplate array for simultaneous detection of environmentally relevant gasesGraf, M. / Taschini, S. / Kaser, P. / Hagleitner, C. / Hierlemann, A. / Baltes, H. et al. | 2004
- 355
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Portable digital microfluidics platform with active but disposable Lab-On-ChipJian Gong, / Shih-Kang Fan, / Chang-Jin, / Kim, C.J. et al. | 2004
- 355
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TPa33 PORTABLE DIGITAL MICROFLUIDICS PLATFORM WITH ACTIVE BUT DISPOSABLE LAB-ON-CHIPGong, J. / Fan, S.-K. / Kim, C.-J. / IEEE et al. | 2004
- 359
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TPa34 MAGNETIC HANDLING OF DROPLET IN MICRO CHEMICAL ANALYSIS SYSTEM UTILIZING SURFACE TENSION AND WETTABILITYShikida, M. / Inouchi, K. / Honda, H. / Sato, K. / IEEE et al. | 2004
- 359
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Magnetic handling of droplet in micro chemical analysis system utilizing surface tension and wettabilityShikida, M. / Inouchi, K. / Honda, H. / Sato, K. et al. | 2004
- 363
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TPa35 MEMS DEVICES FOR DETECTING CORRESPONDENCE BETWEEN MECHANICAL ROTATION AND ATP CONSUMPTION IN A SINGLE BIOMOLECULAR MOTORArata, H. / Takeuchi, S. / Tresset, G. / Rondelez, Y. / Tabata, K. / Noji, H. / Fujita, H. / IEEE et al. | 2004
- 363
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MEMS devices for detecting correspondence between mechanical rotation and ATP consumption in a single biomolecular motorArata, H. / Takeuchi, S. / Tresset, G. / Rondelez, Y. / Tabata, K. / Noji, H. / Fujita, H. et al. | 2004
- 367
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Microchip flow cytometer with integrated polymer optical elements for measurement of scattered lightWang, Z. / El-Ali, J. / Perch-Nielsen, I.R. / Mogensen, K.B. / Snakenborg, D. / Kutter, J.P. / Wolff, A. et al. | 2004
- 367
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TPa36 MICROCHIP FLOW CYTOMETER WITH INTEGRATED POLYMER OPTICAL ELEMENTS FOR MEASURMENT OF SCATTERED LIGHTWang, Z. / El-Ali, J. / Perch-Nielsen, I. R. / Mogensen, K. B. / Snakenborg, D. / Kutter, J. P. / Wolff, A. / IEEE et al. | 2004
- 371
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TPa37 SINGLE BIO-MOLECULE DETECTION WITH QUANTUM DOTS IN A MICROCHANNELYeh, H.-C. / Simone, E. / Zhang, C. / Wang, T.-H. / IEEE et al. | 2004
- 371
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Single bio-molecule detection with quantum dots in a microchannelHsin-Chih Yeh, / Simone, E. / Chunyang Zhang, / Tza-Huei Wang, et al. | 2004
- 375
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TPa38 A LOW VOLTAGE SINGLE CELL ELECTROPORATOR WITH A MICROFABRICATED SENSE-PORATE APERTURESarkar, A. / Mitra, B. / Shastry, A. / Wadia, S. / Mulherkar, R. / Lal, R. / IEEE et al. | 2004
- 375
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A low voltage single cell electroporator with a microfabricated sense-porate apertureSarkar, A. / Mitra, B. / Shastry, A. / Wadia, S. / Mulherkar, R. / Lal, R. et al. | 2004
- 379
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TPa39 A PDMS-BASED CONSTANT-FLOWRATE MICROFLUIDIC CONTROL DEVICEYang, B. / Levis, J. W. / Lin, Q. / IEEE et al. | 2004
- 379
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A PDMS-based constant-flowrate microfluidic control deviceBozhi Yang, / Levis, J.W. / Qiao Lin, et al. | 2004
- 383
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High-aspect-ratio tapered structures using an integrated lens techniqueJung-Hwan Park, / Yong-Kyu Yoon, / Prausnitz, M.R. / Allen, M.G. et al. | 2004
- 383
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TPa40 HIGH-ASPECT-RATIO TAPERED STRUCTURES USING AN INTEGRATED LENS TECHNIQUEPark, J.-H. / Yoon, Y.-K. / Prausnitz, M. R. / Allen, M. G. / IEEE et al. | 2004
- 387
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TPa41 ON-CHIP CRYOPRESERVATION OF CELLSLi, S. / Liu, W. / Lin, L. / IEEE et al. | 2004
- 387
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On-chip cryopreservation of cellsSha Li, / Wei Liu, / Lin, L. et al. | 2004
- 391
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A hydrogel-based wireless chemical sensorMing Lei, / Baldi, A. / Pan, T. / Yuandong Gu, / Siegel, R.A. / Ziaie, B. et al. | 2004
- 391
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TPa42 A HYDROGEL-BASED WIRELESS CHEMICAL SENSORLei, M. / Baldi, A. / Pan, T. / Gu, Y. / Siegel, R. A. / Ziaie, B. / IEEE et al. | 2004
- 395
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TPa43 A POLYPYRROLE-CARBON-NANOTUBE (PPY-MWNT) NANOCOMPOSITE GLUCOSE SENSORTeh, K.-S. / Lin, L. / IEEE et al. | 2004
- 395
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A polypyrrole-carbon-nanotube (PPy-MWNT) nanocomposite glucose sensorKwok-Siong Teh, / Liwei Lin, et al. | 2004
- 399
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TPa44 CELL-CULTURE PLATE WITH SUB-MICRON APERTURE ARRAY FOR NEAR-FIELD FLUORESCENT MEASUREMENTKan, T. / Matsumoto, K. / Shimoyama, I. / IEEE et al. | 2004
- 399
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Cell-culture plate with sub-micron aperture array for near-field fluorescent measurementKan, T. / Matsumoto, K. / Shimoyama, I. et al. | 2004
- 403
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The optical blood test device with the micro Fabry-Perrot interferometerDohi, T. / Matsumoto, K. / Shimoyama, I. et al. | 2004
- 403
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TPa45 THE OPTICAL BLOOD TEST DEVICE WITH THE MICRO FABRY-PERROT INTERFEROMETERDohi, T. / Matsumoto, K. / Shimoyama, I. / IEEE et al. | 2004
