Metrology solutions using optical scatterometry for advanced CMOS: III-V and Germanium multi-gate field-effect transistors [8788-62] (English)
- New search for: Chin, H.-C.
- New search for: Liu, B.
- New search for: Zhang, X.
- New search for: Ling, M.-L.
- New search for: Yip, C.-H.
- New search for: Liu, Y.
- New search for: Hu, J.
- New search for: Yeo, Y.-C.
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- New search for: Chin, H.-C.
- New search for: Liu, B.
- New search for: Zhang, X.
- New search for: Ling, M.-L.
- New search for: Yip, C.-H.
- New search for: Liu, Y.
- New search for: Hu, J.
- New search for: Yeo, Y.-C.
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In:
Optical measurement systems for industrial inspection
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8788 1R
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2013
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ISBN:
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ISSN:
- Conference paper / Print
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Title:Metrology solutions using optical scatterometry for advanced CMOS: III-V and Germanium multi-gate field-effect transistors [8788-62]
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Contributors:Chin, H.-C. ( author ) / Liu, B. ( author ) / Zhang, X. ( author ) / Ling, M.-L. ( author ) / Yip, C.-H. ( author ) / Liu, Y. ( author ) / Hu, J. ( author ) / Yeo, Y.-C. ( author ) / Lehmann, Peter H. / Osten, Wolfgang
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Conference:Technical conference; 8th, Optical measurement systems for industrial inspection ; 2013 ; Munich, Germany
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Published in:PROCEEDINGS - SPIE THE INTERNATIONAL SOCIETY FOR OPTICAL ENGINEERING ; 8788 ; 8788 1R
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Publisher:
- New search for: SPIE
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Place of publication:Bellingham, Washington
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Publication date:2013-01-01
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Size:8788 1R
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Remarks:Includes bibliographical references and index.
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ISBN:
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ISSN:
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Type of media:Conference paper
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Type of material:Print
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Language:English
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Keywords:
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Source:
© Metadata Copyright the British Library Board and other contributors. All rights reserved.
Table of contents conference proceedings
The tables of contents are generated automatically and are based on the data records of the individual contributions available in the index of the TIB portal. The display of the Tables of Contents may therefore be incomplete.
- 87880A
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Hybrid and transflective system based on digital holographic microscope and low coherent interferometer for high gradient shape measurementLiżewski, K. / Tomczewski, S. / Kostencka, J. / Kozacki, T. et al. | 2013
- 87880B
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Total compensation of chromatic errors in digital color holography using a single recordingLeclercq, Mathieu / Picart, Pascal et al. | 2013
- 87880D
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Lensless object scanning holography for diffuse objectsGarcía, Javier / Ferreira, Carlos / Micó, Vicente et al. | 2013
- 87880E
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A long trace profiler with large dynamical rangeRitucci, A. / Rossi, M. et al. | 2013
- 87880G
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Optical characterization method for very small microlenses (sub-50 micron) for industrial mass-production applicationsKim, Myun-Sik / Sunarjo, Jonathan / Weible, Kenneth J. / Voelkel, Reinhard et al. | 2013
- 87880I
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Shape reconstruction using dual wavelength digital holography and speckle movementsKhodadad, Davood / Hällstig, Emil / Sjödahl, Mikael et al. | 2013
- 87880J
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Digital holographic inspection for the straight pipe inner surface using multiwavelength from laser diodesYokota, M. / Koyama, T. / Kawakami, T. et al. | 2013
- 87880K
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Seeing through smoke and flames: a challenge for imaging capabilities, met thanks to digital holography at far infraredLocatelli, Massimiliano / Pugliese, Eugenio / Paturzo, Melania / Bianco, Vittorio / Finizio, Andrea / Pelagotti, Anna / Poggi, Pasquale / Miccio, Lisa / Meucci, Riccardo / Ferraro, Pietro et al. | 2013
- 87880L
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A computational tool to highlight anomalies on shearographic images in optical flaw detectionFantin, A. V. / Willemann, D. P. / Viotti, M. / Albertazzi, A. et al. | 2013
- 87880M
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ESPI based on spatial fringe analysis method using only two sheets of speckle patternsArai, Y. / Yokozeki, S. et al. | 2013
- 87880O
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Relation between vectorial source structure and coherence-polarization of lightSingh, Rakesh K. / Naik, Dinesh N. / Itou, Hitoshi / Brundavanam, Maruthi M. / Miyamoto, Yoko / Takeda, Mitsuo et al. | 2013
- 87880P
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A polarization-based frequency shifting interferometry for inspecting transparent objects in microelectronics manufacturingLee, Seung Hyun / Kim, Min Young et al. | 2013
- 87880Q
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Fast and accurate line scanner based on white light interferometryLambelet, Patrick / Moosburger, Rudolf et al. | 2013
- 87880R
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High speed measurement of specular surfaces based on carrier fringe patterns in a line scan Michelson interferometer setupKnell, Holger / Lehmann, Peter et al. | 2013
- 87880S
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Speed-up chromatic sensors by optimized optical filtersTaphanel, Miro / Hovestreydt, Bastiaan / Beyerer, Jürgen et al. | 2013
- 87880T
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Robust evaluation of intensity curves measured by confocal microscopiesSeewig, Jörg / Raid, Indek / Wiehr, Christian / George, Bini A. et al. | 2013
- 87880U
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Model-based assistance system for confocal measurements of rough surfacesMauch, F. / Lyda, W. / Osten, W. et al. | 2013
- 87880V
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Parallelized chromatic confocal sensor systemsHillenbrand, Matthias / Grewe, Adrian / Bichra, Mohamed / Kleindienst, Roman / Lorenz, Lucia / Kirner, Raoul / Weiß, Robert / Sinzinger, Stefan et al. | 2013
- 87880W
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Robust signal evaluation for Chromatic Confocal Spectral InterferometryBoettcher, Tobias / Lyda, Wolfram / Gronle, Marc / Mauch, Florian / Osten, Wolfgang et al. | 2013
- 87880X
