Ion implantation into Si covered by HfO~2 or SiO~2 film [5774-39] (English)
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In:
5th international conference on thin film physics and applications
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176-179
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2004
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ISBN:
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ISSN:
- Conference paper / Print
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Title:Ion implantation into Si covered by HfO~2 or SiO~2 film [5774-39]
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Contributors:
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Conference:International conference; 5th, 5th international conference on thin film physics and applications ; 2004 ; Shanghai, China
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Published in:PROCEEDINGS- SPIE THE INTERNATIONAL SOCIETY FOR OPTICAL ENGINEERING ; 5774 ; 176-179
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Publisher:
- New search for: SPIE- The International Society for Optical Engineering
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Publication date:2004-01-01
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Size:4 pages
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ISBN:
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ISSN:
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Type of media:Conference paper
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Type of material:Print
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Language:English
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Keywords:
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Source:
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Table of contents conference proceedings
The tables of contents are generated automatically and are based on the data records of the individual contributions available in the index of the TIB portal. The display of the Tables of Contents may therefore be incomplete.
- 1
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Electromigration in VLSI of thin film interconnectsTu, K. N. et al. | 2004
- 1
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Electromigration in VLSI of thin film interconnects (Invited Paper) [5774-01]Tu, K. N. / SPIE et al. | 2004
- 5
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Thin films in silicon carbide semiconductor devicesOstling, Mikael / Koo, Sang-Mo / Lee, Sang-Kwon / Zetterling, Carl-Mikael / Grishin, Alexander et al. | 2004
- 5
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Thin films in silicon carbide semiconductor devices (Invited Paper) [5774-02]Ostling, M. / Koo, S.-M. / Lee, S.-K. / Zetterling, C.-M. / Grishin, A. / SPIE et al. | 2004
- 11
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Making ferromagnetic semiconductors out of III-V nitride semiconductors (Invited Paper) [5774-03]Makino, H. / Kim, J. J. / Chen, P. P. / Cho, M. W. / Yao, T. / SPIE et al. | 2004
- 11
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Making ferromagnetic semiconductors out of III-V nitride semiconductorsMakino, Hisao / Kim, J. J. / Chen, P. P. / Cho, M. W. / Yao, Takafumi et al. | 2004
- 17
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Fabrication of magnetic nanostructures and devices by AFM nanolithography techniqueTakemura, Yasushi / Shirakashi, Jun-ichi et al. | 2004
- 17
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Fabrication of magnetic nanostructures and devices by AFM nanolithography technique (Invited Paper) [5774-04]Takemura, Y. / Shirakashi, J. / SPIE et al. | 2004
- 23
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The second law of thermodynamics for advanced thin filmsWang, Ji-Tao / Zhang, David W. / Yu, Wei-Feng et al. | 2004
- 23
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The second law of thermodynamics for advanced thin films (Invited Paper) [5774-05]Wang, J.-T. / Zhang, D. W. / Yu, W.-F. / SPIE et al. | 2004
- 29
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MBE growth and properties of InN and InN-based diluted magnetic semiconductorsChen, P. P. / Makino, H. / Lu, Wei / Yao, Takafumi et al. | 2004
- 29
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MBE growth and properties of InN and InN-based diluted magnetic semiconductors (Invited Paper) [5774-06]Chen, P. P. / Makino, H. / Lu, W. / Yao, T. / SPIE et al. | 2004
- 34
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Formation and characteristics of quantum dots of wide-bandgap II-VI semiconductor (Invited Paper) [5774-07]Fan, X. W. / Shan, C. X. / Yang, Y. / Zhang, J. Y. / Liu, Y. C. / Lu, Y. M. / Shen, D. Z. / SPIE et al. | 2004
- 34
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Formation and characteristics of quantum dots of wide-bandgap II-VI semiconductorFan, Xi Wu / Shan, C. X. / Yang, Yujing / Zhang, J. Y. / Liu, Yi C. / Lu, You M. / Shen, D. Z. et al. | 2004
- 39
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The characteristic criterion of the growth of metallic films from discontinuous to continuous [5774-08]Fan, P. / Qi, H.-J. / Yi, K. / Shao, J.-D. / Fan, Z.-X. / SPIE et al. | 2004
- 39
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The characteristic criterion of the growth of metallic films from discontinuous to continuousFan, Ping / Qi, Hong-Ji / Yi, Kui / Shao, Jian-Da / Fan, Zheng-Xiu et al. | 2004
- 43
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Ballistic emission spectroscopy and imaging of a buried metal-organic interfaceChandrasekhar, N. / Troadec, Cedric / Kunardi, Linda et al. | 2004
- 43
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Ballistic emission spectroscopy and imaging of a buried metal-organic interface [5774-09]Chandrasekhar, N. / Troadec, C. / Kunardi, L. / SPIE et al. | 2004
- 48
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Comparative study on Al-doped ZnO films sputtered with ceramics and metal targetsShao, Le-Xi / Liu, Xiao-Ping / Hwang, Huey-Liang et al. | 2004
- 48
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Comparative study on Al-doped ZnO films sputtered with ceramics and metal targets [5774-10]Shao, L.-X. / Liu, X.-P. / Hwang, H.-L. / SPIE et al. | 2004
- 52
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Monte Carlo study of Kerr effect in Ni~xSiO~2~(~1~-~x~) granular films [5774-11]Yang, Y. / Lin, Y. / Huang, Z. / Du, Y. / SPIE et al. | 2004
- 52
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Monte Carlo study of Kerr effect in NixSi02(1-x)granular filmsYang, Yanmin / Lin, Yingbin / Huang, Zhi-gao / Du, Youwei et al. | 2004
- 56
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Size and step effects of hysteresis in mixed magnetic filmsWeng, Zhenzhen / Huang, Zhi-gao et al. | 2004
- 56
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Size and step effects of hysteresis in mixed magnetic films [5774-12]Weng, Z. / Huang, Z. / SPIE et al. | 2004
- 61
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Effects of the next-nearest-neighbor interaction on the phase transition of magnetic multilayersJiang, Liqin / Feng, Qian / Huang, Zhi-gao et al. | 2004
- 61
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Effects of the next-nearest-neighbor interaction on the phase transition of magnetic multilayers [5774-13]Jiang, L. / Feng, Q. / Huang, Z. / SPIE et al. | 2004
- 65
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Mesostructure of Fe-based ribbon influenced by inner stress [5774-14]Fang, Y. Z. / Wu, W. H. / Zheng, J. J. / Wu, F. M. / Lin, G. J. / Wang, Y. K. / Pan, J. W. / SPIE et al. | 2004
- 65
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Mesostructure of Fe-based ribbon influenced by inner stressFang, Yun Z. / Wu, W. H. / Zheng, J. J. / Wu, F. M. / Lin, G. J. / Wang, Y. K. / Pan, J. W. et al. | 2004
- 69
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Ab initio study of electronic properties of CoSi~2 and NiSi~2 in the fluorite structure [5774-15]Wang, T. / Dai, Y. B. / Ouyang, S. K. / Shen, H. S. / Wu, J. S. / SPIE et al. | 2004
- 69
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Ab initio study of electronic properties of CoSi2and NiSi2in the fluorite structureWang, Tao / Dai, Yong Bin / Ouyang, S. K. / Shen, He Sheng / Wu, Jian S. et al. | 2004
- 74