- 407
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High signal to noise ratio in low field NMR on chip, simulations and experimental resultsWensink, H. / Hermes, D.C. / van den Berg, A. et al. | 2004
- 407
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TPa46 HIGH SIGNAL TO NOISE RATIO IN LOW FIELD Nmr ON CHIP, SIMULATIONS AND EXPERIMENTAL RESULTSWensink, H. / Hermes, D. C. / van den Berg, A. / IEEE et al. | 2004
- 411
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TPb1 THE NANOGATE: NANOSCALE FLOW CONTROLWhite, J. / Ma, H. / Lang, J. / Slocum, A. / IEEE et al. | 2004
- 411
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The Nanogate: nanoscale flow controlWhite, J. / Ma, H. / Lang, J. / Slocum, A. et al. | 2004
- 415
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TPb2 FABRICATION OF DIRECTED NANO WIRE NETWORKS THROUGH SELF-ASSEMBLYAlaca, E. / Sehitoglu, H. / Saif, T. / IEEE et al. | 2004
- 415
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Fabrication of directed nano wire networks through self-assemblyAlaca, E. / Sehitoglu, H. / Saif, T. et al. | 2004
- 418
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TPb3 3-nm GAP FABRICATION USING GAS PHASE SACRIFICIAL ETCHING FOR QUANTUM DEVICESHamaguchi, K. / Tsuchiya, T. / Shimaoka, K. / Funabashi, H. / IEEE et al. | 2004
- 418
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3-nm gap fabrication using gas phase sacrificial etching for quantum devicesHamaguchi, K. / Tsuchiya, T. / Shimaoka, K. / Funabashi, H. et al. | 2004
- 422
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Nano-to-micro self-assembly using shear flow devicesChi-Yuan Shih, / Siyang Zheng, / Meng, E. / Yu-Chong Tai, / Yi Liu, / Stoddart, J.F. et al. | 2004
- 422
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TPb4 NANO-TO-MICRO SELF-ASSEMBLY USING SHEAR FLOW DEVICESShih, C.-Y. / Zheng, S. / Meng, E. / Tai, Y.-C. / Liu, Y. / Stoddart, J. F. / IEEE et al. | 2004
- 426
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TPb5 FORCE-DEFLECTION CHARACTERIZATION OF INDIVIDUAL CARBON NANOTUBES ATTACHED TO MEMS DEVICESHartman, A. B. / Rice, P. / Finch, D. S. / Skidmore, G. D. / Bright, V. M. / IEEE et al. | 2004
- 426
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Force-deflection characterization of individual carbon nanotubes attached to MEMS devicesHartman, A.B. / Rice, P. / Finch, D.S. / Skidmore, G.D. / Bright, V.M. et al. | 2004
- 430
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Utilization of carbon nanotube and diamond for electron field emission devicesPhan Ngoc Minh, / Phan Ngoc Hong, / To Manh Cuong, / Ono, T. / Esashi, M. et al. | 2004
- 430
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TPb6 UTILIZATION OF CARBON NANOTUBE AND DIAMOND FOR ELECTRON FIELD EMISSION DEVICESMinh, P. N. / Hong, P. N. / Cuong, T. M. / Ono, T. / Esashi, M. / IEEE et al. | 2004
- 434
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Applying indium oxide nanowires as sensitive and selective redox protein sensorsRouhanizadeh, M. / Tao Tang, / Chao Li, / Gopikrishnan Soundararajan, / Chongwu Zhou, / Tzung Hsiai, et al. | 2004
- 434
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TPb7 APPLYING INDIUM OXIDE NANOWIRES AS SENSITIVE AND SELECTIVE REDOX PROTEIN SENSORSRouhanizadeh, M. / Tang, T. / Li, C. / Soundararajan, G. / Zhou, C. / Hsiai, T. / IEEE et al. | 2004
- 438
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Single-walled carbon nanotube probes for AFM imagingLian Zhang, / Ata, E. / Minne, S.C. / Hough, P. et al. | 2004
- 438
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TPb8 SINGLE-WALLED CARBON NANOTUBE PROBES FOR AFM IMAGINGZhang, L. / Ata, E. / Minne, S. C. / Hough, P. / IEEE et al. | 2004
- 442
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A thermally actuated three-probe nanomanipulator for efficient handling of individual nanostructuresXuefeng Wang, / Vincent, L. / Minfeng Yu, / Yonggang Huang, / Chang Liu, et al. | 2004
- 442
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TPb9 A THERMALLY ACTUATED THREE-PROBE NANOMANIPULATOR FOR EFFICIENT HANDLING OF INDIVIDUAL NANOSTRUCTURESWang, X. / Vincent, L. / Yu, M. / Huang, Y. / Liu, C. / IEEE et al. | 2004
- 446
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Electrostatically-actuated micro cantilevers for electro-mechanical measurement of single-walled carbon nanotubes grown by catalytic CVDHoshino, K. / Murakami, Y. / Maruyama, S. / Matsumoto, K. / Shimoyama, I. et al. | 2004
- 446
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TPb10 ELECTROSTATICALLY-ACTUATED MICRO CANTILEVERS FOR ELECTROMECHANICAL MEASUREMENT OF SINGLE-WALLED CARBON NANOTUBES GROWN BY CATALYTIC CVDHoshino, K. / Murakami, Y. / Maruyama, S. / Matsumoto, K. / Shimoyama, I. / IEEE et al. | 2004
- 450
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A bi-directional electrothermal electromagnetic actuatorCao, A. / Jong Baeg Kim, / Tony Tsao, / Liwei Lin, et al. | 2004
- 450
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TPb11 A BI-DIRECTIONAL ELECTROTHERMAL ELECTROMAGNETIC ACTUATORCao, A. / Kim, J. B. / Tsao, T. / Lin, L. / IEEE et al. | 2004
- 454
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Large-strain, piezoelectric, in-plane micro-actuatorConway, N.J. / Sang-Gook Kim, et al. | 2004
- 454
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TPb12 LARGE-STRAIN, PIEZOELECTRIC, IN-PLANE MICRO-ACTUATORConway, N. J. / Kim, S.-G. / IEEE et al. | 2004
- 458
