C-Axis Oriented ZnO Film by RF Sputtering and Its Integration with MEMS Processing (English)
- New search for: Chandra, S.
- New search for: Singh, R.
- New search for: Materials Research Society
- New search for: Chandra, S.
- New search for: Singh, R.
- New search for: LaVan, David A.
- New search for: Materials Research Society
In:
Microelectromechanical systems, materials and devices
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99-104
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2008
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ISBN:
- Conference paper / Print
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Title:C-Axis Oriented ZnO Film by RF Sputtering and Its Integration with MEMS Processing
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Contributors:
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Conference:Symposium, Microelectromechanical systems, materials and devices ; 2007 ; Boston, MA
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Published in:MATERIALS RESEARCH SOCIETY SYMPOSIUM PROCEEDINGS ; 1052 2008. ; 99-104
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Publisher:
- New search for: Materials Research Society
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Place of publication:Warrendale, Pa.
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Publication date:2008-01-01
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Size:6 pages
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Remarks:Includes bibliographical references and indexes.
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ISBN:
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Type of media:Conference paper
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Type of material:Print
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Language:English
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Keywords:
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Source:
© Metadata Copyright the British Library Board and other contributors. All rights reserved.
Table of contents conference proceedings
The tables of contents are generated automatically and are based on the data records of the individual contributions available in the index of the TIB portal. The display of the Tables of Contents may therefore be incomplete.
- 3
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A Review of Tension Test Methods for Thin FilmsSharpe, W.N. / Materials Research Society et al. | 2008
- 15
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Reliability of MEMS Materials: Mechanical Characterization of Thin Films Using the Wafer Scale Bulge Test and Improved Microtensile TechniquesGaspar, J. / Schmidt, M. / Held, J. / Paul, O. / Materials Research Society et al. | 2008
- 21
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Fast Characterization of Silicon Membrane Structures by Laser-Doppler VibrometryGerbach, R. / Ebert, M. / Bagdahn, J. / Materials Research Society et al. | 2008
- 29
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MEMS Lubrication: An Atomistic Perspective of a Bound + Mobile LubricantIrving, D.L. / Brenner, D.W. / Materials Research Society et al. | 2008
- 37
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Microstructural and Geometrical Factors Influencing the Mechanical Failure of Polysilicon for MEMSJonnalagadda, K. / Chasiotis, I. / Materials Research Society et al. | 2008
- 47
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Passive Devices for Determining Fracture Strength of MEMS Structural MaterialsKahn, H. / Ballarini, R. / Heuer, A.H. / Materials Research Society et al. | 2008
- 53
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Effect of Surface Oxide Layer on Mechanical Properties of Single Crystalline SiliconMiyamoto, K. / Sugano, K. / Tsuchiya, T. / Tabata, O. / Materials Research Society et al. | 2008
- 59
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Indentation Characterization of Fracture Toughness and Interfacial Strength of PECVD Nitrides After Rapid Thermal AnnealingYan, H.-Y. / Ou, K.-S. / Chen, K.-S. / Materials Research Society et al. | 2008
- 65
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A Novel Micro Tensile Testing Instrument with Replaceable Testing Specimen by Parylene Passivation TechniqueLau, Y.-D. / Chang, T.-C. / Hocheng, H. / Chen, R. / Fang, W. / Materials Research Society et al. | 2008
- 73
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Mechanical Stress Sensors for Copper Damascene InterconnectsDelamare, R. / Blayac, S. / Kasbari, M. / Inal, K. / Rivero, C. / Materials Research Society et al. | 2008
- 81