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Formation of GaAs hollow above InAs quantum dotsZhan, Hua H. / Kang, Jun Y. et al. | 2004
- 74
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Formation of GaAs hollow above InAs quantum dots [5774-16]Zhan, H. H. / Kang, J. Y. / SPIE et al. | 2004
- 78
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Improve the charge stability of SiO~2 films by plasma treatment and ion implantation [5774-17]Yuan, N. / Li, J. / SPIE et al. | 2004
- 78
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Improve the charge stability of SiO2films by plasma treatment and ion implantationYuan, Ningyi / Li, Jinhua et al. | 2004
- 82
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Photovoltaic feature of boron-doped nanocrystalline carbon films on siliconMa, Z. Q. / Zhang, Q. et al. | 2004
- 82
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Photovoltaic feature of boron-doped nanocrystalline carbon films on silicon [5774-18]Ma, Z. Q. / Zhang, Q. / SPIE et al. | 2004
- 87
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A novel application of the solid electrolyte thin film for preparing copper nanowiresShi, Shuo / Sun, Jia-Lin / Zhang, Guo-Sheng / Zhang, Jian-Hong / Guo, Ji-Hua / Wang, Zheng-Ping et al. | 2004
- 87
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A novel application of the solid electrolyte thin film for preparing copper nanowires [5774-19]Shi, S. / Sun, J.-L. / Zhang, G.-S. / Zhang, J.-H. / Guo, J.-H. / Wang, Z.-P. / SPIE et al. | 2004
- 91
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Energy resolution in x-ray detecting microstrip gas chamber fabricated on CVD diamond films [5774-20]Zhang, M. / Xia, Y. / Wang, L. / Yang, Y. / Gu, B. / SPIE et al. | 2004
- 91
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Energy resolution in x-ray detecting microstrip gas chamber fabricated on CVD diamond filmsZhang, Minglong / Xia, Yiben / Wang, Linjun / Yang, Yin / Wang, Lin / Gu, Beibei et al. | 2004
- 95
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Deposition and characterizations of GeCN thin filmsXu, Fuchun / Kang, Jun Yong et al. | 2004
- 95
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Deposition and characterizations of GeCN thin films [5774-21]Xu, F. / Kang, J. Y. / SPIE et al. | 2004
- 99
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Theoretical analysis of atom focusing for nanostructure fabricationChen, Xian Z. / Xing, Ting W. / Yu, Guo B. / Chen, Xu N. / Yao, Han M. et al. | 2004
- 99
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Theoretical analysis of atom focusing for nanostructure fabrication [5774-22]Chen, X. Z. / Xing, T. W. / Yu, G. B. / Chen, X. N. / Yao, H. M. / SPIE et al. | 2004
- 103
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MBE growth and magnetoresistance properties of PrSrMnO3films on NdGaO3(100) substrateChen, P. P. / Liu, G. J. / Makino, H. / Lu, Wei / Yao, Takafumi et al. | 2004
- 103
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MBE growth and magnetoresistance properties of PrSrMnO~3 films on NdGaO~3(100) substrate [5774-23]Chen, P. P. / Liu, G. J. / Makino, H. / Lu, W. / Yao, T. / SPIE et al. | 2004
- 107
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Thickness effects on microwave properties and ferromagnetic resonance of Fe-Co-B magnetic thin films [5774-24]Yang, Y. / Tian, W. / Lu, G. / Zhang, B. / Xu, W. / Lu, M. / Lu, H. / SPIE et al. | 2004
- 107
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Thickness effects on microwave properties and ferromagnetic resonance of Fe-Co-B magnetic thin filmsYang, Yi / Tian, Wei / Lu, Gang / Zhang, Baoshan / Xu, Weidong / Lu, Mu / Lu, Huaixian et al. | 2004
- 111
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Calculation of temperature field of CO2laser conditioning of fused silicaWei, Chaoyang / He, Hongbo / Shao, Jianda / Deng, Zhi / Shen, Jian / Fan, Zhengxiu et al. | 2004
- 111
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Calculation of temperature field of CO~2 laser conditioning of fused silica [5774-25]Wei, C. / He, H. / Shao, J. / Deng, Z. / Shen, J. / Fan, Z. / SPIE et al. | 2004
- 116
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Efficient field emission from porous silicon [5774-26]Zhang, Y. / Yu, K. / Luo, L. / Zhu, Z. / SPIE et al. | 2004
- 116
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Efficient field emission from porous siliconZhang, Yongsheng / Yu, Ke / Luo, Laiqiang / Zhu, Ziqiang et al. | 2004
- 120
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Effect of high-energy ball milling on morphology and field emission properties of multi-walled carbon nanotubesLuo, Laiqiang / Yu, Ke / Zhang, Yongsheng / Zhu, Ziqiang / Chen, Shaoqiang et al. | 2004
- 120
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Effect of high-energy ball milling on morphology and field emission properties of multi-walled carbon nanotubes [5774-27]Luo, L. / Yu, K. / Zhang, Y. / Zhu, Z. / Chen, S. / SPIE et al. | 2004
- 124
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Piezoelectric PZT thin films derived by sol-gel techniques (Invited Paper) [5774-28]Cheng, J. / Meng, Z. / Cross, L. E. / SPIE et al. | 2004
- 124
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Piezoelectric PZT thin films derived by sol-gel techniquesCheng, Jinrong / Meng, Zhongyan / Cross, L. E. et al. | 2004
- 130
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Correlation between the optical and electrical parameters of ZnSe thin films (Invited Paper) [5774-29]Venkatachalam, S. / Jeyachandran, Y. L. / SenthilKumar, V. / Mangalaraj, D. / Narayandass, S. K. / Kim, K. / Yi, J. / SPIE et al. | 2004
- 130
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Correlation between the optical and electrical parameters of ZnSe thin filmsVenkatachalam, S. / Jeyachandran, Y. L. / SenthilKumar, V. / Mangalaraj, Devanesan / Narayandass, Sa. K. / Kim, K. / Yi, J. et al. | 2004
- 136
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Fabrication of SiGe-on-insulator and applications for strained Si (Invited Paper) [5774-30]Lin, C. / Liu, W. / An, Z. / Di, Z. / Zhang, M. / SPIE et al. | 2004
- 136
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Fabrication of SiGe-on-insulator and applications for strained SiLin, Chenglu / Liu, Weili / An, Zhenghua / Di, Zengfeng / Zhang, Miao et al. | 2004
- 142
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Investigation of laser-induced damage of dielectric optical coatingsHe, Hong-Bo / Zhao, Yuan-An / Zhang, Dong-Ping / Gao, Wei-Dong / Zhan, Mei-Qiong / Fan, Zheng-Xiu / Shao, Jian-Da et al. | 2004
- 142
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Investigation of laser-induced damage of dielectric optical coatings (Invited Paper) [5774-31]He, H.-B. / Zhao, Y.-A. / Zhang, D.-P. / Gao, W.-D. / Zhan, M.-Q. / Fan, Z.-X. / Shao, J.-D. / SPIE et al. | 2004
- 148
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Vanadium oxide thin films prepared by RF magnetron sputtering method [5774-32]Li, Z. / Wu, S. / Li, J. / Guo, D. / Xu, F. / SPIE et al. | 2004
- 148
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Vanadium oxide thin films prepared by RF magnetron sputtering methodLi, Zhishuan / Wu, Suntao / Li, Jing / Guo, Donghui / Xu, Fuchun et al. | 2004
- 152
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The nanostructures and optical properties of ZnO films by RF magnetron sputteringHuang, Bo / Wu, Suntao / Li, Jing / Sun, Shigang / Tian, Zhong-Qun et al. | 2004
- 152
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The nanostructures and optical properties of ZnO films by RF magnetron sputtering [5774-33]Huang, B. / Wu, S. / Li, J. / Sun, S. / Tian, Z. / SPIE et al. | 2004
- 156
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The study on the interface adhesion comparison of MgF~2, Al~2O~3, SiO~2, and Ag thin films [5774-34]Xu, X. / Tang, Z. / Shao, J. D. / Fan, Z. / SPIE et al. | 2004
- 156
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The study on the interface adhesion comparison of MgF2, Al2O3, SiO2, and Ag thin filmsXu, Xueke / Tang, Zhaosheng / Shao, Jian Da / Fan, Zhengxiu et al. | 2004
- 160
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Study on the structure and ferroelectric properties of sol-gel-derived Pb(Mg1/3Nb2/3)O3-PbTiO3thin filmsLiu, Aiyun / Meng, Xiangjian / Sun, Jinglan / Chu, Jun-Hao et al. | 2004