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Plastic micropumps using ferrofluid and magnetic membrane actuationYamahata, C. / Gijs, M.A.M. et al. | 2004
- 458
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TPb13 PLASTIC MICROPUMPS USING FERROFLUID AND MAGNETIC MEMBRANE ACTUATIONYamahata, C. / Gijs, M. A. M. / IEEE et al. | 2004
- 462
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TPb14 A PLANAR MICROPUMP UTILIZING THERMOPNEUMATIC ACTUATION AND IN-PLANE FLAP VALVESZimmermann, S. / Frank, J. A. / Liepmann, D. / Pisano, A. P. / IEEE et al. | 2004
- 462
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A planar micropump utilizing thermopneumatic actuation and in-plane flap valvesZimmermann, S. / Frank, J.A. / Liepmann, D. / Pisano, A.P. et al. | 2004
- 466
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TPb15 A HIGHLY PARALLEL PIEZOELECTRIC PRINTING DEVICE FOR MICRO-ARRAY TECHNOLOGYKuoni, A. / Boillat, M. / de Rooij, N. F. / IEEE et al. | 2004
- 466
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A highly parallel piezoelectric printing device for micro-array technologyKuoni, A. / Boillat, M. / de Rooij, N.F. et al. | 2004
- 470
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Micro-patterned electret for high power electrostatic motorGenda, T. / Tanaka, S. / Esashi, M. et al. | 2004
- 470
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TPb16 MICRO-PATTERNED ELECTRET FOR HIGH POWER ELECTROSTATIC MOTORGenda, T. / Tanaka, S. / Esashi, M. / IEEE et al. | 2004
- 474
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Tdesign and fabrication of a three-dimensional long-stretch micro drive by electroplatingWen-Chuan Tai, / Chien-Tai Wu, / Chen-Peng Hsu, / Wensyang Hsu, et al. | 2004
- 474
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TPb17 DESIGN AND FABRICATION OF A THREE-DIMENSIONAL LONG-STRETCH MICRO DRIVE BY ELECTROPLATINGTai, W.-C. / Wu, C.-T. / Hsu, C.-P. / Hsu, W. / IEEE et al. | 2004
- 478
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TPb18 MICRO ELECTROSTRICTIVE ACTUATOR WITH METAL COMPLIANT ELECTRODES FOR FLOW CONTROL APPLICATIONSPimpin, A. / Suzuki, Y. / Kasagi, N. / IEEE et al. | 2004
- 478
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Micro electrostrictive actuator with metal compliant electrodes for flow control applicationsPimpin, A. / Suzuki, Y. / Kasagi, N. et al. | 2004
- 482
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Miniaturized SAW motor with 100 MHz driving frequencyShigematsu, T. / Kurosawa, M.K. et al. | 2004
- 482
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TPb19 MINIATURIZED SAW MOTOR WITH 100 MHz DRIVING FREQUENCYShigematsu, T. / Kurosawa, M. K. / IEEE et al. | 2004
- 486
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Ultrasonic underwater thrusterHongyu Yu, / Eun Sok Kim, et al. | 2004
- 486
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TPb20 ULTRASONIC UNDERWATER THRUSTERYu, H. / Kim, E. S. / IEEE et al. | 2004
- 490
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Microactuator driven by a new type of capillary forceSakurai, M. / Yoshihara, S. / Ohnishi, M. et al. | 2004
- 490
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TPb21 MICROACTUATOR DRIVEN BY NEW TYPE OF CAPILLARY FORCESakurai, M. / Yoshihara, S. / Ohnishi, M. / IEEE et al. | 2004
- 494
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Batch-fabricated scanning micromirrors using localized plastic deformation of siliconJongbaeg Kim, / Liwei Lin, et al. | 2004
- 494
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TPb22 BATCH-FABRICATED SCANNING MICROMIRRORS USING LOCALIZED PLASTIC DEFORMATION OF SILICONKim, J. / Lin, L. / IEEE et al. | 2004
- 498
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TPb23 POLYMERIC MICROCOMBUSTORS FOR SOLID-PHASE CONDUCTIVE FUELSZhao, Y. / English, B. A. / Choi, Y. / DiBiaso, H. / Yuan, G. / Allen, M. G. / IEEE et al. | 2004
- 498
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Polymeric microcombustors for solid-phase conductive fuelsYanzhu Zhao, / English, B.A. / Yoonsu Choi, / DiBiaso, H. / Guang, Yuan. / Allen, M.G. et al. | 2004
- 502
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A DC-powered, tunable, fully mechanical oscillator using in-plane electrothermal actuationUdeshi, K. / Gianchandani, Y.B. et al. | 2004
- 502
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TPb24 A DC-POWERED, TUNABLE, FULLY MECHANICAL OSCILLATOR USING IN-PLANE ELECTROTHERMAL ACTUATIONUdeshi, K. / Gianchandani, Y. B. / IEEE et al. | 2004
- 506
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Low-voltage large angular displacement electrostatic scanning micromirror using floating slider mechanismKerwin Wang, / Sinclair, M.J. / Bohringer, K.F. et al. | 2004
- 506
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TPb25 LOW-VOLTAGE LARGE ANGULAR DISPLACEMENT ELECTROSTATIC SCANNING MICROMIRROR USING FLOATING SLIDER MECHANISMWang, K. / Sinclair, M. J. / Bohringer, K. F. / IEEE et al. | 2004
- 510
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TPb26 ROBUST, LARGE-DEFLECTION, IN-PLANE THERMAL POLYMER V-SHAPED ACTUATORSHaasl, S. / Griss, P. / Sohlstrom, H. / Kalvesten, E. / Stemme, G. / IEEE et al. | 2004
- 510
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Robust, large-deflection, in-plane thermal polymer V-shaped actuatorsHaasl, S. / Griss, P. / Sohlstrom, H. / Kalvesten, E. / Stemme, G. et al. | 2004
- 514
