Methods of eliminating the grid effect based on DMD technique of maskless lithography [7657-73] (English)
- New search for: Li, Y.
- New search for: Yan, W.
- New search for: Wang, J.
- New search for: Yang, Y.
- New search for: Zhao, L.
- New search for: Zhongguo guang xue xue hui
- New search for: Society of Photo-optical Instrumentation Engineers
- New search for: Zhongguo ke xue yuan
- New search for: China
- New search for: Li, Y.
- New search for: Yan, W.
- New search for: Wang, J.
- New search for: Yang, Y.
- New search for: Zhao, L.
- New search for: Ye, Tianchun
- New search for: Zhongguo guang xue xue hui
- New search for: Society of Photo-optical Instrumentation Engineers
- New search for: Zhongguo ke xue yuan
- New search for: China
In:
Advanced optical manufacturing and testing technologies; Design, manufacturing, and testing of micro-and nano-optical devices and systems
;
7657 16
;
2010
-
ISBN:
-
ISSN:
- Conference paper / Print
-
Title:Methods of eliminating the grid effect based on DMD technique of maskless lithography [7657-73]
-
Contributors:Li, Y. ( author ) / Yan, W. ( author ) / Wang, J. ( author ) / Yang, Y. ( author ) / Zhao, L. ( author ) / Ye, Tianchun / Zhongguo guang xue xue hui / Society of Photo-optical Instrumentation Engineers / Zhongguo ke xue yuan / China
-
Conference:International symposium; 5th, Advanced optical manufacturing and testing technologies; Design, manufacturing, and testing of micro-and nano-optical devices and systems ; 2010 ; Dalian, China
-
Published in:PROCEEDINGS- SPIE THE INTERNATIONAL SOCIETY FOR OPTICAL ENGINEERING ; 7657 ; 7657 16
-
Publisher:
- New search for: SPIE
-
Place of publication:Bellingham, WA
-
Publication date:2010-01-01
-
Size:7657 16
-
Remarks:Sponsored by COS--Chinese Optical Society (China) [and] IOE--the Institute of Optics and Electronics, CAS (China) ; supporting organizations, Ministry of Science and Technology of China .. [et al.]. ; cooperating organizations, Fraunhofer Institute for Applied Optics and Precision Engineering (Germany) .. [et al.] ; supporting organization, National Natural Science Foundation (China) ; cosponsor and published by SPIE--the International Society for Optical Engineering. Includes bibliographical references and index. 5th International Symposium on Advanced Optical Manufacturing and Testing Technologies. Fifth International Symposium on Advanced Optical Manufacturing and Testing Technologies. International Symposium on Advanced Optical Manufacturing and Testing Technologies.
-
ISBN:
-
ISSN:
-
Type of media:Conference paper
-
Type of material:Print
-
Language:English
-
Keywords:
-
Source:
© Metadata Copyright the British Library Board and other contributors. All rights reserved.
Table of contents conference proceedings
The tables of contents are generated automatically and are based on the data records of the individual contributions available in the index of the TIB portal. The display of the Tables of Contents may therefore be incomplete.
- 76570A
-
Application and influence of aspheric surfaces in lithographic objectives designMa, Bin / Li, Lin / Huang, Yifan / Jun, Chang / Du, Baolin / Han, Xing et al. | 2010
- 76570B
-
Metal nanostrip array for light transmission enhancement in subwavelength slitLi, Xu-Feng / Pan, Shi / Guo, Ying-Nan / Li, Hong / Wang, Shuo / Wang, Qiao et al. | 2010
- 76570C
-
Optical response of bowtie antennasGuo, Ying-Nan / Pan, Shi / Li, Xu-Feng / Wang, Shuo / Wang, Qiao et al. | 2010
- 76570D
-
Numerical calculation of optical probe's polarization characteristicsHao, Peng / Zhan, Zhenxian / Wu, Yunliang / Wang, Keyi et al. | 2010
- 76570E
-
Design, manufacture and properties of high-definition diffractive objective lensWei, Ming-yue / Wang, Meng / Li, Bin et al. | 2010
- 76570F
-
