Directional Difference of Patterns Printed by Scan-Projection Lithography Using a Gradient Index Lens Array (7 pages) (English)
- New search for: Horiuchi, T.
- New search for: Suzuki, T.
- New search for: Kobayashi, H.
- New search for: Horiuchi, T.
- New search for: Suzuki, T.
- New search for: Kobayashi, H.
- New search for: Ono, Yukinori
In:
Microprocesses and nanotechnology; Special issue microprocesses and nanotechnology
6
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06GL17
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2013
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ISSN:
- Conference paper / Print
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Title:Directional Difference of Patterns Printed by Scan-Projection Lithography Using a Gradient Index Lens Array (7 pages)
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Contributors:
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Conference:International conference; 25th, Microprocesses and nanotechnology; Special issue microprocesses and nanotechnology ; 2012 ; Kobe, Japan
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Published in:JAPANESE JOURNAL OF APPLIED PHYSICS -NEW SERIES- ; 52, 6 ; 06GL17
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Publisher:
- New search for: Japan Society of Applied Physics
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Place of publication:Tokyo
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Publication date:2013-01-01
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Size:06GL17
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Remarks:Also known as MNC 2012.
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ISSN:
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Type of media:Conference paper
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Type of material:Print
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Language:English
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Keywords:
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Source:
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