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Measurement, visualization and analysis of extremely large data sets with a nanopositioning and nanomeasuring machineBirli, O. / Franke, K.-H. / Linß, G. / Machleidt, T. / Manske, E. / Schale, F. / Schwannecke, H.-C. / Sparrer, E. / Weiß, M. et al. | 2013
- 87880Y
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Model-based, active inspection of three-dimensional objects using a multi-sensor measurement systemGronle, Marc / Lyda, Wolfram / Osten, Wolfgang et al. | 2013
- 87880Z
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High-frequency optical fiber microphone for condition-based maintenance applicationTosi, Daniele / Olivero, Massimo / Perrone, Guido / Vallan, Alberto et al. | 2013
- 87881A
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Highly accurate surface maps from profilometer measurementsMedicus, Kate M. / Nelson, Jessica D. / Mandina, Mike P. et al. | 2013
- 87881B
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Lateral location error compensation algorithm for measuring aspheric surfaces by sub-aperture stitching interferometryZhao, Zixin / Zhao, Hong / Gu, Feifei / Zhang, Lu et al. | 2013
- 87881C
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Deflectometry vs. interferometryHäusler, Gerd / Faber, Christian / Olesch, Evelyn / Ettl, Svenja et al. | 2013
- 87881D
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Approach to the measurement of astronomical mirrors with new proceduresHofbauer, E. / Rascher, R. / Stubenrauch, Th. / Liebl, J. / Maurer, R. / Zimmermann, A. / Rösch, O. / Reitberger, J. et al. | 2013
- 87881E
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Precision aspheric optics testing with SCOTS: a deflectometry approachSu, Peng / Khreishi, Manal / Huang, Run / Su, Tianquan / Burge, James H. et al. | 2013
- 87881F
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Methods to obtain the waveform profile from slope measurementsMoreno, Alfonso / Espínola, Manuel / Martínez, José / Campos, Juan et al. | 2013
- 87881G
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Moiré deflectometry under incoherent illumination: 3D profiler for specular surfacesHirose, Tomohiro / Kitayama, Tsunaji et al. | 2013
- 87881H
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Optical profilometer using laser based conical triangulation for inspection of inner geometry of corroded pipes in cylindrical coordinatesBuschinelli, Pedro D. V. / Melo, João Ricardo C. / Albertazzi, Armando / Santos, João M. C. / Camerini, Claudio S. et al. | 2013
- 87881I
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Active retroreflector with in situ beam analysis to measure the rotational orientation in conjunction with a laser trackerHofherr, O. / Wachten, C. / Müller, C. / Reinecke, H. et al. | 2013
- 87881J
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Automated control of robotic camera tacheometers for measurements of industrial large scale objectsHeimonen, Teuvo / Leinonen, Jukka / Sipola, Jani et al. | 2013
- 87881K
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Development of alignment-guidance device for grooved roll mill using parallel projection imaging techniqueKodama, Toshifumi / Iwata, Teruhisa / Yamagami, Daisaku / Takagi, Keiji et al. | 2013
- 87881L
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Photogrammetry based system for the measurement of cylindrical forgings axis straightnessZatočilová, Aneta / Poliščuk, Radek / Paloušek, David / Brandejs, Jan et al. | 2013
- 87881N
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Sub-nanometer in-die overlay metrology: measurement and simulation at the edge of finitenessSmilde, Henk-Jan H. / Jak, Martin / den Boef, Arie / van Schijndel, Mark / Bozkurt, Murat / Fuchs, Andreas / van der Schaar, Maurits / Meyer, Steffen / Morgan, Stephen / Bhattacharyya, Kaustuve et al. | 2013
- 87881O
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Nanometrology of periodic nanopillar arrays by means of light scatteringPaul, Oliver / Widulle, Frank / Kleemann, Bernd H. / Heinrich, Andreas et al. | 2013
- 87881P
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Phase information in coherent Fourier scatterometryKumar, N. / El Gawhary, O. / Roy, S. / Pereira, S. F. / Urbach, H. P. et al. | 2013
- 87881Q
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Revisiting parallel catadioptric goniophotometersKaramata, Boris / Andersen, Marilyne et al. | 2013
- 87881R
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Metrology solutions using optical scatterometry for advanced CMOS: III-V and Germanium multi-gate field-effect transistorsChin, Hock-Chun / Liu, Bin / Zhang, Xingui / Ling, Moh-Lung / Yip, Chan-Hoe / Liu, Yongdong / Hu, Jiangtao / Yeo, Yee-Chia et al. | 2013
- 87881S
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The road towards accurate optical width measurements at the industrial levelBodermann, Bernd / Köning, Rainer / Bergmann, Detlef / Buhr, Egbert / Hässler-Grohne, Wolfgang / Flügge, Jens / Bosse, Harald et al. | 2013
- 87881T
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3D shape measurements of fast moving rough surfaces by two tilted interference fringe systemsKuschmierz, Robert / Günther, Philipp / Czarske, Jürgen W. et al. | 2013
- 87881U
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Optical vibration analysis of MEMS devices with pm-resolution in x, y, and z directionsGiesen, Moritz / Kowarsch, Robert / Ochs, Wanja / Winter, Marcus / Rembe, Christian et al. | 2013
- 87881V
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Characterization and demonstration of a 12-channel Laser-Doppler vibrometerHaist, T. / Lingel, C. / Osten, W. / Bendel, K. / Giesen, M. / Gartner, M. / Rembe, C. et al. | 2013
- 87881X
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Diagnostic of structures in heat and power generating industries with utilization of 3D digital image correlationMalesa, M. / Kujawińska, M. / Malowany, K. / Siwek, B. et al. | 2013
- 87881Y
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Integrated digital image correlation for residual stress measurementBaldi, Antonio / Bertolino, Filippo et al. | 2013
- 87881Z
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Infrared differential interference contrast microscopy for overlay metrology on 3D-interconnect bonded wafersKu, Yi-sha / Shyu, Deh-Ming / Lin, Yeou-Sung / Cho, Chia-Hung et al. | 2013
- 87882C
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Three-axis optic-electronic autocollimation system for the inspection of large-scale objectsKonyakhin, Igor A. / Timofeev, Alexandr N. / Konyakhin, Aleksey et al. | 2013
- 87882D
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Optical device for the improvement of positioning accuracy in large machine toolsCocola, L. / Fedel, M. / Mocellin, M. / Casarin, R. / Poletto, L. et al. | 2013
- 87882E
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Measurement uncertainty in the profile detection on solar troughsSansoni, P. / Fontani, D. / Francini, F. / Toccafondi, S. / Messeri, M. / Coraggia, S. / Mercatelli, L. / Jafrancesco, D. / Sani, E. et al. | 2013
- 87882F
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The impact of polarization on metrology performance of the lateral shearing interferometerYao, Zhengpeng / Xing, Tingwen et al. | 2013
- 87882G
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Comparison of Michelson and Linnik interference microscopes with respect to measurement capabilities and adjustment effortsKühnhold, Peter / Xie, Weichang / Lehmann, Peter et al. | 2013
