Shared shuttles for integrated silicon optoelectronics (Invited Paper) [8252-15] (English)
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In:
MOEMS and miniaturized systems
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8252 0G
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2012
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ISBN:
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ISSN:
- Conference paper / Print
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Title:Shared shuttles for integrated silicon optoelectronics (Invited Paper) [8252-15]
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Contributors:Baehr-Jones, T. ( author ) / Ding, R. ( author ) / Ayazi, A. ( author ) / Pinguet, T. ( author ) / Streshinsky, M. ( author ) / Harris, N. ( author ) / Li, J. ( author ) / He, L. ( author ) / Gould, M. ( author ) / Zhang, Y. ( author )
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Conference:Conference; 11th, MOEMS and miniaturized systems ; 2012 ; San Francisco, CA
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Published in:MOEMS and miniaturized systems ; 8252 0GPROCEEDINGS - SPIE THE INTERNATIONAL SOCIETY FOR OPTICAL ENGINEERING ; 8252 ; 8252 0G
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Publisher:
- New search for: SPIE
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Place of publication:Bellingham, Wash.
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Publication date:2012-01-01
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Size:8252 0G
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Remarks:"SPIE Photonics West" --cover. Includes bibliographical references and index.
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ISBN:
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ISSN:
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Type of media:Conference paper
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Type of material:Print
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Language:English
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Keywords:
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Source:
© Metadata Copyright the British Library Board and other contributors. All rights reserved.
Table of contents conference proceedings
The tables of contents are generated automatically and are based on the data records of the individual contributions available in the index of the TIB portal. The display of the Tables of Contents may therefore be incomplete.
- 82520A
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Net flux sensors for the measurement of Mars surface radiation budgetNgo Phong, Linh / Alazzam, Anas / Daly, Michael G. / Proulx, Christian / Châteauneuf, Francois et al. | 2012
- 82520B
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Large MEMS-based programmable reflective slit mask for multi-object spectroscopy fabricated using multiple wafer-level bondingCanonica, Michael / Zamkotsian, Frederic / Lanzoni, Patrick / Noell, Wilfried / de Rooij, Nico et al. | 2012
- 82520C
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Translatory MEMS actuator and their system integration for miniaturized Fourier transform spectrometersSandner, Thilo / Grasshoff, Thomas / Schenk, Harald / Kenda, Andreas et al. | 2012
- 82520D
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Advances in performance and miniaturization of a FT-IR spectrometer system based on a large stroke MOEMS piston mirrorKenda, Andreas / Sandner, Thilo / Lüttjohann, Stephan / Kraft, Martin / Tortschanoff, Andreas / Simon, Arno et al. | 2012
- 82520E
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Spectral imaging characterization of MOEM tunable Fabry-Perot filterGupta, Neelam et al. | 2012
- 82520G
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Shared shuttles for integrated silicon optoelectronicsBaehr-Jones, Tom / Ding, Ran / Ayazi, Ali / Pinguet, Thierry / Streshinsky, Matt / Harris, Nick / Li, Jing / He, Li / Gould, Mike / Zhang, Yi et al. | 2012
- 82520H
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One-dimensional light modulatorSinning, S. / Wullinger, I. / Schmidt, J.-U. / Friedrichs, M. / Dauderstädt, U. / Wolschke, S. / Hughes, T. / Pahner, D. / Wagner, M. et al. | 2012
- 82520J