- 160
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Study on the structure and ferroelectric properties of sol-gel-derived Pb(Mg~1~/~3Nb~2~/~3)O~3-PbTiO~3 thin films [5774-35]Liu, A. / Meng, X. / Sun, J. / Chu, J. / SPIE et al. | 2004
- 164
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Heat-treating effect on the properties of Pb1-xLax(Zr0.4Ti0.6)O3ferroelectric thin film prepared by a modified sol-gel processShi, Fuwen / Wang, Genshui / Meng, Xiangjian / Sun, Jinglan / Chu, Jun-Hao et al. | 2004
- 164
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Heat-treating effect on the properties of Pb~1~-~xLa~x(Zr~0~.~4Ti~0~.~6)O~3 ferroelectric thin film prepared by a modified sol-gel process [5774-36]Shi, F. / Wang, G. / Meng, X. / Sun, J. / Chu, J. / SPIE et al. | 2004
- 168
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Optical properties of BaTiO3and Mn:BaTiO3thin films deposited on fused quartz and silicon substrates using a sol-gel methodLi, Yawei / Sun, Jing-Lan / Meng, Xiangjian / Zhang, Weifeng / Chu, Jun-Hao et al. | 2004
- 168
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Optical properties of BaTiO~3 and Mn:BaTiO~3 thin films deposited on fused quartz and silicon substrates using a sol-gel method [5774-37]Li, Y. / Sun, J.-L. / Meng, X. / Zhang, W. / Chu, J. / SPIE et al. | 2004
- 172
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Doped (AlxGa1-x)0.5In0.5P alloys grown by MOCVDLi, Zhonghui / Niu, Hanben et al. | 2004
- 172
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Doped (Al~xGa~1~-~x)~0~.~5In~0~.~5P alloys grown by MOCVD [5774-38]Li, Z. / Niu, H. / SPIE et al. | 2004
- 176
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Ion implantation into Si covered by HfO~2 or SiO~2 film [5774-39]Shi, H. / Yu, M. / Huang, R. / Zhang, X. / Wang, Y. / SPIE et al. | 2004
- 176
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Ion implantation into Si covered by HfO2or SiO2filmShi, Hao / Yu, Min / Huang, Ru / Zhang, Xing D. / Wang, Yangyuan et al. | 2004
- 180
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Influence of different bottom electrodes to microstructure and electrical properties of Pb(Zr0.52Ti0.48)O3ferroelectric filmsLi, Jian-Kang / Yao, Xi / Zhang, Liangying et al. | 2004
- 180
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Influence of different bottom electrodes to microstructure and electrical properties of Pb(Zr~0~.~5~2Ti~0~.~4~8)O~3 ferroelectric films [5774-40]Li, J. / Yao, X. / Zhang, L. / SPIE et al. | 2004
- 184
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The preparation of the single-phase perovskite conductive LaNiO3films on different substratesLi, Jian-Kang / Yao, Xi / Zhang, Liangying et al. | 2004
- 184
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The preparation of the single-phase perovskite conductive LaNiO~3 films on different substrates [5774-41]Li, J. / Yao, X. / Zhang, L. / SPIE et al. | 2004
- 188
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Photoelectric properties of unsymmetrical metal-free phthalocyanine and C60 complex thin films [5774-42]Yang, Z. / Shen, Y. / Zhang, J. / SPIE et al. | 2004
- 188
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Photoelectric properties of unsymmetrical metal-free phthalocyanine and C60 complex thin filmsYang, Zhigang / Shen, Yue / Zhang, Jiancheng et al. | 2004
- 192
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Gallium phosphide protective infrared films on zinc sulphide deposited by RF-planar magnetron sputtering [5774-43]Li, Y. / Liu, Z. / Cui, H. / SPIE et al. | 2004
- 192
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Gallium phosphide protective infrared films on zinc sulphide deposited by RF-planar magnetron sputteringLi, Yangping / Liu, Zhengtang / Cui, Hu et al. | 2004
- 196
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The phase transformation and mechanical behavior of NiTi thin filmsYuan, Zhenyu / Cheng, Xiulan / Xu, Dong / Ye, Zhican / Zhang, YaFei / Cai, Bingchu et al. | 2004
- 196
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The phase transformation and mechanical behavior of NiTi thin films [5774-44]Yuan, Z. / Cheng, X. / Xu, D. / Ye, Z. / Zhang, Y. / Cai, B. / SPIE et al. | 2004
- 200
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Microstructure and properties of sol-gel-derived (La,Sr)CoO3thin film with compositional fluctuation La/Sr ratioLu, Wei / Zheng, Ping / Meng, Zhongyan / Wu, Wenbiao et al. | 2004
- 200
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Microstructure and properties of sol-gel-derived (La,Sr)CoO~3 thin film with compositional fluctuation La/Sr ratio [5774-45]Lu, W. / Zheng, P. / Meng, Z. / Wu, W. / SPIE et al. | 2004
- 204
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Thickness-dependent electrical properties of lead zirconate titanate thin films on titanium substrates [5774-46]Zheng, P. / Cheng, J. / Lu, W. / Meng, Z. / SPIE et al. | 2004
- 204
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Thickness-dependent electrical properties of lead zirconate titanate thin films on titanium substratesZheng, Ping / Cheng, Jinrong / Lu, Wei / Meng, Zhongyan et al. | 2004
- 208
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Influence of buffer layer on dielectric properties of (Ba~1~-~xSr~x)TiO~3 thin films [5774-47]Peng, D. / Meng, Z. / Wu, W. / SPIE et al. | 2004
- 208
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Influence of buffer layer on dielectric properties of (Ba1-xSrx)TiO3thin filmsPeng, Dongwen / Meng, Zhongyan / Wu, Wenbiao et al. | 2004
- 212
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Study on the stress of silicon nitride thin films prepared by PECVD [5774-48]Yu, Y. / Luo, Z. / Weng, X. / SPIE et al. | 2004
- 212
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Study on the stress of silicon nitride thin films prepared by PECVDYu, Ying / Luo, Zongzi / Weng, Xinqiao et al. | 2004
- 216
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Photoconductivity of azo-polymer/ copper-phthalocyanine/ diamond-like carbon films [5774-49]Shen, Y. / Zhang, J. / Xia, Y. / Gu, F. / Shen, W. / Yang, Z. / SPIE et al. | 2004
- 216
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Photoconductivity of azo-polymer/copper-phthalocyanine/diamond-like carbon filmsShen, Yue / Zhang, Jiancheng / Xia, Yiben / Gu, Feng / Shen, Weiping / Yang, Zhigang et al. | 2004
- 220
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The preparation of diamond films on new composite ceramic substrates of diamond and alumina [5774-50]Shen, Y. / Xia, Y. / Gu, F. / Su, Q. / Zhang, J. / SPIE et al. | 2004
- 220
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The preparation of diamond films on new composite ceramic substrates of diamond and aluminaShen, Yue / Xia, Yiben / Gu, Feng / Su, Qingfeng / Zhang, Jiancheng et al. | 2004
- 224
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Ferroelectricity of BiFeO3prepared by the chemical solution deposition methodYang, Caixia / Lin, Yinyin / Tang, Ting-ao et al. | 2004
- 224
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Ferroelectricity of BiFeO~3 prepared by the chemical solution deposition method [5774-51]Yang, C. / Lin, Y. / Tang, T. / SPIE et al. | 2004
- 228
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The studies of RT electrical resistivities of LaNiO3-δthin films by RF magnetron sputtering with different percentage of oxygen partial pressure at various substrate temperaturesZhang, X. D. / Meng, Xiang J. / Sun, Jing L. / Wang, Gen S. / Lin, Tie / Chu, Jun H. et al. | 2004
- 228
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The studies of RT electrical resistivities of LaNiO~3~-~d~e~l~t~a thin films by RF magnetron sputtering with different percentage of oxygen partial pressure at various substrate temperatures [5774-52]Zhang, X. D. / Meng, X. J. / Sun, J. L. / Wang, G. S. / Lin, T. / Chu, J. H. / SPIE et al. | 2004
- 232
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Formation mechanism of the VO2polycrystalline film prepared by modified ion-beam enhanced depositionLi, Jinhua / Yuan, Ningyi et al. | 2004
- 232
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Formation mechanism of the VO~2 polycrystalline film prepared by modified Ion-beam-enhanced deposition [5774-53]Li, J. / Yuan, N. / SPIE et al. | 2004