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TPb27 HYDROGEN PEROXIDE ETCHING AND STABILITY OF P-TYPE POLY-SiGe FILMSBircumshaw, B. L. / Wasilik, M. L. / Kim, E. B. / Su, Y. R. / Takeuchi, H. / Low, C. W. / Liu, G. / Pisano, A. P. / King, T.-J. / Howe, R. T. et al. | 2004
- 514
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Hydrogen peroxide etching and stability of p-type poly-SiGe filmsBircumshaw, B.L. / Wasilik, M.L. / Kim, E.B. / Su, Y.R. / Takeuchi, H. / Low, C.W. / Liu, G. / Pisano, A.P. / King, T.-J. / Howe, R.T. et al. | 2004
- 520
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Fabrication and characterization of a pixel level micro vacuum package for infrared imagerIkushima, K. / Baba, A. / Kyougoku, M. / Sawada, K. / Ishida, M. et al. | 2004
- 520
-
TPb28 FABRICATION AND CHARACTERIZATION OF A PIXEL LEVEL MICRO VACUUM PACKAGE FOR INFARED IMAGERIkushima, K. / Baba, A. / Kyougoku, M. / Sawada, K. / Ishida, M. / IEEE et al. | 2004
- 524
-
A Z-axis differential capacitive SOI accelerometer with vertical comb electrodesTsuchiya, T. / Funabashi, H. et al. | 2004
- 524
-
TPb29 A Z-AXIS DIFFERENTIAL CAPACITIVE SOI ACCELEROMETER WITH VERTICAL COMB ELECTRODESTsuchiya, T. / Funabashi, H. / IEEE et al. | 2004
- 528
-
Increasing the performance of silicon microphones by the benefit of a complete system simulationBrauer, M. / Dehe, A. / Fuldner, M. / Laur, R. et al. | 2004
- 528
-
TPb30 INCREASING THE PERFORMANCE OF SILICON MICROPHONES BY THE BENEFIT OF A COMPLETE SYSTEM SIMULATIONBrauer, M. / Dehe, A. / Fuldner, M. / Laur, R. / IEEE et al. | 2004
- 532
-
A micromachined Pirani gauge with dual heat sinksJunseok Chae, / Stark, B.H. / Najafi, K. et al. | 2004
- 532
-
TPb31 A MICROMACHINED PIRANI GAUGE WITH DUAL HEAT SINKSChae, J. / Stark, B. H. / Najafi, K. / IEEE et al. | 2004
- 536
-
Diamond probe for ultra-high-density ferroelectric data storage based on scanning nonlinear dielectric microscopyTakahashi, H. / Ono, T. / Yasuo Cho, / Esashi, M. et al. | 2004
- 536
-
TPb32 DIAMOND PROBE FOR ULTRA-HIGH-DENSITY FERROELECTRIC DATA STORAGE BASED ON SCANNING NONLINEAR DIELECTRIC MICROSCOPYTakahashi, H. / Ono, T. / Cho, Y. / Esashi, M. / IEEE et al. | 2004
- 540
-
A capacitive micro gas flow sensor based on slip flowJaesung Jang, / Wereley, S.T. et al. | 2004
- 540
-
TPb33 A CAPACITIVE MICRO GAS FLOW SENSOR BASED ON SLIP FLOWJang, J. / Wereley, S. T. / IEEE et al. | 2004
- 544
-
Capacitive long-range position sensor for microactuatorsKuijpers, A.A. / Wiegerink, R.J. / Krijnen, G.J.M. / Lammerink, T.S.J. / Elwenspoek, M. et al. | 2004
- 544
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TPb34 CAPACITIVE LONG-RANGE POSITION SENSOR FOR MICROACTUATORSKuijpers, A. A. / Wiegerink, R. J. / Krijnen, G. J. M. / Lammerink, T. S. J. / Elwenspoek, M. / IEEE et al. | 2004
- 548
-
TPb35 PIEZORESISTIVE MICROPHONE WITH INTEGRATED AMPLIFIER REALIZED USING METAL-INDUCED LATERALLY CRYSTALLIZED POLYCRYSTALLINE SILICONLi, G. / Zohar, Y. / Wong, M. / IEEE et al. | 2004
- 548
-
Piezoresistive microphone with integrated amplifier realized using metal-induced laterally crystallized polycrystalline siliconGang Li, / Zohar, Y. / Man Wong, et al. | 2004
- 552
-
A thermal conductivity based humidity sensor in a standard CMOS processOkcan, B. / Akin, T. et al. | 2004
- 552
-
TPb36 A THERMAL CONDUCTIVITY BASED HUMIDITY SENSOR IN A STANDARD CMOS PROCESSOkcan, B. / Akin, T. / IEEE et al. | 2004
- 556
-
TPb37 A PLANAR, X-AXIS, SINGLE-CRYSTALLINE SILICON GYROSCOPE FABRICATED USING THE EXTENDED SBM PROCESSKim, J. / Park, S. / Kwak, D. / Ko, H. / Cho, D.-I. / IEEE et al. | 2004
- 556
-
A planar, x-axis, single-crystalline silicon gyroscope fabricated using the extended SBM processJongpal Kim, / Sangjun Park, / Donghun Kwak, / Hyoungho Ko, / Dong-Il Dan Cho, et al. | 2004
- 560
-
TPb38 ULTRA-SMALL SINGLE-CRYSTAL SILICON CANTILEVERS FOR SCANNING FORCE MICROSCOPESYang, J. L. / Despont, M. / Hoogenboom, B. W. / Drechsler, U. / Frederix, P. L. T. M. / Martin, S. / Hug, H. J. / Vettiger, P. / Engel, A. / IEEE et al. | 2004
- 560
-
Ultra-small single-crystal silicon cantilevers for scanning force microscopesYang, J.L. / Despont, M. / Hoogenboom, B.W. / Drechsler, U. / Frederix, P.L.T.M. / Martin, S. / Hug, H.J. / Vettiger, P. / Engel, A. et al. | 2004
- 564
-
TPb39 AN ELASTOMERIC TACTILE SENSOR EMPLOYING DIELECTRIC CONSTANT VARIATION AND APPLICABLE TO ORTHODONTIATseng, F.-G. / Yang, C.-S. / Pan, L.-C. / IEEE et al. | 2004
- 564
-
An elastomeric tactile sensor employing dielectric constant variation and applicable to orthodontiaFan-Gang Tseng, / Chih-Sheng Yang, / Li-Chern Pan, et al. | 2004
- 568
-
Axial-flow microturbine with electromagnetic generator: design, CFD simulation, and prototype demonstrationHolmes, A.S. / Hong, G. / Pullen, K.R. / Buffard, K.R. et al. | 2004
- 568
-
TPb40 AXIAL-FLOW MICROTURBINE WITH ELECTROMAGNETIC GENERATOR: DESIGN, CFD SIMULATION, AND PROTOTYPE DEMONSTRATIONHolmes, A. S. / Hong, G. / Pullen, K. R. / Buffard, K. R. / IEEE et al. | 2004
- 572
-
A high resolution, stictionless, CMOS compatible SOI accelerometer with a low noise, low power, 0.25 /spl mu/m CMOS interfaceAmini, B.V. / Pourkamali, S. / Ayazi, F. et al. | 2004
- 572
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TPb41 A HIGH RESOLUTION, STICTIONLESS, CMOS COMPATIBLE SOI ACCELEROMETER WITH A LOW NOISE, LOW POWER 0.25mum CMOS INTERFACEAmini, B. V. / Pourkamali, S. / Ayazi, F. / IEEE et al. | 2004
- 576
-
Monolithic dielectric BST infrared sensor arrays using a novel silicon-ferroelectric integration scheme based on improved porous silicon micromachiningLiang Dong, / Ruifeng Yue, / Litian Liu, et al. | 2004
- 576
-
