In situ investigation of ion drift processes in glass during anodic bonding (English)
- New search for: Schmidt, B.
- New search for: Nitzsche, P.
- New search for: Lange, K.
- New search for: Grigull, S.
- New search for: Kreissig, U.
- New search for: Thomas, B.
- New search for: Herzog, K.
- New search for: Schmidt, B.
- New search for: Nitzsche, P.
- New search for: Lange, K.
- New search for: Grigull, S.
- New search for: Kreissig, U.
- New search for: Thomas, B.
- New search for: Herzog, K.
In:
SENSORS AND ACTUATORS A
;
67
, 1-3
;
191-198
;
1998
-
ISSN:
- Article (Journal) / Print
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Title:In situ investigation of ion drift processes in glass during anodic bonding
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Contributors:Schmidt, B. ( author ) / Nitzsche, P. ( author ) / Lange, K. ( author ) / Grigull, S. ( author ) / Kreissig, U. ( author ) / Thomas, B. ( author ) / Herzog, K. ( author )
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Published in:SENSORS AND ACTUATORS A ; 67, 1-3 ; 191-198
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Publisher:
- New search for: ELSEVIER SEQUOIA S A
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Publication date:1998-01-01
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Size:8 pages
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ISSN:
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Type of media:Article (Journal)
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Type of material:Print
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Language:English
- New search for: 681.2
- Further information on Dewey Decimal Classification
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Classification:
DDC: 681.2 -
Source:
© Metadata Copyright the British Library Board and other contributors. All rights reserved.
Table of contents – Volume 67, Issue 1-3
The tables of contents are generated automatically and are based on the data records of the individual contributions available in the index of the TIB portal. The display of the Tables of Contents may therefore be incomplete.
- 1
-
Simulation and design of microsystems: a 10-year perspectiveSenturia, Stephen D. et al. | 1998
- 8
-
Improved ultrasonic density sensor with reduced diffraction influencePüttmer, A. et al. | 1998
- 13
-
On the mechanisms in thermally actuated composite diaphragmsPuers, Robert et al. | 1998
- 18
-
An NMR magnetometer with planar microcoils and integrated electronics for signal detection and amplificationBoero, G. et al. | 1998
- 24
-
Optical sensor system for the on-line measurement of carbon in fly-ashSchneider, A. et al. | 1998
- 32
-
Ultrasonic sensors for process monitoring and chemical analysis: state-of-the-art and trendsHauptmann, Peter et al. | 1998
- 49
-
An alternative method for determining the lambda(H) function in magnetostrictive amorphous alloysHristoforou, E. / Chiriac, H. / Neagu, M. et al. | 1998
- 49
-
An alternative method for determining the l(H) function in magnetostrictive amorphous alloysHristoforou, E. et al. | 1998
- 55
-
Ambient temperature coefficient of thermal piezoacoustic sensors operating in a twin configurationKampik, Marian et al. | 1998
- 60
-
Design of SAW delay lines for sensorsSoluch, Waldemar et al. | 1998
- 65
-
Accelerometer based on metal-silicon dislocation diode structuresFastykovsky, P.P. et al. | 1998
- 68
-
New UV-enhanced solar blind optical sensors based on monocrystalline zinc sulphideMalik, Alexander et al. | 1998
- 72
-
New fully integrated 3-D silicon Hall sensor for precise angular-position measurementsBurger, F. et al. | 1998
- 77
-
Using a formal mathematics software for SH-APM sensor modellingEsteban, Irène et al. | 1998
- 84
-
A new measurement method for magneto-impedance in soft amorphous ferromagnets at microwave frequencyBrunetti, Luciano et al. | 1998
- 89
-
Electrostatically deflectable polysilicon micromirrors - dynamic behaviour and comparison with the results from FEM modelling with ANSYSFischer, M. et al. | 1998
- 96
-
Magnetic-field sensor based on a thin-film SOI transistorLosantos, Pere et al. | 1998
- 102
-
An optical current transducer for residual current sensing in the milliampere rangeMartinez, L.M. et al. | 1998
- 109
-
Progress in VLSI optical position-sensitive circuitsTartagni, Marco et al. | 1998
- 115
-
Smart optical sensor systems in CMOS for measuring light intensity and colourde Graaf, G. et al. | 1998
- 120
-
Spectral beam sampling and control by a planar optical transducerWiki, M. et al. | 1998
- 125
-
Highly sensitive motion detection with a combined microwave-ultrasonic sensorRuser, H. et al. | 1998
- 133
-
Microsystem for high-accuracy 3-D magnetic-field measurementsSchott, Ch et al. | 1998
- 138
-
Improvement of pressure-sensor performance and process robustness through reinforcement of the membrane edgesGötz, A. et al. | 1998
- 142
-
Media-isolated sensorCzarnocki, W.S. et al. | 1998
- 146
-
New generation of infrared photodetectorsPiotrowski, Jozef et al. | 1998
- 153
-
Global model generation for a capacitive silicon accelerometer by finite-element analysisAnsel, Y. et al. | 1998
- 159
-
Machining of three-dimensional microstructures in silicon by electro-discharge machiningReynaerts, Dominiek et al. | 1998
- 166
-
Laser-induced reversible change of electrical resistivity of CoSi2 thin-film sensorsKnite, M. et al. | 1998
- 170
-
On the Hall effect and resistivity of nanocomposite Ni-SiO2 thin filmsRusu, Florin et al. | 1998
- 175
-
Low-stress PECVD SiC thin films for IC-compatible microstructuresSarro, P.M. et al. | 1998
- 181
-
Effect of silicon oxide, silicon nitride and polysilicon layers on the electrostatic pressure during anodic bondingPlaza, J.A. et al. | 1998
- 185
-
Low-cost plastic sensor packaging using the open-window package conceptCotofana, C. et al. | 1998
- 191
-
In situ investigation of ion drift processes in glass during anodic bondingSchmidt, B. et al. | 1998
- 199
-
Dynamic actuation of polyimide V-groove joints by electrical heatingEbefors, Thorbjörn et al. | 1998
- 205
-
Oxidized porous silicon: a new approach in support thermal isolation of thermopile-based biosensorsLysenko, V. et al. | 1998
- 211
-
Full integration of a pressure-sensor system into a standard BiCMOS processScheiter, T. et al. | 1998
- 215
-
Measurement of micromechanical properties of polysilicon microstructures with an atomic force microscopeSerre, C. et al. | 1998