Rapid Thermal Annealing of a SiOF Film Prepared by Remote-Plasma Chemical-Vapor Deposition (Unknown)
- New search for: Lee, J. H.
- New search for: Cho, G. S.
- New search for: Kim, S. K.
- New search for: Moon, B. Y.
- New search for: Lee, S. M.
- New search for: Jang, J.
- New search for: Lee, J. H.
- New search for: Cho, G. S.
- New search for: Kim, S. K.
- New search for: Moon, B. Y.
- New search for: Lee, S. M.
- New search for: Jang, J.
In:
KOREAN APPLIED PHYSICS
;
10
, 6
;
536-539
;
1997
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ISSN:
- Article (Journal) / Print
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Title:Rapid Thermal Annealing of a SiOF Film Prepared by Remote-Plasma Chemical-Vapor Deposition
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Contributors:Lee, J. H. ( author ) / Cho, G. S. ( author ) / Kim, S. K. ( author ) / Moon, B. Y. ( author ) / Lee, S. M. ( author ) / Jang, J. ( author )
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Published in:KOREAN APPLIED PHYSICS ; 10, 6 ; 536-539
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Publisher:
- New search for: THE KOREAN PHYSICAL SOCIETY
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Publication date:1997-01-01
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Size:4 pages
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ISSN:
-
Type of media:Article (Journal)
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Type of material:Print
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Language:Unknown
- New search for: 530
- Further information on Dewey Decimal Classification
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Classification:
DDC: 530 -
Source:
© Metadata Copyright the British Library Board and other contributors. All rights reserved.
Table of contents – Volume 10, Issue 6
The tables of contents are generated automatically and are based on the data records of the individual contributions available in the index of the TIB portal. The display of the Tables of Contents may therefore be incomplete.
- 509
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Manufacture of an Ultra-Sharp Tungsten Electrode for a Field-Emission Electron Beam and Its Beam CharacteristicsKim, Y. G. / Lee, J. H. / Choi, B. H. / Choi, E. H. / Cho, G. S. / Kang, S. O. et al. | 1997
- 515
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Construction and Performance Evaluation of a 200-keV High Current Ion Implanter (I)Kim, H. K. / Moon, D. W. / Jang, H. K. / Kim, H. B. / Whang, C. N. / Woo, J. J. et al. | 1997
- 523
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Sound-Absorbing Characteristics of Layered Absorbents with an Air GapJung, S. S. / Kim, N. H. / Kim, M. G. et al. | 1997
- 530
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Measurement of the Thermal Conductivity of SiO~2 Thin FilmsPark, B. R. / Seong, D. J. / Kim, J. C. / Kim, S. W. / Hahn, S. H. et al. | 1997
- 536
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Rapid Thermal Annealing of a SiOF Film Prepared by Remote-Plasma Chemical-Vapor DepositionLee, J. H. / Cho, G. S. / Kim, S. K. / Moon, B. Y. / Lee, S. M. / Jang, J. et al. | 1997
- 540
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Electrical and Optical Properties of Microcrystalline Silicon Films Deposited by ICP-CVDKim, H. C. / Ryu, J. I. / Kim, K. N. / Jang, J. et al. | 1997
- 547
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Metastable States Induced by Rapid Cooling in Hydrogenated Amorphous SiliconKang, S. S. / Lee, W. J. / Cho, J. H. / Park, D. K. / Yang, S.-H. et al. | 1997
- 553
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Surface Morphology and Crystallization of Sol-Gel Derived SrBi~2Ta~2O~9 Thin FilmsLee, K. B. et al. | 1997
- 558
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Bandgap-Narrowing Effects in Carbon-Doped GaAs Epilayers Grown by MOCVDCho, S. / Lee, D. / Kim, S.-I. / Kim, E. K. / Min, S.-K. / Choi, I.-H. et al. | 1997
- 565
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Magnetic and Microwave Properties of YIGSong, Y. Y. / Yu, S. C. / Kim, W. T. / Lee, S. S. / Park, J. R. / Lee, S. J. / Kim, T. H. et al. | 1997
- 570
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The Performance of Electrochromic Tungsten-Oxide Films Doped with TitaniumLee, K. D. / Yang, J. Y. et al. | 1997
- 577
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Chemical Etching of (GaAs)~n(AlAs)~n Short-Period Superlattices for Use in Spectroscopic EllipsometryKim, Y.-D. et al. | 1997
- 581
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Gas-Adsorption Experiment by Quartz Microbalance using Inductive Detection of Piezoelectric ResonanceKim, J. Y. / Yu, L. et al. | 1997
- 587
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Growth of High-Quality ZnS/GaAs Epilayers by Hot-Wall EpitaxyNam, S. / Rhee, J. / Young-Moon, Y. / Byungsung, O. / Lee, K.-S. / Dae Choi, Y. / Yang, D. I. / Lee, W. H. / Kim, J. B. et al. | 1997
- 594
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AFM Study of InAs Quantum Dots Grown on GaAs(100), GaAs(311)B, and GaAs(411)B by Chemical Beam EpitaxyChang, Y. G. / Park, S.-J. / Park, S. W. / Song, J.-I. et al. | 1997
- 599
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Minimization of Differential Thinning Phenomena by Using Rocking-Angle Ion-Milling to Prepare Thin Films for Cross-Sectional Transmission Electron MicroscopyKim, H. H. / Jeong, Y. W. / Lee, J. S. et al. | 1997
- 606
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The Etching Characteristics of Ru and RuO~2 Films in a Cl~2 Gas Ambient When Using Chemically Assisted Ion-Beam EtchingKim, K. J. / Youn, C. J. / Yu, H. W. / Lee, K. B. / Choi, Y. C. / Lee, B. S. / Park, W. I. et al. | 1997
- 613
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Characteristics and Application of Native-Oxide Layers Formed by Anodic OxidationJang, Y. J. / Park, Y. J. / Hahn, C. K. / Kim, K. M. / Oh, C. S. / Kim, E. K. / Min, S.-K. / Park, C. Y. et al. | 1997