- 87882H
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Application of line-scanning microscopy using a linear sensor in semiconductor industry: shape and thickness measurementsMacedo, Milton P. / Correia, C. M. B. A. et al. | 2013
- 87882J
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Optical resolution measurement system for small lens by using slanted-slit methodHuang, Kuang-Yuh / Chia, Chou-Min / Chang, Elmer et al. | 2013
- 87882K
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A compensation method of large aperture optical lens for gravity deformationYang, Lijuan / Xing, Tingwen / Feng, Jie et al. | 2013
- 87882L
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Reaching accuracies of Lambda/100 with the Three-Flat-TestWittek, Steffen et al. | 2013
- 87882M
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Optical measurement system applied to continuous displacement monitoring of long-span suspension bridgesLages Martins, L. / Rebordão, J. M. / Ribeiro, A. S. et al. | 2013
- 87882N
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Small angle light scattering for a glass fibre diameter characterizationŚwirniak, Grzegorz / Głomb, Grzegorz et al. | 2013
- 87882O
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Design and location deviation of the computer generated holograms used for aspheric surface testingFeng, Jie / Deng, Chao / Xing, Tingwen et al. | 2013
- 87882P
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Laser welding control by monitoring of plasmaChmelickova, Hana / Sebestova, Hana / Havelkova, Martina / Rihakova, Lenka / Nozka, Libor et al. | 2013
- 87882Q
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Design of omnidirectional camera lens system with catadioptic systemJo, Jae Heung / Lee, Sangon / Seo, Hyeon Jin / Lee, Jung Hwan / Kim, Joon Mo et al. | 2013
- 87882R
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Dual view x-ray inspection system for foreign objects detection in canned foodLu, Zhiwen / Peng, Ningsong et al. | 2013
- 87882S
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Development of a zero-method interferometer by means of dynamic generation of reference wave frontHanayama, Ryohei / Ishii, Katsuhiro et al. | 2013
- 87882T
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Absolute scale-based imaging position encoder with submicron accuracyAnisimov, Andrey G. / Pantyushin, Anton V. / Lashmanov, Oleg U. / Vasilev, A. S. / Timofeev, Alexander N. / Korotaev, Valery V. / Gordeev, Sergey V. et al. | 2013
- 87882U
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CCD camera-based analysis of thin film growth in industrial PACVD processesZauner, G. / Schulte, T. / Forsich, C. / Heim, Daniel et al. | 2013
- 87882V
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Towards superresolution imaging with optical vortex scanning microscopeMasajada, Jan / Popiołek-Masajada, Agnieszka / Augustyniak, Ireneusz / Sokolenko, Bohdan et al. | 2013
- 87882W
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Image quality improvement using speckle method in digital holography by means of multi-mode fiberFunamizu, H. / Shimoma, S. / Aizu, Y. et al. | 2013
- 87882X
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Measurement of residual stress fields in FHPP welding: a comparison between DSPI combined with hole-drilling and neutron diffractionViotti, Matias R. / Albertazzi, Armando / Staron, Peter / Pisa, Marcelo et al. | 2013
- 87882Y
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Iterative alignment of reflector segments using a laser trackerCabrera Cuevas, Lizeth / Lucero Alvarez, Maribel / Leon-Huerta, Andrea / Hernandez Rios, Emilio / Hernandez Lázaro, Josefina / Tzile Torres, Carlos / Castro Santos, David / Gale, David M. / Wilson, Grant / Narayanan, Gopal et al. | 2013
- 87882Z
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Tilted objects EFI in digital holography by two different numerical approachesMatrecano, Marcella / Paturzo, Melania / Ferraro, Pietro et al. | 2013
- 87883A
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Iterative improvements to the surface error of a 1.7 metre aluminium reflectorCastro Santos, David / Cabrera Cuevas, Lizeth / Hernandez Rios, Emilio / Gale, David M. / Smith, David R. et al. | 2013
- 87883B
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Efficient testing methodologies for microcameras in a gigapixel imaging systemYoun, Seo Ho / Marks, Daniel L. / McLaughlin, Paul O. / Brady, David J. / Kim, Jungsang et al. | 2013
- 87883C
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Wavelength modulation-based method for interference phase detection with reduced optical complexityŘeřucha, Šimon / Šarbort, Martin / Buchta, Zdeněk / Mikel, Bretislav / Šmíd, Radek / Čížek, Martin / Jedlička, Petr / Řerucha, Jan / Lazar, Josef / Číp, Ondřej et al. | 2013
- 87883D
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Camera-based curvature measurement of a large incandescent objectOllikkala, Arttu V. H. / Kananen, Timo P. / Mäkynen, Anssi J. / Holappa, Markus et al. | 2013
- 87883E
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Design and analysis of a low-cost compensated POF displacement sensor for industrial applicationsTosi, Daniele / Olivero, Massimo / Perrone, Guido / Vallan, Alberto et al. | 2013
- 87883F
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Digital holographic microscopy for the study of nano-fibersWahba, Hamdy H. / Sjödahl, Mikael / Gren, Per / Olsson, Erik et al. | 2013
- 87883G
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Implementation of a fringe visibility based algorithm in coherence scanning interferometry for surface roughness measurementMontgomery, P. C. / Salzenstein, F. / Montaner, D. / Serio, B. / Pfeiffer, P. et al. | 2013
- 87883H
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Turbine-blade tip clearance and tip timing measurements using an optical fiber bundle sensorGarcia, Iker / Beloki, Josu / Zubia, Joseba / Durana, Gaizka / Aldabaldetreku, Gotzon et al. | 2013
- 87883I
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Precision positioning with suppression of the influence of refractive index of airHolá, M. / Hrabina, J. / Oulehla, J. / Čížek, M. / Mikel, B. / Řeřucha, Š. / Buchta, Z. / Číp, O. / Lazar, J. et al. | 2013
- 87883J
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Static and (quasi)dynamic calibration of stroboscopic scanning white light interferometerSeppä, Jeremias / Kassamakov, Ivan / Nolvi, Anton / Heikkinen, Ville / Paulin, Tor / Lassila, Antti / Hao, Ling / Hæggsröm, Edward et al. | 2013
- 87883K
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Computed tomography of cylindrically symmetric object by use of digital holographyPan, Zhelang / Li, Shiping / Zhong, Jingang et al. | 2013
- 87883M
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Stimulated LIF studied using pulsed digital holography and modellingAmer, Eynas / Stenvall, Jonas / Gren, Per / Sjödahl, Mikael et al. | 2013
- 87883O
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Surface normal deblurring caused by conveyor movement for fast surface inspectionKurihara, Toru / Katsuki, Yugo / Ando, Shigeru et al. | 2013
- 87883P
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Tape measuring system using linear encoder and digital cameraEom, Tae Bong / Jeong, Don Young / Kim, Myung Soon / Kim, Jae Wan / Kim, Jong Ahn et al. | 2013