Thinned-cladding zeolite-coated long period fiber grating chemical sensorShen, Gao / Jiang, Lan / Wang, Sumei / Li, Benye / Zhou, Lanying / Tsai, Hai-Lung / Xiao, Hai et al. | 2010
- 76570G
-
Characterization of a 61-element bulk-PZT thick film deformable mirror and generation of Zernike polynomialsMa, Jianqiang / Li, Baoqing / Chu, Jiaru et al. | 2010
- 76570H
-
The mode characteristics of photonic crystal vertical cavity surface emitting laserXie, Yi Yang / Xu, Chen / Kan, Qiang / Wang, Chun Xia / Wang, Bao Qiang / Liu, Ying Ming / Chen, Hong Da / Shen, Guang Di et al. | 2010
- 76570I
-
Design and fabrication of dual-transmission-band fiber Bragg grating with terahertz wavelength spacingTang, Jianguan / Sun, Junqiang et al. | 2010
- 76570J
-
The analysis of holographic mosaic gratings' errorQian, Guo-lin / Wu, Jian-hong / Li, Chao-ming et al. | 2010
- 76570K
-
Periodic microstructures induced by interfered femtosecond laser pulsesGuo, Zhongyi / Qu, Shiliang / Liu, Shutian / Lee, Jung-Ho et al. | 2010
- 76570L
-
Influence on digital photolithography intensity by collimated Gaussian beamHe, Shuai / Gao, Yiqing / Luo, Ningning / Rao, Yufang et al. | 2010
- 76570M
-
External laser intensity modulation based on a MEMS micro-mirror for photo-acoustic gas sensingLi, Li / Stewart, George / Thursby, Graham / Arsad, Norhana / Uttamchandani, Deepak / Culshaw, Brian / Wang, Yiding et al. | 2010
- 76570N
-
Dynamic adjustment system of space-borne Fourier transform spectrometerWei, Huandong / Hua, Jianwen / Wang, Zhanhu / Dai, Zuoxiao / Li, Dayu / Jin, Xiaoqiang et al. | 2010
- 76570O
-
Research on VCSEL of single-mode multilayer photonic crystalLi, Wenchao / Liu, Zhengjun / Sha, Xiaopeng et al. | 2010
- 76570P
-
Research and design on DMD digital photolithography systemRao, Yufang / Gao, Yiqing / Luo, Ningning et al. | 2010
- 76570Q
-
Formation of self-organized nanostructures on Si surfaces during low energy ion beam erosionChen, Zhi-li / Liu, Wei-guo / Xu, Xiao-hui et al. | 2010
- 76570R
-
DMFC bipolar material and new processing for μDMFC microchannelYin, Bifeng / Guan, Tao / Wang, Yun et al. | 2010
- 76570S
-
Analysis on electromagnetic polarity of asymmetrical nanoshellsShi, Guang / Wang, Hao / Sun, Wenzhen / Han, Wei / Xing, Haiding et al. | 2010
- 76570T
-
Simulation and experiment of cutting force in ultrasonic torsional vibration assisted micro-millingHu, Haijun / Sun, Yazhou / Lu, Zesheng et al. | 2010
- 76570U
-
Optical design and error analyses of lens for observing the fiber core based on the software ZEMAXSun, Jinglu / Li, Xiangning / Wu, Xuting et al. | 2010
- 76570V
-
Design and simulation of microspectrometer based on torsional MEMS gratingYan, Bin / Yuan, Weizheng / Sun, Ruikang / Qiao, Dayong et al. | 2010
- 76570W
-
The impact of manufacturing errors of domain structure on frequency doubling efficiency in PPLN waveguidesLiu, Zhengying / Ren, Aihong / Zhang, Rongzhu / Liu, Jinglun / Sun, Nianchun / Chen, Jianguo et al. | 2010
- 76570X
-
Design and test of focusing mechanism of space cameraGuo, Quanfeng / Jin, Guang / Dong, Jihong / Li, Yanchun / Li, Wei / Wang, Haiping et al. | 2010
- 76570Y
-
Radiation forces analysis for gold nanoparticles in optical tweezersLiu, Xiaoyu / Wang, Feng et al. | 2010
- 76570Z
-
Soft substrate as a sacrificial layer for fabrication free-standing SU-8-based nanofluidic systemLi, Xiaojun / Wang, Xudi / Jin, Jian / Li, Xin / Tian, Yangchao / Fu, Shaojun et al. | 2010
- 76571A
-
Experimental verification of the inverse Doppler effect in negative-index materialFeng, Lie / Chen, Jiabi / Wang, Yan / Geng, Tao / Zhuang, Songlin et al. | 2010
- 76571B
-
Phase demodulation method for fringe pattern in alignment of nanometer lithographyXu, Feng / Hu, Song / Luo, Zhengquan et al. | 2010
- 76571C
-
Nanolithography in the evanescent near-field by using gain-assisted meta-materials systemYang, Yong / Yan, Wei / Wang, Jian / Li, Yanli / Zhao, Lixin / Hu, Song / Li, Zhan et al. | 2010
