Stress determination in strained-Si grown on ultra-thin SiGe virtual substrates (English)
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- New search for: Perova, T. S.
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- New search for: Waldron, A.
- New search for: Oehme, M.
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In:
From strained silicon to nanotubes: novel channels for field effect devices
3
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192-194
;
2006
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ISSN:
- Conference paper / Print
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Title:Stress determination in strained-Si grown on ultra-thin SiGe virtual substrates
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Contributors:Perova, T. S. ( author ) / Lyutovich, K. ( author ) / Kasper, E. ( author ) / Waldron, A. ( author ) / Oehme, M. ( author ) / Moore, R. A. ( author ) / Frank, Martin M. / European Materials Research Society / International Union of Materials Research Societies / ICEM
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Conference:Symposium; 2006 May, From strained silicon to nanotubes: novel channels for field effect devices
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Published in:MATERIALS SCIENCE AND ENGINEERING B -LAUSANNE- ; 135, 3 ; 192-194
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Publisher:
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Publication date:2006-01-01
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Size:3 pages
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Remarks:Held as Symposium B of the E-MRS IUMRS ICEM Spring meeting.
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ISSN:
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Type of media:Conference paper
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Type of material:Print
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Language:English
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Keywords:
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Source:
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