- 87883Q
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Automated hardware and software complex for extended light sources verificationGorbunova, Elena V. / Peretyagin, Vladimir S. / Chertov, Aleksandr N. et al. | 2013
- 878801
-
Front Matter: Volume 8788| 2013
- 878802
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Low coherence full field interference microscopy or optical coherence tomography: recent advances, limitations and future trendsAbdulhalim, I. et al. | 2013
- 878803
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Excess fraction measurement of a transparent glass thickness in wavelength tuning interferometryKim, Yangjin / Hibino, Kenichi / Harada, Kanako / Sugita, Naohiko / Mitsuishi, Mamoru et al. | 2013
- 878804
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Metrology for adhesive layer of temporary bonding wafers using IR interferometryChang, Po-Yi / Ku, Yi-Sha / Cho, Chia-Hung et al. | 2013
- 878805
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Concept, realization and performance of a two-beam phase-shifting point diffraction interferometerVoznesenskiy, Nikolay / Voznesenskaia, Mariia / Petrova, Natalia / Abels, Artur et al. | 2013
- 878806
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Sparsity-based denoising method of wrapped-phase reconstructions in digital holographyMemmolo, Pasquale / Iannone, Maria / Ventre, Maurizio / Netti, Paolo A. / Finizio, Andrea / Paturzo, Melania / Ferraro, Pietro et al. | 2013
- 878807
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Holographic Interferometry based on photorefractive crystal to measure 3D thermo-elastic distortion of composite structures and comparison with finite element modelsThizy, C. / Eliot, F. / Ballhause, D. / Olympio, K. R. / Kluge, R. / Shannon, A. / Laduree, G. / Logut, D. / Georges, M. P. et al. | 2013
- 878808
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Lensless single-exposure super-resolved interferometric microscopyGranero, Luis / Ferreira, Carlos / García, Javier / Micó, Vicente et al. | 2013
- 878809
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Resolution enhancement and autofocusing in digital holographic microscopy by using structured illuminationGao, Peng / Pedrini, Giancarlo / Osten, Wolfgang et al. | 2013
- 878810
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A space-borne fiber-optic interrogator module based on narrow-band tunable laser diode for temperature monitoring in telecommunication satellitesPutzer, P. / Kuhenuri, N. / Koch, A. W. / Schweyer, S. / Hurni, A. / Plattner, M. et al. | 2013
- 878811
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Miniature low-cost extrinsic Fabry-Perot interferometer for low-pressure detectionPoeggel, Sven / Tosi, Daniele / Leen, Gabriel / Lewis, Elfed et al. | 2013
- 878812
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Applications of tilted fiber Bragg grating in liquid parameters measurementJiang, Biqiang / Zhao, Jianlin / Rauf, Abdul / Qin, Chuan / Jiang, Wei et al. | 2013
- 878813
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Experimental comparison of phase-shifting fringe projection and statistical pattern projection for active triangulation systemsLutzke, Peter / Schaffer, Martin / Kühmstedt, Peter / Kowarschik, Richard / Notni, Gunther et al. | 2013
- 878814
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Scanning fringe projection for fast 3D inspectionHonegger, Marc / Kahl, Michael / Trunz, Sandra / Rinner, Stefan / Ettemeyer, Andreas / Lambelet, Patrick et al. | 2013
- 878815
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High-speed 3D shape measurement using array projectionHeist, Stefan / Sieler, Marcel / Breitbarth, Andreas / Kühmstedt, Peter / Notni, Gunther et al. | 2013
- 878816
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Influence of the structured illumination frequency content on the correspondence assignment precision in stereophotogrammetryGroße, Marcus / Schaffer, Martin / Harendt, Bastian / Kowarschik, Richard et al. | 2013
- 878817
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High resolution measurements of filigree, inner geometries with endoscopic micro fringe projectionOhrt, Christoph / Kästner, Markus / Reithmeier, Eduard et al. | 2013
- 878818
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Measurement of aspheres and free-form surfaces in a non-null test interferometer: reconstruction of high-frequency errorsBaer, Goran / Schindler, Johannes / Siepmann, Jens / Pruß, Christof / Osten, Wolfgang / Schulz, Michael et al. | 2013
- 878819
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Non-contact profiling for high precision fast asphere topology measurementPetter, Jürgen / Berger, Gernot et al. | 2013
- 878820
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A lateral sensor for the alignment of two formation-flying satellitesRoose, S. / Stockman, Y. / Sodnik, Z. et al. | 2013
- 878822
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Analysis of method of 3D shape reconstruction using scanning deflectometryNovák, Jiří / Novák, Pavel / Mikš, Antonín et al. | 2013
- 878823
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CO2laser photoacoustic spectrometry: sensitivity and drift analysisSkřínský, Jan / Zelinger, Zdeněk / Nevrlý, Václav / Hejzlar, Tomáš / Baudišová, Barbora / Bitala, Petr et al. | 2013
- 878824
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Imaging sensor for monitoring of the piston mechanism in cylindrical valvesPantiushina, Ekaterina N. / Gorbachev, Alexey A. et al. | 2013
- 878825
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Development of program package for investigation and modeling of carbon nanostructures in diamond like carbon films with the help of Raman scattering and infrared absorption spectra line resolvingHayrapetyan, David B. / Hovhannisyan, Levon / Mantashyan, Paytsar A. et al. | 2013
- 878826
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Temperature sensing by modulating phase of optical fiberCheng, Guanxiao / Xu, Ping / Hong, Chunquan / Cao, Yang / Zhu, Feng / Feng, Shuyang / Lin, Ruibin et al. | 2013
- 878827
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Real-time visualization and analysis of airflow field by use of digital holographyDi, Jianglei / Wu, Bingjing / Chen, Xin / Liu, Junjiang / Wang, Jun / Zhao, Jianlin et al. | 2013
- 878828
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Visual and dynamic measurement of temperature fields by use of digital holographic interferometryZhao, Jianlin / Di, Jianglei / Wu, Bingjing / Wang, Jun / Wang, Qian / Jiang, Hongzhen et al. | 2013
- 878829
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Calibration of misalignment aberrations in cylindrical surface interferometric measurementPeng, Junzheng / Ge, Dongbao / Yu, Yingjie / Chen, Mingyi et al. | 2013
- 878831
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Non-Bayesian noise reduction in digital holography by random resampling masksBianco, Vittorio / Paturzo, Melania / Memmolo, Pasquale / Finizio, Andrea / Javidi, Bahram / Ferraro, Pietro et al. | 2013
- 878832
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Research of autocollimating angular deformation measurement system for large-size objects controlTurgalieva, Tatiana V. / Konyakhin, Igor A. et al. | 2013
- 878833
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Design and experiment of testing an off-axis aspheric surface by computer generated hologramLi, Shijie / Wu, Fan / Chen, Qiang / Fan, Bin / Li, Lianghong et al. | 2013