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Low voltage vertical flaps arrays as optical modulating elements for reflective display and switchable gratingsJutzi, F. / Noell, W. / de Rooij, N. F. et al. | 2012
- 82520K
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Dynamically deformable reflective membrane for laser beam shaping and smoothingMasson, J. / Bitterli, R. / Bich, A. / Noell, W. / Voelkel, R. / Weible, K. / de Rooij, N. et al. | 2012
- 82520L
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MEMS focus control and spherical aberration correction for multilayer optical discsLukes, Sarah J. / Dickensheets, David L. et al. | 2012
- 82520M
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Deformable mirror with controlled air damping for fast focus tracking and scanningMoghimi, Mohammad J. / Chattergoon, Krishna / Wilson, Chris / Dickensheets, David L. et al. | 2012
- 82520N
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Miniature non-mechanical zoom camera using deformable MOEMS mirrorsKaylor, Brant M. / Wilson, Christopher R. / Greenfield, Nathan J. / Roos, Peter A. / Seger, Eric M. / Moghimi, Mohammad J. / Dickensheets, David L. et al. | 2012
- 82520O
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Microelectrofluidic iris for variable apertureChang, Jong-hyeon / Jung, Kyu-Dong / Lee, Eunsung / Choi, Minseog / Lee, Seungwan et al. | 2012
- 82520P
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Thin varifocal liquid lenses actuated below 10V for mobile phone camerasPouydebasque, Arnaud / Bolis, Sébastien / Jacquet, Fabrice / Bridoux, Claudine / Zavattoni, Laëtitia / Soulimane, Sofiane / Moreau, Stéphane / Saint-Patrice, Damien / Bouvier, Christophe / Kopp, Christophe et al. | 2012
- 82520Q
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Novel resistive electrode structure for liquid crystal modal lens shiftingFraval, Nicolas / Berier, Frédéric / Castany, Olivier et al. | 2012
- 82520R
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Modeling and simulation of the surface profile forming process for optimum control of the lithographically fabricated microlenses and lens arraysMiao, Zhengyu / Wang, Wanjun et al. | 2012
- 82520S
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Optical position feedback for electrostatically driven MOEMS scannersTortschanoff, A. / Baumgart, M. / Frank, A. / Wildenhain, M. / Sandner, T. / Schenk, H. / Kenda, A. et al. | 2012
- 82520T
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Closed-loop control for quasi-static MOEMS mirrorsTortschanoff, A. / Holzmann, D. / Lenzhofer, M. / Sandner, T. et al. | 2012
- 82520U
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Vertical comb drive microscanners for beam steering, linear scanning, and laser projection applicationsJung, Denis / Sandner, Thilo / Kallweit, David / Schenk, Harald et al. | 2012
- 82520V
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A high-speed, bimodal, CMOS-MEMS resonant scanner driven by temperature-gradient actuatorsCamacho-León, Sergio / Gilgunn, Peter J. / Martínez-Chapa, Sergio O. / Fedder, Gary K. et al. | 2012
- 82520W
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Self-sustained oscillation of MEMS torsional micromirrorsMukhopadhyay, D. / Antonio, D. / Jung, I. W. / López, D. et al. | 2012
- 82520X
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Micro-optical system based 3D imaging for full HD depth image capturingPark, Yong-Hwa / Cho, Yong-Chul / You, Jang-Woo / Park, Chang-Young / Yoon, Heesun / Lee, Sang-Hun / Kwon, Jong-Oh / Lee, Seung-Wan et al. | 2012
- 82520Y
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Fabrication and characterization of wavelength selective microbolometers using a planar self-aligned process for low deformation membranesPark, Jong Yeon / Gardner, James E. / Pasupathy, Praveen / Suk, Ji Won / Ruoff, Rodney S. / Neikirk, Dean P. et al. | 2012
- 82520Z
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Microscopy using water dropletsChowdhury, Faqrul A. / Chau, Kenneth J. et al. | 2012
- 825201
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Front Matter: Volume 8252| 2012
- 825203
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Trajectory precision of micromachined scanning mirrors for laser beam scanning pico-projector displaysDavis, Wyatt O. / Beard, Michael / Jackson, Robert et al. | 2012
