Structure design of Si-based M-Z interference acceleration seismic geophone [5641-05] (English)
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In:
MEMS/MOEMS technologies and applications II
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19-25
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2004
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ISBN:
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ISSN:
- Conference paper / Print
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Title:Structure design of Si-based M-Z interference acceleration seismic geophone [5641-05]
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Contributors:Wu, B. ( author ) / Chen, C. ( author ) / Zhang, X. ( author ) / Cui, Y. ( author ) / Ma, G. ( author ) / Zhang, Y. ( author ) / Zhong, J. ( author ) / Ma, Zhichun / Jin, Guofan / Chen, Xuyuan
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Conference:Conference; 2nd, MEMS/MOEMS technologies and applications II ; 2004 ; Beijing, China
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Published in:
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Publisher:
- New search for: SPIE
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Publication date:2004-01-01
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Size:7 pages
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ISBN:
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ISSN:
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Type of media:Conference paper
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Type of material:Print
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Language:English
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Keywords:
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Source:
© Metadata Copyright the British Library Board and other contributors. All rights reserved.
Table of contents conference proceedings
The tables of contents are generated automatically and are based on the data records of the individual contributions available in the index of the TIB portal. The display of the Tables of Contents may therefore be incomplete.
- 1
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Electromagnetic MEMs eight-channel variable optical attenuator arrayDai, Xuhan / Zhao, Xiaolin / Ding, Guifu / Cai, Bingchu et al. | 2004
- 1
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Electromagnetic MEMs eight-channel variable optical attenuator array (Invited Paper) [5641-01]Dai, X. / Zhao, X. / Ding, G. / Cai, B. / SPIE / Chinese Optical Society et al. | 2004
- 7
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Dielectric-based distributed Bragg reflector (DBR) mirrors for tunable MOEMS applicationsShanmugan, Vicknesh / Shah, Mithilesh A. / Teo, S. L. / Ramam, Akkipeddi et al. | 2004
- 7
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Dielectric-based distributed Bragg reflector (DBR) mirrors for tunable MOEMS applications [5641-03]Shanmugan, V. / Shah, M. A. / Teo, S. L. / Ramam, A. / SPIE / Chinese Optical Society et al. | 2004
- 19
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Structure design of Si-based M-Z interference acceleration seismic geophone [5641-05]Wu, B. / Chen, C. / Zhang, X. / Cui, Y. / Ma, G. / Zhang, Y. / Zhong, J. / SPIE / Chinese Optical Society et al. | 2004
- 19
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Structure design of Si-based M-Z interference acceleration seismic geophoneWu, Bo / Chen, Caihe / Zhang, Xiaoling / Cui, Yuming / Ma, Guangpeng / Zhang, Yanjun / Zhong, Juanjuan et al. | 2004
- 26
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Design considerations for electrostatically tunable InP-based Fabry-Perot filters for WDM applicationsShah, Mithilesh A. / Shanmugan, Vicknesh / Ramam, Akkipeddi et al. | 2004
- 26
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Design considerations for electrostatically tunable InP-based Fabry-Perot filters for WDM applications [5641-07]Shah, M. A. / Shanmugan, V. / Ramam, A. / SPIE / Chinese Optical Society et al. | 2004
- 37
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The application of laser micromachining technology in fiber optic sensing (Invited Paper) [5641-08]Jiang, D. / Xin, S. / Wei, R. / Huang, J. / SPIE / Chinese Optical Society et al. | 2004
- 37
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The application of laser micromachining technology in fiber optic sensingJiang, Desheng / Xin, Sijin / Wei, Renxuan / Huang, Jun et al. | 2004
- 48
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The study on the compound x-ray refractive lens using LIGA technique [5641-09]Liang, J. / Le, Z. / Peng, L. / Wang, W. / Lan, W. / Ming, A. / Yi, F. / Ye, J. / Quan, B. / Yao, J. et al. | 2004