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Elastic and Viscoelastic Characterization of Polydimethylsiloxane (PDMS) for Cell-Mechanics ApplicationsLin, I.-K. / Liao, Y.-M. / Liu, Y. / Chen, K.-S. / Zhang, X. / Materials Research Society et al. | 2008
- 87
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A Direct Method of Determining Complex Depth Profiles of Residual Stresses in Thin Films on a Nanoscale-Mechanics of Residually Stressed SystemsMassl, S. / Keckes, J. / Pippan, R. / Materials Research Society et al. | 2008
- 93
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Modification of Conductivity and of Mechanical Properties of Electroactive Polymer (EAP) Thin Films by Titanium Ion ImplantationNiklaus, M. / Rosset, S. / Dadras, M. / Dubois, P. / Shea, H.R. / Materials Research Society et al. | 2008
- 99
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C-Axis Oriented ZnO Film by RF Sputtering and Its Integration with MEMS ProcessingChandra, S. / Singh, R. / Materials Research Society et al. | 2008
- 105
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Optimization of the Geometry of the MEMS Electrothermal Actuator to Maximize In-Plane Tip DeflectionKolesar, E.S. / Htun, T. / Least, B. / Tippey, J. / Michalik, J. / Materials Research Society et al. | 2008
- 111
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Aligned Low-Temperature Wafer Bonding for MEMS Manufacturing: Challenges and PromisesDragoi, V. / Matthias, T. / Mittendorfer, G. / Lindner, P. / Materials Research Society et al. | 2008
- 117
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Compressive Stress Accumulation in Composite Nanoporous Gold and Silicone Bilayer Membranes: Underlying Mechanisms and RemediesSeker, E. / Huang, L. / Begley, M.R. / Bart-Smith, H. / Kelly, R.G. / Zangari, G. / Reed, M.L. / Utz, M. / Materials Research Society et al. | 2008
- 123
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Variation in Dislocation Pattern Observed in SCS Films Fractured by Tensile Test: Effects of Film Thickness and Testing TemperatureNakao, S. / Ando, T. / Arai, S. / Saito, N. / Sato, K. / Materials Research Society et al. | 2008
- 129
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Micro-Topography Enhances Directional Myogenic Differentiation of Skeletal Precursor CellsZhao, Y. / Materials Research Society et al. | 2008
- 135
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RF MEMS Behavior, Surface Roughness and Asperity ContactRezvanian, O. / Zikry, M.A. / Brown, C. / Krim, J. / Materials Research Society et al. | 2008
- 141
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The Effect of Hydrophobic Patterning on Micromolding of Aqueous-Derived Silk StructuresTsioris, K. / White, R.D. / Kaplan, D.L. / Wong, P.Y. / Materials Research Society et al. | 2008
- 151
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Fabrication and Characterization of Normal and Shear Stresses Sensitive Tactile Sensors by Using Inclined Micro-Cantilevers Covered with ElastomerSohgawa, M. / Huang, Y.-M. / Noda, M. / Kanashima, T. / Yamashita, K. / Okuyama, M. / Ikeda, M. / Noma, H. / Materials Research Society et al. | 2008
- 157
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Design and Fabrication of an Optical-MEMS SensorMathur, V. / Li, J. / Goodhue, W.D. / Materials Research Society et al. | 2008
- 165
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Relative Resistance Chemical Sensors Built on Microhotplate PlatformsHertz, J.L. / Montgomery, C.B. / Lahr, D.L. / Semancik, S. / Materials Research Society et al. | 2008
- 171
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Novel Differential Surface Stress Sensor for Detection of Chemical and Biological SpeciesKang, K. / Shrotriya, P. / Materials Research Society et al. | 2008
- 179
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Excimer Laser Induced Patterning of PSZT and PLZT FilmsLeech, P.W. / Holland, A.S. / Materials Research Society et al. | 2008
- 185
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Optically Actuated Deformable Micro-Mirrors for Adaptive OpticsRibaudo, T. / Li, J. / Haji-saeed, B. / Khoury, J. / Goodhue, W. / Materials Research Society et al. | 2008
- 191
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High Temperature Annealing Studies on the Piezoelectric Properties of Thin Aluminum Nitride FilmsFarrell, R. / Pagan, V.R. / Kabulski, A. / Kuchibhatla, S. / Harman, J. / Kasarla, K.R. / Rodak, L.E. / Hensel, J.P. / Famouri, P. / Korakakis, D. et al. | 2008
- 197