- 878834
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Spectral monitoring of toluene and ethanol in gasoline blends using Fourier-Transform Raman spectroscopyOrtega Clavero, Valentin / Weber, Andreas / Schröder, Werner / Curticapean, Dan / Meyrueis, Patrick / Javahiraly, Nicolas et al. | 2013
- 878835
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Reflection, transmission and color measurement system for the online quality control of float glass coating processMamedbeili, Izmir / Cakiroglu, Fahrettin / Bektas, Gokhan / Riza, Dadash / Hacizade, Fikret et al. | 2013
- 878836
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Energetic sensitivity of optical-electronic systems based on polychromatic optical equisignal zoneMaraev, Anton A. / Timofeev, Alexandr N. et al. | 2013
- 878837
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Automatic unit for measuring refractive index of air based on Ciddor equation and its verification using direct interferometric measurement methodHucl, V. / Čížek, M. / Hrabina, J. / Mikel, B. / Řeřucha, Š. / Buchta, Z. / Jedlička, P. / Lešundák, A. / Oulehla, J. / Mrňa, L. et al. | 2013
- 878839
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Alignment of a large outdoor antenna surface using a laser trackerLeon-Huerta, Andrea / Lucero Alvarez, Maribel / Hernandez Rios, Emilio / Tzile Torres, Carlos / Cabrera Cuevas, Lizeth / Castro Santos, David / Hernandez Lázaro, Josefina / Gale, David M. / Wilson, Grant / Narayanan, Gopal et al. | 2013
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Lensless single-exposure super-resolved interferometric microscopy [8788-7]Granero, L. / Ferreira, C. / Garcia, J. / Mico, V. / SPIE (Society) et al. | 2013
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Sparsity-based denoising method of wrapped-phase reconstructions in digital holography [8788-5]Memmolo, P. / Iannone, M. / Ventre, M. / Netti, P.A. / Finizio, A. / Paturzo, M. / Ferraro, P. / SPIE (Society) et al. | 2013
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Analysis of method of 3D shape reconstruction using scanning deflectometry [8788-73]Novak, J. / Novak, P. / Miks, A. / SPIE (Society) et al. | 2013
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Temperature sensing by modulating phase of optical fiber [8788-77]Cheng, G. / Xu, P. / Hong, C. / Cao, Y. / Zhu, F. / Feng, S. / Lin, R. / SPIE (Society) et al. | 2013
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Optical device for the improvement of positioning accuracy in large machine tools [8788-84]Cocola, L. / Fedel, M. / Mocellin, M. / Casarin, R. / Poletto, L. / SPIE (Society) et al. | 2013
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A compensation method of large aperture optical lens for gravity deformation [8788-91]Yang, L. / Xing, T. / Feng, J. / SPIE (Society) et al. | 2013
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Non-Bayesian noise reduction in digital holography by random resampling masks [8788-109]Bianco, V. / Paturzo, M. / Memmolo, P. / Finizio, A. / Javidi, B. / Ferraro, P. / SPIE (Society) et al. | 2013
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Static and (quasi)dynamic calibration of stroboscopic scanning white light interferometer [8788-127]Seppa, J. / Kassamakov, I. / Nolvi, A. / Heikkinen, V. / Paulin, T. / Lassila, A. / Hao, L. / Hoeggsrom, E. / SPIE (Society) et al. | 2013
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Resolution enhancement and autofocusing in digital holographic microscopy by using structured illumination [8788-8]Gao, P. / Pedrini, G. / Osten, W. / SPIE (Society) et al. | 2013
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Experimental comparison of phase-shifting fringe projection and statistical pattern projection for active triangulation systems [8788-38]Lutzke, P. / Schaffer, M. / Kuhmstedt, P. / Kowarschik, R. / Notni, G. / SPIE (Society) et al. | 2013
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Methods to obtain the waveform profile from slope measurements [8788-50]Moreno, A. / Espinola, M. / Martinez, J. / Campos, J. / SPIE (Society) et al. | 2013
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The impact of polarization on metrology performance of the lateral shearing interferometer [8788-86]Yao, Z. / Xing, T. / SPIE (Society) et al. | 2013
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Computed tomography of cylindrically symmetric object by use of digital holography [8788-128]Pan, Z. / Li, S. / Zhong, J. / SPIE (Society) et al. | 2013
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A long trace profiler with large dynamical range [8788-13]Ritucci, A. / Rossi, M. / SPIE (Society) et al. | 2013
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Robust signal evaluation for Chromatic Confocal Spectral Interferometry [8788-31]Boettcher, T. / Lyda, W. / Gronle, M. / Mauch, F. / Osten, W. / SPIE (Society) et al. | 2013
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Influence of the structured illumination frequency content on the correspondence assignment precision in stereophotogrammetry [8788-41]Grosse, M. / Schaffer, M. / Harendt, B. / Kowarschik, R. / SPIE (Society) et al. | 2013
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Measurement of aspheres and free-form surfaces in a non-null test interferometer: reconstruction of high-frequency errors [8788-43]Baer, G. / Schindler, J. / Siepmann, J. / Pruss, C. / Osten, W. / Schulz, M. / SPIE (Society) et al. | 2013
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Photogrammetry based system for the measurement of cylindrical forgings axis straightness [8788-56]Zatocilova, A. / Poliscuk, R. / Palousek, D. / Brandejs, J. / SPIE (Society) et al. | 2013
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Development of program package for investigation and modeling of carbon nanostructures in diamond like carbon films with the help of Raman scattering and infrared absorption spectra line resolving [8788-76]Hayrapetyan, D.B. / Hovhannisyan, L.T. / Mantashyan, P.A. / SPIE (Society) et al. | 2013
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Measurement of residual stress fields in FHPP welding: a comparison between DSPI combined with hole-drilling and neutron diffraction [8788-105]Viotti, M.R. / Albertazzi, A. / Staron, P. / Pisa, M. / SPIE (Society) et al. | 2013
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Efficient testing methodologies for microcameras in a gigapixel imaging system [8788-119]Youn, S.H. / Marks, D.L. / McLaughlin, P.O. / Brady, D.J. / Kim, J. / SPIE (Society) et al. | 2013
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Surface normal deblurring caused by conveyor movement for fast surface inspection [8788-132]Kurihara, T. / Katsuki, Y. / Ando, S. / SPIE (Society) et al. | 2013
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Relation between vectorial source structure and coherence-polarization of light [8788-23]Singh, R.K. / Naik, D.N. / Itou, H. / Brundavanam, M.M. / Miyamoto, Y. / Takeda, M. / SPIE (Society) et al. | 2013
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Applications of tilted fiber Bragg grating in liquid parameters measurement [8788-37]Jiang, B. / Zhao, J. / Rauf, A. / Qin, C. / Jiang, W. / SPIE (Society) et al. | 2013
-
Deflectometry vs. interferometry (Invited Paper) [8788-47]Hausler, G. / Faber, C. / Olesch, E. / Ettl, S. / SPIE (Society) et al. | 2013