- 76571D
-
Research on focusing technique based on dual-phase lock-in amplifier in 193nm lithography systemXie, Fei / Tang, Xiaoping / Hu, Song / Yan, Wei et al. | 2010
- 76571E
-
A new system for measuring the diffraction efficiency of large aperture gratingsZhou, Xiaowei / Wang, Xiao / Liu, Zhengkun / Xu, Xiangdong / Fu, Shaojun et al. | 2010
- 76571F
-
Study on residual stresses in ultrasonic torsional vibration assisted micro-millingLu, Zesheng / Hu, Haijun / Sun, Yazhou / Sun, Qing et al. | 2010
- 76571G
-
Positioning scheme based on grating modulation and phase imaging in lithographyZhou, Shaolin / Xu, Feng / Hu, Song / Tang, Xiaoping et al. | 2010
- 76571H
-
Focusing and leveling in dual stage lithographic systemLi, Jinlong / Zhao, Lixin et al. | 2010
- 76571I
-
Application of chaos optimization algorithm in the micro spectrometerXiong, Yu Hong / Xu, Shao Ping / Lv, Xiao Lan / Jiang, Shun Liang / Ye, Fa Mao / Zhou, Shi Lin et al. | 2010
- 76571J
-
An optical modulation based focus method for optical projection lithographyChen, Wangfu / Hu, Song et al. | 2010
- 76571K
-
Moiré fringe method of using warping deformation measurement of electronic componentsHuang, Yanping / Huang, Biaobing / Xu, Hongji / Yan, Dongmei / Li, Wenpeng et al. | 2010
- 76571L
-
Study on mechanical properties and damage behaviors of Kevlar fiber reinforced epoxy composites by digital image correlation technique under optical microscopeGao, Xiang / Shao, Wenquan / Ji, Hongwei et al. | 2010
- 76571M
-
System-level modeling and verification of a micro pitch-tunable gratingLv, Xianglian / He, Yang / Yuan, Weizheng et al. | 2010
- 76571N
-
An AFM system with multi-mode scanning for large-area measurementCui, Yuguo / He, Gaifa / Arai, Yoshikazu / Gao, Wei et al. | 2010
- 76571O
-
Characteristics of sensors based on MEMS grating with interdigitated comb structuresWei, Naike / Wang, Weimin / Yao, Jun / Chen, Kefan / Zhu, Jianhua / Gao, Fuhua et al. | 2010
- 76571P
-
Waveguide ring coupling design of MOGJi, Xiang / Li, Zi-li / Chen, Yuan-you / Qin, Xiao-hu / Lv, Xin et al. | 2010
- 76571Q
-
Fabrication and optical design of pyramid microstructure on the base of light guide used for the backlight moduleChang, Jee-Gong / Liu, Chien-Wei / Fang, Yu-Bin / Lu, Jian-Ming / Li, Wang-Long / Ju, Shin-Pon et al. | 2010
- 76571R
-
Analysis on optical absorption and photo-thermal polarity of metal nanoshellsHan, Wei / Wang, Hao / Sun, Wenzhen / Shi, Guang / Xing, Haiding et al. | 2010
- 76571S
-
Design and simulation for the bifocal microlens in thick film lithographyTang, Xionggui / Lu, Rongguo / Liao, Jinkun / Li, Heping / Zhang, Lin / Liu, Yongzhi et al. | 2010
- 76571W
-
Alignment for double-side deep-exposure lithography toolMa, Ping / Fu, Xiaofang / Yang, Chunli / Hu, Song / Tang, Xiaoping et al. | 2010
- 765701
-
Front Matter: Volume 7657| 2010
- 765702
-
A novel technique of phase-locked interference positioning and phase discriminationYe, Shuliang / Gao, Ping et al. | 2010
- 765703
-
Miniature Fabry-Perot optical fiber pressure sensorChen, Shuang / Zhang, Lizhe et al. | 2010
- 765704
-
Analysis of silicon-based optical racetrack resonator for acceleration sensingMo, Wenqin / Wu, Huaming / Gao, Dingshan / Zhou, Zhiping et al. | 2010
- 765705
-
Application of holographic technique to the photonic crystal quantum cascade lasersLu, Quan-Yong / Liu, Feng-Qi / Wang, Li-Jun / Liu, Jun-Qi / Li, Lu / Wang, Zhan-Guo et al. | 2010
- 765706
-
Nano-patterns fabricated by soft press and temperature-pressure variation imprintWang, Lei / Liu, Wen / Zhang, Yiwen / Qiu, Fei / Wang, Dingli / Zhou, Ning / Xu, Zhimou et al. | 2010
- 765707
-
Simulation of modal wavefront sensor employed multiplexed holographic optical elementsLiu, Changhai / Jiang, Zongfu / Huang, Shengyang / Ma, Haotong / Xi, Fengjie et al. | 2010
