Design for Micro Assembly (English)
- New search for: Bullema, J. E.
- New search for: Veninga, E.
- New search for: Tillie, L.
- New search for: European Society for Precision Engineering and Nanotechnology
- New search for: Bullema, J. E.
- New search for: Veninga, E.
- New search for: Tillie, L.
- New search for: Weck, M.
- New search for: Kunzmann, H.
- New search for: European Society for Precision Engineering and Nanotechnology
In:
International topical conference on precision engineering, micro technology, measurement techniques and equipment; EUSPEN
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31-34
;
2003
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ISBN:
- Conference paper / Print
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Title:Design for Micro Assembly
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Contributors:Bullema, J. E. ( author ) / Veninga, E. ( author ) / Tillie, L. ( author ) / Weck, M. / Kunzmann, H. / European Society for Precision Engineering and Nanotechnology
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Conference:International topical conference on precision engineering, micro technology, measurement techniques and equipment; EUSPEN ; 2003 ; Aachen, Germany
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Published in:
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Publisher:
- New search for: Riehm,
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Place of publication:Voerde:
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Publication date:2003-01-01
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Size:4 pages
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ISBN:
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Type of media:Conference paper
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Type of material:Print
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Language:English
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Keywords:
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Source:
© Metadata Copyright the British Library Board and other contributors. All rights reserved.
Table of contents conference proceedings
The tables of contents are generated automatically and are based on the data records of the individual contributions available in the index of the TIB portal. The display of the Tables of Contents may therefore be incomplete.
- 3
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Metrology and Testing for Micro- to Nano-Technology: A Wish List with Associated ProblemsLeach, R. K. / European Society for Precision Engineering and Nanotechnology et al. | 2003
- 11
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Investigation on the International State of the Art of Micro Production TechnologyHesselbach, J. / Raatz, A. / Wrege, J. / Herrmann, H. / Weule, H. / Fleischer, J. / Buchholz, C. / Tritschler, H. / Knoll, M. / Elsner, J. et al. | 2003
- 23
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Methodological Investigation of the Product Development in Micro TechnologyMarz, J. / Burkardt, N. / Albers, A. / European Society for Precision Engineering and Nanotechnology et al. | 2003
- 27
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Compact Hybrid Optical Devices Realised with Thick SU-8™ Photo-Resist StructuresAnsel, Y. / Gindele, F. / Scheurer, J. / Reinhard, C. / Neumann, F. / European Society for Precision Engineering and Nanotechnology et al. | 2003
- 31
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Design for Micro AssemblyBullema, J. E. / Veninga, E. / Tillie, L. / European Society for Precision Engineering and Nanotechnology et al. | 2003
- 35
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Determination of Mechanical Properties of Micro-Specimens Produced by Micro-Moulding TechniquesAuhorn, M. / Beck, T. / Schulze, V. / Lohe, D. / European Society for Precision Engineering and Nanotechnology et al. | 2003
- 39
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Silicon as a Suitable Material in Precision EngineeringFruhauf, J. / European Society for Precision Engineering and Nanotechnology et al. | 2003
- 43
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Flexural Solid Hinges Etched from SiliconGartner, E. / Fruhauf, J. / Jansch, E. / Reuter, D. / European Society for Precision Engineering and Nanotechnology et al. | 2003
- 47
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Design of Spiral Piezoelectric Cantilever Unimorphs for MicroactuationWilson, S. A. / Haigh, R. D. / Southin, J. E. A. / Dorey, R. A. / Whatmore, R. W. / European Society for Precision Engineering and Nanotechnology et al. | 2003
