Preparation of amorphous Si1-xCx (0x<=1) films by alternate deposition of Si and C thin layers using a dual magnetron sputtering source (English)
- New search for: Kikuchi, N.
- New search for: Kusano, E.
- New search for: Tanaka, T.
- New search for: Kinbara, A.
- New search for: Nanto, H.
- New search for: Kikuchi, N.
- New search for: Kusano, E.
- New search for: Tanaka, T.
- New search for: Kinbara, A.
- New search for: Nanto, H.
In:
SURFACE AND COATINGS TECHNOLOGY
;
149
, 1
;
76-81
;
2002
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ISSN:
- Article (Journal) / Print
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Title:Preparation of amorphous Si1-xCx (0x<=1) films by alternate deposition of Si and C thin layers using a dual magnetron sputtering source
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Contributors:Kikuchi, N. ( author ) / Kusano, E. ( author ) / Tanaka, T. ( author ) / Kinbara, A. ( author ) / Nanto, H. ( author )
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Published in:SURFACE AND COATINGS TECHNOLOGY ; 149, 1 ; 76-81
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Publisher:
- New search for: ELSEVIER SEQUOIA SA
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Publication date:2002-01-01
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Size:6 pages
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ISSN:
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Type of media:Article (Journal)
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Type of material:Print
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Language:English
- New search for: 671.73
- Further information on Dewey Decimal Classification
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Classification:
DDC: 671.73 -
Source:
© Metadata Copyright the British Library Board and other contributors. All rights reserved.
Table of contents – Volume 149, Issue 1
The tables of contents are generated automatically and are based on the data records of the individual contributions available in the index of the TIB portal. The display of the Tables of Contents may therefore be incomplete.
- 1
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Crystallization of tantalum oxide formed by PLDHino, T. et al. | 2002
- 7
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Mechanical properties of TiN thin film coatings on 304 stainless steel substratesChou, Wen-Jun et al. | 2002
- 14
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Evaluation of TiB2 coatings in sliding contact against aluminiumBerger, M. et al. | 2002
- 21
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Influence of the pack thickness of the boronizing mixture on the boriding of steelJain, Vipin et al. | 2002
- 27
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Ultra-microhardness testing procedure with Vickers indenterAntunes, J.M. et al. | 2002
- 36
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Enhancement of cavitation erosion and corrosion resistance of brass by laser surface alloying with Ni-Cr-Si-BTam, K.F. et al. | 2002
- 45
-
Fatigue behavior of a 4340 steel coated with an electroless Ni-P depositDiaz, J.A. et al. | 2002
- 57
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Performance of dicalcium silicate coatings in hot-corrosive environmentJansen, Franz et al. | 2002
- 62
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High-rate sputter deposited tantalum coating on steel for wear and erosion mitigationLee, S.L. et al. | 2002
- 70
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Oxidation behaviour of NiCrAlY coatings on Ni-based superalloyWang, B. et al. | 2002
- 76
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Preparation of amorphous Si1-xCx (0x<=1) films by alternate deposition of Si and C thin layers using a dual magnetron sputtering sourceKikuchi, N. / Kusano, E. / Tanaka, T. / Kinbara, A. / Nanto, H. et al. | 2002
- 76
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Preparation of amorphous Si1-xCx (0<=x<=1) films by alternate deposition of Si and C thin layers using a dual magnetron sputtering sourceKikuchi, Naoto et al. | 2002
- 82
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The influence of temperature on the microstructure and mechanical properties of sputtered Cr2Nx coatingsKringhøj, P. et al. | 2002
- 89
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Structural evolution of a-C:F:H film prepared by microwave ECR CVDXin, Y. et al. | 2002