Influence of chemical sputtering on the composition and bonding structure of carbon nitride films (English)
- New search for: Hammer, P.
- New search for: Alvarez, F.
- New search for: Hammer, P.
- New search for: Alvarez, F.
In:
THIN SOLID FILMS
;
398-399
;
116-123
;
2001
-
ISSN:
- Article (Journal) / Print
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Title:Influence of chemical sputtering on the composition and bonding structure of carbon nitride films
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Contributors:Hammer, P. ( author ) / Alvarez, F. ( author )
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Published in:THIN SOLID FILMS ; 398-399 ; 116-123
-
Publisher:
- New search for: ELSEVIER SEQUOIA SA
-
Publication date:2001-01-01
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Size:8 pages
-
ISSN:
-
Type of media:Article (Journal)
-
Type of material:Print
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Language:English
- New search for: 530.4275
- Further information on Dewey Decimal Classification
-
Classification:
DDC: 530.4275 -
Source:
© Metadata Copyright the British Library Board and other contributors. All rights reserved.
Table of contents – Volume 398-399
The tables of contents are generated automatically and are based on the data records of the individual contributions available in the index of the TIB portal. The display of the Tables of Contents may therefore be incomplete.
- 1
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Achieving narrow bandpass filters which meet the requirements for DWDMWilley, R. R. et al. | 2001
- 10
-
Thermochromic VO2 sputtered by control of a vanadium-oxygen emission ratioDillon, R. O. / Le, K. / Ianno, N. et al. | 2001
- 17
-
Characterization of aluminum nitride thin films deposited by filtered cathodic arc processDixit, S. J. / Rai, A. K. / Bhattacharya, R. S. / Guha, S. / Wittberg, T. et al. | 2001
- 24
-
Zinc sulfide thin films produced by sulfidation of sol-gel deposited zinc oxideKavanagh, Y. / Cameron, D. C. et al. | 2001
- 29
-
Growth of ZnO Thin Films and WhiskersChang, Y. S. / Ting, J. M. et al. | 2001
- 35
-
Growth and properties of alumina films obtained by low-pressure metal-organic chemical vapor depositionKuo, D. H. / Cheung, B. Y. / Wu, R. J. et al. | 2001
- 41
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Electrochromic behaviour of nickel oxide thin films deposited by thermal evaporationPorqueras, I. / Bertran, E. et al. | 2001
- 45
-
Infrared transparent spinel films with p-type conductivityWindisch Jr, C. F. / Exarhos, G. J. / Ferris, K. F. / Engelhard, M. H. / Stewart, D. C. et al. | 2001
- 53
-
Transparent conducting impurity-co-doped ZnO:Al thin films prepared by magnetron sputteringMinami, T. / Suzuki, S. / Miyata, T. et al. | 2001
- 59
-
Innovative and cost-effective synthesis of indium tin oxide filmsChandrasekhar, R. / Choy, K. L. et al. | 2001
- 65
-
The influence of film composition on the optical and thermal properties of solar control coatingsRusso, D. / McKown, C. / Roger, C. / Brotzman, Jeffery Stricker, J. et al. | 2001
- 71
-
Optically active coatings deposited from an ultrasonically generated aerosolLanglet, M. et al. | 2001
- 78
-
Characterization and luminescence properties of Alq3 films grown by ionized-cluster-beam deposition, neutral-cluster-beam deposition and thermal evaporationKim, S. Y. / Ryu, S. Y. / Choi, J. M. / Kang, S. J. / Park, S. P. / Im, S. / Whang, C. N. / Choi, D. S. et al. | 2001