- 51
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World MEMS Fab: An Overview of the MEMS Industry WorldwideMounier, E. / Eloy, J. C. / Leroy, S. / European Society for Precision Engineering and Nanotechnology et al. | 2003
- 57
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A New Multi-Probe Method for Precision Measurement of Cylindrical FiguresEndo, K. / Gao, W. / Kiyono, S. / European Society for Precision Engineering and Nanotechnology et al. | 2003
- 61
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Improvement of Air Bearing Performance by Means of Laminarization and its Application to Ultraprecision MicromachiningSawada, K. / Kawai, T. / Ebihara, K. / Takeuchi, Y. / European Society for Precision Engineering and Nanotechnology et al. | 2003
- 65
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A Manufacturing System for Ultraprecision Polishing of Slight Curved Optical ComponentsHerold, V. / Jungstand, U. / Schaffel, C. / Waak, T. / European Society for Precision Engineering and Nanotechnology et al. | 2003
- 69
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Ultra-precise Positioning with Nanometric Resolution Using Rolling Guide Way and Leadscrew Mechanism Equipped with Viscous-elastic ElementFukada, S. / Mikoshiba, T. / Inagaki, T. / European Society for Precision Engineering and Nanotechnology et al. | 2003
- 73
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A Miniaturized Fast Tool Servo for Generating Micro-Structured SurfaceTano, M. / Gao, W. / Kiyono, S. / Mito, M. / European Society for Precision Engineering and Nanotechnology et al. | 2003
- 77
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Friction-Free TCP-Kinematic for Tilt Micro ManipulatorNeugebauer, R. / Schubert, A. / Koriath, H.-J. / Schulz, B. / European Society for Precision Engineering and Nanotechnology et al. | 2003
- 81
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Design of a Small Precision LatheLoffler, F. / European Society for Precision Engineering and Nanotechnology et al. | 2003
- 85
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Diamond Turning of Platinum AlloysFeist, C. / Loffler, F. / Waldele, F. / European Society for Precision Engineering and Nanotechnology et al. | 2003
- 89
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Connecting Machine Evaluation and Dynamic Simulation Part1: System Identification and Contouring EvaluationMueller, U. / Nogi, S. / Liu, J. / European Society for Precision Engineering and Nanotechnology et al. | 2003
- 89
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Connecting machine evaluation and dynamic simulation - Part 1: system idenfitication and contouring evaluationMueler, U. / Nogi, S. / Liu, J. et al. | 2003
- 93
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Laser Planar Encoder with High Head-to-Scale Alignment ToleranceWu, C. C. / Chang, C. C. / Kao, C. F. / European Society for Precision Engineering and Nanotechnology et al. | 2003
- 97
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Development of a Practical High-Performance Laser-Guided Deep-Hole Boring Tool - Improvement of Guiding Strategy -Katsuki, A. / Onikura, H. / Sajima, T. / Mohri, A. / Moriyama, T. / Hamano, Y. / European Society for Precision Engineering and Nanotechnology et al. | 2003
- 101
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Enhancement of Operator and System Precision in MicromanipulationShacklock, A. P. / Pickering, J. P. / Spowage, A. C. / European Society for Precision Engineering and Nanotechnology et al. | 2003
- 105
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Linear Displacement of a Miniature Robot Using On/Off Controlled Piezoelectric ElementsTorii, A. / Fukaya, Y. / Doki, K. / Ueda, A. / European Society for Precision Engineering and Nanotechnology et al. | 2003
- 109
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A Piezoelectric Drive Combining a Resonant and a Stepping Positioning ModeDevos, S. / De Volder, M. / Reynaerts, D. / Van Brussel, H. / European Society for Precision Engineering and Nanotechnology et al. | 2003
- 113
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Kinematics and Application of Simultaneous Double-Disk Grinding in Silicon Wafer PlanarizationPietsch, G. J. / Kerstan, M. / European Society for Precision Engineering and Nanotechnology et al. | 2003
- 117