- 765708
-
Fast, high efficiency and cost-effective laser nano-lithographyPeng, C. S. / Tan, C. et al. | 2010
- 765709
-
Analyzing the effect of tool edge radius on cutting temperature in micro-milling processLiang, Y. C. / Yang, K. / Zheng, K. N. / Bai, Q. S. / Chen, W. Q. / Sun, G. Y. et al. | 2010
- 765710
-
Poly (ethylene terephthalate) (PET) micro/nanostructures fabricated by nanoimprint and its applicationsWang, Xudi / Jin, Jian / Tang, Qisheng / Tian, Wenrui / Li, Xiaojun / Fu, Shaojun / Liao, Yanlin et al. | 2010
- 765711
-
High stability temperature control of the reference laser diode for spaceborne Fourier transform spectrometerJin, Xiaoqiang / Dai, Zuoxiao / Hua, Jianwen / Li, Dayu / Wei, Huandong / Sun, Xiaojie et al. | 2010
- 765712
-
Research on exposure model for DMD-based digital gray-tone maskLuo, Ningning / Gao, Yiqing / He, Shuai / Rao, Yufang et al. | 2010
- 765713
-
Research on the characteristics of color filter with double metal layersZhou, Yun / Ye, Yan / Shen, Su / Fang, Zongbao / Chen, Linsen et al. | 2010
- 765714
-
Compact grating couplers between a single-mode fiber and nanophotonic silicon-on-insulator waveguideTong, Xiaogang / Liu, Jun / Xue, Chenyang et al. | 2010
- 765715
-
Design and analysis of deep ultraviolet microlithography illumination systemHan, Xing / Li, Lin / Huang, Yifan / Du, Baolin / Ma, Bin / Che, Zihui et al. | 2010
- 765716
-
Methods of eliminating the grid effect based on DMD technique of maskless lithographyLi, Yanli / Yan, Wei / Wang, Jian / Yang, Yong / Zhao, Lixin et al. | 2010
- 765717
-
Design and fabrication of diffractive microlens and analysis of optical characteristicsWang, Meng / Li, Bin / Wei, Ming-yue / Zhang, Xin-yu / Xie, Chang-Sheng / Zhang, Tian-xu et al. | 2010
- 765718
-
Optimization study on the deformable mirror support structure of the hyperspectral imaging system for food detectionZhao, Fu / Wang, Ping / Gong, Yanjue / Zhang, Li / Meng, Chunling et al. | 2010
- 765719
-
Study on controlling the profile of holographic ion beam etching gratingsLiu, Quan / Wang, Hai-bin / Wu, Jian-hong / Sun, Peng / Qian, Guo-lin / Wang, Dan et al. | 2010
-
Thinned-cladding zeolite-coated long period fiber grating chemical sensor [7657-81]Shen, G. / Jiang, L. / Wang, S. / Li, B. / Zhou, L. / Tsai, H.-L. / Xiao, H. / Zhongguo guang xue xue hui / Society of Photo-optical Instrumentation Engineers / Zhongguo ke xue yuan et al. | 2010
-
Research and design on DMD digital photolithography system [7657-14]Rao, Y. / Gao, Y. / Luo, N. / He, S. / Zhongguo guang xue xue hui / Society of Photo-optical Instrumentation Engineers / Zhongguo ke xue yuan / China et al. | 2010
-
Design and test of focusing mechanism of space camera [7657-57]Guo, Q. / Jin, G. / Dong, J. / Li, Y. / Li, W. / Wang, H. / Zhongguo guang xue xue hui / Society of Photo-optical Instrumentation Engineers / Zhongguo ke xue yuan / China et al. | 2010
-
Design and analysis of deep ultraviolet microlithography illumination system [7657-43]Han, X. / Li, L. / Huang, Y. / Du, B. / Ma, B. / Che, Z. / Zhongguo guang xue xue hui / Society of Photo-optical Instrumentation Engineers / Zhongguo ke xue yuan / China et al. | 2010
-
Study on mechanical properties and damage behaviors of Kevlar fiber reinforced epoxy composites by digital image correlation technique under optical microscope [7657-68]Gao, X. / Shao, W. / Ji, H. / Zhongguo guang xue xue hui / Society of Photo-optical Instrumentation Engineers / Zhongguo ke xue yuan / China et al. | 2010
-
Analysis of silicon-based optical racetrack resonator for acceleration sensing [7657-31]Mo, W. / Wu, H. / Gao, D. / Zhou, Z. / Zhongguo guang xue xue hui / Society of Photo-optical Instrumentation Engineers / Zhongguo ke xue yuan / China et al. | 2010
-