TPb42 MONOLITHIC DIELECTRIC BST INFRARED SENSOR ARRAYS USING A NOVEL SILICON-FERROELECTRIC INTEGRATION SCHEME BASED ON IMPROVED POROUS SILICON MICROMACHININGDong, L. / Yue, R. / Liu, L. / IEEE et al. | 2004
- 580
-
A novel micromachined magnetostrictive delay line (MDL) with electroplated amorphous magnetostrictive thin filmRong Rong, / Ahn, C.H. et al. | 2004
- 580
-
TPb43 A NOVEL MICROMACHINED MAGNETOSTRICTIVE DELAY LINE (MDL) WITH ELECTROPLATED AMORPHOUS MAGNETOSTRICTIVE THIN FILMRong, R. / Ahn, C. H. / IEEE et al. | 2004
- 584
-
Electrostatically coupled micromechanical beam filtersPourkamali, S. / Abdolvand, R. / Ho, G.K. / Ayazi, F. et al. | 2004
- 584
-
TPb44 ELECTROSTATICALLY COUPLED MICROMECHANICAL BEAM FILTERSPourkamali, S. / Abdolvand, R. / Ho, G. K. / Ayazi, F. / IEEE et al. | 2004
- 588
-
INVITED SPEAKER ASSEMBLY TECHNOLOGY ACROSS MULTIPLE LENGTH SCALES FROM THE MICRO-SCALE TO THE NANO-SCALESkidmore, G. / Ellis, M. / Geisberger, A. / Tsui, K. / Tuck, K. / Saini, R. / Udeshi, T. / Nolan, M. / Stallcup, R. / von Ehr, J. et al. | 2004
- 588
-
Assembly technology across multiple length scales from the micro-scale to the nano-scaleSkidmore, G. / Ellis, M. / Geisberger, A. / Tsui, K. / Tuck, K. / Saini, R. / Udeshi, T. / Nolan, M. / Stallcup, R. / Von Ehr, J. et al. | 2004
- 593
-
Uncooled all-parylene bolometerLiger, M. / Konishi, S. / Yu-Chong Tai, et al. | 2004
- 597
-
A novel (111) single-crystal-silicon accelerometer using parallel-connected parallel plate capacitanceHsin-Hua, / Weileun Fang, et al. | 2004
- 601
-
New fabrication process for high-performance silicon condenser microphone with monocrystalline silicon diaphragm and backplateIguchi, Y. / Tajima, T. / Goto, M. / Iwaki, M. / Ando, A. / Tanioka, K. / Takeshi, F. / Matsunaga, S. / Yasuno, Y. et al. | 2004
- 605
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Integrated bulk-micromachined gyroscope using deep trench isolation technologyGuizhen Yan, / Yong Zhu, / Chengwei Wang, / Rong Zhang, / Zhiyong Chen, / Xuesong Liu, / Wang, Y.Y. et al. | 2004
- 609
-
Three-dimensional nanofabrication (3D-NANO) down to 10-NM order using electron-beam lithographyYamazaki, K. / Namatsu, H. et al. | 2004
- 613
-
A novel magnetic tweezers for manipulation of a single DNA moleculeChi-Han Chiou, / Zhao-Fu Tseng, / Gwo-Bin Lee, et al. | 2004
- 617
-
Microfabricated glucose sensor based on single-walled carbon nanotubesJaehyun Chung, / Kyong-Hoon Lee, / Junghoon Lee, et al. | 2004
- 621
-
From micro-patterns to nano-structures by controllable colloidal aggregation at air-water interfaceXiaorong Xiong, / Kerwin Wang, / Bohringer, K.F. et al. | 2004
- 625
-
Micro patterning of fluorescent nanoparticles by atomizers combined with electrostatic deposition and stencil maskJoon-Wan Kim, / Yamagata, Y. / Beomjoon Kim, / Higuchi, T. et al. | 2004
- 629
-
Nanomechanical protein detectors using electrothermal nano-gap actuatorsWon Chul Lee, / Young-Ho Cho, et al. | 2004
- 633
-
High-Q thin-film silicon resonators processed at temperatures below 110/spl deg/C on glass and plastic substratesGaspar, J. / Chu, V. / Conde, J.P. et al. | 2004
- 633
-
HIGH-Q THIN-FILM SILICON RESONATORS PROCESSED AT TEMPERATURES BELOW 110^oC ON GLASS AND PLASTIC SUBSTRATESGaspar, J. / Chu, V. / Conde, J. P. / IEEE et al. | 2004
- 633
-
High-Q thin-film silicon resonators processed at temperatures below 110 degrees C on glass and plastic substratesGaspar, J. / Chu, V. / Conde, J.P. et al. | 2004
- 637
-
S-shaped film actuator for low-voltage high-isolation MEMS metal contact switchesOberhammer, J. / Stemme, G. et al. | 2004
- 641
-
1.51-GHz nanocrystalline diamond micromechanical disk resonator with material-mismatched isolating supportJing Wang, / Butler, J.E. / Feygelson, T. / Nguyen, C.T.-C. et al. | 2004
- 645
-
Low phase noise CMOS distributed oscillators using MEMS low loss transmission linesEun-Chul Park, / Taek-Sang Song, / Sang-Hyun Baek, / Euisik Yoon, et al. | 2004
- 649
-
WP1 SILICON LIQUID FLOW SENSOR ENCAPSULATION USING METAL TO GLASS ANODIC BONDINGBriand, D. / Weber, P. / de Rooij, N. F. / IEEE et al. | 2004
- 649
-
Silicon liquid flow sensor encapsulation using metal to glass anodic bondingBriand, D. / Weber, P. / de Rooij, N.F. et al. | 2004
- 653
-
Hydrophobic coatings using atomic layer deposition and non-chlorinated precursorsHerrmann, C.F. / DelRio, F.W. / Bright, V.M. / George, S.M. et al. | 2004
- 653
-
WP2 HYROPHOBIC COATINGS USING ATOMIC LAYER DEPOSITION AND NON-CHLORINATED PRECURSORSHerrmann, C. F. / DelRio, F. W. / Bright, V. M. / George, S. M. / IEEE et al. | 2004
- 657
-
WP3 MAGNETIC COMPOSITE ELECTRODEPOSITION OF MICRO-ARRAY MAGNETS FOR MEMS ACTUATORSGuan, S. / Nelson, B. J. / IEEE et al. | 2004
- 657
-
Magnetic composite electrodeposition of micro-array magnets for MEMS actuatorsGuan, S. / Nelson, B.J. et al. | 2004
- 661
-
WP4 HORIZONTAL BURIED CHANNELS IN MONOCRISTALLINE SILICONDe Sagazan, O. / Denoual, M. / Guil, P. / Gaudin, D. / LePioufle, B. / Bonnaud, O. / IEEE et al. | 2004
- 661
-
Horizontal buried channels in monocristalline siliconDe Sagazan, O. / Denoual, M. / Guil, P. / Gaudin, D. / Le Pioufle, B. / Bonnaud, O. et al. | 2004
- 665
-
Low temperature plasma-assisted wafer bonding and bond-interface stress characterizationDoll, A. / Goldschmidtboeing, F. / Woias, P. et al. | 2004
- 665
-
WP5 LOW TEMPERATURE PLASMA-ASSISTED WAFER BONDING AND BOND-INTERFACE STRESS CHARACTERIZATIONDoll, A. / Goldschmidtboeing, F. / Woias, P. / IEEE et al. | 2004
- 669