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Coupled Simulation of Structural Dynamics and Control Loops for the Development of Machine ToolsWeck, M. / Queins, M. / Witt, S. / European Society for Precision Engineering and Nanotechnology et al. | 2003
- 121
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Investigations on the Limitations of the FE-Analysis of Micro-DevicesAlbers, A. / Metz, D. / European Society for Precision Engineering and Nanotechnology et al. | 2003
- 125
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Accuracy Improvement of Parallel Kinematic Machine -Compensation Method for Elastic and Thermal Deformation of Machine Frame-Oiwa, T. / European Society for Precision Engineering and Nanotechnology et al. | 2003
- 129
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Study of Friction on Miniature Robot Driven by On/Off Controlled Piezo ElementsTorii, A. / Ueda, A. / Liu, X. / Chetwynd, D. G. / European Society for Precision Engineering and Nanotechnology et al. | 2003
- 133
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Modular OD/ID Grinding Machine with Bearings Preloaded by Inclined Iron Core Linear Electric MotorSlocum, A. / Basaran, M. / Cortesi, R. / Marsh, E. / European Society for Precision Engineering and Nanotechnology et al. | 2003
- 137
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Improving Machine Tool Accuracy by a Direct Position Measurement Using a New Approach of Laser GoniometrySchroder, K. / Ament, C. / Patzelt, S. / Goch, G. / European Society for Precision Engineering and Nanotechnology et al. | 2003
- 141
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Long Stroke Fast Tool Servo with Dynamic Mass Compensation and Hydrostatic BearingsWeck, M. / Henning, J. / Wetter, O. / European Society for Precision Engineering and Nanotechnology et al. | 2003
- 145
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High Dynamic Intelligence - Boring Tool with Local Integrated Control SystemWeck, M. / Zimmerschitt-Halbig, P. / European Society for Precision Engineering and Nanotechnology et al. | 2003
- 149
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Highly Dynamic Turning Machine with PC-based Control System using FireWire BusWeck, M. / Borner, U. / Wetter, O. / European Society for Precision Engineering and Nanotechnology et al. | 2003
- 153
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Adaptable module for five-axis polishingWeck, M. / Wenzel, C. / European Society for Precision Engineering and Nanotechnology et al. | 2003
- 157
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Direct Drive NC Rotary Tilt Unit for the Micro TechnologyKorischem, B. / Holter, H. / European Society for Precision Engineering and Nanotechnology et al. | 2003
- 165
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Combined In-Process Monitoring and Post-Process Measurement Technique for Micro-Machining ApplicationsMorantz, P. / Shore, P. / European Society for Precision Engineering and Nanotechnology et al. | 2003
- 169
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Micro Machining of Cemented Carbide and Polycrystalline Diamond Using Wire-EDMKlocke, F. / Lung, D. / Antonoglou, G. / European Society for Precision Engineering and Nanotechnology et al. | 2003
- 173
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Polishing of Structured SurfacesBrinksmeier, E. / Riemer, O. / Gessenharter, A. / European Society for Precision Engineering and Nanotechnology et al. | 2003
- 177
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Electrodes for Micro-EDMSchmidt, J. / Fleischer, J. / Knoll, M. / European Society for Precision Engineering and Nanotechnology et al. | 2003
- 181
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Prediction and Compensation of Machining Error in Ball-End Milling for Microscale Curved SurfacesLiu, X.-W. / Cheng, K. / Webb, D. / Longstaff, A. P. / Widiyarto, M. H. / Jiang, X.-Q. / Blunt, L. / Ford, D. / European Society for Precision Engineering and Nanotechnology et al. | 2003
- 185
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Joining of a Micro Converter by MS-PVD-Deposited Solder SystemsLugscheider, E. / Bobzin, K. / Erdie, A. / European Society for Precision Engineering and Nanotechnology et al. | 2003
- 189
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Diamond Contour Boring and Raster-Milling of Molds for an Ultraprecision Open Ring Light SystemBrinksmeier, E. / Autschbach, L. / European Society for Precision Engineering and Nanotechnology et al. | 2003
- 193