- 237
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The transmission of organic group in solid electrolyte filmShi, Shuo / Zhang, Guo-Sheng / Sun, Jia-Lin / Zhang, Jian-Hong / Guo, Ji-Hua / Wang, Zheng-Ping et al. | 2004
- 237
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The transmission of organic group in solid electrolyte film [5774-54]Shi, S. / Zhang, G.-S. / Sun, J.-L. / Zhang, J.-H. / Guo, J.-H. / Wang, Z.-P. / SPIE et al. | 2004
- 241
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Thickness effect of LaNiO3buffer layer on microstructure and electrical properties of PZT thin filmsDu, Wenjuan / Lu, Wei / Cheng, Jinrong / Meng, Zhongyan et al. | 2004
- 241
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Thickness effect of LaNiO~3 buffer layer on microstructure and electrical properties of PZT thin films [5774-55]Du, W. / Lu, W. / Cheng, J. / Meng, Z. / SPIE et al. | 2004
- 246
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Structural and electrical properties of Pb(Zr,Ti)O~3 thin films on NiCr substrate modified by LaNiO~3 and PbTiO~3 buffer layers [5774-56]He, L. / Cheng, J. / Meng, Z. / SPIE et al. | 2004
- 246
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Structural and electrical properties of Pb(Zr,Ti)O3thin films on NiCr substrate modified by LaNiO3and PbTiO3buffer layersHe, Liang / Cheng, Jinrong / Meng, Zhongyan et al. | 2004
- 250
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Tunable properties of Pb~xSr~1~-~xTiO~3 thin films [5774-57]Ni, B. / Peng, D. / Wu, W. / Meng, Z. / SPIE et al. | 2004
- 250
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Tunable properties of PbxSr1-xTiO3thin filmsNi, Boyu / Peng, Dongwen / Wu, Wenbiao / Meng, Zhongyan et al. | 2004
- 254
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Preparation and characterization of chemically deposited SnS thin filmsXu, Jing / Wei, Guangpu / Shi, Weiming / Chen, Pengfei / Xue, Yuchun et al. | 2004
- 254
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Preparation and characterization of chemically deposited SnS thin films [5774-58]Xu, J. / Wei, G. / Shi, W. / Chen, P. / Xue, Y. / SPIE et al. | 2004
- 258
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Preparation and characterization of Nd-doped Bi~4Ti~3O~1~2 thin films by pulsed laser deposition method [5774-59]Wu, W. B. / Meng, Z. Y. / Shibuya, A. / Okuyama, M. / SPIE et al. | 2004
- 258
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Preparation and characterization of Nd-doped Bi4Ti3O12thin films by pulsed laser deposition methodWu, Wen B. / Meng, Zhong Y. / Shibuya, A. / Okuyama, M. et al. | 2004
- 263
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Synthesis and applications of ordered mesoporous tin dioxide thin films [5774-60]Zhou, X. / Zhang, J. / Shen, Y. / SPIE et al. | 2004
- 263
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Synthesis and applications of ordered mesoporous tin dioxide thin filmsZhou, Xiao'an / Zhang, Jiancheng / Shen, Yue et al. | 2004
- 267
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Preparation and properties of hydrophobic organic-inorganic silica hybrid filmsYao, Lanfang / Wu, Guangming / Wu, Zhaofeng / Qu, Dian / Wang, Guoqing / Shen, Jun / Wang, Jue et al. | 2004
- 267
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Preparation and properties of hydrophobic organic-inorganic silica hybrid films [5774-61]Yao, L. / Wu, G. / Wu, Z. / Qu, D. / Wang, G. / Shen, J. / Wang, J. / SPIE et al. | 2004
- 271
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Preparation of low-density porous silica thin films by ambient pressure drying [5774-62]Yao, L. / Shen, J. / Wu, G. / Ni, X. / Wang, J. / Zhou, B. / SPIE et al. | 2004
- 271
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Preparation of low-density porous silica thin films by ambient pressure dryingYao, Lanfang / Shen, Jun / Wu, Guangming / Ni, Xingyuan / Wang, Jue / Zhou, Bin et al. | 2004
- 275
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MgB2thick film grown on stainless steel substrate with ductilityFeng, Qing-rong / Chen, Chinping / Lu, Ying / Jia, Zhang / Guo, Jing-pu / Wang, Xiao-nan / Zhu, Meng / Xu, Jun / Wang, Yong-Zhong et al. | 2004
- 275
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MgB~2 thick film grown on stainless steel substrate with ductility [5774-63]Feng, Q. / Chen, C. / Lu, Y. / Jia, Z. / Guo, J. / Wang, X. / Zhu, M. / Xu, J. / Wang, Y. / SPIE et al. | 2004
- 279
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Structural ordering in amorphous silicon thin film due to post hydrogen plasma annealingRui, Yunjun / Mei, Jiaxin / Xu, Jun / Yang, Ling / Li, Wei / Chen, Kunji et al. | 2004
- 279
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Structural ordering in amorphous silicon thin film due to post hydrogen plasma annealing [5774-64]Rui, Y. / Mei, J. / Xu, J. / Yang, L. / Li, W. / Chen, K. / SPIE et al. | 2004
- 283
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Characterization of vacuum-evaporated In70Se30thin filmsViswanathan, C. / Gopal, S. / Karunagaran, B. / Mangalaraj, Devanesan / Narayandass, Sa. K. / Yi, J. et al. | 2004
- 283
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Characterization of vacuum-evaporated In~7~0Se~3~0 thin films [5774-65]Viswanathan, C. / Gopal, S. / Karunagaran, B. / Mangalaraj, D. / Narayandass, S. K. / Yi, J. / SPIE et al. | 2004
- 287
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Effect of oxygen implantation on the characteristic of Ge~2Sb~2Te~5 phase change film [5774-66]Liu, B. / Song, Z. / Zhang, T. / Feng, S. / Chen, B. / SPIE et al. | 2004
- 287
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Effect of oxygen implantation on the characteristic of Ge2Sb2Te5phase change filmLiu, Bo / Song, Zhitang / Zhang, Ting / Feng, Songlin / Chen, Bomy et al. | 2004
- 291
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Mesoporous silica thin films prepared by argon plasma treatment of sol-gel-derived precursor [5774-67]Zhang, J. / Palaniappan, A. / Su, X. / Tay, F. E. H. / SPIE et al. | 2004
- 291
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Mesoporous silica thin films prepared by argon plasma treatment of sol-gel-derived precursorZhang, Jian / Palaniappan, Al / Su, Xiaodi / Tay, Francis E. H. et al. | 2004
- 296
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The influence of rapid recurrent thermal annealing on magnetic properties of CoFe-O thin filmShi, Yu / Zhang, Huaiwu / Jing, Yulan / Xing, Huaizhong / Jiang, Xiangdong et al. | 2004
- 296
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The influence of rapid recurrent thermal annealing on magnetic properties of CoFe-O thin film [5774-68]Shi, Y. / Zhang, H. / Jing, Y. / Xing, H. / Jiang, X. / SPIE et al. | 2004
- 299
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Structure and ferroelectric properties of Bi3.25La0.75Ti3O12and Bi3.25Nd0.75Ti3O12thin films prepared by an MOD methodMa, Jian H. / Meng, Xiang-Jian / Sun, Jing-Lan / Lin, Tie / Chu, Jun-Hao et al. | 2004
- 299
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Structure and ferroelectric properties of Bi~3~.~2~5La~0~.~7~5Ti~3O~1~2 and Bi~3~.~2~5Nd~0~.~7~5Ti~3O~1~2 thin films prepared by an MOD method [5774-69]Ma, J. H. / Meng, X. J. / Sun, J. L. / Lin, T. / Chu, J. H. / SPIE et al. | 2004
- 303
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Nodule growth in zirconium films prepared by ion beam sputteringZhang, Dongping / Qi, HongJi / Shao, Jianda / He, Hongbo / Fan, Zhengxiu et al. | 2004
- 303
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Nodule growth in zirconium films prepared by ion beam sputtering [5774-70]Zhang, D. / Qi, H. / Shao, J. / He, H. / Fan, Z. / SPIE et al. | 2004
- 307
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Influences of post-deposition annealing on the properties of the ZrO~2 thin films prepared by electron beam evaporation [5774-71]Shao, S. Y. / Shao, J. D. / Zhang, D. P. / Huang, J. B. / Fan, Z. X. / SPIE et al. | 2004
- 307
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Influences of post-deposition annealing on the properties of the ZrO2thin films prepared by electron beam evaporationShao, S. Y. / Shao, Jian D. / Zhang, D. P. / Huang, J. B. / Fan, Zheng X. et al. | 2004
- 312
