Influence of electric field intensity on the copper catalyst-mediated crystallization of amorphous silicon (English)
- New search for: Kim, Y.-B.
- New search for: Kim, C.-H.
- New search for: Kim, H.-C.
- New search for: Kim, Y.-W.
- New search for: Jeon, H.-P.
- New search for: Choi, D.-K.
- New search for: Kim, Y.-B.
- New search for: Kim, C.-H.
- New search for: Kim, H.-C.
- New search for: Kim, Y.-W.
- New search for: Jeon, H.-P.
- New search for: Choi, D.-K.
In:
JOURNAL OF VACUUM SCIENCE AND TECHNOLOGY B MICROELECTRONICS AND NANOMETER STRUCTURES
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23
, 2
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525-529
;
2005
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ISSN:
- Article (Journal) / Print
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Title:Influence of electric field intensity on the copper catalyst-mediated crystallization of amorphous silicon
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Contributors:Kim, Y.-B. ( author ) / Kim, C.-H. ( author ) / Kim, H.-C. ( author ) / Kim, Y.-W. ( author ) / Jeon, H.-P. ( author ) / Choi, D.-K. ( author )
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Published in:
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Publisher:
- New search for: American Vacuum Society
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Publication date:2005-01-01
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Size:5 pages
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ISSN:
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Type of media:Article (Journal)
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Type of material:Print
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Language:English
- New search for: 621.55
- Further information on Dewey Decimal Classification
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Classification:
DDC: 621.55 -
Source:
© Metadata Copyright the British Library Board and other contributors. All rights reserved.
Table of contents – Volume 23, Issue 2
The tables of contents are generated automatically and are based on the data records of the individual contributions available in the index of the TIB portal. The display of the Tables of Contents may therefore be incomplete.
- 339
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Fabrication of a nanosized current-driven spin valve device using proximity correction in electron-beam lithographyYi, Hyunjung / Nguyen, T. H. Y. / Chang, Joonyeon / Shin, K. H. et al. | 2005
- 344
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Fourier transform infrared spectroscopy studies of water-polymer interactions in chemically amplified photoresistsMcDonough, Laurie A. / Chikan, Viktor / Hwan Kim, Zee / Leone, Stephen R. / Hinsberg, William D. et al. | 2005
- 349
-
Diffusion of dopants in highly - and -doped GaSb-based materialsDier, Oliver / Grau, Markus / Lauer, Christian / Lin, Chun / Amann, Markus-Christian et al. | 2005
- 354
-
Micropatterning organosilane self-assembled monolayers with plasma etching and backfilling techniquesHarant, Adam W. / Whipple, Stephen G. / Douglas, Kenneth / Bowman, Christopher N. et al. | 2005
- 359
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Fabrication and characterization of -type silicon field-emitter arrays for lithographyTeepen, T. F. / van Veen, A. H. V. / van’t Spijker, H. / Steenbrink, S. W. H. K. / van Zuuk, A. / Heerkens, C. Th. H. / Wieland, M. J. / van Druten, N. J. / Kruit, P. et al. | 2005
- 370
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Performance improvement of diamondlike carbon membrane masks for electron projection lithographyAmemiya, Isao / Yamashita, Hiroshi / Taniguchi, Kazutake / Nakatsuka, Sakae / Kimura, Ikuru / Nagarekawa, Osamu et al. | 2005
