A micromachined capacitive incremental position sensor: part 2. Experimental assessment (English)
- New search for: Kuijpers, A. A.
- New search for: Krijnen, G. J. M.
- New search for: Wiegerink, R. J.
- New search for: Lammerink, T. S. J.
- New search for: Elwenspoek, M.
- New search for: Kuijpers, A. A.
- New search for: Krijnen, G. J. M.
- New search for: Wiegerink, R. J.
- New search for: Lammerink, T. S. J.
- New search for: Elwenspoek, M.
In:
Micromechanics; MME 16
6
;
S125-S134
;
2006
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ISSN:
- Conference paper / Print
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Title:A micromachined capacitive incremental position sensor: part 2. Experimental assessment
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Contributors:Kuijpers, A. A. ( author ) / Krijnen, G. J. M. ( author ) / Wiegerink, R. J. ( author ) / Lammerink, T. S. J. ( author ) / Elwenspoek, M. ( author )
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Conference:European Workshop; 16th, Micromechanics; MME 16 ; 2005 ; Goteborg, Sweden
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Published in:Micromechanics; MME 16 , 6 ; S125-S134JOURNAL OF MICROMECHANICS AND MICROENGINEERING ; 16, 6 ; S125-S134
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Publisher:
- New search for: IoP
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Publication date:2006-01-01
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Size:S125-S134
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ISSN:
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Type of media:Conference paper
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Type of material:Print
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Language:English
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Keywords:
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Source:
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