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Fabrication and characteristics of PLZT thin films derived from MOD processZhang, Yong / He, Xiyun / Qiu, Pingsun / Ding, Aili et al. | 2004
- 312
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Fabrication and characteristics of PLZT thin films derived from MOD process [5774-72]Zhang, Y. / He, X. / Qiu, P. / Ding, A. / SPIE et al. | 2004
- 316
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Influence of process parameters on fabrication of PZT(53/47) thick films by a dip-coating process [5774-73]He, X. / Zhang, Y. / Qiu, P. / Ding, A. / SPIE et al. | 2004
- 316
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Influence of process parameters on fabrication of PZT(53/47) thick films by a dip-coating processHe, Xiyun / Zhang, Yong / Qiu, Pingsun / Ding, Aili et al. | 2004
- 320
-
Anisotropic optical properties of ZrO~2 films by oblique deposition [5774-74]Wang, J. / Shao, J. / Fan, S. / Fan, Z. / SPIE et al. | 2004
- 320
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Anisotropic optical properties of ZrO2films by oblique depositionWang, Jianguo / Shao, Jianda / Fan, Shuhai / Fan, Zhengxiu et al. | 2004
- 324
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Plasma-implantation-based surface modification of metals with single-implantation modeTian, X. B. / Cui, J. T. / Yang, S. Q. / Fu, Ricky K. Y. / Chu, Paul K. et al. | 2004
- 324
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Plasma-implantation-based surface modification of metals with single-implantation mode (Invited Paper) [5774-75]Tian, X. B. / Cui, J. T. / Yang, S. Q. / Fu, R. K. Y. / Chu, P. K. / SPIE et al. | 2004
- 330
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Thermal stability of metal containing diamond-like carbon thin film fabricated by dual plasma depositionFu, Ricky K. Y. / Mei, Y. F. / Fu, M. Y. / Wei, C. B. / Siu, G. G. / Chu, Paul K. / Cheung, W. Y. / Wong, S. P. et al. | 2004
- 330
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Thermal stability of metal containing diamond-like carbon thin film fabricated by dual plasma deposition (Invited Paper) [5774-76]Fu, R. K. Y. / Mei, Y. F. / Fu, M. Y. / Wei, C. B. / Siu, G. G. / Chu, P. K. / Cheung, W. Y. / Wong, S. P. / SPIE et al. | 2004
- 336
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Development and applications of solar cell in China (Invited Paper) [5774-77]Wei, G.-P. / Jin, D.-R. / SPIE et al. | 2004
- 336
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Development and applications of solar cell in ChinaWei, Guangpu / Jin, Deng-Ren et al. | 2004
- 341
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Organic light-emitting devices using phosphorescent dopants (Invited Paper) [5774-78]Nagatomo, T. / Nagashima, S. / Sugawara, R. / SPIE et al. | 2004
- 341
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Organic light-emitting devices using phosphorescent dopantsNagatomo, Takao / Nagashima, Susumu / Sugawara, Ryosuke et al. | 2004
- 345
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The effects of ion cleaning on the roughness of substrates and laser-induced damage thresholds of films [5774-79]Zhang, D. / Shao, J. / Fan, S. / Zhao, Y. / Fan, R. / Wang, Y. / Fan, Z. / SPIE et al. | 2004
- 345
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The effects of ion cleaning on the roughness of substrates and laser-induced damage thresholds of filmsZhang, Dawei / Shao, Jianda / Fan, Shuhai / Zhao, Yuanan / Fan, Ruiying / Wang, Yingjian / Fan, Zhengxiu et al. | 2004
- 349
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Selective formation of porous silicon array using highly resistive silicon layer as masking materials [5774-80]Wang, X. / Chen, S. / Zhang, J. / Zhu, J. / Zhu, Z. / SPIE et al. | 2004
- 349
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Selective formation of porous silicon array using highly resistive silicon layer as masking materialsWang, Xiaohua / Chen, Shaoqiang / Zhang, Jian / Zhu, Jianzhong / Zhu, Ziqiang et al. | 2004
- 353
-
Field emission behavior of GaN nanoparticles and nanobeltsYu, Ke / Zhang, Yongsheng / Luo, Laiqiang / Zhu, Ziqiang et al. | 2004
- 353
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Field emission behavior of GaN nanoparticles and nanobelts [5774-81]Yu, K. / Zhang, Y. / Luo, L. / Zhu, Z. / SPIE et al. | 2004
- 357
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Preparation and performance of phase retarder at the wavelength of 1315 nm [5774-82]Huang, J. / Shao, J. / Wang, Y. / Fan, Z. / SPIE et al. | 2004
- 357
-
Preparation and performance of phase retarder at the wavelength of 1315 nmHuang, Jianbing / Shao, Jianda / Wang, Yingjian / Fan, Zhengxiu et al. | 2004
- 361
-
Epitaxial growth of atomically smooth (111)-oriented MgO films on Si(111) substrate by pulsed laser deposition [5774-83]Chen, T. L. / Li, X. M. / Zhang, X. / Yu, W. D. / Gao, X. D. / SPIE et al. | 2004
- 361
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Epitaxial growth of atomically smooth (111)-oriented MgO films on Si (111) substrate by pulsed laser depositionChen, Tong L. / Li, Xiao M. / Zhang, Xia / Yu, Wei D. / Gao, Xiang D. et al. | 2004
- 365
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Temperature dependence of laser-induced damage threshold of 355-nm Al2O3/MgF2HR coatingsZhan, Meiqiong / Tan, Tianya / Zhang, Dawei / He, Hongbo / Shao, Jianda / Fan, Zhengxiu et al. | 2004
- 365
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Temperature dependence of laser-induced damage threshold of 355-nm Al~2O~3/MgF~2 HR coatings [5774-84]Zhan, M. / Tan, T. / Zhang, D. / He, H. / Shao, J. / Fan, Z. / SPIE et al. | 2004
- 369
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Characterization of ZnO films grown on different substrates by L-MBE method [5774-85]Yang, X. / Zhang, J. / Xu, Q. / He, Y. / Wang, H. / Zhang, W. / Hou, X. / SPIE et al. | 2004
- 369
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Characterization of ZnO films grown on different substrates by L-MBE methodYang, Xiaodong / Zhang, Jingwen / Xu, Qing'an / He, Yongning / Wang, Hongbo / Zhang, Weifeng / Hou, Xun et al. | 2004
- 373
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Influence of inhomogeneities on the spectral characteristics of anti-reflection coatingsShen, Zicai / Wang, Yingjian / Fan, Zhengxiu / Shao, Jianda et al. | 2004
- 373
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Influence of inhomogeneities on the spectral characteristics of anti-reflection coatings [5774-86]Shen, Z. / Wang, Y. / Fan, Z. / Shao, J. / SPIE et al. | 2004
- 377
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Elimination of the half-wave hole for short-wave pass filterMa, Xiaofeng / Wang, Yingjian / Shao, Jianda / Fan, Zhengxiu et al. | 2004
- 377
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Elimination of the half-wave hole for short-wave pass filter [5774-87]Ma, X. / Wang, Y. / Shao, J. / Fan, Z. / SPIE et al. | 2004
- 381
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Properties of InGaN violet-LED structureLi, Zhonghui / Yang, Zhijian / Yu, Tongjun / Zhang, Guoyi / Feng, Yuchun / Niu, Hanben et al. | 2004
- 381
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Properties of InGaN violet-LED structure [5774-88]Li, Z. / Yang, Z. / Yu, T. / Zhang, G. / Feng, Y. / Niu, H. / SPIE et al. | 2004
- 385
-
Optical properties of Al~2O~3 and MgF~2 coatings deposited by electron-beam evaporation in the DUV/VUV spectral range [5774-89]Shang, S. / Yi, K. / Huang, J. / Shao, J. / Fan, Z. / SPIE et al. | 2004
- 385
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Optical properties of Al2O3and MgF2coatings deposited by electron-beam evaporation in the DUV/VUV spectral rangeShang, Shuzhen / Yi, Kui / Huang, Jianbing / Shao, Jianda / Fan, Zhengxiu et al. | 2004
- 389
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Preparation and characterization of [100]-oriented diamond films by HFCVDSu, Qingfeng / Xia, Yiben / Wang, Linjun / Ren, Ling / Zhang, Minglong / Shi, Weimin et al. | 2004
- 389
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Preparation and characterization of [100]-oriented diamond films by HFCVD [5774-90]Su, Q. / Xia, Y. / Wang, L. / Ren, L. / Zhang, M. / Shi, W. / SPIE et al. | 2004
- 394