-
Nanometrology of periodic nanopillar arrays by means of light scattering [8788-59]Paul, O. / Widulle, F. / Kleemann, B.H. / Heinrich, A. / SPIE (Society) et al. | 2013
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Integrated digital image correlation for residual stress measurement [8788-69]Baldi, A. / Bertolino, F. / SPIE (Society) et al. | 2013
-
Metrology for adhesive layer of temporary bonding wafers using IR interferometry [8788-3]Chang, P.-Y. / Ku, Y.-S. / Cho, C.-H. / SPIE (Society) et al. | 2013
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Seeing through smoke and flames: a challenge for imaging capabilities, met thanks to digital holography at far infrared [8788-19]Locatelli, M. / Pugliese, E. / Paturzo, M. / Bianco, V. / Finizio, A. / Pelagotti, A. / Poggi, P. / Miccio, L. / Meucci, R. / Ferraro, P. et al. | 2013
-
Model-based assistance system for confocal measurements of rough surfaces [8788-29]Mauch, F. / Lyda, W. / Osten, W. / SPIE (Society) et al. | 2013
-
Measurement, visualization and analysis of extremely large data sets with a nanopositioning and nanomeasuring machine [8788-32]Birli, O. / Franke, K.-H. / Linss, G. / Machleidt, T. / Manske, E. / Schale, F. / Schwannecke, H.-C. / Sparrer, E. / Weiss, M. / SPIE (Society) et al. | 2013
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Highly accurate surface maps from profilometer measurements [8788-45]Medicus, K.M. / Nelson, J.D. / Mandina, M.P. / SPIE (Society) et al. | 2013
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Development of alignment-guidance device for grooved roll mill using parallel projection imaging technique [8788-55]Kodama, T. / Iwata, T. / Yamagami, D. / Takagi, K. / SPIE (Society) et al. | 2013
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Metrology solutions using optical scatterometry for advanced CMOS: III-V and Germanium multi-gate field-effect transistors [8788-62]Chin, H.-C. / Liu, B. / Zhang, X. / Ling, M.-L. / Yip, C.-H. / Liu, Y. / Hu, J. / Yeo, Y.-C. / SPIE (Society) et al. | 2013
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Comparison of Michelson and Linnik interference microscopes with respect to measurement capabilities and adjustment efforts [8788-87]Kuhnhold, P. / Xie, W. / Lehmann, P. / SPIE (Society) et al. | 2013
-
Small angle light scattering for a glass fibre diameter characterization [8788-94]Swirniak, G. / Glomb, G. / SPIE (Society) et al. | 2013
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Design and location deviation of the computer generated holograms used for aspheric surface testing [8788-95]Feng, J. / Deng, C. / Xing, T. / SPIE (Society) et al. | 2013
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Absolute scale-based imaging position encoder with submicron accuracy [8788-101]Anisimov, A.G. / Pantyushin, A.V. / Lashmanov, O.U. / Vasilev, A.S. / Timofeev, A.N. / Korotaev, V.V. / Gordeev, S.V. / SPIE (Society) et al. | 2013
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Tilted objects EFI in digital holography by two different numerical approaches [8788-107]Matrecano, M. / Paturzo, M. / Ferraro, P. / SPIE (Society) et al. | 2013
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Iterative alignment of reflector segments using a laser tracker [8788-106]Cuevas, L.C. / Alvarez, M.L. / Leon-Huerta, A. / Rios, E.H. / Lazaro, J.H. / Torres, C.T. / Santos, D.C. / Gale, D.M. / Wilson, G. / Narayanan, G. et al. | 2013
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Iterative improvements to the surface error of a 1.7 metre aluminium reflector [8788-118]Santos, D.C. / Cuevas, L.C. / Rios, E.H. / Gale, D.M. / Smith, D.R. / SPIE (Society) et al. | 2013
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Implementation of a fringe visibility based algorithm in coherence scanning interferometry for surface roughness measurement [8788-124]Montgomery, P.C. / Salzenstein, F. / Montaner, D. / Serio, B. / Pfeiffer, P. / SPIE (Society) et al. | 2013
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Digital holographic microscopy for the study of nano-fibers [8788-123]Wahba, H.H. / Sjodahl, M. / Gren, P. / Olsson, E. / SPIE (Society) et al. | 2013
-
Lensless object scanning holography for diffuse objects [8788-12]Garcia, J. / Ferreira, C. / Mico, V. / SPIE (Society) et al. | 2013
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Digital holographic inspection for the straight pipe inner surface using multiwavelength from laser diodes [8788-18]Yokota, M. / Koyama, T. / Kawakami, T. / SPIE (Society) et al. | 2013
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Robust evaluation of intensity curves measured by confocal microscopies [8788-28]Seewig, J. / Raid, I. / Wiehr, C. / George, B.A. / SPIE (Society) et al. | 2013
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Miniature low-cost extrinsic Fabry-Perot interferometer for low-pressure detection [8788-36]Poeggel, S. / Tosi, D. / Leen, G. / Lewis, E. / SPIE (Society) et al. | 2013
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Sub-nanometer in-die overlay metrology: measurement and simulation at the edge of finiteness [8788-58]Smilde, H.-J.H. / Jak, M. / Boef, A.d. / van Schijndel, M. / Bozkurt, M. / Fuchs, A. / van der Schaar, M. / Meyer, S. / Morgan, S. / Bhattacharyya, K. et al. | 2013
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Phase information in coherent Fourier scatterometry [8788-60]Kumar, N. / El Gawhary, O. / Roy, S. / Pereira, S.F. / Urbach, H.P. / SPIE (Society) et al. | 2013
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Optical vibration analysis of MEMS devices with pm-resolution in x, y, and z directions [8788-65]Giesen, M. / Kowarsch, R. / Ochs, W. / Winter, M. / Rembe, C. / SPIE (Society) et al. | 2013
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CO~2 laser photoacoustic spectrometry: sensitivity and drift analysis [8788-74]Skrinsky, J. / Zelinger, Z. / Hejzlar, T. / Nevrly, V. / Baudisova, B. / Bitala, P. / SPIE (Society) et al. | 2013
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Energetic sensitivity of optical-electronic systems based on polychromatic optical equisignal zone [8788-114]Maraev, A.A. / Timofeev, A.N. / SPIE (Society) et al. | 2013
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Wavelength modulation-based method for interference phase detection with reduced optical complexity [8788-120]Rerucha, S. / Sarbort, M. / Buchta, Z. / Mikel, B. / Smid, R. / Cizek, M. / Jedlicka, P. / Rerucha, J. / Lazar, J. / Cip, O. et al. | 2013
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Optical characterization method for very small microlenses (sub-50 micron) for industrial mass-production applications [8788-15]Kim, M.-S. / Sunarjo, J. / Weible, K.J. / Voelkel, R. / SPIE (Society) et al. | 2013
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Model-based, active inspection of three-dimensional objects using a multi-sensor measurement system [8788-33]Gronle, M. / Lyda, W. / Osten, W. / SPIE (Society) et al. | 2013
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High-frequency optical fiber microphone for condition-based maintenance application [8788-34]Tosi, D. / Olivero, M. / Perrone, G. / Vallan, A. / SPIE (Society) et al. | 2013
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High-speed 3D shape measurement using array projection [8788-40]Heist, S. / Sieler, M. / Breitbarth, A. / Kuhmstedt, P. / Notni, G. / SPIE (Society) et al. | 2013