- 48
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The study on the compound x-ray refractive lens using LIGA techniqueLiang, Jingqiu / Le, Zichun / Peng, Liangqiang / Wang, Weibiao / Lan, Weihua / Ming, Anjie / Yi, Futing / Ye, Jian / Quan, Bisheng / Yao, Jinsong et al. | 2004
- 56
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Silicon scanning mirror with 54.74° slanted reflective surface for fluorescence scanning systemLee, Kook-Nyung / Jang, Yun-Ho / Choi, Jaeho / Kim, Hoseoung / Lee, Yoon-Sik / Kim, Yong-Kweon et al. | 2004
- 56
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Silicon scanning mirror with 54.74^o slanted reflective surface for fluorescence scanning system [5641-10]Lee, K.-N. / Jang, Y.-H. / Choi, J. / Kim, H. / Lee, Y.-S. / Kim, Y.-K. / SPIE / Chinese Optical Society et al. | 2004
- 67
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BioMEMS for high-throughput handling and microinjection of embryosBernstein, Ralph W. / Scott, Matthew / Solgaard, Olav et al. | 2004
- 67
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BioMEMS for high-throughput handling and microinjection of embryos (Invited Paper) [5641-22]Bernstein, R. W. / Scott, M. / Solgaard, O. / SPIE / Chinese Optical Society et al. | 2004
- 74
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Torsion-mirror optical actuators with compound driving structures [5641-23]Wu, W. / Chen, Q. / Yan, G. / Hao, Y. / SPIE / Chinese Optical Society et al. | 2004
- 74
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Torsion-mirror optical actuators with compound driving structuresWu, Wengang / Chen, Qinghua / Yan, Guizhen / Hao, Yilong et al. | 2004
- 82
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A high-g overload-protected accelerometer with a novel microstructure [5641-26]Chen, W. / Wang, W. / Tian, L. / Liu, X. / Huo, M. / Zhang, R. / Zhang, D. / SPIE / Chinese Optical Society et al. | 2004
- 82
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A high-g overload-protected accelerometer with a novel microstructureChen, Weiping / Wang, Wei / Tian, Lei / Liu, Xiaowei / Huo, Mingxue / Zhang, Ruichao / Zhang, Deyin et al. | 2004
- 87
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Mechanism and experiment study on photothermally excited bilayer silicon microcantilever resonatorsZhang, Shaojun / Liu, Yueming et al. | 2004
- 87
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Mechanism and experiment study on photothermally excited bilayer silicon microcantilever resonators [5641-27]Zhang, S. / Liu, Y. / SPIE / Chinese Optical Society et al. | 2004
- 95
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Polymer-derived ceramics-based fuel atomizersMa, Zhichun / An, Linan / Chen, Xuyuan / Hays, A. et al. | 2004
- 95
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Polymer-derived ceramics-based fuel atomizers (Invited Paper) [5641-30]Ma, Z. / An, L. / Chen, X. Y. / Hays, A. / SPIE / Chinese Optical Society et al. | 2004
- 102
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Single crystalline silicon micromirror array for maskless photolithography in protein synthesis systemsJang, Yun-Ho / Lee, Kook-Nyung / Shin, Dong-Sik / Lee, Yoon-Sik / Kim, Yong-Kweon et al. | 2004
- 102
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Single crystalline silicon micromirror array for maskless photolithography in protein synthesis systems [5641-32]Jang, Y.-H. / Lee, K.-N. / Shin, D.-S. / Lee, Y.-S. / Kim, Y.-K. / SPIE / Chinese Optical Society et al. | 2004
- 112
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Microfluidic dye laser integration in a lab-on-a-chip deviceKou, Qingli / Yesilyurt, Ilker / Escalier, Guilhem / Galas, Jean Christophe / Coureau, Laurent / Chen, Yong et al. | 2004
- 112
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Microfluidic dye laser integration in a lab-on-a-chip device [5641-33]Kou, Q. / Yesilyurt, I. / Escalier, G. / Galas, J.-C. / Coureau, L. / Chen, Y. / SPIE / Chinese Optical Society et al. | 2004
- 116
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Origin mechanism of residual stresses in porous silicon film (Invited Paper) [5641-12]Lei, Z. / Kang, Y. / Hu, M. / Qiu, Y. / Cen, H. / SPIE / Chinese Optical Society et al. | 2004
- 116
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Origin mechanism of residual stresses in porous silicon filmLei, Zhenkun / Kang, Yilan / Hu, Ming / Qiu, Yu / Cen, Hao et al. | 2004
- 124