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Development of Ultraprecise Milling Techniques for the Manufacture of Optical Quality Molds with Continuous and Microstructured SurfacesBrinksmeier, E. / Autschbach, L. / European Society for Precision Engineering and Nanotechnology et al. | 2003
- 197
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Cost - Effective Fabrication of Reflection Optical Gratings for Displacement SensorBlanc, D. / Barbier, A. / Saoudi, R. / Jourlin, Y. / European Society for Precision Engineering and Nanotechnology et al. | 2003
- 201
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Connection Between Pessure Dstribution and Shape Formation in the Polishing Process of Plane SurfacesBergner, D. / Herold, V. / Hoyer, K. / Leopold, J. / European Society for Precision Engineering and Nanotechnology et al. | 2003
- 205
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Prediction of Contact between Grinding Wheel and Workpiece - Clearance Prediction by Using Hydrophone -Yui, A. / Mototani, S. / Okuyama, S. / Kitajima, T. / European Society for Precision Engineering and Nanotechnology et al. | 2003
- 209
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Tool Design for End Milling of Micro Structures in SteelSchmidt, J. / Tritschler, H. / European Society for Precision Engineering and Nanotechnology et al. | 2003
- 213
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Mechanical Drilling of Microholes in Al/Al2O3 CompositesKudla, L. / European Society for Precision Engineering and Nanotechnology et al. | 2003
- 217
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Inspections of Micro Systems in the Field of Micro AssemblyPfeifer, T. / Dussler, G. / Driessen, S. / European Society for Precision Engineering and Nanotechnology et al. | 2003
- 221
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Diamond Turning Compatible Nickel CoatingPeeters, P. G. J. M. / van der Hoorn, G. / van den Broek, D. A. A. / Kurowski, A. / Staikov, G. / European Society for Precision Engineering and Nanotechnology et al. | 2003
- 225
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Industrial Microsystem Electro PlatingPeeters, P. G. J. M. / van den Broek, D. A. A. / de Kubber, D. L. / European Society for Precision Engineering and Nanotechnology et al. | 2003
- 229
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Dynamic Tool Behaviour During Micro Milling of Metallic Composite Materials Measured with a Laser VibrometerUhlmann, E. / Doll, U. / Schauer, K. / European Society for Precision Engineering and Nanotechnology et al. | 2003
- 233
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Germanium Immersion Grating by Using the Ultraprecision Machine Tool by Micro-ELID GrindingSuzuki, T. / Ohmori, H. / Uehara, Y. / Lin, W. / Dai, Y. / Makinouchi, A. / European Society for Precision Engineering and Nanotechnology et al. | 2003
- 237
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Analysis of Cutting Process in Cutting off Composite Materials with SawbladeMizuno, M. / Iyama, T. / European Society for Precision Engineering and Nanotechnology et al. | 2003
- 241
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Cutting Tool Wear Mechanism in Precision Single-Point Diamond Machining of Optical and Bioengineering PolymersLavrynenko, S. / European Society for Precision Engineering and Nanotechnology et al. | 2003
- 245
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Development Desktop Machine Tool Applying ELID Grinding System with Constant Pressure TableUehara, Y. / Ohmori, H. / Susuki, T. / Mitsuishi, N. / Miura, T. / European Society for Precision Engineering and Nanotechnology et al. | 2003
- 249
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Ultraprecision Processing of Solid Immersion Mirror by ELID GrindingOhmori, H. / Suzuki, T. / Uehara, Y. / Shimizu, T. / Ueyanagi, K. / Adashi, Y. / Wakabayashi, K. / European Society for Precision Engineering and Nanotechnology et al. | 2003
- 253
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Precision of Etched Bulk Silicon Structures with Dimensions up to the mm-RangeFruhauf, J. / Kronert, S. / Kruger-Sehm, R. / European Society for Precision Engineering and Nanotechnology et al. | 2003
- 257
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Ultra-Precision Cutting of Titanium Alloy with the Formed Coated-Cemented-Carbide Cutting ToolSakamoto, S. / Yasui, H. / European Society for Precision Engineering and Nanotechnology et al. | 2003
- 261
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Research on Fine Structure of the Micro Groove Cut into Sputtered Thin FilmNakamura, I. / Horii, N. / Sato, Y. / Seki, H. / Sato, M. / European Society for Precision Engineering and Nanotechnology et al. | 2003