- 375
-
Three-dimensional multilayered microstructure fabricated by imprint lithographyOoe, H. / Morimatsu, M. / Yoshikawa, T. / Kawata, H. / Hirai, Y. et al. | 2005
- 380
-
Shot noise power spectrum of planar field emittersRangaswamy, K. / Cahay, M. / Jensen, K. L. et al. | 2005
- 389
-
Reduction of plasma-induced damage in films during pulse-time-modulated plasma irradiationIshikawa, Yasushi / Okigawa, Mitsuru / Samukawa, Seiji / Yamasaki, Satoshi et al. | 2005
- 395
-
Effect of plasma interactions with low- films as a function of porosity, plasma chemistry, and temperatureWorsley, Marcus A. / Bent, Stacey F. / Gates, Stephen M. / Fuller, Nicholas C. M. / Volksen, Willi / Steen, Michelle / Dalton, Timothy et al. | 2005
- 395
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Effect of plasma interactions with low-kappa films as a function of porosity, plasma chemistry, and temperatureWorsley, M. A. / Bent, S. F. / Gates, S. M. / Fuller, N. C. M. / Volksen, W. / Steen, M. / Dalton, T. et al. | 2005
- 406
-
Anion variations at semiconductor interfaces: ZnSe(100)/GaAs(100) superlatticesFarrell, H. H. / LaViolette, Randall A. et al. | 2005
- 417
-
Edge effects characterization of phase shift maskChua, Gek Soon / Tay, Cho Jui / Quan, Chenggen / Lin, Qunying et al. | 2005
- 425
-
Effect of sidewall properties on the bottom microtrench during etching in a plasmaMin, Jae-Ho / Lee, Gye-Re / Lee, Jin-Kwan / Moon, Sang Heup / Kim, Chang-Koo et al. | 2005
- 433
-
Effect of electric field on chemical bonds of carbon-doped silicon oxide as evidenced by in situ Fourier transform infrared spectroscopyYiang, K. Y. / Yoo, W. J. / Krishnamoorthy, Ahila et al. | 2005
- 437
-
In situ fabrication of metal gate/high- dielectric gate stacks using a potential lower cost front-end process for the sub- CMOS technology nodeDamjanovic, Daniel / Singh, Rajendra / Poole, Kelvin F. et al. | 2005
- 437
-
In situ fabrication of metal gate/high-kappa dielectric gate stacks using a potential lower cost front-end process for the sub-90 nm CMOS technology nodeDamjanovic, D. / Singh, R. / Poole, K. F. et al. | 2005
- 443
-
Surface morphology of epitaxial LiF(110) and (110) layersSugawara, Akira / Mae, K. et al. | 2005
- 449
-
Effects of B content on microstructure and mechanical properties of nanocomposite thin filmsLu, Y. H. / Sit, P. / Hung, T. F. / Chen, Haydn / Zhou, Z. F. / Li, K. Y. / Shen, Y. G. et al. | 2005
- 449
-
Effects of B content on microstructure and mechanical properties of nanocomposites Ti-B~x-N~y thin filmsLu, Y. H. / Sit, P. / Hung, T. F. / Chen, H. / Zhou, Z. F. / Li, K. Y. / Shen, Y. G. et al. | 2005
- 458
-
Synthesis of multiwalled carbon nanotubes using catalystHuh, Yoon / Lee, Jeong Yong / Choi, Sang Kyu / Lee, Cheol Jin et al. | 2005
- 463
-
Copper diffusion barrier properties of CVD boron carbo-nitrideEngbrecht, E. R. / Sun, Y.-M. / Junker, K. H. / White, J. M. / Ekerdt, J. G. et al. | 2005
- 468
-
Approach to interface roughness of silicide thin films by micro-Raman imagingZhao, F. F. / Sun, W. X. / Feng, Y. P. / Zheng, J. Z. / Shen, Z. X. / Pang, C. H. / Chan, L. H. et al. | 2005
- 475
-
Effects of Pd activation on the self annealing of electroless copper deposition using Co(II)–ethylenediamine as a reducing agentLee, Chang Hwa / Kim, Jae Jeong et al. | 2005
- 480
-
Mechanism of simultaneous formation of refractory-metal free and induced by -switched :Yttrium–aluminum–garnet laser irradiationTan, S. C. / See, A. / Yu, T. / Shen, Z. X. / Lin, J. et al. | 2005
- 486
-
Effects of nickel and titanium thickness on nickel/titanium ohmic contacts to -type silicon carbidePark, Jae Hyun / Holloway, Paul H. et al. | 2005
- 495
-
Fermi level pinning on surface by inductively coupled plasma treatmentKim, Iee-Gon / Choi, Kyoung Jin / Lee, Jong-Lam et al. | 2005