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WP6 PROFILE ANGLE CONTROL IN SIO^2 DEEP ANISOTROPIC DRY ETCHING FOR MEMS FABRICATIONPavius, M. / Hibert, C. / Fluckiger, P. / Renaud, P. / Rolland, L. / Puech, M. / IEEE et al. | 2004
- 669
-
Profile angle control in SiO2 deep anisotropic dry etching for MEMS fabricationPavius, M. / Hibert, C. / Fluckiger, P. / Renaud, P. / Rolland, L. / Puech, M. et al. | 2004
- 669
-
Profile angle control in SiO/sub 2/ deep anisotropic dry etching for MEMS fabricationPavius, M. / Hibert, C. / Fluckiger, P. / Renaud, P. / Rolland, L. / Puech, M. et al. | 2004
- 673
-
WP7 IMPROVEMENT IN PROTON BEAM WRITING AT THE NANO SCALEvan Kan, J. A. / Bettiol, A. A. / Ansari, K. / Shao, P. / Watt, F. / IEEE et al. | 2004
- 673
-
Improvement in proton beam writing at the nano scalevan Kan, J.A. / Bettiol, A.A. / Ansari, K. / Shao, P. / Watt, F. et al. | 2004
- 677
-
Fabrication of a 35-channel optical scanner integrated by passive-self alignment using through-holes precisely formed by DRIEAkashi, T. / Kanamaru, M. / Kazama, A. / Itou, Y. / Horino, M. / Fukuda, K. / Ishikawa, T. / Harada, T. / Okada, R. et al. | 2004
- 677
-
WP8 FABRICATION OF A 35-CHANNEL OPTICAL SCANNER INTEGRATED BY PASSIVE-SELF ALIGNMENT USING THROUGH-HOLES PRECISELY FORMED BY DRIEAkashi, T. / Kanamaru, M. / Kazama, A. / Itou, Y. / Horino, M. / Fukuda, K. / Ishikawa, T. / Harada, T. / Okada, R. / IEEE et al. | 2004
- 681
-
A novel fabrication process of 3-D microstructures by double exposure in standard deep X-ray lithographyMatsuzuka, N. / Hirai, Y. / Tabata, O. et al. | 2004
- 681
-
WP9 A NOVEL FABRICATION PROCESS OF 3-D MICROSTRUCTURES BY DOUBLE EXPOSURE IN STANDARD DEEP X-RAY LITHOGRAPHYMatsuzuka, N. / Hirai, Y. / Tabata, O. / IEEE et al. | 2004
- 685
-
Novel lithography process for extreme deep trench by using laminated negative dry film resistMoon-Youn Jung, / Won Ick Jang, / Chang Auck Choi, / Myung Rae Lee, / Chi Hoon Jun, / Youn Tae Kim, et al. | 2004
- 685
-
WP10 NOVEL LITHOGRAPHY PROCESS FOR EXTREME DEEP TRENCH BY USING LAMINATED NEGATIVE DRY FILM RESISTJung, M.-Y. / Jang, W. I. / Choi, C. A. / Lee, M. R. / Jun, C. H. / Kim, Y. T. / IEEE et al. | 2004
- 689
-
WP11 POLYMER BASED SMART FLEXIBLE THERMOPILE FOR POWER GENERATIONHasebe, S. / Ogawa, J. / Shiozaki, M. / Toriyama, T. / Sugiyama, S. / Ueno, H. / Itoigawa, K. / IEEE et al. | 2004
- 689
-
Polymer based smart flexible thermopile for power generationHasebe, S. / Ogawa, J. / Shiozaki, M. / Toriyama, T. / Sugiyama, S. / Ueno, H. / Itoigawa, K. et al. | 2004
- 693
-
WP12 FUNCTIONAL 3-D PDMS MICROCHANNELS HAVING SLANTED GROOVES EMBEDDED WALLS REALIZING SPIRAL FLOWSato, H. / Ito, S. / Tajima, K. / Orimoto, N. / Shoji, S. / IEEE et al. | 2004
- 693
-
Functional 3-D PDMS microchannels having slanted grooves embedded walls realizing spiral flowSato, H. / Ito, S. / Tajima, K. / Orimoto, N. / Shoji, S. et al. | 2004
- 697
-
WP13 RAPID PROTOTYPING OF GLASS CHIP WITH MICRO-POWDER BLASTING USING NANO-PARTICLES DISPERSED POLYMERYagyu, H. / Sugano, K. / Hayashi, S. / Tabata, O. / IEEE et al. | 2004
- 697
-
Rapid prototyping of glass chip with micro-powder blasting using nano-particles dispersed polymerYagyu, H. / Sugano, K. / Hayashi, S. / Tabata, O. et al. | 2004
- 701
-
A foldable multi-chip packaging technique with a polyimide platform and flexible PDMS assembly moldWoohyek Choi, / Ziaie, B. et al. | 2004
- 701
-
WP14 A FOLDABLE MULTI-CHIP PACKAGING TECHNIQUE WITH A POLYMIDE PLATFORM AND FLEXIBLE PDMS ASSEMBLY MOLDChoi, W. / Ziaie, B. / IEEE et al. | 2004
- 705
-
High aspect ratio nanovolume glass cell array fabricated by area-selective silicon electrochemical etching processHomma, T. / Sato, H. / Mori, K. / Osaka, T. / Shoji, S. et al. | 2004
- 705
-
WP15 HIGH ASPECT RATIO NANOVOLUME GLASS CELL ARRAY FABRICATED BY AREA-SELECTIVE SILICON ELECTROCHEMICAL ETCHING PROCESSHomma, T. / Sato, H. / Mori, K. / Osaka, T. / Shoji, S. / IEEE et al. | 2004
- 709
-
WP16 SURFACE POLISHING OF THREE DIMENSIONAL MICRO STRUCTURESLim, C. H. / Kim, W. B. / Lee, S. H. / Lee, J. I. / Kim, Y. J. / Lee, S. J. / IEEE et al. | 2004
- 709
-
Surface polishing of three dimensional micro structuresLim, C.H. / Kim, W.B. / Lee, S.H. / Lee, J.I. / Kim, Y.J. / Lee, S.J. et al. | 2004
- 713
-
WP17 CONTACT PRINTING FOR IMPROVED BOND-STRENGTH OF PATTERNED ADHESIVE FULL-WAFER BONDED 0-LEVEL PACKAGESOberhammer, J. / Stemme, G. / IEEE et al. | 2004
- 713
-
Contact printing for improved bond-strength of patterned adhesive full-wafer bonded 0-level packagesOberhammer, J. / Stemme, G. et al. | 2004
- 717
-
A clean wafer-scale chip-release process without dicing based on vapor phase etchingOverstolz, T. / Clerc, P.A. / Noell, W. / Zickar, M. / de Rooij, N.F. et al. | 2004
- 717
-
WP18 A CLEAN WAFER-SCALE CHIP-RELEASE PROCESS WITHOUT DICING BASED ON VAPOR PHASE ETCHINGOverstolz, T. / Clerc, P. A. / Noell, W. / Zickar, M. / de Rooij, N. F. / IEEE et al. | 2004
- 721
-
Novel high growth rate processes for depositing poly-SiGe structural layers at CMOS compatible temperaturesMehta, A. / Gromova, M. / Rusu, C. / Olivier, R. / Baert, K. / Van Hoof, C. / Witvrouw, A. et al. | 2004
- 721
-
WP19 NOVEL HIGH GROWTH RATE PROCESSES FOR DEPOSITING POLY-SIGE STRUCTURAL LAYERS AT CMOS COMPATIBLE TEMPERATURESMehta, A. / Gromova, M. / Rusu, C. / Olivier, R. / Baert, K. / Van Hoof, C. / Witvrouw, A. / IEEE et al. | 2004
- 725
-
WP20 CERAMIC MICROCOMPONENTS BY MICROSTEREOLITHOGRAPHYBertsch, A. / Jiguet, S. / Hofmann, H. / Renaud, P. / IEEE et al. | 2004
- 725
-
Ceramic microcomponents by microstereolithographyBertsch, A. / Jiguet, S. / Hofmann, H. / Renaud, P. et al. | 2004
