Deposition of protective coatings in rf organosilicon discharges (English)
- New search for: Zajickova, L.
- New search for: Bursikova, V.
- New search for: Kucerova, Z.
- New search for: Franta, D.
- New search for: Dvorak, P.
- New search for: Smid, R.
- New search for: Perina, V.
- New search for: Mackova, A.
- New search for: Zajickova, L.
- New search for: Bursikova, V.
- New search for: Kucerova, Z.
- New search for: Franta, D.
- New search for: Dvorak, P.
- New search for: Smid, R.
- New search for: Perina, V.
- New search for: Mackova, A.
- New search for: Cacciatore, M.
In:
Europhysics conference on the atomic and molecular physics of ionised gases
1
;
S123-S132
;
2007
-
ISSN:
- Conference paper / Print
-
Title:Deposition of protective coatings in rf organosilicon discharges
-
Contributors:Zajickova, L. ( author ) / Bursikova, V. ( author ) / Kucerova, Z. ( author ) / Franta, D. ( author ) / Dvorak, P. ( author ) / Smid, R. ( author ) / Perina, V. ( author ) / Mackova, A. ( author ) / Cacciatore, M.
-
Conference:18th, Europhysics conference on the atomic and molecular physics of ionised gases ; 2006 ; Lecce, Italy
-
Published in:PLASMA SOURCES SCIENCE AND TECHNOLOGY ; 16, 1 ; S123-S132
-
Publisher:
- New search for: IOP Publishing
-
Publication date:2007-01-01
-
Size:S123-S132
-
Remarks:See also s/m 3830.415000 VOL 30 PART G 2006 for abstracts
-
ISSN:
-
Type of media:Conference paper
-
Type of material:Print
-
Language:English
-
Keywords:
-
Source:
© Metadata Copyright the British Library Board and other contributors. All rights reserved.