Application and influence of aspheric surfaces in lithographic objectives design [7657-30]Ma, B. / Li, L. / Huang, Y. / Jun, C. / Du, B. / Han, X. / Zhongguo guang xue xue hui / Society of Photo-optical Instrumentation Engineers / Zhongguo ke xue yuan / China et al. | 2010
-
Poly (ethylene terephthalate) (PET) micro/nanostructures fabricated by nanoimprint and its applications [7657-44]Wang, X. / Jin, J. / Tang, Q. / Tian, W. / Li, X. / Fu, S. / Liao, Y. / Zhongguo guang xue xue hui / Society of Photo-optical Instrumentation Engineers / Zhongguo ke xue yuan et al. | 2010
-
Methods of eliminating the grid effect based on DMD technique of maskless lithography [7657-73]Li, Y. / Yan, W. / Wang, J. / Yang, Y. / Zhao, L. / Zhongguo guang xue xue hui / Society of Photo-optical Instrumentation Engineers / Zhongguo ke xue yuan / China et al. | 2010
-
Research on VCSEL of single-mode multilayer photonic crystal [7657-07]Li, W. / Liu, Z. / Sha, X. / Zhongguo guang xue xue hui / Society of Photo-optical Instrumentation Engineers / Zhongguo ke xue yuan / China et al. | 2010
-
Positioning scheme based on grating modulation and phase imaging in lithography [7657-70]Zhou, S. / Xu, F. / Hu, S. / Tang, X. / Zhongguo guang xue xue hui / Society of Photo-optical Instrumentation Engineers / Zhongguo ke xue yuan / China et al. | 2010
-
Focusing and leveling in dual stage lithographic system [7657-67]Li, J. / Zhao, L. / Hu, S. / Zhou, S. / Zhongguo guang xue xue hui / Society of Photo-optical Instrumentation Engineers / Zhongguo ke xue yuan / China et al. | 2010
-
The mode characteristics of photonic crystal vertical cavity surface emitting laser [7657-102]Xie, Y.Y. / Xu, C. / Kan, Q. / Wang, C.X. / Wang, B.Q. / Liu, Y.M. / Chen, H.D. / Shen, G.D. / Zhongguo guang xue xue hui / Society of Photo-optical Instrumentation Engineers et al. | 2010
-
Simulation and experiment of cutting force in ultrasonic torsional vibration assisted micro-milling [7657-26]Hu, H. / Sun, Y. / Lu, Z. / Zhongguo guang xue xue hui / Society of Photo-optical Instrumentation Engineers / Zhongguo ke xue yuan / China et al. | 2010
-
Radiation forces analysis for gold nanoparticles in optical tweezers [7657-10]Liu, X. / Wang, F. / Zhongguo guang xue xue hui / Society of Photo-optical Instrumentation Engineers / Zhongguo ke xue yuan / China et al. | 2010
-
Research on the characteristics of color filter with double metal layers [7657-76]Zhou, Y. / Ye, Y. / Shen, S. / Fang, Z. / Chen, L. / Zhongguo guang xue xue hui / Society of Photo-optical Instrumentation Engineers / Zhongguo ke xue yuan / China et al. | 2010
-
Phase demodulation method for fringe pattern in alignment of nanometer lithography [7657-74]Xu, F. / Hu, S. / Luo, Z. / Zhou, S. / Zhongguo guang xue xue hui / Society of Photo-optical Instrumentation Engineers / Zhongguo ke xue yuan / China et al. | 2010
-
Nanolithography in the evanescent near-field by using gain-assisted meta-materials system [7657-72]Yang, Y. / Yan, W. / Wang, J. / Li, Y. / Zhao, L. / Hu, S. / Li, Z. / Zhongguo guang xue xue hui / Society of Photo-optical Instrumentation Engineers / Zhongguo ke xue yuan et al. | 2010
-
Fast, high efficiency and cost-effective laser nano-lithography [7657-108]Peng, C.S. / Tan, C. / Zhongguo guang xue xue hui / Society of Photo-optical Instrumentation Engineers / Zhongguo ke xue yuan / China et al. | 2010
-
Analysis on electromagnetic polarity of asymmetrical nanoshells [7657-105]Shi, G. / Wang, H. / Sun, W. / Han, W. / Xing, H. / Zhongguo guang xue xue hui / Society of Photo-optical Instrumentation Engineers / Zhongguo ke xue yuan / China et al. | 2010
-
Study on residual stresses in ultrasonic torsional vibration assisted micro-milling [7657-35]Lu, Z. / Hu, H. / Sun, Y. / Sun, Q. / Zhongguo guang xue xue hui / Society of Photo-optical Instrumentation Engineers / Zhongguo ke xue yuan / China et al. | 2010