- 729
-
WP21 LOCALIZED INDUCTION HEATING SOLDER BONDING FOR WAFER LEVEL MEMS PACKAGINGYang, H.-A. / Wu, M. / Fang, W. / IEEE et al. | 2004
- 729
-
Localized induction heating solder bonding for wafer level MEMS packagingHsueh-An Yang, / Mingching Wu, / Weileun Fang, et al. | 2004
- 733
-
Multi-layer electroplated micro-spring array for MEMS probe cardKataoka, K. / Itoh, T. / Inoue, K. / Suga, T. et al. | 2004
- 733
-
WP22 MULTI-LAYER ELECTROPLATED MICRO-SPRING ARRAY FOR MEMS PROBE CARDKataoka, K. / Itoh, T. / Inoue, K. / Suga, T. / IEEE et al. | 2004
- 737
-
WP23 MODELING AND CHARACTERIZATION OF SACRIFICIAL POLYSILICON ETCHING USING VAPOR-PHASE XENON DIFLUORIDEBrazzle, J. D. / Dokmeci, M. R. / Mastrangelo, C. H. / IEEE et al. | 2004
- 737
-
Modeling and characterization of sacrificial polysilicon etching using vapor-phase xenon difluorideBrazzle, J.D. / Dokmeci, M.R. / Mastrangelo, C.H. et al. | 2004
- 741
-
WP24 ELASTOMER-SUPPORTED COLD WELDING FOR ROOM TEMPERATURE WAFER-LEVEL BONDINGZhang, W. Y. / Ferguson, G. S. / Tatic-Lucic, S. / IEEE et al. | 2004
- 741
-
Elastomer-supported cold welding for room temperature wafer-level bondingZhang, W.Y. / Ferguson, G.S. / Tatic-Lucic, S. et al. | 2004
- 745
-
High-resolution patterning and transfer of thin PDMS films: fabrication of hybrid self-sealing 3D microfluidic systemsKloter, U. / Schmid, H. / Wolf, H. / Michel, B. / Juncker, D. et al. | 2004
- 745
-
WP25 HIGH-RESOLUTION PATTERNING AND TRANSFER OF THIN PDMS FILMS: FABRICATION OF HYBRID SELF-SEALING 3D MICROFLUIDIC SYSTEMSKloter, U. / Schmid, H. / Wolf, H. / Michel, B. / Juncker, D. / IEEE et al. | 2004
- 749
-
Polymer flip-chip bonding of pressure sensors on flexible Kapton film for neonatal cathetersChunyan Li, / Sauser, F.E. / Azizkhan, R. / Ahn, C.H. / Papautsky, I. et al. | 2004
- 749
-
WP26 POLYMER FLIP-CHIP BONDING OF PRESSURE SENSORS ON FLEXIBLE KAPTON FILM FOR NEONATAL CATHETERSLi, C. / Sauser, F. E. / Azizkhan, R. / Ahn, C. H. / Papautsky, I. / IEEE et al. | 2004
- 753
-
Fabrication of 3D microstructures and microactuators on (100) SOI wafer using the DAWN processHuai-Yuan Chu, / Weileun Fang, et al. | 2004
- 753
-
WP27 FABRICATION OF 3D MICROSTRUCTURES AND MICROACTUATORS ON (100) SOI WAFER USING THE DAWN PROCESSChu, H.-Y. / Fang, W. / IEEE et al. | 2004
- 757
-
WP28 MICROFABRICATION OF 3-DIMENSIONAL PHOTORESIST STRUCTURES USING SELECTIVE PATTERNING AND DEVELOPMENT ON TWO TYPES OF SPECIFIC RESISTS AND ITS APPLICATION TO MICROFLUIDIC COMPONENTSYun, K.-S. / Yoon, E. / IEEE et al. | 2004
- 757
-
Microfabrication of 3-dimensional photoresist structures using selective patterning and development on two types of specific resists and its application to microfluidic componentsKwang-Seok Yun, / Euisik Yoon, et al. | 2004
- 761
-
WP29 A NEW BONDING PROCESS FOR POLYMER MICRO- AND NANOSTRUCTURES BASED ON NEAR-SURFACE DEGRADATIONTruckenmuller, R. / Henzi, P. / Herrmann, D. / Saile, V. / Schomburg, W. K. / IEEE et al. | 2004
- 761
-
A new bonding process for polymer micro- and nanostructures based on near-surface degradationTruckenmuller, R. / Henzi, P. / Herrmann, D. / Saile, V. / Schomburg, W.K. et al. | 2004
- 765
-
Room temperature deposition of silicon by arrayed DC microplasmasWilson, C.G. / Gianchandani, Y.B. et al. | 2004
- 765
-
WP30 ROOM TEMPERATURE DEPOSITION OF SILICON BY ARRAYED DC MICROPLASMASWilson, C. G. / Gianchandani, Y. B. / IEEE et al. | 2004
- 769
-
Through-support-coupled micromechanical filter arrayHo, G.K. / Abdolvand, R. / Ayazi, F. et al. | 2004
- 769
-
WP31 THROUGH-SUPPORT-COUPLED MICROMECHANICAL FILTER ARRAYHo, G. K. / Abdolvand, R. / Ayazi, F. / IEEE et al. | 2004
- 773
-
WP32 MEASUREMENT OF THE NONLINEAR BEHAVIOR OF A MEMS VARIABLE CAPACITORInnocent, M. / Wambacq, P. / Tilmans, H. A. C. / Sansen, W. / De Man, H. / IEEE et al. | 2004
- 773
-
Measurement of the nonlinear behavior of a MEMS variable capacitorInnocent, M. / Wambacq, P. / Tilmans, H.A.C. / Sansen, W. / De Man, H. et al. | 2004
- 777
-
RF MEMS tunable capacitors with large tuning ratioRijks, T.G.S.M. / van Beek, J.T.M. / Steeneken, P.G. / Ulenaers, M.J.E. / De Coster, J. / Puers, R. et al. | 2004
- 777
-
WP33 RF MEMS TUNABLE CAPACITORS WITH LARGE TUNING RATIORijks, T. G. S. M. / van Beek, J. T. M. / Steeneken, P. G. / Ulenaers, M. J. E. / De Coster, J. / Puers, R. / IEEE et al. | 2004
- 781
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WP34 PARALLEL-CONTACT METAL-CONTACT RF-MEMS SWITCHES FOR HIGH POWER APPLICATIONSNishijima, N. / Hung, J.-J. / Rebeiz, G. M. / IEEE et al. | 2004
- 781
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Parallel-contact metal-contact RF-MEMS switches for high power applicationsNishijima, N. / Juo-Jung Hung, / Rebeiz, G.M. et al. | 2004
- 785
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WP35 DESIGN AND FABRICATION OF SCS (SINGLE CRYSTALLINE SILICON) RF-MEMS SWITCH USING SiOG PROCESSKim, J.-M. / Park, J.-H. / Baek, C.-W. / Kim, Y.-K. / IEEE et al. | 2004
- 785
-
Design and fabrication of SCS (single crystalline silicon) RF MEMS switch using SiOG processJong-Man Kim, / Jae-Hyoung Park, / Chang-Wook Baek, / Yong-Kweon Kim, et al. | 2004
- 789
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WP36 SIMULTANEOUS FABRICATION OF RF MEMS SWITCHES AND RESONATORS USING COPPER-BASED CMOS INTERCONNECT MANUFACTURING METHODSJahnes, C. V. / Cotte, J. / Lund, J. L. / Deligianni, H. / Chinthakindi, A. / Buchwalter, L. P. / Fryer, P. / Tornello, J. A. / Hoivik, N. / Magerlein, J. H. et al. | 2004
- 789