- 825204
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MEMS-based microprojection system with a 1.5cc optical engineKilcher, Lucio / Abelé, Nicolas et al. | 2012
- 825205
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Laser projector solution based on two 1D resonant scanning micromirrors assembled in a low vertical distortion scan headGrahmann, Jan / Wildenhain, Michael / Grasshoff, Thomas / Gerwig, Christian / Dallmann, Hans-Georg / Wolter, Alexander / Schenk, Harald et al. | 2012
- 825206
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Speckle reduction in laser-illuminated picoprojectorsShevlin, Fergal P. et al. | 2012
- 825207
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Optotune focus tunable lenses and laser speckle reduction based on electroactive polymersBlum, M. / Büeler, M. / Grätzel, C. / Giger, J. / Aschwanden, M. et al. | 2012
- 825208
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Superluminescent light emitting diodes: the best out of two worldsRossetti, M. / Napierala, J. / Matuschek, N. / Achatz, U. / Duelk, M. / Vélez, C. / Castiglia, A. / Grandjean, N. / Dorsaz, J. / Feltin, E. et al. | 2012
- 825209
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Bi-resonant scanning mirror with piezoresistive position sensor for WVGA laser projection systemsDrabe, Christian / Kallweit, David / Dreyhaupt, André / Grahmann, Jan / Schenk, Harald / Davis, Wyatt et al. | 2012
- 825210
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Microbolometers: a market perspectiveMounier, E. et al. | 2012
- xxv
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New optical, acoustic, and electrical diagnostics for the developing world (Plenary Paper) [8251-103]Neale, S.L. / Witte, C. / Bourquin, Y. / Kremer, C. / Menachery, A. / Zhang, Y. / Wilson, R. / Reboud, J. / Cooper, J.M. / SPIE (Society) et al. | 2012
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Trajectory precision of micromachined scanning mirrors for laser beam scanning pico-projector displays (Invited Paper) [8252-01]Davis, W.O. / Beard, M. / Jackson, R. / SPIE (Society) et al. | 2012
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MEMS-based microprojection system with a 1.5cc optical engine (Invited Paper) [8252-02]Kilcher, L. / Abele, N. / SPIE (Society) et al. | 2012
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Optical position feedback for electrostatically driven MOEMS scanners [8252-27]Tortschanoff, A. / Baumgart, M. / Frank, A. / Wildenhain, M. / Sandner, T. / Schenk, H. / Kenda, A. / SPIE (Society) et al. | 2012
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A high-speed, bimodal, CMOS-MEMS resonant scanner driven by temperature-gradient actuators [8252-30]Camacho-Leon, S. / Gilgunn, P.J. / Martinez-Chapa, S.O. / Fedder, G.K. / SPIE (Society) et al. | 2012
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Translatory MEMS actuator and their system integration for miniaturized Fourier transform spectrometers [8252-10]Sandner, T. / Grasshoff, T. / Schenk, H. / Kenda, A. / SPIE (Society) et al. | 2012
-
Advances in performance and miniaturization of a FT-IR spectrometer system based on a large stroke MOEMS piston mirror [8252-11]Kenda, A. / Sandner, T. / Luttjohann, S. / Kraft, M. / Tortschanoff, A. / Simon, A. / SPIE (Society) et al. | 2012
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Low voltage vertical flaps arrays as optical modulating elements for reflective display and switchable gratings [8252-18]Jutzi, F. / Noell, W. / de Rooij, N.F. / SPIE (Society) et al. | 2012
-
Shared shuttles for integrated silicon optoelectronics (Invited Paper) [8252-15]Baehr-Jones, T. / Ding, R. / Ayazi, A. / Pinguet, T. / Streshinsky, M. / Harris, N. / Li, J. / He, L. / Gould, M. / Zhang, Y. et al. | 2012
-
MEMS focus control and spherical aberration correction for multilayer optical discs [8252-20]Lukes, S.J. / Dickensheets, D.L. / SPIE (Society) et al. | 2012
-
Thin varifocal liquid lenses actuated below 10V for mobile phone cameras [8252-24]Pouydebasque, A. / Bolis, S. / Jacquet, F. / Bridoux, C. / Zavattoni, L. / Soulimane, S. / Moreau, S. / Saint-Patrice, D. / Bouvier, C. / Kopp, C. et al. | 2012