- 265
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Modelling of Cutting Tool and Work Material Interface Process in Ultraprecision Single-Point Diamond MachiningMamalis, A. G. / Lavrynenko, S. N. / European Society for Precision Engineering and Nanotechnology et al. | 2003
- 269
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Influences of Crystallographic Orientations in Microcutting of Single Crystalline CopperZhang, C. / Rentsch, R. / Brinksmeier, E. / European Society for Precision Engineering and Nanotechnology et al. | 2003
- 273
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Development of a 3D Packaging Concept for MEMS and Micro ElectronicsVeninga, E. P. / Meuwissen, M. H. H. / Bullema, J. E. / European Society for Precision Engineering and Nanotechnology et al. | 2003
- 277
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Best Simultaneous Clamping for Multi Micro-ElementsBalon, S. A. P. / European Society for Precision Engineering and Nanotechnology et al. | 2003
- 281
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2D and 3D Micro-Engraving of Polymer Foils for Laser Targets ApplicationsLegaie, O. / Bednarczyk, S. / Faese, F. / Perron, G. / European Society for Precision Engineering and Nanotechnology et al. | 2003
- 285
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Discussion of the Ability of Statistical Signal Processing Methods for the Use in Predictive Tool Break Monitoring in Micro MillingFleischer, J. / Schmidt, J. / Ruoff, E. / European Society for Precision Engineering and Nanotechnology et al. | 2003
- 289
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Mechanical Model and Simulation of the Ultrasonic Vibration Assisted Turning ProcessJeng-Shyong, C. / Winn-Chin, J. / gwo-yuh, J. / European Society for Precision Engineering and Nanotechnology et al. | 2003
- 293
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Optimization of Chemical Mechanical Polishing of Thin Silicon WafersGatzen, H. H. / Guenzel, G. / European Society for Precision Engineering and Nanotechnology et al. | 2003
- 297
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Effect of ELID (Electrolytic In-process Dressing) Grinding Method on Corrosion Resistance and Micro-Hardness of Metallic Biomaterials (Ti-6Al-4V Alloy)Mizutani, M. / Komotori, J. / Katahira, K. / Ohmori, H. / Watanabe, Y. / European Society for Precision Engineering and Nanotechnology et al. | 2003
- 301
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Development of On-machine Profile Measuring System with Non-Contact Laser-Probe and its PropertiesWatanabe, Y. / Ohmori, H. / Lin, W. / Katahira, K. / Makinouchi, A. / European Society for Precision Engineering and Nanotechnology et al. | 2003
- 305
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Development of Metal-free Electro-Conductive Resin Bonded Wheel for ELID GrindingItoh, N. / Komazawa, R. / Ohmori, H. / European Society for Precision Engineering and Nanotechnology et al. | 2003
- 309
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Micro-Removal Mechanism of Engineered ToolImai, K. / Hashimoto, H. / European Society for Precision Engineering and Nanotechnology et al. | 2003
- 313
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Ultraprecision Fabrication of Glass Ceramic Mirror by ELID-grinding with Hydrostatic Driving MachineShimizu, T. / Ohmori, H. / Suzuki, T. / Uehara, Y. / Lin, W. / European Society for Precision Engineering and Nanotechnology et al. | 2003
- 317
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ELID Grinding Characteristics for the Machining of Optical Surface Quality for Ceramic Spherical Lens MoldsKatahira, K. / Schmidt, C. / Dambon, O. / Schneider, U. / Klocke, F. / Ohmori, H. / European Society for Precision Engineering and Nanotechnology et al. | 2003
- 321
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Ultraprecision Diamond Cutting of Dies for Micro-Lens Array by ShapingMoriwaki, T. / Iguchi, Y. / Hino, R. / Matsuo, M. / European Society for Precision Engineering and Nanotechnology et al. | 2003
- 325
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Non-Contact Handling in MicrofabricationZah, M. F. / Zimmermann, J. / Zitzmann, A. / Schilp, M. / European Society for Precision Engineering and Nanotechnology et al. | 2003
- 329
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High-Precision Hard Turning of Cemented CarbidesKlocke, F. / Bertalan, C. / European Society for Precision Engineering and Nanotechnology et al. | 2003