- 82
-
Characterization of thermally evaporated 1,8-diacetoxy-9,10-anthraquinone filmsMahajan, A. / Bedi, R. K. / Kumar, S. et al. | 2001
- 87
-
A study of transparent indium tin oxide (ITO) contact to p-GaNKim, D. W. / Sung, Y. J. / Park, J. W. / Yeom, G. Y. et al. | 2001
- 93
-
Photoelectric, stoichiometric and structural properties of n-ZnO film on p-SiKim, H. Y. / Kim, J. H. / Park, M. O. / Im, S. et al. | 2001
- 99
-
Application of FTIR phase-modulated ellipsometry to the characterisation of thin films on surface-enhanced IR absorption active substratesGarcia-Caurel, E. / Bertran, E. / Canillas, A. et al. | 2001
- 104
-
Effect of antenna porphyrins and phthalocyanines on the photochromism of benzospiropyrans in poly(methyl methacrylate) filmsHagen, J. P. / Becerra, I. / Drakulich, D. / Dillon, R. O. et al. | 2001
- 110
-
Metal-containing amorphous carbon films for hydrophobic applicationChen, J. S. / Lau, S. P. / Sun, Z. / Chen, G. Y. / Li, Y. J. / Tay, B. K. / Chai, J. W. et al. | 2001
- 116
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Influence of chemical sputtering on the composition and bonding structure of carbon nitride filmsHammer, P. / Alvarez, F. et al. | 2001
- 124
-
Structure and mechanical properties of argon assisted carbon nitride filmsValentini, L. / Kenny, J. M. / Gerbig, Y. / Savan, A. / Haefke, H. / Lozzi, L. / Santucci, S. et al. | 2001
- 130
-
Dependence of the stress of c-BN films on the major deposition parameters: theoretical and experimental studiesKlett, A. / Freudenstein, R. / Kulisch, W. et al. | 2001
- 137
-
Controlling stress in cubic boron nitride coatingsClarke, R. / Litvinov, D. / Taylor, C. / Barlett, D. / Inspektor, A. et al. | 2001
- 142
-
Mechanical and tribological properties of cBN films on silicon and tungsten carbide substratesKeunecke, M. / Yamamoto, K. / Bewilogua, K. et al. | 2001
- 150
-
Effect of NH3 environmental gas on the growth of aligned carbon nanotube in catalystically pyrolizing C2H2Jung, M. / Eun, K. Y. / Baik, Y. J. / Lee, K. R. / Shin, J. K. / Kim, S. T. et al. | 2001
- 156
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Gas-phase and plasma-surface reactions in radiofrequency discharges of C2H2-N2-noble gas mixturesDurrant, S. F. / Bica de Moraes, M. A. / Rouxinol, F. P. et al. | 2001
- 163
-
Nitrogen-doped plasma enhanced chemical vapor deposited (PECVD) amorphous carbon: processes and propertiesSmith, S. M. / Voight, S. A. / Tompkins, H. / Hooper, A. / Talin, A. A. / Vella, J. et al. | 2001
- 170
-
Nanostructured, nitrogen-doped carbon materials for hydrogen storageBadzian, A. / Badzian, T. / Breval, E. / Piotrowski, A. et al. | 2001
- 175
-
Morphology variation of diamond with increasing pressure up to 400 torr during deposition using hot filament CVDKang, M. S. / Lee, W. S. / Baik, Y. J. et al. | 2001
- 180
-
CaO-modified diamond-like carbon coatings synthesised by a direct current dischargeDorner-Reisel, A. / Schurer, C. / Reisel, G. / Simon, F. / Irmer, G. / Muller, E. et al. | 2001
- 187
-
Wear resistant carbon coatings deposited without substrate bias voltageRother, B. / Herrmann, U. / Schulze, S. et al. | 2001
- 193
-
Structure and field emission properties of decorated C/N nanotubes tuned by diameter variationsKurt, R. / Bonard, J. M. / Karimi, A. et al. | 2001
- 199
-
Control of the tribological moisture sensitivity of diamond-like carbon films by alloying with F, Ti or SiGilmore, R. / Hauert, R. et al. | 2001
- 205
-