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Generation of 32-fs pulse by use of optimized Gires-Tournois interferometer negative-dispersion mirrors [5774-91]Liao, C. / Shao, J. / Fan, Z. / Wu, Z. / Zhang, Z. / SPIE et al. | 2004
- 394
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Generation of 32-fs pulse by use of optimized Gires-Tournois interferometer negative-dispersion mirrorsLiao, Chunyan / Shao, Jianda / Fan, Zhengxiu / Wu, Zubin / Zhang, Zhi-gang et al. | 2004
- 398
-
Study on the test of laser-induced damage threshold of multilayer dielectric gratings [5774-92]Kong, W. / Wang, T. / Shao, J. / Fan, Z. / SPIE et al. | 2004
- 398
-
Study on the test of laser-induced damage threshold of multilayer dielectric gratingsKong, Weijin / Wang, Tao / Shao, Jianda / Fan, Zhengxiu et al. | 2004
- 403
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The simulation of growth process of thin film on nonplanar substrate [5774-93]Qi, H. J. / Shao, J. D. / Zhang, D. P. / Yi, K. / Fan, Z. X. / SPIE et al. | 2004
- 403
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The simulation of growth process of thin film on nonplanar substrateQi, Hong J. / Shao, Jian D. / Zhang, Dong P. / Yi, Kui / Fan, Zheng X. et al. | 2004
- 407
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Preparation of CoSi~2 using microwave hydrogen plasma annealing [5774-94]Wang, T. / Dai, Y. B. / Ouyang, S. K. / Shen, H. S. / Wu, J. S. / SPIE et al. | 2004
- 407
-
Preparation of CoSi2using microwave hydrogen plasma annealingWang, Tao / Dai, Yong B. / Ouyang, S. K. / Shen, He S. / Wu, Jian S. et al. | 2004
- 411
-
Charge collection properties of 1x128 array radiation detector based on CVD diamond filmGu, Beibei / Wang, Linjun / Xia, Yiben / Zhang, Minglong / Lou, Yanyan / Su, Qingfeng et al. | 2004
- 411
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Charge collection properties of 1x128 array radiation detector based on CVD diamond film [5774-95]Gu, B. / Wang, L. / Xia, Y. / Zhang, M. / Lou, Y. / Su, Q. / SPIE et al. | 2004
- 415
-
Optimization for the growth of CVD diamond on Al~2O~3 and the response to alpha particle irradiation [5774-96]Lou, Y. / Wang, L. / Zhang, M. / Gu, B. / Su, Q. / Xia, Y. / SPIE et al. | 2004
- 415
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Optimization for the growth of CVD diamond on Al2O3and the response to alpha particle irradiationLou, Yanyan / Wang, Linjun / Zhang, Minglong / Gu, Beibei / Su, Qingfeng / Xia, Yiben et al. | 2004
- 419
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Effects of deposition conditions and annealing process on the infrared optical properties of diamond films grown by MPCVD [5774-97]Wang, L. / Xia, Y. / Zhang, M. / Su, Q. / Gu, B. / Lou, Y. / SPIE et al. | 2004
- 419
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Effects of deposition conditions and annealing process on the infrared optical properties of diamond films grown by MPCVDWang, Linjun / Xia, Yiben / Zhang, Minglong / Su, Qingfeng / Gu, Beibei / Lou, Yanyan et al. | 2004
- 423
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Liquid nitrogen flowrate alarm system for MBESun, Yongwei / Li, Shuying / Ni, Haiqiao / Xu, Yun / Chen, Lianghui et al. | 2004
- 423
-
Liquid nitrogen flowrate alarm system for MBE [5774-98]Sun, Y. / Li, S. / Ni, H. / Xu, Y. / Chen, L. / SPIE et al. | 2004
- 426
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Deposition of microcrystalline silicon thin films for solar cells by VHF-PECVDZhang, Xiaodan / Zhao, Ying / Zhu, Feng / Mai, Yaohua / Wei, Changchun / Gao, Yantao / Hou, Guofu / Sun, Jian / Li, Juan / Geng, Xinhua et al. | 2004
- 426
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Deposition of microcrystalline silicon thin films for solar cells by VHF-PECVD [5774-99]Zhang, X. / Zhao, Y. / Zhu, F. / Mai, Y. / Wei, C. / Gao, Y. / Hou, G. / Sun, J. / Li, J. / Geng, X. et al. | 2004
- 430
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Structural and electrical properties of Nd- and V-modified bismuth titanate thin films by sol-gel processing [5774-100]Cheng, J. / He, L. / Meng, Z. / SPIE et al. | 2004
- 430
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Structural and electrical properties of Nd- and V-modified bismuth titanate thin films by sol-gel processingCheng, Jinrong / He, Liang / Meng, Zhongyan et al. | 2004
- 434
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Study on oriented 3D mesoporous silica thin film and nano magnetic grain assemblyZhang, Jian C. / Ni, Qi L. / Shen, Yue / Zhou, Xiao'An / Yue, Li M. et al. | 2004
- 434
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Study on oriented 3D mesoporous silica thin film and nano magnetic grain assembly [5774-101]Zhang, J. C. / Ni, Q. L. / Shen, Y. / Zhou, X. A. / Yue, L. M. / SPIE et al. | 2004
- 438
-
Post-treating techniques of porous silicon thin film [5774-102]Zhu, Z. / Long, Y. / Chen, S. / Yu, X. / Zhu, J. / SPIE et al. | 2004
- 438
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Post-treating techniques of porous silicon thin filmZhu, Ziqiang / Long, Yongfu / Chen, Shaoqiang / Yu, Xianwen / Zhu, Jianzhong et al. | 2004
- 442
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Research on the fabrication of μc-Si and its incubation layerLi, Juan / Zhang, Xiaodan / Wu, Chunya / Liu, Jianping / Zhao, Shuyan / Meng, Zhiguo / Zhao, Ying / Xiong, Shaozhen / Zhang, Lizhu et al. | 2004
- 442
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Research on the fabrication of muc-Si and its incubation layer [5774-103]Li, J. / Zhang, X. / Wu, C. / Liu, J. / Zhao, S. / Meng, Z. / Zhao, Y. / Xiong, S. / Zhang, L. / SPIE et al. | 2004
- 446
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Visible photoluminescence originated from various mechanisms during step-by-step annealing [5774-104]Mei, J. / Rui, Y. / Yang, L. / Xu, J. / Ma, Z. / Zhu, D. / Huang, X. / Chen, K. / SPIE et al. | 2004
- 446
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Visible photoluminescence originated from various mechanisms during step-by-step annealingMei, Jiaxin / Rui, Yunjun / Yang, Ling / Xu, Jun / Ma, Zhongyuan / Zhu, Da / Huang, Xinfan / Chen, Kunji et al. | 2004
- 450
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20-nm linewidth nanoimprint mold prepared by selectively etched multilayer thin filmZhang, Yongjun / Han, Guanqi / Huang, Xinfan / Li, Wei / Hao, Xiping / Ma, Guobin / Chen, Kunji et al. | 2004
- 450
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20-nm linewidth nanoimprint mold prepared by selectively etched multiplayer thin film [5774-105]Zhang, Y. / Han, G. / Huang, X. / Li, W. / Hao, X. / Ma, G. / Chen, K. / SPIE et al. | 2004
- 454
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SiCN and Ta/TaN barriers for Cu/ultralow-k integration in 0.13µm technologyYang, L. Y. / Zhang, D. H. / Li, C. Y. / Lu, Peiwei / Foo, P. D. et al. | 2004
- 454
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SiCN and Ta/TaN barriers for Cu/ultralow-k integration in 0.13-mum technology [5774-106]Yang, L. Y. / Zhang, D. H. / Li, C. Y. / Lu, P. / Foo, P. D. / SPIE et al. | 2004
- 458
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The studies of room-temperature electrical resistivity of post-annealed LaNiO3-δthin film on Si(100)/n by RF magnetron sputteringZhang, X. D. / Meng, Xiang J. / Sun, J. L. / Wang, G. S. / Lin, Tie / Chu, Jun H. et al. | 2004
- 458
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The studies of room-temperature electrical resistivity of post-annealed LaNiO~3~-~d~e~l~t~a thin film on Si(100)/n by RF magnetron sputtering [5774-107]Zhang, X. D. / Meng, X. J. / Sun, J. L. / Wang, G. S. / Lin, T. / Chu, J. H. / SPIE et al. | 2004
- 462
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Effects of oxygen pressure on optical and crystal properties of ZnO thin films prepared by laser molecular beam epitaxy [5774-108]Xu, Q. / Zhang, J. / Yang, X. / He, Y. / Zhang, W. / Hou, X. / SPIE et al. | 2004
- 462
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Effects of oxygen pressure on optical and crystal properties of ZnO thin films prepared by laser molecular beam epitaxyXu, Qing'an / Zhang, Jingwen / Yang, Xiaodong / He, Yongning / Zhang, Weifeng / Hou, Xun et al. | 2004
- 466
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A V-shaped module technique for promoting generation photocurrent density of silicon solar cells [5774-109]Li, J. / Chong, M. / Duan, X. / Xu, J. / Gao, M. / Wang, F. / SPIE et al. | 2004