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Micro-optical system based 3D imaging for full HD depth image capturing (Invited Paper, Best Paper Award) [8252-32]Park, Y.-H. / Cho, Y.-C. / You, J.-W. / Park, C.-Y. / Yoon, H. / Lee, S.-H. / Kwon, J.-O. / Lee, S.-W. / SPIE (Society) et al. | 2012
-
Net flux sensors for the measurement of Mars surface radiation budget [8252-08]Phong, L.N. / Alazzam, A. / Daly, M.G. / Proulx, C. / Chateauneuf, F. / SPIE (Society) et al. | 2012
-
Dynamically deformable reflective membrane for laser beam shaping and smoothing [8252-19]Masson, J. / Bitterli, R. / Bich, A. / Noell, W. / Voelkel, R. / Weible, K. / de Rooij, N. / SPIE (Society) et al. | 2012
-
Modeling and simulation of the surface profile forming process for optimum control of the lithographically fabricated microlenses and lens arrays [8252-26]Miao, Z. / Wang, W. / SPIE (Society) et al. | 2012
-
Vertical comb drive microscanners for beam steering, linear scanning, and laser projection applications (Best Student Paper Award) [8252-29]Jung, D. / Sandner, T. / Kallweit, D. / Schenk, H. / SPIE (Society) et al. | 2012
-
Fabrication and characterization of wavelength selective microbolometers using a planar self-aligned process for low deformation membranes [8252-33]Park, J.Y. / Gardner, J.E. / Pasupathy, P. / Suk, J.W. / Ruoff, R.S. / Neikirk, D.P. / SPIE (Society) et al. | 2012
-
Speckle reduction in laser-illuminated picoprojectors (Invited Paper) [8252-04]Shevlin, F.P. / SPIE (Society) et al. | 2012
-
Miniature non-mechanical zoom camera using deformable MOEMS mirrors [8252-22]Kaylor, B.M. / Wilson, C.R. / Greenfield, N.J. / Roos, P.A. / Seger, E.M. / Moghimi, M.J. / Dickensheets, D.L. / SPIE (Society) et al. | 2012
-
Large MEMS-based programmable reflective slit mask for multi-object spectroscopy fabricated using multiple wafer-level bonding [8252-09]Canonica, M. / Zamkotsian, F. / Lanzoni, P. / Noell, W. / de Rooij, N. / SPIE (Society) et al. | 2012
-
Novel resistive electrode structure for liquid crystal modal lens shifting [8252-25]Fraval, N. / Berier, F. / Castany, O. / SPIE (Society) et al. | 2012
-
Laser projector solution based on two 1D resonant scanning micromirrors assembled in a low vertical distortion scan head [8252-03]Grahmann, J. / Wildenhain, M. / Grasshoff, T. / Gerwig, C. / Dallmann, H.-G. / Wolter, A. / Schenk, H. / SPIE (Society) et al. | 2012
-
Optotune focus tunable lenses and laser speckle reduction based on electroactive polymers (Invited Paper) [8252-05]Blum, M. / Bueler, M. / Gratzel, C. / Giger, J. / Aschwanden, M. / SPIE (Society) et al. | 2012
-
Deformable mirror with controlled air damping for fast focus tracking and scanning [8252-21]Moghimi, M.J. / Chattergoon, K. / Wilson, C. / Dickensheets, D.L. / SPIE (Society) et al. | 2012
-
Microelectrofluidic iris for variable aperture [8252-23]Chang, J. / Jung, K.-D. / Lee, E. / Choi, M. / Lee, S. / SPIE (Society) et al. | 2012
-
Bi-resonant scanning mirror with piezoresistive position sensor for WVGA laser projection systems [8252-07]Drabe, C. / Kallweit, D. / Dreyhaupt, A. / Grahmann, J. / Schenk, H. / Davis, W. / SPIE (Society) et al. | 2012
-
Microbolometers: a market perspective [8252-35]Mounier, E. / SPIE (Society) et al. | 2012
-
Powering the wireless world with MEMS (Plenary Paper) [8248-102]Schaevitz, S.B. / SPIE (Society) et al. | 2012
-
Spectral imaging characterization of MOEM tunable Fabry-Perot filter [8252-12]Gupta, N. / SPIE (Society) et al. | 2012
-
One-dimensional light modulator [8252-16]Sinning, S. / Wullinger, I. / Schmidt, J.-U. / Friedrichs, M. / Dauderstadt, U. / Wolschke, S. / Hughes, T. / Pahner, D. / Wagner, M. / SPIE (Society) et al. | 2012
-
Self-sustained oscillation of MEMS torsional micromirrors [8252-31]Mukhopadhyay, D. / Antonio, D. / Jung, I.W. / Lopez, D. / SPIE (Society) et al. | 2012
-
Microscopy using water droplets [8252-34]Chowdhury, F.A. / Chau, K.J. / SPIE (Society) et al. | 2012
-
Superluminescent light emitting diodes: the best out of two worlds (Invited Paper) [8252-06]Rossetti, M. / Napierala, J. / Matuschek, N. / Achatz, U. / Duelk, M. / Velez, C. / Castiglia, A. / Grandjean, N. / Dorsaz, J. / Feltin, E. et al. | 2012
-
Closed-loop control for quasi-static MOEMS mirrors [8252-28]Tortschanoff, A. / Holzmann, D. / Lenzhofer, M. / Sandner, T. / SPIE (Society) et al. | 2012