- 499
-
Rutile films grown by molecular beam epitaxy on GaN andHansen, P. J. / Vaithyanathan, V. / Wu, Y. / Mates, T. / Heikman, S. / Mishra, U. K. / York, R. A. / Schlom, D. G. / Speck, J. S. et al. | 2005
- 507
-
Nanoimprint and nanocontact technologies using hydrogen silsesquioxaneNakamatsu, Ken-ichiro / Watanabe, Keiichiro / Tone, Katsuhiko / Namatsu, Hideo / Matsui, Shinji et al. | 2005
- 513
-
Fabrication of polysilicon thin-film transistors using nickel/copper double-layer-induced lateral crystallizationChen, Chi-Chieh / Yang, Bo-Chuan / Lee, Si-Chen et al. | 2005
- 519
-
Investigation of a nanocrystalline silicon phase embedded in thin films grown by pulsed laser depositionFazio, Enza / Barletta, Enrico / Barreca, Francesco / Neri, Fortunato / Trusso, Sebastiano et al. | 2005
- 525
-
Influence of electric field intensity on the copper catalyst-mediated crystallization of amorphous siliconKim, Young-Bae / Kim, Chul-Ho / Kim, Hyun-Chul / Kim, Young-Woong / Jeon, Hyun-Pyo / Choi, Duck-Kyun et al. | 2005
- 530
-
Ferromagnetic properties of (Ga,Mn)N nanowires grown by a chemical vapor deposition methodBaik, Jeong Min / Lee, Jong-Lam et al. | 2005
- 534
-
Study of neutral-beam etching conditions for the fabrication of 7-nm-diameter nanocolumn structures using ferritin iron-core masksKubota, Tomohiro / Baba, Tomohiro / Kawashima, Hiroyuki / Uraoka, Yukiharu / Fuyuki, Takashi / Yamashita, Ichiro / Samukawa, Seiji et al. | 2005
- 540
-
Process method to suppress the effect of phase errors in alternating phase shift masksSingh, Navab / Roy, Moitreyee M. / Mehta, Sohan S. / Adeyeye, A. O. et al. | 2005
- 547
-
Evaluation of the effectiveness of plasmas in removing boron from Si after etching of films in plasmasWang, C. / Donnelly, V. M. et al. | 2005
- 554
-
Combined in situ and ex situ analysis of hydrogen radical and thermal removal of native oxides from (001) GaAsEyink, Kurt G. / Grazulis, Larry et al. | 2005
- 559
-
Ideally ordered 10 nm channel arrays grown by anodization of focused-ion-beam patterned aluminumPeng, C. Y. / Liu, C. Y. / Liu, N. W. / Wang, H. H. / Datta, A. / Wang, Y. L. et al. | 2005
- 563
-
Carbon nanotube field emitter manufactured by anodic-alumina template and Ni-CNT composite platingKang, Hyungdong / Lee, Sangmoon / Lee, Haisung et al. | 2005
- 566
-
Dielectric properties enhancement of thin films induced by substrate biasingHuang, A. P. / Chu, Paul K. / Yan, H. / Zhu, M. K. et al. | 2005
- 570
-
Optical measurement and fabrication from a Morpho-butterfly-scale quasistructure by focused ion beam chemical vapor depositionWatanabe, Keiichiro / Hoshino, Takayuki / Kanda, Kazuhiro / Haruyama, Yuichi / Kaito, Takashi / Matsui, Shinji et al. | 2005
- 575
-
Development and characterization of silane antisticking layers on nickel-based stamps designed for nanoimprint lithographyKeil, M. / Beck, M. / Ling, T. G. I. / Graczyk, M. / Montelius, L. / Heidari, B. et al. | 2005
- 575
-
Development and characterization of silane antisticking layers on nickel-based stamps designed for nanoimprint lithographya)Keil, M. / Beck, M. / Ling, T. G. I. / Graczyk, M. / Montelius, L. / Heidari, B. et al. | 2005
- 585
-
Gas-assisted focused ion beam etching characteristics of niobiumFu, X. L. / Li, P. G. / Jin, A. Z. / Zhang, H. Y. / Yang, H. F. / Tang, W. H. et al. | 2005
- 588
-
Microstructure and mechanical properties of superhard Ti–B–C–N films deposited by dc unbalanced magnetron sputteringPark, In-Wook / Kim, Kwang Ho / Kunrath, Augusto O. / Zhong, Dalong / Moore, John J. / Voevodin, A. A. / Levashov, E. A. et al. | 2005
- 594
-
Electronic defect states at annealed metal/4H-SiC interfacesTumakha, S. / Goss, S. H. / Brillson, L. J. / Okojie, R. S. et al. | 2005
- 594
-