- 466
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A V-shaped module technique for promoting generation photocurrent density of silicon solar cellsLi, Jianming / Chong, Ming / Duan, Xiaofeng / Xu, Jiadong / Gao, Min / Wang, Fenglian et al. | 2004
- 470
-
Silicon-based one-dimensional photonic crystal microcavityChen, San / Qian, Bo / Chen, Kunji / Xu, Jun / Li, Wei / Huang, Xinfan et al. | 2004
- 470
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Silicon-based one-dimensional photonic crystal microcavity (Invited Paper) [5774-110]Chen, S. / Qian, B. / Chen, K. / Xu, J. / Li, W. / Huang, X. / SPIE et al. | 2004
- 476
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Photonic crystal slab made from porous siliconZheng, W. H. / Reece, P. / Gal, M. et al. | 2004
- 476
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Photonic crystal slab made from porous silicon (Invited Paper) [5774-111]Zheng, W. H. / Reece, P. / Gal, M. / SPIE et al. | 2004
- 481
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Investigation of electrical, structural, and optical properties of very thin oxide/a-Si:H/c-Si interfaces passivated by cyanide treatment (Invited Paper) [5774-112]Pincik, E. / Kobayashi, H. / Jurecka, S. / Jergel, M. / Gleskova, H. / Takahashi, M. / Brunner, R. / Fujiwara, N. / Mullerova, J. / SPIE et al. | 2004
- 481
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Investigation of electrical, structural, and optical properties of very thin oxide/a-Si:H/c-Si interfaces passivated by cyanide treatmentPincik, Emil / Kobayashi, Hikaru / Jurecka, Stanislav / Jergel, Matej / Gleskova, Helena / Takahashi, Masao / Brunner, Robert / Fujiwara, Naozumi / Mullerova, Jarmila et al. | 2004
- 488
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Formation of random laser action in ZnO thin films (Invited Paper) [5774-113]Yu, S. F. / Leong, E. S. P. / Lau, S. P. / Yuen, C. / SPIE et al. | 2004
- 488
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Formation of random laser action in ZnO thin filmsYu, S. F. / Leong, Eunice S. P. / Lau, S. P. / Yuen, Clement et al. | 2004
- 494
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Nonpolarizing filter designQi, Hong J. / Hong, R. J. / Yi, Kui / Shao, Jian D. / Fan, Zheng X. et al. | 2004
- 494
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Nonpolarizing filter design [5774-114]Qi, H. J. / Hong, R. J. / Yi, K. / Shao, J. D. / Fan, Z. X. / SPIE et al. | 2004
- 498
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The LIDT of Ta2O5/SiO2narrow-band interference filters under different laser modesGao, WeiDong / He, Hongbo / Zhao, Yuanan / Shao, Jianda / Fan, Zhengxiu et al. | 2004
- 498
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The LIDT of Ta~2O~5/SiO~2 narrow-band interference filters under different laser modes [5774-115]Gao, W. / He, H. / Zhao, Y. / Shao, J. / Fan, Z. / SPIE et al. | 2004
- 502
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Control of p- and n-type conduction in ZnO films and properties of ZnO p-n homojunctionsZhang, Canyun / Bian, Jiming / Li, Xiao M. et al. | 2004
- 502
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Control of p- and n-type conduction in ZnO films and properties of ZnO p-n homojunctions [5774-116]Zhang, C. / Bian, J. / Li, X. M. / SPIE et al. | 2004
- 506
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Failure analysis of MEMS RF cantilevered beam switch [5774-117]Guo, F. / Xu, X. / Li, C. / Ge, Y. / Yu, J. / Xin, P. / Zhu, R. / Lai, Z. / Zhu, Z. / Lu, W. et al. | 2004
- 506
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Failure analysis of MEMS RF cantilevered beam switchGuo, Fangmin / Xu, Xin / Li, Chengshi / Ge, Yuping / Yu, Jianguo / Xin, Peisheng / Zhu, Rongjin / Lai, Zongshen / Zhu, Ziqiang / Lu, Wei et al. | 2004
- 510
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Design and simulation of uncooled bi-material infrared detector [5774-118]Xu, X. / Guo, F. / Lu, W. / Yu, S. / Ge, Y. / Li, N. / SPIE et al. | 2004
- 510
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Design and simulation of uncooled bi-material infrared detectorXu, Xin / Guo, Fangmin / Lu, Wei / Yu, Shaoxin / Ge, Yuping / Li, Ning et al. | 2004
- 515
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Low-loss microwave coplanar waveguides realized on low-resistivity silicon waferGe, Yuping / Guo, Fangmin / Wang, Weiming / Yu, Shaoxin / Shao, Li / Zhu, Ziqiang / Lu, Wei et al. | 2004
- 515
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Low-loss microwave coplanar waveguides realized on low-resistivity silicon wafer [5774-119]Ge, Y. / Guo, F. / Wang, W. / Yu, S. / Shao, L. / Zhu, Z. / Lu, W. / SPIE et al. | 2004
- 519
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Impact of diode facet reflectivity on the fiber grating external-cavity semiconductor laserXu, Qingyang / Chen, Shaowu et al. | 2004
- 519
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Impact of diode facet reflectivity on the fiber grating external-cavity semiconductor laser [5774-120]Xu, Q. / Chen, S. / SPIE et al. | 2004
- 523
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Optimized inductor and low-pass filter with low substrate loss on OPS/PS interlayerLiu, Yun / Shi, Yanling / Feng, Xiao / Wang, Yong / Chen, Shaoqiang / Li, Xiaojin / Zhu, Ziqiang / Lai, Zongshen et al. | 2004
- 523
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Optimized inductor and low-pass filter with low substrate loss on OPS/PS interlayer [5774-121]Liu, Y. / Shi, Y. / Feng, X. / Wang, Y. / Chen, S. / Li, X. / Zhu, Z. / Lai, Z. / SPIE et al. | 2004
- 527
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Influence of annealing on the nanosecond laser damage resistance of the dielectric mirror coatings at 1064-nm prepared by IBS [5774-122]Wang, T. / He, H. / Zhao, Y. / Shao, J. / Fan, Z. / SPIE et al. | 2004
- 527
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Influence of annealing on the nanosecond laser damage resistance of the dielectric mirror coatings at 1064-nm prepared by IBSWang, Tao / He, Hongbo / Zhao, Yuanan / Shao, Jianda / Fan, Zhengxiu et al. | 2004
- 531
-
Absorption measurement for coatings using surface thermal lensing techniqueFan, Shuhai / He, Hongbo / Shao, Jianda / Fan, Zhengxiu / Zhang, Dongqing et al. | 2004
- 531
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Absorption measurement for coatings using surface thermal lensing technique [5774-123]Fan, S. / He, H. / Shao, J. / Fan, Z. / Zhang, D. / SPIE et al. | 2004
- 535
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Porous-silicon-based oligonucleotide chipsShao, Li / Chen, Shaoqiang / Zhang, Jian / Zhu, Jianzhong / Zhu, Ziqiang / Zhu, Bin et al. | 2004
- 535
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Porous-silicon-based oligonucleotide chips [5774-124]Shao, L. / Chen, S. / Zhang, J. / Zhu, J. / Zhu, Z. / Zhu, B. / SPIE et al. | 2004
- 539
-
Design of negative dispersion mirrors used in Ti:sapphire femtosecond lasersLiao, Chunyan / Shao, Jianda / Fan, Zhengxiu et al. | 2004
- 539
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Design of negative dispersion mirrors used in Ti:sapphire femtosecond lasers [5774-125]Liao, C. / Shao, J. / Fan, Z. / SPIE et al. | 2004
- 543
-
The test of new-type MEMS ammonia-sensitive sensorWang, Lingjie / Lin, Jishen et al. | 2004
- 543
-
The test of new-type MEMS ammonia-sensitive sensor [5774-126]Wang, L. / Lin, J. / SPIE et al. | 2004
- 547
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High-isolation contact switch in MEMS phase shifterLi, Wei / Shi, Yanling / Qing, Jian / Jiang, Ling / Ren, Zheng / Xin, Peisheng / Zhu, Ziqiang / Lai, Zongshen et al. | 2004
- 547
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High-isolation contact switch in MEMS phase shifter [5774-127]Li, W. / Shi, Y. / Qing, J. / Jiang, L. / Ren, Z. / Xin, P. / Zhu, Z. / Lai, Z. / SPIE et al. | 2004
- 551
-
Analysis of the tunnel junction current [5774-128]Guo, R. / Zhao, Z. / Lu, M. / SPIE et al. | 2004
- 551
-
Analysis of the tunnel junction currentGuo, Rong-hui / Zhao, Zhengping / Lu, Miao et al. | 2004
- 555
-
ZrO2thin films deposited on various LiB3O5substrates by electron beam evaporationTan, Tianya / Huang, Jianbing / Zhan, Meiqiong / Tian, Guanglei / Shao, Jianda / Fan, Zhengxiu et al. | 2004
- 555
-