-
System-level modeling and verification of a micro pitch-tunable grating [7657-82]Lv, X. / Xu, J. / Yu, Y. / He, Y. / Yuan, W. / Zhongguo guang xue xue hui / Society of Photo-optical Instrumentation Engineers / Zhongguo ke xue yuan / China et al. | 2010
-
Nano-patterns fabricated by soft press and temperature-pressure variation imprint [7657-93]Wang, L. / Liu, W. / Zhang, Y. / Qiu, F. / Wang, D. / Zhou, N. / Xu, Z. / Zhongguo guang xue xue hui / Society of Photo-optical Instrumentation Engineers / Zhongguo ke xue yuan et al. | 2010
-
Metal nanostrip array for light transmission enhancement in subwavelength slit [7657-52]Li, X.-F. / Pan, S. / Guo, Y.-N. / Li, H. / Wang, S. / Wang, Q. / Zhongguo guang xue xue hui / Society of Photo-optical Instrumentation Engineers / Zhongguo ke xue yuan / China et al. | 2010
-
Design and fabrication of dual-transmission-band fiber Bragg grating with terahertz wavelength spacing [7657-89]Tang, J. / Sun, J. / Chen, J. / Zhongguo guang xue xue hui / Society of Photo-optical Instrumentation Engineers / Zhongguo ke xue yuan / China et al. | 2010
-
Formation of self-organized nanostructures on Si surfaces during low energy ion beam erosion [7657-42]Chen, Z. / Liu, W. / Xu, X. / Zhongguo guang xue xue hui / Society of Photo-optical Instrumentation Engineers / Zhongguo ke xue yuan / China et al. | 2010
-
An AFM system with multi-mode scanning for large-area measurement [7657-16]Cui, Y. / He, G. / Arai, Y. / Gao, W. / Zhongguo guang xue xue hui / Society of Photo-optical Instrumentation Engineers / Zhongguo ke xue yuan / China et al. | 2010
-
Moire fringe method of using warping deformation measurement of electronic components [7657-61]Huang, Y. / Huang, B. / Xu, H. / Yan, D. / Li, W. / Zhongguo guang xue xue hui / Society of Photo-optical Instrumentation Engineers / Zhongguo ke xue yuan / China et al. | 2010
-
Fabrication and optical design of pyramid microstructure on the base of light guide used for the backlight module [7657-01]Chang, J.-G. / Liu, C.-W. / Fang, Y.-B. / Lu, J.-M. / Li, W.-L. / Ju, S.-P. / Zhongguo guang xue xue hui / Society of Photo-optical Instrumentation Engineers / Zhongguo ke xue yuan / China et al. | 2010
-
A novel technique of phase-locked interference positioning and phase discrimination [7657-54]Ye, S. / Gao, P. / Zhongguo guang xue xue hui / Society of Photo-optical Instrumentation Engineers / Zhongguo ke xue yuan / China et al. | 2010
-
Optical response of bowtie antennas [7657-50]Guo, Y.-N. / Pan, S. / Li, X.-F. / Wang, S. / Wang, Q. / Zhongguo guang xue xue hui / Society of Photo-optical Instrumentation Engineers / Zhongguo ke xue yuan / China et al. | 2010
-
Periodic microstructures induced by interfered femtosecond laser pulses [7657-45]Guo, Z. / Qu, S. / Liu, S. / Lee, J.-H. / Zhongguo guang xue xue hui / Society of Photo-optical Instrumentation Engineers / Zhongguo ke xue yuan / China et al. | 2010
-
Design and simulation of microspectrometer based on torsional MEMS grating [7657-101]Yan, B. / Yuan, W. / Sun, R. / Qiao, D. / Yu, Y. / Li, T. / Zhongguo guang xue xue hui / Society of Photo-optical Instrumentation Engineers / Zhongguo ke xue yuan / China et al. | 2010
-
The impact of manufacturing errors of domain structure on frequency doubling efficiency in PPLN waveguides [7657-21]Liu, Z. / Ren, A. / Zhang, R. / Liu, J. / Sun, N. / Chen, J. / Zhongguo guang xue xue hui / Society of Photo-optical Instrumentation Engineers / Zhongguo ke xue yuan / China et al. | 2010
-
A new system for measuring the diffraction efficiency of large aperture gratings [7657-47]Zhou, X. / Wang, X. / Liu, Z. / Xu, X. / Fu, S. / Zhongguo guang xue xue hui / Society of Photo-optical Instrumentation Engineers / Zhongguo ke xue yuan / China et al. | 2010
-
