ZnO Thin Film, Device, and Circuit Fabrication using Low-Temperature PECVD Processes (English)
- New search for: Sun, J.
- New search for: Mourey, D. A.
- New search for: Zhao, D.
- New search for: Jackson, T. N.
- New search for: Sun, J.
- New search for: Mourey, D. A.
- New search for: Zhao, D.
- New search for: Jackson, T. N.
- New search for: Phillips, Jamie
- New search for: Stahlbush, Robert
- New search for: Xing, Grace
In:
Electronic materials conference; Group III nitrides, SiC and ZnO
5
;
755-759
;
2008
-
ISSN:
- Conference paper / Print
-
Title:ZnO Thin Film, Device, and Circuit Fabrication using Low-Temperature PECVD Processes
-
Contributors:Sun, J. ( author ) / Mourey, D. A. ( author ) / Zhao, D. ( author ) / Jackson, T. N. ( author ) / Phillips, Jamie / Stahlbush, Robert / Xing, Grace
-
Conference:49th, Electronic materials conference; Group III nitrides, SiC and ZnO ; 2007 ; University of Notre Dame
-
Published in:JOURNAL OF ELECTRONIC MATERIALS ; 37, 5 ; 755-759
-
Publisher:
- New search for: Springer
-
Publication date:2008-01-01
-
Size:5 pages
-
ISSN:
-
Type of media:Conference paper
-
Type of material:Print
-
Language:English
-
Keywords:
-
Source:
© Metadata Copyright the British Library Board and other contributors. All rights reserved.