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Simultaneous fabrication of RF MEMS switches and resonators using copper-based CMOS interconnect manufacturing methodsJahnes, C.V. / Cotte, J. / Lund, J.L. / Deligianni, H. / Chinthakindi, A. / Buchwalter, L.P. / Fryer, P. / Tornello, J.A. / Hoivik, N. / Magerlein, J.H. et al. | 2004
- 793
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Tunable solenoid microinductors utilizing Permalloy electro-thermal vibromotorsShih, W.-P. / Li, Z. / McCormick, D.T. / Tien, N.C. / Hui, C.Y. et al. | 2004
- 793
-
WP37 TUNABLE SOLENOID MICROINDUCTORS UTILIZING PERMALLOY ELECTRO-THERMAL VIBROMOTORSShih, W.-P. / Li, Z. / McCormick, D. T. / Tien, N. C. / Hui, C. Y. / IEEE et al. | 2004
- 797
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A bi-stable electro-thermal RF switch for high power applicationsLong Que, / Udeshi, K. / Park, J. / Gianchandani, Y.B. et al. | 2004
- 797
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WP38 A BI-STABLE ELECTRO-THERMAL RF SWITCH FOR HIGH POWER APPLICATIONSQue, L. / Udeshi, K. / Park, J. / Gianchandani, Y. B. / IEEE et al. | 2004
- 801
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WP39 A COMPACT LOW-LOSS KA-BAND FILTER USING 3-DIMENSIONAL MICROMACHINED INTEGRATED COAXChen, R. T. / Brown, E. R. / Bang, C. A. / IEEE et al. | 2004
- 801
-
A compact low-loss Ka-band filter using 3-dimensional micromachined integrated coaxChen, R.T. / Brown, E.R. / Bang, C.A. et al. | 2004
- 805
-
WP40 HIGH Q FILM BULK ACOUSTIC RESONATOR FROM 2.4 TO 5.1GHZPang, W. / Zhang, H. / Whangbo, S. / Kim, E. S. / IEEE et al. | 2004
- 805
-
High Q film bulk acoustic resonator from 2.4 to 5.1 GHzWei Pang, / Hao Zhang, / Sangwoo Whangbo, / Eun Sok Kim, et al. | 2004
- 809
-
WP41 FABRICATION AND MODELING OF SILICON-EMBEDDED HIGH Q INDUCTORSPan, T. / Baldi, A. / Davies-Venn, E. / Drayton, R. F. / Ziaie, B. / IEEE et al. | 2004
- 809
-
Fabrication and modeling of silicon-embedded high Q inductorsPan, T. / Baldi, A. / Davies-Venn, E. / Drayton, R.F. / Ziaie, B. et al. | 2004
- 813
-
Fully single crystal silicon resonators with deep-submicron dry-etched transducer gapsPourkamali, S. / Ayazi, F. et al. | 2004
- 813
-
WP42 FULLY SINGLE CRYSTAL SILICON RESONATORS WITH DEEP-SUBMICRON DRY-ETCHED TRANSDUCER GAPSPourkamali, S. / Ayazi, F. / IEEE et al. | 2004
- 817
-
Self-powered IC-compatible DC bias for electrostatic resonatorsShyi-Herng Kan, / Lal, A. et al. | 2004
- 817
-
WP43 SELF-POWERED IC-COMPATIBLE DC BIAS FOR ELECTROSTATIC RESONATORSKan, S.-H. / Lal, A. / IEEE et al. | 2004
- 821
-
Micromechanical "hollow-disk" ring resonatorsSheng-Shian Li, / Yu-Wei Lin, / Yuan Xie, / Zeying Ren, / Nguyen, C.T.-C. et al. | 2004
- 821
-
WP44 MICROMECHANICAL "HOLLOW DISK" RING RESONATORSLi, S.-S. / Lin, Y.-W. / Xie, Y. / Ren, Z. / Nguyen, C. T.-C. / IEEE et al. | 2004
- 825
-
Ultracompliant, passively decoupled thermal probe arrays: large area mapping of non-planar surfaces without force feedbackMcNamara, S. / Basu, A. / Joohyung Lee, / Gianchandani, Y.B. et al. | 2004
- 829
-
Two-dimensional high density piezo-FET stress sensor arrays for in-situ monitoring of wire bonding processesDoelle, M. / Peters, C. / Gieschke, P. / Ruther, P. / Paul, O. et al. | 2004
- 833
-
Underwater flexible shear-stress sensor skinsYong Xu, / Clendenen, J. / Steve Tung, / Fukang Jiang, / Yu-Chong Tai, et al. | 2004
- 837
-
Characterizing fruit fly flight behavior using a micro force sensor with a new comb drive configurationYu Sun, / Potasek, D.P. / Fry, S.N. / Nelson, B.J. et al. | 2004
- 841
-
A MEMS resonant strain sensor operated in airWojciechowski, K.E. / Boser, B.E. / Pisano, A.P. et al. | 2004
- 846
-
Silicon smart tactile image sensor with pneumatically swollen single diaphragm structureTakao, H. / Sawada, K. / Ishida, M. et al. | 2004
- 850
-
Enhanced electro-osmotic pumping with liquid bridge and field effect flow rectificationMuthu, S. / Svec, F. / Mastrangelo, C.H. / Frechet, J.M.J. / Gianchandani, Y.B. et al. | 2004
- 854
-
Laterally moving bi-stable MEMS DC-switch for biomedical applicationsReceveur, R.A.M. / Marxer, C. / Duport, F. / Woering, R. / Larik, V. / de Rooij, N.F. et al. | 2004
- 857
-
Fabrication of low directional acoustic transducers for intravascular forward-looking imagingChen, J.J. / Haga, Y. / Akahori, H. / Oshiro, O. / Chihara, K. / Esashi, M. et al. | 2004
- 861
-
Matrix combination of MEMS relaysFabian, J.H. / Niayesh, K. / Kotilainen, S. / Wapelhorst, E. / Niemeyer, L. / Strumpler, R. et al. | 2004
- 865
-
Active-head sliders for flying-height adjustment in magnetic storageSuzuki, K. / Kurita, M. et al. | 2004
- i
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17th IEEE International Conference on Micro Electro Mechanical Systems. Maastricht MEMS 2004 Technical Digest (IEEE Cat. No.04CH37517)| 2004
- ii
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Copyright| 2004
- iii
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Welcome| 2004
- iv
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Executive Organizing Committee for MEMS- 2004| 2004
- li
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The Seventeenth IEEE International Conference on Micro Electro Mechanical Systems - MEMS 2004 (Title Page)| 2004
- vi
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MEMS 2004 Technical Program Committee| 2004
- viii
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Table of Contents - MEMS 2004| 2004
- xlv
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Keyword Index| 2004
- xxxvi
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Author index| 2004