- 333
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Advanced Multi Wire Slicing According the "Both Direction" Machinig CinematicKlocke, F. / Huttenhuis, S. / Pahler, D. / Themis, V. / European Society for Precision Engineering and Nanotechnology et al. | 2003
- 337
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Grinding of Microstructures in Hardend Steel with CBN ToolsHoffmeister, H.-W. / Hlavac, M. / European Society for Precision Engineering and Nanotechnology et al. | 2003
- 341
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Design Issues for the Development of Microformed PartsAntonelli, D. / European Society for Precision Engineering and Nanotechnology et al. | 2003
- 345
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ELID Grinding of Neutron Fresnel Lens with Forming WheelLin, W. / Ohmori, H. / Guo, J. / Moriyasu, S. / Iwaki, M. / European Society for Precision Engineering and Nanotechnology et al. | 2003
- 349
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Precision Profile Grinding of High Aspect Ratio MicrostructuresGatzen, H. H. / Morsbach, C. / European Society for Precision Engineering and Nanotechnology et al. | 2003
- 355
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Ultrasonic Plastification Concepts in Micro Injection MouldingMichaeli, W. / Opfermann, D. / Gartner, R. / European Society for Precision Engineering and Nanotechnology et al. | 2003
- 359
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Mass Production of Small Parts Made from Photosensitive ResinKobayashi, Y. / Shirai, K. / European Society for Precision Engineering and Nanotechnology et al. | 2003
- 363
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Microstructuring Glass via Hot EmbossingBurkhardt, T. / Ebeling, P. / Schubert, A. / Semar, W. / European Society for Precision Engineering and Nanotechnology et al. | 2003
- 367
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Metal Micro Parts made by Electroforming on Two-Component Lost Polymer MouldsPiotter, V. / Holstein, N. / Oskotski, E. / Ruprecht, R. / Hausselt, J. / European Society for Precision Engineering and Nanotechnology et al. | 2003
- 371
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Powder Injection Molding for Production of Micro PartsRuprecht, R. / Merz, L. / Orlygsson, G. / Piotter, V. / Rath, S. / Hausselt, J. / European Society for Precision Engineering and Nanotechnology et al. | 2003
- 379
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A Milestone in Nanometrology: Large Area AFM-Scans with the Nanometre Coordinate Measuring Machine (NCMM)Petersen, R. / Rothe, H. / European Society for Precision Engineering and Nanotechnology et al. | 2003
- 383
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High Accuracy Absolute Distance Measurement within 2m using two Diode LasersZhang, C. / Meiners-Hagen, K. / Burgarth, V. / Abou-Zeid, A. / European Society for Precision Engineering and Nanotechnology et al. | 2003
- 387
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Standing Wave Interferometer for Length MeasurementsBuchner, H.-J. / Mandryka, V. / Jager, G. / Bunte, E. / Stiebig, H. / European Society for Precision Engineering and Nanotechnology et al. | 2003
- 391
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Metrological Characterization of a New Three-axis Piezoresistive Micro ProbeBergner, D. / Herold, V. / Hoyer, K. / Leopold, J. / European Society for Precision Engineering and Nanotechnology et al. | 2003
- 395
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Development and Investigation of a Calibration Method for the Depth Measuring System of a Nanoindentation InstrumentHerrmann, K. / Li, Z. / Pohlenz, F. / Menelao, F. / European Society for Precision Engineering and Nanotechnology et al. | 2003
- 395
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Development and investigation of a calibration method for the depth measuring system of a nanoindentation intstrumentHerrmann, K. / Li, Z. / Pohlenz, F. / Menelao, F. et al. | 2003
- 399
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Alternative Measuring Modes for Scanning Probe InstrumentationKoops, K. R. / Dirscherl, K. / European Society for Precision Engineering and Nanotechnology et al. | 2003
- 403
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Developments on the NMi-VSL Traceable Scanning Probe MicroscopeDirscherl, K. / Koops, K. R. / European Society for Precision Engineering and Nanotechnology et al. | 2003
- 407