Physical properties of cubic boron nitride films synthesized by PVD using a bi-step processDjouadi, M. A. / Banakh, O. / Soltani, A. / Sanjines, R. / Levy, F. et al. | 2001
- 210
-
Probing for mechanical and tribological anomalies in the TiC/amorphous hydrocarbon nanocomposite coating systemFeng, B. / Cao, D. M. / Meng, W. J. / Rehn, L. E. / Baldo, P. M. / Doll, G. L. et al. | 2001
- 217
-
Investigation of the nucleation of c-BN by AFM measurementsFreudenstein, R. / Klett, A. / Kulisch, W. et al. | 2001
- 222
-
BN coating adhesion on ion-implanted polymer surfacesChecchetto, R. / Miotello, A. / Guzman, L. / Adami, M. / Chayahara, A. et al. | 2001
- 228
-
Characterization of pulsed laser deposited a-C films by means of reflection electron energy loss spectroscopyBarreca, F. / Mezzasalma, A. M. / Mondio, G. / Neri, F. / Trusso, S. et al. | 2001
- 233
-
An investigation of the electronic and structural properties of pulsed laser-deposited a-C filmsNeri, F. / Mondio, G. / Mezzasalma, A. M. / Fazio, E. / Trusso, S. / Fazio, B. et al. | 2001
- 238
-
Synthesis of multilayer diamond film and evaluation of its mechanical propertiesTakeuchi, S. / Oda, S. / Murakawa, M. et al. | 2001
- 244
-
Structural and optical properties of ZnO thin films produced by filtered cathodic vacuum arcXu, X. L. / Lau, S. P. / Tay, B. K. et al. | 2001
- 250
-
Development of tubes of micro-crystalline diamond and diamond-like carbonBaranauskas, V. / Ceragioli, H. J. / Peterlevitz, A. C. / Durrant, S. F. et al. | 2001
- 255
-
Structural properties of diamond and diamond-like carbon grown on stainless-steel bladesBaranauskas, V. / Peterlevitz, A. C. / Ceragioli, H. J. / Souto, A. L. / Durrant, S. F. et al. | 2001
- 260
-
Growth of diamond and carbon structures on natural pyrolized fibersBaranauskas, V. / Peterlevitz, A. C. / Ceragioli, H. J. / Durrant, S. F. et al. | 2001
- 265
-
Determination of biaxial modulus of chemical vapor-deposited diamond filmsFan, Q. H. / Gracio, J. / Pereira, E. / Teixeira, V. / Tavares, J. C. et al. | 2001
- 270
-
B-C-N coatings prepared by microwave chemical vapor depositionStanishevsky, A. / Li, H. / Badzian, A. / Badzian, T. / Drawl, W. / Khriachtchev, L. / McDaniel, E. et al. | 2001
- 275
-
Hardness and elastic modulus of carbon-germanium alloysVilcarromero, J. / Marques, F. C. et al. | 2001
- 279
-
Depth resolved comparative investigation of phase formation and stress build-up in cubic boron nitride filmsKlett, A. / Freudenstein, R. / Kulisch, W. / Ye, M. / Delplancke-Ogletree, M. P. et al. | 2001
- 285
-
Deposition of carbon-containing cubic boron nitride films by pulsed-DC magnetron sputteringYang, T. S. / Tsai, T. H. / Lee, C. H. / Cheng, C. L. / Wong, M. S. et al. | 2001
- 291
-
Modelling the hardness response of bulk materials, single and multilayer coatingsBull, S. J. et al. | 2001
- 299
-
Accurate determination of Young's modulus and Poisson's ratio of thin films by a combination of acoustic microscopy and nanoindentationBamber, M. J. / Cooke, K. E. / Mann, A. B. / Derby, B. et al. | 2001
- 306
-
Nano-indentation, scratching and atomic force microscopy for evaluating the mar resistance of automotive clearcoats: study of the ductile scratchesBertrand-Lambotte, P. / Loubet, J. L. / Verpy, C. / Pavan, S. et al. | 2001
- 313
-
Micro/nanomechanical and tribological studies of bulk and thin-film materials used in magnetic recording headsLi, X. / Bhushan, B. et al. | 2001
- 320
-