Design and simulation for the bifocal microlens in thick film lithography [7657-29]Tang, X. / Lu, R. / Liao, J. / Li, H. / Zhang, L. / Liu, Y. / Zhongguo guang xue xue hui / Society of Photo-optical Instrumentation Engineers / Zhongguo ke xue yuan / China et al. | 2010
-
External laser intensity modulation based on a MEMS micro-mirror for photo-acoustic gas sensing [7657-03]Li, L. / Stewart, G. / Thursby, G. / Arsad, N. / Uttamchandani, D. / Culshaw, B. / Wang, Y. / Zhongguo guang xue xue hui / Society of Photo-optical Instrumentation Engineers / Zhongguo ke xue yuan et al. | 2010
-
Soft substrate as a sacrificial layer for fabrication free-standing SU-8-based nanofluidic system [7657-37]Li, X. / Wang, X. / Jin, J. / Tian, Y. / Fu, S. / Zhongguo guang xue xue hui / Society of Photo-optical Instrumentation Engineers / Zhongguo ke xue yuan / China et al. | 2010
-
Research on exposure model for DMD-based digital gray-tone mask [7657-12]Luo, N. / Gao, Y. / He, S. / Rao, Y. / Zhongguo guang xue xue hui / Society of Photo-optical Instrumentation Engineers / Zhongguo ke xue yuan / China et al. | 2010
-
Research on focusing technique based on dual-phase lock-in amplifier in 193nm lithography system [7657-66]Xie, F. / Tang, X. / Hu, S. / Yan, W. / Zhongguo guang xue xue hui / Society of Photo-optical Instrumentation Engineers / Zhongguo ke xue yuan / China et al. | 2010
-
An optical modulation based focus method for optical projection lithography [7657-75]Chen, W. / Hu, S. / Zhongguo guang xue xue hui / Society of Photo-optical Instrumentation Engineers / Zhongguo ke xue yuan / China et al. | 2010
-
Waveguide ring coupling design of MOG [7657-56]Ji, X. / Li, Z. / Chen, Y. / Qin, X. / Lv, X. / Zhongguo guang xue xue hui / Society of Photo-optical Instrumentation Engineers / Zhongguo ke xue yuan / China et al. | 2010
-
Analysis on optical absorption and photo-thermal polarity of metal nanoshells [7657-106]Han, W. / Wang, H. / Sun, W. / Shi, G. / Xing, H. / Zhongguo guang xue xue hui / Society of Photo-optical Instrumentation Engineers / Zhongguo ke xue yuan / China et al. | 2010
-
Simulation of modal wavefront sensor employed multiplexed holographic optical elements [7657-91]Liu, C. / Jiang, Z. / Huang, S. / Ma, H. / Xi, F. / Zhongguo guang xue xue hui / Society of Photo-optical Instrumentation Engineers / Zhongguo ke xue yuan / China et al. | 2010
-
Numerical calculation of optical probe's polarization characteristics [7657-36]Hao, P. / Zhan, Z. / Wu, Y. / Wang, K. / Zhongguo guang xue xue hui / Society of Photo-optical Instrumentation Engineers / Zhongguo ke xue yuan / China et al. | 2010
-
Compact grating couplers between a single-mode fiber and nanophotonic silicon-on-insulator waveguide [7657-09]Tong, X. / Liu, J. / Xue, C. / Zhongguo guang xue xue hui / Society of Photo-optical Instrumentation Engineers / Zhongguo ke xue yuan / China et al. | 2010
-
Application of chaos optimization algorithm in the micro spectrometer [7657-95]Xiong, Y.H. / Xu, S.P. / Lv, X.L. / Jiang, S.L. / Ye, F.M. / Zhou, S.L. / Zhongguo guang xue xue hui / Society of Photo-optical Instrumentation Engineers / Zhongguo ke xue yuan / China et al. | 2010
-
Analyzing the effect of tool edge radius on cutting temperature in micro-milling process [7657-107]Liang, Y.C. / Yang, K. / Zheng, K.N. / Bai, Q.S. / Chen, W.Q. / Sun, G.Y. / Zhongguo guang xue xue hui / Society of Photo-optical Instrumentation Engineers / Zhongguo ke xue yuan / China et al. | 2010
-
The analysis of holographic mosaic gratings' error [7657-65]Qian, G. / Wu, J. / Li, C. / Zhongguo guang xue xue hui / Society of Photo-optical Instrumentation Engineers / Zhongguo ke xue yuan / China et al. | 2010
-
Influence on digital photolithography intensity by collimated Gaussian beam [7657-06]He, S. / Gao, Y. / Luo, N. / Rao, Y. / Zhongguo guang xue xue hui / Society of Photo-optical Instrumentation Engineers / Zhongguo ke xue yuan / China et al. | 2010