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Development of Micro Force Setting Standards for Stylus InstrumentsDoering, L. / Brand, U. / Peiner, E. / Fruhauf, J. / Gartner, E. / European Society for Precision Engineering and Nanotechnology et al. | 2003
- 411
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High Precision, Low Force 3D Touch Probe for Measurements on Small ObjectsMeli, F. / Fracheboud, M. / Bottinelli, S. / Bieri, M. / Thalmann, R. / Breguet, J.-M. / Clavel, R. / European Society for Precision Engineering and Nanotechnology et al. | 2003
- 415
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Uncertainty Evaluation of Squareness Measurement by Reversal TechniqueLui, P. K. W. / Huang, H. / Peng, G. S. / Lin, V. T. Y. / European Society for Precision Engineering and Nanotechnology et al. | 2003
- 419
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Real-Time Control for Two-Dimensional Positioning and Scanning with Nanometer PrecisionSu, Y.-Y. / Yeh, H.-C. / Pan, S.-s. / Gwo-Sheng, G.-S. / Tsuei, P. K.-Y. / European Society for Precision Engineering and Nanotechnology et al. | 2003
- 423
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Self-Calibration of Coordinate Measuring MachinesYoo, S. / Kim, S.-W. / European Society for Precision Engineering and Nanotechnology et al. | 2003
- 427
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Design and Manufacture of a Tensile Testing Machine for In-situ Atomic Force Microscope (AFM) Mechanical TestingBamberg, E. / Grippo, C. / Slocum, A. / Boyce, M. C. / European Society for Precision Engineering and Nanotechnology et al. | 2003
- 431
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A new Acoustic Method for Determination of the Effective Air Temperature for Length InterferometersKorpelainen, V. / Hemming, B. / Lehto, H. / Lassila, A. / European Society for Precision Engineering and Nanotechnology et al. | 2003
- 435
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Measurement of 3D Surface Topography Using Non Contact Sensors - Identification of the Macro- and Micro-Geometric ParametersLartigue, C. / Bourdet, P. / Deleuze, S. / European Society for Precision Engineering and Nanotechnology et al. | 2003
- 439
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Homodyne Fiber Coupled Laser VibrometerDontsov, D. / Jager, G. / Buchner, H.-J. / Gerhard, U. / European Society for Precision Engineering and Nanotechnology et al. | 2003
- 443
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Estimation of Work Damaged Layer Using Magnetic Force MicroscopyIchida, Y. / Morimoto, Y. / Sato, R. / European Society for Precision Engineering and Nanotechnology et al. | 2003
- 447
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Remote Calibration of Frequency-Stabilized Lasers in CMS-NMLLin, T.-Y. / Cheng, K.-Y. / Lu, S.-H. / European Society for Precision Engineering and Nanotechnology et al. | 2003
- 451
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Precision Plane Angle Measurements in Dynamic Mode by Means of Optical EncoderGoncharov, N. V. / Filatov, Y. V. / European Society for Precision Engineering and Nanotechnology et al. | 2003
- 455
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Comparative Investigation of Optical Techniques for Topography Measurement of Rough Plastic SurfacesBariani, P. / Hansen, H. N. / Theilade, U. R. A. / De Chiffre, L. / European Society for Precision Engineering and Nanotechnology et al. | 2003
- 459
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Quality of Topographical Micro Replication in Injection MouldingTheilade, U. R. A. / Hansen, H. N. / Bariani, P. / De Chiffre, L. / Kjaer, E. / European Society for Precision Engineering and Nanotechnology et al. | 2003
- 463
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Novel Edge Profile Measurement for Micro Cutting Tool by Laser DiffractionKhajornrungruang, P. / Miyoshi, T. / Takaya, Y. / Takahashi, S. / Harada, T. / Isago, S. / European Society for Precision Engineering and Nanotechnology et al. | 2003
- 467
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Further Improvement of the Measurement Capability of the Metrological Scanning Probe Microscope Veritekt CDai, G. / Pohlenz, F. / Hasche, K. / European Society for Precision Engineering and Nanotechnology et al. | 2003
- 471
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Development and Validation of a Novel Approach to the Calibration of Internal and External Threads on Coordinate Measuring MachinesCarmignato, S. / De Chiffre, L. / Savio, E. / Tosello, G. / European Society for Precision Engineering and Nanotechnology et al. | 2003