Mechanical properties of Ti-B-C-N coatings deposited by magnetron sputteringZhong, D. / Sutter, E. / Moore, J. J. / Mustoe, G. G. / Levashov, E. A. / Disam, J. et al. | 2001
- 326
-
Thin-film elastic-property measurements with laser-ultrasonic SAW spectrometryHurley, D. C. / Tewary, V. K. / Richards, A. J. et al. | 2001
- 331
-
On the measurement of stress-strain curves by spherical indentationHerbert, E. G. / Pharr, G. M. / Oliver, W. C. / Lucas, B. N. / Hay, J. L. et al. | 2001
- 336
-
Profile reconstruction in sputter depth profilingHofmann, S. et al. | 2001
- 343
-
An analysis of the TiN plasmachemical vapor deposition process based on optical emission spectroscopy measurementsPeter, S. / Giegengack, H. / Richter, F. / Tabersky, R. / Konig, U. et al. | 2001
- 349
-
Silicon diffusion on LiF films deposited on Si(100) induced by electron beamCremona, M. / Achete, C. A. / Guimaraes, P. I. et al. | 2001
- 356
-
Study of phase transition and electrical resistivity of tantalum nitride films prepared by DC magnetron sputtering with OES detection systemLu, Y. M. / Weng, R. J. / Hwang, W. S. / Yang, Y. S. et al. | 2001
- 361
-
Junction properties of nickel phthalocyanine thin film devices utilising indium injecting electrodesShafai, T. S. / Anthopoulos, T. D. et al. | 2001
- 368
-
Phase changes of CrN films annealed at high temperature under controlled atmosphereLu, F. H. / Chen, H. Y. et al. | 2001
- 374
-
In-situ observation of deposition process of Pd on clean Si surfaces by ultrahigh vacuum-transmission electron microscopy/scanning tunneling microscopyTanaka, M. / Takeguchi, M. / Yasuda, H. / Furuya, K. et al. | 2001
- 379
-
Characterization of Ge-Sb-Te thin films deposited using a composition-spread approachKyrsta, S. / Cremer, R. / Neuschutz, D. / Laurenzis, M. / Haring Bolivar, P. / Kurz, H. et al. | 2001
- 385
-
Electron beam deposition of thin bioceramic film for biomedical implantsHamdi, M. / Ektessabi, A. M. et al. | 2001
- 391
-
Microstructure and mechanical properties of nanocomposite (Ti,Si,Al)N coatingsCarvalho, S. / Rebouta, L. / Cavaleiro, A. / Rocha, L. A. / Gomes, J. / Alves, E. et al. | 2001
- 397
-
Microstructure of superhard (Ti,Al)N/Mo multilayersTavares, C. J. / Rebouta, L. / Riviere, J. P. / Pacaud, J. / Garem, H. / Pischow, K. / Wang, Z. et al. | 2001
- 405
-
Application of an planar X-ray waveguide for structure study of thin film coatingsEgorov, V. K. / Egorov, E. V. et al. | 2001
- 413
-
Structures and properties of the SiNC films on Si wafer at different deposition stagesWu, J. Y. / Kuo, C. T. / Liu, T. L. et al. | 2001
- 419
-
Cu, Nb and V on (110) TiO2 (rutile): epitaxy and chemical reactionsWagner, T. / Marien, J. / Duscher, G. et al. | 2001
- 427
-
Characterization of AgInTe2 films grown by a hot wall epitaxy technique on KCl substratesSingh, A. / Bedi, R. K. et al. | 2001
- 432
-
The electrical response of evaporated cobalt phthalocyanine thin films on exposure to NO2Gould, R. D. / Ibrahim, N. A. et al. | 2001
- 438
-
Micro-impact testing: a new technique for investigating fracture toughnessBeake, B. D. / Garcia, M. I. / Smith, J. F. et al. | 2001
- 444
-
Fabrication of YBa2Cu3O7-x superconducting film with CeO2/BaTiO double buffer layerHoi Hur, C. / Yeol Lee, S. et al. | 2001
- 448
-
Recovery of plasma-induced damage in PZT thin film with O2 gas annealingKang, M. G. / Kim, K. T. / Kim, C. I. et al. | 2001
- 454
-
DC conductivity in RF magnetron sputtered gold-silicon nitride-gold sandwich structuresGould, R. D. / Awan, S. A. et al. | 2001