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Optical properties study of silicon oxynitride films deposited by RF magnetron sputteringZhu, Yong / Gu, Peifu / Ye, Hui / Shen, Weidong et al. | 2004
- 124
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Optical properties study of silicon oxynitride films deposited by RF magnetron sputtering [5641-13]Zhu, Y. / Gu, P. / Ye, H. / Shen, W. / SPIE / Chinese Optical Society et al. | 2004
- 130
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Lumped model for the comb-finger capacitance and electrostatic forceChen, Xuyuan / Ma, Zhichun / Jensen, Geir U. et al. | 2004
- 130
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Lumped model for the comb-finger capacitance and electrostatic force [5641-14]Chen, X. Y. / Ma, Z. / Jensen, G. U. / SPIE / Chinese Optical Society et al. | 2004
- 138
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Simulation and comparison of movable membrane design for MEMS Fabry-Perot tunable filterJiang, Wei / Cui, Fang / Sun, Yu-nan et al. | 2004
- 138
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Simulation and comparison of movable membrane design for MEMS Fabry-Perot tunable filter [5641-15]Jiang, W. / Cui, F. / Sun, Y. / SPIE / Chinese Optical Society et al. | 2004
- 145
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The deflection and frequency analysis of the inhomogeneous silicon cantilever beam for microrelay [5641-17]Hong, H. / Hu, G. / Chen, G. / Liu, W. / SPIE / Chinese Optical Society et al. | 2004
- 145
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The deflection and frequency analysis of the inhomogeneous silicon cantilever beam for microrelayHong, Huinan / Hu, Guoqing / Chen, Guangwen / Liu, Wenyan et al. | 2004
- 152
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3D align overlay verification using glass wafers [5641-18]Smeets, E. M. J. / Bijnen, F. G. C. / Slabbekoorn, J. / van Zeijl, H. W. / SPIE / Chinese Optical Society et al. | 2004
- 152
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3D align overlay verification using glass wafersSmeets, Eric M. J. / Bijnen, Frans G. C. / Slabbekoorn, John / van Zeijl, Henk W. et al. | 2004
- 163
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Analysis of the structures and characteristics for an InP-based micromechanical tunable filter [5641-20]Chen, B. / Zhou, Z. / Huang, Y. / Ren, X. / SPIE / Chinese Optical Society et al. | 2004
- 163
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Analysis of the structures and characteristics for an InP-based micromechanical tunable filterChen, Bin / Zhou, Zhen / Huang, Yongqing / Ren, Xiaomin et al. | 2004
- 172
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Study on application and analysis of a microaccelerometer with magnetorheological fluidsLin, Zhonghua / Hong, Huinan / Hu, Guoqing / Liu, Wenyan / Zhang, Huijie / Lin, Lingling et al. | 2004
- 172
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Study on application and analysis of a microaccelerometer with magnetorheological fluids [5641-21]Lin, Z. / Hong, H. / Hu, G. / Liu, W. / Zhang, H. / Lin, L. / SPIE / Chinese Optical Society et al. | 2004
- 179
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Development of microfabrication technology for MEMS/MOEMS applications (Invited Paper) [5641-34]Cui, Z. / SPIE / Chinese Optical Society et al. | 2004
- 179
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Development of microfabrication technology for MEMS/MOEMS applicationsCui, Zheng et al. | 2004
- 188
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Two new types of microneedle array fabricated by x-ray lithography [5641-35]Li, Y. / Sugiyama, S. / SPIE / Chinese Optical Society et al. | 2004
- 188
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Two new types of microneedle array fabricated by x-ray lithographyLi, Yigui / Sugiyama, Susumu et al. | 2004
- 196
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Fabrication of anisotropic structures with large aspect ratio and minimal roughness by using black silicon methodZhao, Yue / Lai, Jianjun / Zhou, Hong / Yi, Xinjian et al. | 2004
- 196
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Fabrication of anisotropic structures with large aspect ratio and minimal roughness by using black silicon method [5641-36]Zhao, Y. / Lai, J. / Zhou, H. / Yi, X. / SPIE / Chinese Optical Society et al. | 2004
- 201
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Electrochemical etching of deep-macropore array on p-type silicon wafersGao, Yanjun / Wang, Guozheng / Duanmu, Qingduo / Tian, Jingquan et al. | 2004
- 201