-
DMFC bipolar material and new processing for μDMFC microchannel [7657-103]Yin, B. / Guan, T. / Wang, Y. / Zhongguo guang xue xue hui / Society of Photo-optical Instrumentation Engineers / Zhongguo ke xue yuan / China et al. | 2010
-
Optimization study on the deformable mirror support structure of the hyperspectral imaging system for food detection [7657-40]Zhao, F. / Wang, P. / Gong, Y. / Zhang, L. / Meng, C. / Zhongguo guang xue xue hui / Society of Photo-optical Instrumentation Engineers / Zhongguo ke xue yuan / China et al. | 2010
-
Design and fabrication of diffractive microlens and analysis of optical characteristics [7657-99]Wang, M. / Li, B. / Wei, M. / Zhang, X. / Xie, C. / Zhang, T. / Zhongguo guang xue xue hui / Society of Photo-optical Instrumentation Engineers / Zhongguo ke xue yuan / China et al. | 2010
-
Study on controlling the profile of holographic ion beam etching gratings [7657-32]Liu, Q. / Wang, H. / Wu, J. / Sun, P. / Qian, G. / Wang, D. / Zhongguo guang xue xue hui / Society of Photo-optical Instrumentation Engineers / Zhongguo ke xue yuan / China et al. | 2010
-
Alignment for double-sided deep-exposure lithography tool [7657-96]Ma, P. / Fu, X. / Yang, C. / Hu, S. / Tang, X. / Zhongguo guang xue xue hui / Society of Photo-optical Instrumentation Engineers / Zhongguo ke xue yuan / China et al. | 2010
-
Application of holographic technique to the photonic crystal quantum cascade lasers [7657-104]Lu, Q.-Y. / Liu, F.-Q. / Wang, L.-J. / Liu, J.-Q. / Li, L. / Wang, Z.-G. / Zhongguo guang xue xue hui / Society of Photo-optical Instrumentation Engineers / Zhongguo ke xue yuan / China et al. | 2010
-
Design, manufacture and properties of high-definition diffractive objective lens [7657-97]Wei, M. / Wang, M. / Li, B. / Zhang, X. / Xie, C.-S. / Zhang, T. / Zhongguo guang xue xue hui / Society of Photo-optical Instrumentation Engineers / Zhongguo ke xue yuan / China et al. | 2010
-
Dynamic adjustment system of space-borne Fourier transform spectrometer [7657-27]Wei, H. / Hua, J. / Wang, Z. / Dai, Z. / Li, D. / Jin, X. / Zhongguo guang xue xue hui / Society of Photo-optical Instrumentation Engineers / Zhongguo ke xue yuan / China et al. | 2010
-
Optical design and error analyses of lens for observing the fiber core based on the software ZEMAX [7657-05]Sun, J. / Li, X. / Wu, X. / Zhongguo guang xue xue hui / Society of Photo-optical Instrumentation Engineers / Zhongguo ke xue yuan / China et al. | 2010
-
Experimental verification of the inverse Doppler effect in negative-index material [7657-17]Feng, L. / Chen, J. / Wang, Y. / Geng, T. / Zhuang, S. / Zhongguo guang xue xue hui / Society of Photo-optical Instrumentation Engineers / Zhongguo ke xue yuan / China et al. | 2010
-
Miniature Fabry-Perot optical fiber pressure sensor [7657-98]Chen, S. / Zhang, L. / Zhongguo guang xue xue hui / Society of Photo-optical Instrumentation Engineers / Zhongguo ke xue yuan / China et al. | 2010
-
Characterization of a 61-element bulk-PZT thick film deformable mirror and generation of Zernike polynomials [7657-49]Ma, J. / Li, B. / Chu, J. / Zhongguo guang xue xue hui / Society of Photo-optical Instrumentation Engineers / Zhongguo ke xue yuan / China et al. | 2010
-
High stability temperature control of the reference laser diode for spaceborne Fourier transform spectrometer [7657-28]Jin, X. / Dai, Z. / Hua, J. / Li, D. / Wei, H. / Sun, X. / Zhongguo guang xue xue hui / Society of Photo-optical Instrumentation Engineers / Zhongguo ke xue yuan / China et al. | 2010
-
Characteristics of sensors based on MEMS grating with interdigitated comb structures [7657-53]Wei, N. / Wang, W. / Yao, J. / Chen, K. / Zhu, J. / Gao, F. / Zhongguo guang xue xue hui / Society of Photo-optical Instrumentation Engineers / Zhongguo ke xue yuan / China et al. | 2010