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Moire deflectometry under incoherent illumination: 3D profiler for specular surfaces [8788-51]Hirose, T. / Kitayama, T. / SPIE (Society) et al. | 2013
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Revisiting parallel catadioptric goniophotometers [8788-61]Karamata, B. / Andersen, M. / SPIE (Society) et al. | 2013
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A lateral sensor for the alignment of two formation-flying satellites [8788-71]Roose, S. / Stockman, Y. / Sodnik, Z. / SPIE (Society) et al. | 2013
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Visual and dynamic measurement of temperature fields by use of digital holographic interferometry [8788-79]Zhao, J. / Di, J. / Wu, B. / Wang, J. / Wang, Q. / Jiang, H. / SPIE (Society) et al. | 2013
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Optical resolution measurement system for small lens by using slanted-slit method [8788-90]Huang, K.-Y. / Chia, C.-M. / SPIE (Society) et al. | 2013
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Design of omnidirectional camera lens system with catadioptic system [8788-98]Jo, J.H. / Lee, S. / Seo, H.J. / Lee, J.H. / Kim, J.M. / SPIE (Society) et al. | 2013
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Research of autocollimating angular deformation measurement system for large-size objects control [8788-110]Turgalieva, T.V. / Konyakhin, I.A. / SPIE (Society) et al. | 2013
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Camera-based curvature measurement of a large incandescent object [8788-121]Ollikkala, A.V.H. / Kananen, T.P. / Makynen, A.J. / Holappa, M. / SPIE (Society) et al. | 2013
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Optical profilometer using laser based conical triangulation for inspection of inner geometry of corroded pipes in cylindrical coordinates [8788-52]Buschinelli, P.D.V. / Melo, J.C. / Albertazzi, A. / Santos, J.M.C. / Camerini, C.S. / SPIE (Society) et al. | 2013
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Active retroreflector with in situ beam analysis to measure the rotational orientation in conjunction with a laser tracker [8788-53]Hofherr, O. / Wachten, C. / Muller, C. / Reinecke, H. / SPIE (Society) et al. | 2013
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The road towards accurate optical width measurements at the industrial level [8788-63]Bodermann, B. / Koning, R. / Bergmann, D. / Buhr, E. / Hassler-Grohne, W. / Flugge, J. / Bosse, H. / SPIE (Society) et al. | 2013
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Imaging sensor for monitoring of the piston mechanism in cylindrical valves [8788-75]Pantiushina, E.N. / Gorbachev, A.A. / SPIE (Society) et al. | 2013
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Measurement uncertainty in the profile detection on solar troughs [8788-85]Sansoni, P. / Fontani, D. / Francini, F. / Toccafondi, S. / Messeri, M. / Coraggia, S. / Mercatelli, L. / Jafrancesco, D. / Sani, E. / SPIE (Society) et al. | 2013
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Towards superresolution imaging with optical vortex scanning microscope [8788-103]Masajada, J. / Popiolek-Masajada, A. / Augustyniak, I. / Sokolenko, B. / SPIE (Society) et al. | 2013
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Design and experiment of testing an off-axis aspheric surface by computer generated hologram [8788-111]Li, S. / Wu, F. / Chen, Q. / Fan, B. / Li, L. / SPIE (Society) et al. | 2013
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Turbine-blade tip clearance and tip timing measurements using an optical fiber bundle sensor [8788-125]Garcia, I. / Beloki, J. / Zubia, J. / Durana, G. / Aldabaldetreku, G. / SPIE (Society) et al. | 2013
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Precision positioning with suppression of the influence of refractive index of air [8788-126]Hola, M. / Hrabina, J. / Oulehla, J. / Cizek, M. / Mikel, B. / Rerucha, S. / Buchta, Z. / Cip, O. / Lazar, J. / SPIE (Society) et al. | 2013
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Excess fraction measurement of a transparent glass thickness in wavelength tuning interferometry [8788-2]Kim, Y. / Hibino, K. / Harada, K. / Sugita, N. / Mitsuishi, M. / SPIE (Society) et al. | 2013
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Shape reconstruction using dual wavelength digital holography and speckle movements [8788-17]Khodadad, D. / Hallstig, E. / Sjodahl, M. / SPIE (Society) et al. | 2013
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Scanning fringe projection for fast 3D inspection [8788-135]Honegger, M. / Kahl, M. / Trunz, S. / Rinner, S. / Ettemeyer, A. / Lambelet, P. / SPIE (Society) et al. | 2013
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Precision aspheric optics testing with SCOTS: a deflectometry approach [8788-49]Su, P. / Khreishi, M. / Huang, R. / Su, T. / Burge, J.H. / SPIE (Society) et al. | 2013
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Infrared differential interference contrast microscopy for overlay metrology on 3D-interconnect bonded wafers [8788-70]Ku, Y. / Shyu, D.-M. / Lin, Y.-S. / Cho, C.-H. / SPIE (Society) et al. | 2013
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Real-time visualization and analysis of airflow field by use of digital holography [8788-78]Di, J. / Wu, B. / Chen, X. / Liu, J. / Wang, J. / Zhao, J. / SPIE (Society) et al. | 2013
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Image quality improvement using speckle method in digital holography by means of multi-mode fiber [8788-104]Funamizu, H. / Shimoma, S. / Aizu, Y. / SPIE (Society) et al. | 2013
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Spectral monitoring of toluene and ethanol in gasoline blends using Fourier-Transform Raman spectroscopy [8788-112]Clavero, V.O. / Weber, A. / Schroder, W. / Curticapean, D. / Meyrueis, P. / Javahiraly, N. / SPIE (Society) et al. | 2013
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Automatic unit for measuring refractive index of air based on Ciddor equation and its verification using direct interferometric measurement method [8788-115]Hucl, V. / Cizek, M. / Hrabina, J. / Mikel, B. / Rerucha, S. / Buchta, Z. / Jedlicka, P. / Lesundak, A. / Oulehla, J. / Mrna, L. et al. | 2013
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Hybrid and transflective system based on digital holographic microscope and low coherent interferometer for high gradient shape measurement [8788-9]Lizewski, K. / Tomczewski, S. / Kostencka, J. / Kozacki, T. / SPIE (Society) et al. | 2013
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ESPI based on spatial fringe analysis method using only two sheets of speckle patterns [8788-21]Arai, Y. / Yokozeki, S. / SPIE (Society) et al. | 2013
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A computational tool to highlight anomalies on shearographic images in optical flaw detection [8788-20]Fantin, A.V. / Willemann, D.P. / Viotti, M. / Albertazzi, A. / SPIE (Society) et al. | 2013
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A polarization-based frequency shifting interferometry for inspecting transparent objects in microelectronics manufacturing [8788-24]Lee, S.H. / Kim, M.Y. / SPIE (Society) et al. | 2013
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Fast and accurate line scanner based on white light interferometry [8788-25]Lambelet, P. / Moosburger, R. / SPIE (Society) et al. | 2013