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Electrochemical etching of deep-macropore array on p-type silicon wafers [5641-37]Gao, Y. / Wang, G. / Duanmu, Q. / Tian, J. / SPIE / Chinese Optical Society et al. | 2004
- 205
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The microfabrication using powder materials with excimer laserChen, Jimin / Yue, Canfu / Zhang, Yu / Wang, Xubao / Zuo, Tiechuan et al. | 2004
- 205
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The microfabrication using powder materials with excimer laser (Invited Paper) [5641-38]Chen, J. / Yue, C. / Zhang, Y. / Wang, X. / Zuo, T. / SPIE / Chinese Optical Society et al. | 2004
- 211
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Fabrication of grating waveguides based on nano-imprint lithography and silicon-mould replication techniquesLiu, Yueming / Esashi, Masayoshi / Tian, Weijian et al. | 2004
- 211
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Fabrication of grating waveguides based on nano-imprint lithography and silicon-mould replication techniques [5641-39]Liu, Y. / Esashi, M. / Tian, W. / SPIE / Chinese Optical Society et al. | 2004
- 219
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Microfabrication assisted by laser-trapped microparticle tools [5641-40]Bai, J. / Zhu-ge, Z. / Wang, X. / Hou, X. / Yang, G. / SPIE / Chinese Optical Society et al. | 2004
- 219
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Microfabrication assisted by laser-trapped microparticle toolsBai, Jian / Zhu-ge, Zen-rong / Wang, Xiao-na / Hou, Xiyun / Yang, Guoguang et al. | 2004
- 227
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Fabrication of PDMS (poly-dimethyl siloxane) molding and 3D structure by two-photon absorption induced by an ultrafast laser [5641-41]Yi, S. W. / Lee, S. K. / Cho, M. J. / Kong, H. J. / Yang, D.-Y. / Park, S. / Lim, T. / Kim, R. H. / Lee, K.-S. / SPIE et al. | 2004
- 227
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Fabrication of PDMS (poly-dimethyl siloxane) molding and 3D structure by two-photon absorption induced by an ultrafast laserYi, Shin Wook / Lee, Seong Ku / Cho, Mi Jung / Kong, Hong Jin / Yang, Dong-Yol / Park, Sang-hu / Lim, Tae-woo / Kim, Ran Hee / Lee, Kwang-Sup et al. | 2004
- 238
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Analysis on the optical MEMS pressure sensors based on circular multilayer diaphragm [5641-42]Li, M. / Wang, M. / Wang, T. / Rong, H. / Chen, X. / SPIE / Chinese Optical Society et al. | 2004
- 238
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Analysis on the optical MEMS pressure sensors based on circular multilayer diaphragmLi, Ming / Wang, Ming / Wang, Tinting / Rong, Hua / Chen, Xuxing et al. | 2004
- 246
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A novel system to measure MEMS motionLeng, Changlin / Zhang, Guoxiong / Yu, Fusheng / Jiang, Chengzhi / Zhong, Ying et al. | 2004
- 246
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A novel system to measure MEMS motion [5641-19]Leng, C. / Zhang, G. / Yu, F. / Jiang, C. / Zhong, Y. / SPIE / Chinese Optical Society et al. | 2004
- 255
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Theoretical calculation of light-induced forces and torques on complex microrotors [5641-47]Liu, Y. / Zhu, A. / Huang, W. / SPIE / Chinese Optical Society et al. | 2004
- 255
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Theoretical calculation of light-induced forces and torques on complex microrotorsLiu, Yuxiang / Zhu, Anding / Huang, Wenhao et al. | 2004
- 264
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Design of electrostatically levitated micromachined rotational gyroscope based on UV-LIGA technologyCui, Feng / Chen, Wenyuan / Su, Yufeng / Zhang, Weiping / Zhao, Xiaolin et al. | 2004
- 264
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Design of electrostatically levitated micromachined rotational gyroscope based on UVLIGA technology [5641-48]Cui, F. / Chen, W. / Su, Y. / Zhang, W. / Zhao, X. / SPIE / Chinese Optical Society et al. | 2004
- 276
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Parallel valveless micropump with two flexible diaphragmsSu, Yufeng / Chen, Wenyuan / Cui, Feng / Zhang, Weiping et al. | 2004
- 276
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Parallel valveless micropump with two flexible diaphragms [5641-50]Su, Y. / Chen, W. / Cui, F. / Zhang, W. / SPIE / Chinese Optical Society et al. | 2004
- 283
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Theoretical analysis of grating light valveZhang, J. / Fu, H. / Zhu, Y. / Chen, W. / Huang, S. et al. | 2004
- 283
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Theoretical analysis of grating light valve [5641-53]Zhang, J. / Fu, H. / Zhu, Y. / Chen, W. / Huang, S. / SPIE / Chinese Optical Society et al. | 2004