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A Miniature Silicon Condenser Microphone Improved with a Flexure Hinge Diaphragm and a Large Back VolumeKim, H.J. / Lee, S.Q. / Lee, J.W. / Lee, S.K. / Park, K.H. / Materials Research Society et al. | 2008
- 205
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Comparison of 1D and 2D Theories of Thermoelastic Damping in Flexural MicroresonatorsPrabhakar, S. / Vengallatore, S. / Materials Research Society et al. | 2008
- 211
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Compliant MEMS Motion Characterization by NanoindentationChoueifati, J.G. / Lusk, C. / Pang, X. / Volinsky, A.A. / Materials Research Society et al. | 2008
- 217
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Effects of Supercritical Carbon Dioxide on Adhesive Strength Between Micro-Sized Photoresist Patterns and Silicon SubstratesIshiyama, C. / Shibata, A. / Sone, M. / Higo, Y. / Materials Research Society et al. | 2008
- 223
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Protection Layer Influence on Capacitive Micromachined Ultrasonic Transducers PerformanceJeanne, E. / Meynier, C. / Teston, F. / Certon, D. / Felix, N. / Roy, M. / Alquier, D. / Materials Research Society et al. | 2008
- 229
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Fabrication of C54-TiSi~2 Thin Films Using Cathodic Arc Deposition and Rapid Thermal AnnealingXia, H. / Knudsen, W.R. / Bergstrom, P.L. / Materials Research Society et al. | 2008
- 235
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New Experimental Approach for Measuring Electrical Contact Resistance with an Accurate Mechanical Actuation, Evaluation of the Performances of Gold Micro-SwitchesSeguineau, C. / Broue, A. / Pennec, F. / Dhennin, J. / Desmarres, J.-M. / Pothier, A. / Lafontan, X. / Ignat, M. / Materials Research Society et al. | 2008
- 241
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A Comparative Study of the Strength of Si, SiN and SiC Used at NanoscalesAlan, T. / Sarro, P.M. / Materials Research Society et al. | 2008
- 247
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Compressive Magnetostriction of FeSm Alloy FilmNakano, R. / Matsumura, Y. / Nishi, Y. / Materials Research Society et al. | 2008
- 253
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Influence of Materials on the Performance Limits of MicroactuatorsSrinivasan, P. / Spearing, S.M. / Materials Research Society et al. | 2008
- 259
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Science and Technology of Piezoelectric/Diamond Hybrid Heterostructures for High Performance MEMS/NEMS DevicesAuciello, O. / Sumant, A. / Hiller, J. / Kabius, B. / Srinivasan, S. / Materials Research Society et al. | 2008
- 265
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Relationship Between Film Stress and Dislocation Microstructure Evolution in Thin FilmsFertig, R.S. / Baker, S.P. / Materials Research Society et al. | 2008
- 271
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Systematic Characterization of DRIE-Based Fabrication Process of Silicon MicroneedlesHeld, J. / Gaspar, J. / Ruther, P. / Hagner, M. / Cismak, A. / Heilmann, A. / Paul, O. / Materials Research Society et al. | 2008
- 277
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Novel Fabrication Process for the Integration of MEMS Devices with Thick Amorphous Soft Magnetic Field ConcentratorsBrugger, S. / Pfleging, W. / Paul, O. / Materials Research Society et al. | 2008
- 285
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Analysis and Measurement of Forces in an Electrowetting-Driven OscillatorCrane, N.B. / Volinsky, A.A. / Ramadoss, V. / Nellis, M. / Mishra, P. / Pang, X. / Materials Research Society et al. | 2008
- 291
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Bottom-Up Fabrication of Individual SnO~2 Nanowires-Based Gas Sensors on Suspended MicromembranesRomano-Rodriguez, A. / Hernandez-Ramirez, F. / Prades, J.D. / Tarancon, A. / Casals, O. / Jimenez-Diaz, R. / Juli, M.A. / Morante, J.R. / Barth, S. / Mathur, S. et al. | 2008
- 297
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Nature-Inspired Microfluidic Manipulation Using Magnetic ActuatorsKhaderi, S.N. / Ioan, D. / Toonder, J.M.J.d. / Onck, P.R. / Materials Research Society et al. | 2008
- 305
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MEMS-Based MHz Silicon Ultrasonic Nozzles for Production of Monodisperse DropsSong, Y.L. / Cheng, C.H. / Wang, N. / Tsai, S.C. / Chou, Y.F. / Lee, C.T. / Tsai, C.S. / Materials Research Society et al. | 2008
- 313
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Enabling the Desktop NanoFab with DPN® Pen and Ink Delivery SystemsFragala, J.S. / Shile, R.R. / Haaheim, J. / Materials Research Society et al. | 2008