ZrO~2 thin films deposited on various LiB~3O~5 substrates by electron beam evaporation [5774-129]Tan, T. / Huang, J. / Zhan, M. / Tian, G. / Shao, J. / Fan, Z. / SPIE et al. | 2004
- 559
-
Bond enhance of hydroxyapatite/silicon layers by introducing a porous silicon interlayerChen, Shaoqiang / Zhu, Jianzhong / Zhang, Jian / Feng, Xiao / Shi, Yanling / Wang, Xiaohua / Luo, Laiqiang / Zhu, Ziqiang et al. | 2004
- 559
-
Bond enhance of hydroxyapatite/silicon layers by introducing a porous silicon interlayer [5774-130]Chen, S. / Zhu, J. / Zhang, J. / Feng, X. / Shi, Y. / Wang, X. / Luo, L. / Zhu, Z. / SPIE et al. | 2004
- 563
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Formation of the copper nanoparticles in porous silicon by electroplatingFeng, Xiao / Xu, Shaohui / Chen, Shaoqiang / Zhu, Jianzhong / Zhu, Ziqiang / Lai, Zongshen et al. | 2004
- 563
-
Formation of the copper nanoparticles in porous silicon by electroplating [5774-131]Feng, X. / Xu, S. / Chen, S. / Zhu, J. / Zhu, Z. / Lai, Z. / SPIE et al. | 2004
- 567
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Resolution enhancement in optical lithography using polarized film mask [5774-132]Yu, G. / Lin, W. / Chen, X. / Xing, T. / Yao, H. / SPIE et al. | 2004
- 567
-
Resolution enhancement in optical lithography using polarized film maskYu, Guobin / Lin, Wumei / Chen, Xianzhong / Xing, Tingwen / Yao, HanMin et al. | 2004
- 571
-
A new type of tachometer circuit based on series magneto-diode [5774-133]Wen, L. / SPIE et al. | 2004
- 571
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A new type of tachometer circuit based on series magneto-diodeWen, Liang-Gong et al. | 2004
- 575
-
Influence of experimental environment on the process of photo-assisted electrochemical etching process on siliconChen, Yu / Guo, Pingsheng / Wang, Lianwei et al. | 2004
- 575
-
Influence of experimental environment on the process of photo-assisted electrochemical etching process on silicon [5774-134]Chen, Y. / Guo, P. / Wang, L. / SPIE et al. | 2004
- 579
-
Transfer bonding of thick silicon nitride film via split of porous silicon [5774-135]Bao, X. Q. / Ding, Y. F. / Chen, Y. / Guo, P. S. / Shi, Y. L. / Wang, L. W. / Lai, Z. S. / SPIE et al. | 2004
- 579
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Transfer bonding of thick silicon nitride film via split of porous siliconBao, X. Q. / Ding, Yan F. / Chen, Yu / Guo, Ping S. / Shi, Yan L. / Wang, Lian W. / Lai, Zong S. et al. | 2004
- 583
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Simulation of output voltage waveform on thin film magnetoresistive sensor [5774-136]Shi, Y. / Zhang, H. / Liu, Y. / Jing, Y. / Liu, B. / Zhong, Z. / SPIE et al. | 2004
- 583
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Simulation of output voltage waveform on thin film magnetoresistive sensorShi, Yu / Zhang, Huaiwu / Liu, Yingli / Jing, Yulan / Liu, Baoyuan / Zhong, Zhiyong et al. | 2004
- 587
-
Numerical analysis of pull-in voltage for contact MEMS switches in switched-line phase shifter application [5774-137]Jiang, L. / Shi, Y. / Li, W. / Ding, Y. / Lai, Z. / Zhu, Z. / SPIE et al. | 2004
- 587
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Numerical analysis of pull-in voltage for contact MEMS switches in switched-line phase shifter applicationJiang, Ling / Shi, Yanling / Li, Wei / Ding, Yanfang / Lai, Zongshen / Zhu, Ziqiang et al. | 2004
- 591
-
Study on DC-contact MEMS switches [5774-138]Chen, J. J. / Wei, H. Z. / Hu, M. L. / Lai, Z. S. / SPIE et al. | 2004
- 591
-
Study on DC-contact MEMS switchesChen, J. J. / Wei, H. Z. / Hu, M. L. / Lai, Zong S. et al. | 2004
- 595
-
Evaluation of the mechanical properties of the materials in MEMS using an optical profiler [5774-139]Bao, H. / Lu, D. / Zhao, M. / SPIE et al. | 2004
- 595
-
Evaluation of the mechanical properties of the materials in MEMS using an optical profilerBao, Haifei / Lu, Deren / Zhao, Minghao et al. | 2004
- 599
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Laser conditioning of dielectric oxide mirror coatings at 1064 nm [5774-140]Zhao, Y. / Shao, J. / Wang, T. / Zhang, D. / Fan, S. / Huang, J. / Gao, W. / Fan, Z. / SPIE et al. | 2004
- 599
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Laser conditioning of dielectric oxide mirror coatings at 1064 nmZhao, Yuanan / Shao, Jianda / Wang, Tao / Zhang, Dongping / Fan, Shuhai / Huang, Jianbing / Gao, WeiDong / Fan, Zhengxiu et al. | 2004
- 603
-
Index-compatible design of multilayer film for MEMS-type variable optical attenuatorPeng, Deyan / Li, Guodong / Wang, Lianwei / Lai, Zongshen et al. | 2004
- 603
-
Index-compatible design of multilayer film for MEMS-type variable optical attenuator [5774-141]Peng, D. / Li, G. / Wang, L. / Lai, Z. / SPIE et al. | 2004
- 607
-
Study on multi-quantum barriers for use in quantum well solar cells [5774-142]Wu, L. / Tian, W. / Jiang, X. / SPIE et al. | 2004
- 607
-
Study on multi-quantum barriers for use in quantum well solar cellsWu, Linzhang / Tian, Wei / Jiang, Xiaotao et al. | 2004
- 611
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Relaxation mechanism of SiGe thin film on SOI substrate [5774-143]Di, Z. / Zhang, M. / Liu, W. / Zhu, M. / Lin, C. / Chu, P. K. / SPIE et al. | 2004
- 611
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Relaxation mechanism of SiGe thin film on SOI substrateDi, Zengfeng / Zhang, Miao / Liu, Weili / Zhu, Ming / Lin, Chenglu / Chu, Paul K. et al. | 2004
- 616
-
The process of low-stress silicon nitride and the application in the fabrication of MEMS device [5774-144]He, H. / Xu, Y. / Yang, Y. / SPIE et al. | 2004
- 616
-
The process of low-stress silicon nitride and the application in the fabrication of MEMS deviceHe, Hongtao / Xu, Yongqing / Yang, Yongjun et al. | 2004
- 620
-
An investigation of polymer-carbon black composite gas detectors [5774-145]Sun, X. / Xie, H. / Yang, Q. / Huang, Y. / SPIE et al. | 2004
- 620
-
An investigation of polymer-carbon black composite gas detectorsSun, Xiaoxiang / Xie, Haifen / Yang, Qiudong / Huang, Yiping et al. | 2004
- 624
-
Gas sensor based on nano ZSM-5 zeolite films for the nerve agent simulant dimethylmethylphosphonate detection [5774-146]Xie, H. / Ting, Y. / Sun, X. / Jia, Z. / Huang, Y. / SPIE et al. | 2004
- 624
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Gas sensor based on nano ZSM-5 zeolite films for the nerve agent simulant dimethylmethylphosphonate detectionXie, Haifen / Ting, Yu / Sun, Xiaoxiang / Jia, Zhou / Huang, Yiping et al. | 2004
- 628
-
Investigation on Eu3+-doped Gd2O3sol-gel thin filmsLiu, Xiaolin / Qiu, Longqing / Gu, Mu / Zhang, Rui / Xu, Xin et al. | 2004
- 628
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Investigation on Eu^3^+-doped Gd~2O~3 sol-gel thin films [5774-147]Liu, X. / Qiu, L. / Gu, M. / Zhang, R. / Xu, X. / SPIE et al. | 2004
- 633
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Modification of Gd~2O~3:Eu^3^+ sol-gel luminescence films [5774-148]Qiu, L. / Gu, M. / Liu, X. / Zhang, R. / Xu, X. / SPIE et al. | 2004
- 633
-
Modification of Gd2O3:Eu3+sol-gel luminescence filmsQiu, Longqing / Gu, Mu / Liu, Xiaolin / Zhang, Rui / Xu, Xin et al. | 2004
- 637
-
Replication of the nano-scale mold fabricated with focused ion beamGao, J. X. / Chan-Park, M. B. / Xie, D. Z. / Ngoi, Bryan K. A. et al. | 2004
- 637
-
Replication of the nano-scale mold fabricated with focused ion beam [5774-149]Gao, J. X. / Chan-Park, M. B. / Xie, D. Z. / Ngoi, B. K. A. / SPIE et al. | 2004
- 642
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Research for polyimide as a sacrificial layer in MEMS deviceHu, Meili / Chen, Jinjin / Lai, Zhongshen / Mao, Huibing / Sheng, Dexin et al. | 2004
- 642
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Research for polyimide as a sacrificial layer in MEMS device [5774-150]Hu, M. / Chen, J. / Lai, Z. / Mao, H. / Sheng, D. / SPIE et al. | 2004
- 646
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Structural and electrical properties of high-κ Al2O3-ZrO2gate dielectrics on SOI substrateDing, Yan F. / Ye, G. S. / Zhang, N. L. / Zhu, Ming / Lin, Cheng L. / Zhu, Ziqiang et al. | 2004
- 646
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Structural and electrical properties of high-kappa Al~2O~3-ZrO~2 gate dielectrics on SOI substrate [5774-151]Ding, Y. F. / Ye, G. S. / Zhang, N. L. / Zhu, M. / Lin, C. L. / Zhu, Z. Q. / SPIE et al. | 2004