- 289
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Microfluid oscillator based on thermocapillarityHuang, Teng-chao / Shen, Yi-bing / Liu, Xu / Bai, Jian / Hou, Xiyun / Ye, Hui / Lou, Di et al. | 2004
- 289
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Microfluid oscillator based on thermocapillarity [5641-54]Huang, T.-C. / Shen, Y.-B. / Liu, X. / Bai, J. / Hou, X.-Y. / Ye, H. / Lou, D. / SPIE / Chinese Optical Society et al. | 2004
- 294
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Preparation of multimode fiber grating by microprocessing modification and their temperature-sensing propertiesXin, Sijin / Jiang, Desheng / Li, Jianzhi / Huang, Jun et al. | 2004
- 294
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Preparation of multimode fiber grating by microprocessing modification and their temperature-sensing properties [5641-55]Xin, S. / Jiang, D. / Li, J. / Huang, J. / SPIE / Chinese Optical Society et al. | 2004
- 300
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Optimization of torque on an optically driven micromotor by manipulation of the index of refraction [5641-56]Wing, F. M. / Mahajan, S. / Collett, W. / SPIE / Chinese Optical Society et al. | 2004
- 300
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Optimization of torque on an optically driven micromotor by manipulation of the index of refractionWing, Frank M. / Mahajan, Satish / Collett, Walter et al. | 2004
- 309
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Fabrication and application of a novel freestanding stencil bi-material cantilever structure [5641-57]Wang, W. / Chen, D. / Ye, T. / Pan, L. / Zhang, Q. / Wu, X. / SPIE / Chinese Optical Society et al. | 2004
- 309
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Fabrication and application of a novel freestanding stencil bi-material cantilever structureWang, Weibing / Chen, Dapeng / Ye, Tianchun / Pan, Liang / Zhang, Qingchuan / Wu, Xiaoping et al. | 2004
- 316
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X-ray lithography mask fabricated by excimer laser processLi, Yigui / Sugiyama, Susumu et al. | 2004
- 316
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X-ray lithography mask fabricated by excimer laser process [5641-58]Li, Y. / Sugiyama, S. / SPIE / Chinese Optical Society et al. | 2004
- 323
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Study on optical parts of MOEMS optical switch with low-insertion loss [5641-59]Ming, A. / Liang, J. / Lan, W. / Dong, W. / Yao, J. / Wang, W. / Le, Z. / Chen, W. / Wang, L. / SPIE et al. | 2004
- 323
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Study on optical parts of MOEMS optical switch with low insertion lossMing, Anjie / Liang, Jingqiu / Lan, Weihua / Dong, Wei / Yao, Jinsong / Wang, Weibiao / Le, Zichun / Chen, Weiyou / Wang, Lijun et al. | 2004
- 333
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Extraction of exposure modeling parameters of thick resistLiu, Chi / Du, Jinglei / Liu, Shijie / Duan, Xi / Luo, Boliang / Zhu, Jianhua / Guo, Yongkang / Du, Chunlei et al. | 2004
- 333
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Extraction of exposure modeling parameters of thick resist [5641-61]Liu, C. / Du, J. / Liu, S. / Duan, X. / Luo, B. / Zhu, J. / Guo, Y. / Du, C. / SPIE / Chinese Optical Society et al. | 2004
- 344
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Silicon microhole array prepared by ICP [5641-62]Duanmu, Q. / Zhang, A. / Wang, G. / Gao, Y. / Li, Y. / Jiang, D. / Fu, L. / Tian, J. / SPIE / Chinese Optical Society et al. | 2004
- 344
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Silicon microhole array prepared by ICPDuanmu, Qingduo / Zhang, Anping / Wang, Guozheng / Gao, Yanjun / Li, Ye / Jiang, Delong / Fu, Lichen / Tian, Jingquan et al. | 2004
- 348
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Progress in large-range and nanoscale micromotion stageChen, Benyong / Wang, Junru / Lei, Yong et al. | 2004
- 348
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Progress in large-range and nanoscale micromotion stage [5641-64]Chen, B. / Wang, J. / Lei, Y. / SPIE / Chinese Optical Society et al. | 2004
- 354
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A model for the microfabrication with selective laser sintering metal powdersYue, Canfu / Chen, Jimin / Zuo, Tiechuan et al. | 2004
- 354
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A model for the microfabrication with selective laser sintering metal powders [5641-65]Yue, C. / Chen, J. / Zuo, T. / SPIE / Chinese Optical Society et al. | 2004