- 475
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International Comparison in the Field of Nanometrology: Step Height (NANO2)Koenders, L. / Wilkening, G. / European Society for Precision Engineering and Nanotechnology et al. | 2003
- 479
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Heterodyne Laser Interferometry Using a Single Polarisation-Preserving Optical FibreKnarren, B. A. W. H. / Haitjema, H. / Schellekens, P. H. J. / European Society for Precision Engineering and Nanotechnology et al. | 2003
- 483
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CAD-Based Measurements in Profile Tolerances VerificationMeneghello, R. / Concheri, G. / Savio, E. / European Society for Precision Engineering and Nanotechnology et al. | 2003
- 487
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Surface Property Mapping and CharacterisationLiu, X. / Zhang, J. / Sun, T. / European Society for Precision Engineering and Nanotechnology et al. | 2003
- 491
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Influence of Nanostandard Properties on Calibration Procedures of SPMsDziomba, T. / Hassler-Grohne, W. / Bosse, H. / Danzebrink, H. / Wilkening, G. / European Society for Precision Engineering and Nanotechnology et al. | 2003
- 495
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Nano-Roughness Standards With a Very Low Roughness ValueGatzen, H. H. / Kourouklis, C. / European Society for Precision Engineering and Nanotechnology et al. | 2003
- 499
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Measurement of line scales and linear encoders on the PTB Nanometer ComparatorFlugge, J. / Koning, R. / Bosse, H. / European Society for Precision Engineering and Nanotechnology et al. | 2003
- 503
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New Approaches in Interferometric Analysis of Microstructured SurfacesSchneefuss, K. / Pfeifer, T. / European Society for Precision Engineering and Nanotechnology et al. | 2003
- 507
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Development of a Simulation Tool for the Analysis of Workshop Influences on Interferometrical MeasurementsDorner, D. / Bai, A. / Pfeifer, T. / European Society for Precision Engineering and Nanotechnology et al. | 2003
- 511
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Development of a Ultra-Fast Confocal Scanner for High Quality 3D-InspectionSchick, A. / Neubauer, S. / European Society for Precision Engineering and Nanotechnology et al. | 2003
- 515
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Photogrammetric 3D-Measurement of Microstructures from SEM imagesMolnar, G. / Tutsch, R. / Fischer, G. / European Society for Precision Engineering and Nanotechnology et al. | 2003
- 519
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Laser Optical Surface Characterization of Complex Optical Elements in the Nanometric RangePatzelt, S. / Bosse, S. / Goch, G. / European Society for Precision Engineering and Nanotechnology et al. | 2003
- 523
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Uncertainty Contributions Due to Different Measurement Strategies Applied to Optomechanical Hole PlateMorace, R. E. / Hansen, H. N. / De Chiffre, L. / European Society for Precision Engineering and Nanotechnology et al. | 2003
- 527
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Retrieval of the Spatial Frequency Profile of a Laser Written Grating ScaleJourlin, Y. / Tishchenko, A. V. / Pigeon, F. / Bouchet, G. / Parriaux, O. / Schimansky, C. / Buchner, C. / European Society for Precision Engineering and Nanotechnology et al. | 2003
- 531
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Optical Metrology for MEMS CharacterizationPasop, F. / Novak, E. / Browne, T. / European Society for Precision Engineering and Nanotechnology et al. | 2003
- 535
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Calibration of Rings Using Multi-Step and Reversal Techniques on CMMsSavio, E. / Tosello, G. / De Chiffre, L. / Zeleny, V. / Skalnik, P. / European Society for Precision Engineering and Nanotechnology et al. | 2003
- 539
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Validation of Calibration Procedures for Freeform Parts on CMMsSavio, E. / De Chiffre, L. / European Society for Precision Engineering and Nanotechnology et al. | 2003
- 543
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Improved Accuracy with Fibre Optic Laser Scale System and Real Time Compensation for Refractive IndexKrug, R. / European Society for Precision Engineering and Nanotechnology et al. | 2003