- 460
-
Composition, structure, and nanomechanical properties of DC-sputtered CrNx (0x<=1) thin filmsWei, G. / Rar, A. / Barnard, J. A. et al. | 2001
- 465
-
Elastic properties of indium tin oxide filmsWittkowski, T. / Jorzick, J. / Seitz, H. / Schroder, B. / Jung, K. / Hillebrands, B. et al. | 2001
- 471
-
Biomedical properties of tantalum nitride films synthesized by reactive magnetron sputteringLeng, Y. X. / Sun, H. / Yang, P. / Chen, J. Y. / Wang, J. / Wan, G. J. / Huang, N. / Tian, X. B. / Wang, L. P. / Chu, P. K. et al. | 2001
- 476
-
Residual stress in composite film (Ni-Co-P/Si3N4)Hiratsuka, K. / Takago, S. / Sasaki, T. / Hirose, Y. et al. | 2001
- 480
-
Effect of silicon surface states on the properties of epitaxial Al2O3 filmsWhangbo, S. W. / Choi, Y. K. / Koh, W. S. / Chung, K. B. / Jang, H. K. / Whang, C. N. et al. | 2001
- 485
-
Characterization and light-emitting properties of Au/SiOx/p-Si and Au/Ni-implanted-SiOx/p-Si structuresBae, H. S. / Lee, W. S. / Kim, T. G. / Whang, C. N. / Song, J. H. / Im, S. et al. | 2001
- 490
-
Stress and structure profiles for chromium nitride coatings deposited by r.f. magnetron sputteringNouveau, C. / Djouadi, M. A. / Banakh, O. / Sanjines, R. / Levy, F. et al. | 2001
- 496
-
Characterization of thin film elastic properties using X-ray diffraction and mechanical methods: application to polycrystalline stainless steelGoudeau, P. / Renault, P. O. / Villain, P. / Coupeau, C. / Pelosin, V. / Boubeker, B. / Badawi, K. F. / Thiaudiere, D. / Gailhanou, M. et al. | 2001
- 501
-
Characterisation of chromium nitride films produced by PVD techniquesBarata, A. / Cunha, L. / Moura, C. et al. | 2001
- 507
-
A study of neon-nitrogen interactions in d.c. glow discharges by optical emission spectroscopyAvelar-Batista, J. C. / Wilson, A. D. / Davison, A. / Leyland, A. / Matthews, A. / Fancey, K. S. et al. | 2001
- 513
-
Porous silica materials as low-k dielectrics for electronic and optical interconnectsJain, A. / Rogojevic, S. / Ponoth, S. / Agarwal, N. / Matthew, I. / Gill, W. N. / Persans, P. / Tomozawa, M. / Plawsky, J. L. / Simonyi, E. et al. | 2001
- 523
-
Enhancing the resistance of low-k hydrogen silsesquioxane (HSQ) to wet stripper damageChang, T. C. / Mor, Y. S. / Liu, P. T. / Tsai, T. M. / Chen, C. W. / Mei, Y. J. / Sze, S. M. et al. | 2001
- 527
-
From tribological coatings to low-k dielectrics for ULSI interconnectsGrill, A. et al. | 2001
- 533
-
Characterization and reliability of low dielectric constant fluorosilicate glass and silicon rich oxide process for deep sub-micron device applicationCheng, Y. L. / Wang, Y. L. / Liu, C. W. / Wu, Y. L. / Lo, K. Y. / Liu, C. P. / Lan, J. K. et al. | 2001
- 539
-
Filtered cathodic vacuum arc deposition of thin film copperLau, S. P. / Cheng, Y. H. / Shi, J. R. / Cao, P. / Tay, B. K. / Shi, X. et al. | 2001
- 544
-
Integration of MOCVD titanium nitride with collimated titanium and ion metal plasma titanium for 0.18-mm logic processLan, J. K. / Wang, Y. L. / Lo, K. Y. / Liu, C. P. / Liu, C. W. / Wang, J. K. / Cheng, Y. L. / Chau, C. G. et al. | 2001
- 549
-
Thermomechanical properties of a-Si:H and a-Ge:Hde Lima Jr., M. M. / Marques, F. C. et al. | 2001
- 553
-
Amorphous hydrocarbon based thin films for high-aspect-ratio MEMS applicationsCao, D. M. / Wang, T. / Feng, B. / Meng, W. J. / Kelly, K. W. et al. | 2001
- 560
-
Patterning of diamond and amorphous carbon films using focused ion beamsStanishevsky, A. et al. | 2001
- 566
-