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A space-borne fiber-optic interrogator module based on narrow-band tunable laser diode for temperature monitoring in telecommunication satellites [8788-35]Putzer, P. / Kuhenuri, N. / Koch, A.W. / Schweyer, S. / Hurni, A. / Plattner, M. / SPIE (Society) et al. | 2013
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Diagnostic of structures in heat and power generating industries with utilization of 3D digital image correlation [8788-68]Malesa, M. / Kujawinska, M. / Malowany, K. / Siwek, B. / SPIE (Society) et al. | 2013
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Characterization and demonstration of a 12-channel Laser-Doppler vibrometer [8788-66]Haist, T. / Lingel, C. / Osten, W. / Bendel, K. / Giesen, M. / Gartner, M. / Rembe, C. / SPIE (Society) et al. | 2013
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Three-axis optic-electronic autocollimation system for the inspection of large-scale objects [8788-83]Konyakhin, I.A. / Timofeev, A.N. / Konyakhin, A.I. / SPIE (Society) et al. | 2013
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Application of line-scanning microscopy using a linear sensor in semiconductor industry: shape and thickness measurements [8788-88]Macedo, M.P. / Correia, C.M.B.A. / SPIE (Society) et al. | 2013
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Reaching accuracies of Lambda/100 with the Three-Flat-Test [8788-92]Wittek, S. / SPIE (Society) et al. | 2013
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Optical measurement system applied to continuous displacement monitoring of long-span suspension bridges [8788-93]Martins, L.L. / Rebordao, J.M. / Ribeiro, A.S. / SPIE (Society) et al. | 2013
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Dual view x-ray inspection system for foreign objects detection in canned food [8788-99]Lu, Z. / Peng, N. / SPIE (Society) et al. | 2013
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CCD camera-based analysis of thin film growth in industrial PACVD processes [8788-102]Zauner, G. / Schulte, T. / Forsich, C. / Heim, D. / SPIE (Society) et al. | 2013
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Reflection, transmission and color measurement system for the online quality control of float glass coating process [8788-113]Mamedbeili, I. / Cakiroglu, F. / Bektas, G. / Riza, D. / Hacizade, F. / SPIE (Society) et al. | 2013
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Design and analysis of a low-cost compensated POF displacement sensor for industrial applications [8788-122]Tosi, D. / Olivero, M. / Perrone, G. / Vallan, A. / SPIE (Society) et al. | 2013
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Stimulated LIF studied using pulsed digital holography and modelling [8788-130]Amer, E. / Stenvall, J. / Gren, P. / Sjodahl, M. / SPIE (Society) et al. | 2013
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Automated hardware and software complex for extended light sources verification [8788-134]Gorbunova, E.V. / Peretyagin, V.S. / Chertov, A.N. / SPIE (Society) et al. | 2013
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Low coherence full field interference microscopy or optical coherence tomography: recent advances, limitations and future trends (Invited Paper) [8788-1]Abdulhalim, I. / SPIE (Society) et al. | 2013
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Holographic Interferometry based on photorefractive crystal to measure 3D thermo-elastic distortion of composite structures and comparison with finite element models [8788-6]Thizy, C. / Eliot, F. / Ballhause, D. / Olympio, K.R. / Kluge, R. / Shannon, A. / Laduree, G. / Logut, D. / Georges, M.P. / SPIE (Society) et al. | 2013
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Total compensation of chromatic errors in digital color holography using a single recording [8788-10]Leclercq, M. / Picart, P. / SPIE (Society) et al. | 2013
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3D shape measurements of fast moving rough surfaces by two tilted interference fringe systems [8788-64]Kuschmierz, R. / Gunther, P. / Czarske, J.W. / SPIE (Society) et al. | 2013
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Calibration of misalignment aberrations in cylindrical surface interferometric measurement [8788-80]Peng, J. / Ge, D. / Yu, Y. / Chen, M. / SPIE (Society) et al. | 2013
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Concept, realization and performance of a two-beam phase-shifting point diffraction interferometer [8788-4]Voznesenskiy, N. / Voznesenskaia, M. / Petrova, N. / Abels, A. / SPIE (Society) et al. | 2013
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Speed-up chromatic sensors by optimized optical filters [8788-27]Taphanel, M. / Hovestreydt, B. / Beyerer, J. / SPIE (Society) et al. | 2013
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High speed measurement of specular surfaces based on carrier fringe patterns in a line scan Michelson interferometer setup [8788-26]Knell, H. / Lehmann, P. / SPIE (Society) et al. | 2013
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Parallelized chromatic confocal sensor systems [8788-30]Hillenbrand, M. / Grewe, A. / Bichra, M. / Kleindienst, R. / Lorenz, L. / Kirner, R. / Weiss, R. / Sinzinger, S. / SPIE (Society) et al. | 2013
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High resolution measurements of filigree, inner geometries with endoscopic micro fringe projection [8788-42]Ohrt, C. / Kastner, M. / Reithmeier, E. / SPIE (Society) et al. | 2013
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Non-contact profiling for high precision fast asphere topology measurement [8788-44]Petter, J. / Berger, G. / SPIE (Society) et al. | 2013
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Lateral location error compensation algorithm for measuring aspheric surfaces by sub-aperture stitching interferometry [8788-46]Zhao, Z. / Zhao, H. / Gu, F. / Zhang, L. / SPIE (Society) et al. | 2013
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Approach to the measurement of astronomical mirrors with new procedures [8788-48]Hofbauer, E. / Rascher, R. / Liebl, J. / Maurer, R. / Zimmermann, A. / Rosch, O. / Reitberger, J. / SPIE (Society) et al. | 2013
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Automated control of robotic camera tacheometers for measurements of industrial large scale objects [8788-54]Heimonen, T. / Leinonen, J. / Sipola, J. / SPIE (Society) et al. | 2013
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Laser welding control by monitoring of plasma [8788-96]Chmelickova, H. / Sebestova, H. / Havelkova, M. / Rihakova, L. / Nozka, L. / SPIE (Society) et al. | 2013
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Development of a zero-method interferometer by means of dynamic generation of reference wave front [8788-100]Hanayama, R. / Ishii, K. / SPIE (Society) et al. | 2013
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Alignment of a large outdoor antenna surface using a laser tracker [8788-117]Leon-Huerta, A. / Alvarez, M.L. / Rios, E.H. / Torres, C.T. / Cuevas, L.C. / Santos, D.C. / Lazaro, J.H. / Gale, D.M. / Wilson, G. / Narayanan, G. et al. | 2013
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Tape measuring system using linear encoder and digital camera [8788-133]Eom, T.B. / Jeong, D.Y. / Kim, M.S. / Kim, J.W. / Kim, J.A. / SPIE (Society) et al. | 2013