Three-dimensional structures assembled from polysilicon surface micromachined components containing continuous hinges and microrivetsKolesar, E. S. / Ruff, M. D. / Odom, W. E. / Howard, J. T. / Ko, S. Y. / Allen, P. B. / Wilken, J. M. / Wilks, R. J. / Bosch, J. E. / Boydston, N. C. et al. | 2001
- 572
-
A multilayer semi-industrial vacuum deposition equipment for producing ultrathin batteriesMartin, M. / Faverjon, F. et al. | 2001
- 575
-
AlN thin films deposited by pulsed laser ablation, sputtering and filtered arc techniquesBathe, R. / Vispute, R. D. / Habersat, D. / Sharma, R. P. / Venkatesan, T. / Scozzie, C. J. / Ervin, M. / Geil, B. R. / Lelis, A. J. / Dikshit, S. J. et al. | 2001
- 581
-
Ceramic sol-gel composite coatings for electrical insulationOlding, T. / Sayer, M. / Barrow, D. et al. | 2001
- 587
-
Chambered capsule coatingsJankowski, A. F. / Hayes, J. P. / Morse, J. D. et al. | 2001
- 591
-
Electron emission enhanced chemical vapor deposition (EEECVD) for the fabrication of diverse silicon-containing filmsBica de Moraes, M. A. / Durrant, S. F. / Rouxinol, F. P. et al. | 2001
- 597
-
Characteristics of TiNi alloy thin filmsChen, P. / Ting, J. M. et al. | 2001
- 602
-
Deposition of anti-bacterial silver coatings on polymeric substratesDowling, D. P. / Donnelly, K. / McConnell, M. L. / Eloy, R. / Arnaud, M. N. et al. | 2001
- 607
-
The deposition, structure, pattern deposition, and activity of biomaterial thin-films by matrix-assisted pulsed-laser evaporation (MAPLE) and MAPLE direct writeWu, P. K. / Ringeisen, B. R. / Callahan, J. / Brooks, M. / Bubb, D. M. / Wu, H. D. / Pique, A. / Spargo, B. / McGill, R. A. / Chrisey, D. B. et al. | 2001
- 615
-
Spin casted mesoporous silica coatings for medical applicationsGomez-Vega, J. M. / Iyoshi, M. / Kim, K. Y. / Hozumi, A. / Sugimura, H. / Takai, O. et al. | 2001
- 621
-
Electrochemical deposition of barium titanate films using a wide electrolytic voltage rangeWu, C. T. / Lu, F. H. et al. | 2001
- 626
-
Mechanical and thermophysical properties of PECVD oxynitride films measured by MEMSGuimaraes, M. S. / Sinatora, A. / Alayo, M. I. / Pereyra, I. / Carreno, M. N. et al. | 2001
- 632
-
The effect of ammonia plasma treatment on low-k methyl-hybrido-silsesquioxane against photoresist stripping damageChang, T. C. / Mor, Y. S. / Liu, P. T. / Tsai, T. M. / Chen, C. W. / Mei, Y. J. / Sze, S. M. et al. | 2001
- 637
-
Improvement of low dielectric constant methylsilsesquioxane by boron implantation treatmentChang, T. C. / Mor, Y. S. / Liu, P. T. / Tsai, T. M. / Chen, C. W. / Sze, S. M. / Mei, Y. J. et al. | 2001
- 641
-
Characterization of undoped and Cu-doped ZnO films for surface acoustic wave applicationsLee, J. B. / Lee, H. J. / Seo, S. H. / Park, J. S. et al. | 2001
- 647
-
Development of a low angle forward reflected neutral oxygen beam for materials processingLee, D. H. / Bae, J. W. / Park, S. D. / Yeom, G. Y. et al. | 2001
- 652
-
Etch characteristics of SrBi2Ta2O9 (SBT) thin films using magnetized inductively coupled plasmasLee, Y. J. / Jeong, C. H. / Bae, J. W. / You, I. K. / Park, J. W. / Yeom, G. Y. et al. | 2001
- 657
-
Chemical interaction, adhesion and diffusion properties at the interface of Cu and plasma-treated thiophene-based plasma polymer (ThioPP) filmsKim, K. J. / Lee, N. E. / Kim, M. C. / Boo, J. H. et al. | 2001
- 663
-
Ferroelectric-gate field effect transistors using Nd2Ti2O7/Y2O3/Si structuresKim, W. S. / Ha, S. M. / Yang, J. K. / Park, H. H. et al. | 2001