Electronic defect states at annealed interfacesa)Tumakha, S. / Goss, S. H. / Brillson, L. J. / Okojie, R. S. et al. | 2005
- 599
-
Influence of scaling effects on designing for power efficiency of a micropreconcentratorCook, K. A. / Sastry, A. M. et al. | 2005
- 612
-
Three-dimensional time-resolved analysis for the discharge of plasma display panel using the scanned-point detecting systemChoi, Hoon-Young / Lee, Seok-Hyun / Lee, Seung-Gol / Seo, Jeong-Hyun et al. | 2005
- 621
-
Time dependent models of field-assisted photoemissionJensen, Kevin L. / Feldman, Donald W. / O’Shea, Patrick G. et al. | 2005
- 632
-
Effect of aspect ratio and anode location on the field emission properties of a single tip based emitterSmith, R. C. / Carey, J. D. / Forrest, R. D. / Silva, S. R. P. et al. | 2005
- 636
-
Space-charge effects of electrons and ions on the steady states of field-emission-limited diodesLin, Ming-Chieh et al. | 2005
- 640
-
Electron optics and electrical studies of a single Spindt-type field emitterDésières, Y. / Nicolas, P. / Sermet, F. / Geffraye, F. / Gidon, S. et al. | 2005
- 645
-
Numerical study of the electrostatic field gradients present in various planar emitter field emission configurations relevant to experimental researchGonzález-Berríos, Adolfo / Piazza, Fabrice / Morell, Gerardo et al. | 2005
- 649
-
Ring-shaped images as a result of nonuniform field emission from capped carbon nanotubesFilip, L. D. / Nicolaescu, D. / Tanemura, M. / Kanemaru, S. / Itoh, J. et al. | 2005
- 657
-
Field electron emission from two-dimensional electron gasFilip, V. / Nicolaescu, D. / Wong, H. / Nagao, M. / Chu, P. L. et al. | 2005
- 665
-
Field emission under extreme conditions from carbon nanopearls in a foam-like arrangementLevesque, A. / Vincent, P. / Binh, Vu Thien / Guillot, D. / Brookes, M. D. et al. | 2005
- 671
-
Scanning anode field emission microscopy analysis for studies of planar cathodesSemet, V. / Mouton, R. / Binh, Vu Thien et al. | 2005
- 676
-
Field emission from teepee-shaped carbon nanotube bundlesBusta, H. / Tolt, Z. / Montgomery, J. / Feinerman, A. et al. | 2005
- 680
-
Pulsed field emitted current from different commercial samples in the purpose of a free electron laser applicationGanter, R. / Li, K. / Dehler, M. / Gobrecht, J. / Rivkin, L. / Wrulich, A. et al. | 2005
- 682
-
Characterization of an advanced high-efficiency electron emission deviceNegishi, Nobuyasu / Nakada, Tomonari / Sakemura, Kazuto / Okuda, Yoshiyuki / Satoh, Hideo / Watanabe, Atsushi / Yoshikawa, Takamasa / Ogasawara, Kiyohide / Koshida, Nobuyoshi et al. | 2005
- 687
-
Energy distributions of field emission electrons from silicon emittersShimawaki, Hidetaka / Suzuki, Yousuke / Sagae, Katsumi / Neo, Yoichiro / Mimura, Hidenori et al. | 2005
- 691
-
High current, high current density field emitter array cathodesSchwoebel, P. R. / Spindt, C. A. / Holland, C. E. et al. | 2005
- 694
-
Regeneration of gated carbon nanotube field emissionHsu, David S. Y. / Shaw, Jonathan L. et al. | 2005
- 698
-
Influence of mechanical stress on electron field emission of multiwalled carbon nanotube–polymer compositesPoa, C. H. P. / Smith, R. C. / Silva, S. R. P. / Sun, C. Q. et al. | 2005
- 702
-
Stable and high emission current from carbon nanotube paste with spin on glassPark, Jae-Hong / Moon, Jin-San / Han, Jae-Hee / Berdinsky, Alexander S. / Yoo, Ji-Beom / Park, Chong-Yun / Nam, Joong-Woo / Park, Jonghwan / Lee, Chun Gyoo / Choe, Deok Hyeon et al. | 2005
- 707
-
Emission statistics for Si and HfC emitter arrays after residual gas exposureNicolaescu, D. / Nagao, M. / Sato, T. / Filip, V. / Kanemaru, S. / Itoh, J. et al. | 2005
- 718
-
Uniformity measurement of electron emission from carbon nanotubes using electron-beam resistLee, J. H. / Lee, S. H. / Kim, W. S. / Lee, H. J. / Heo, J. N. / Jeong, T. W. / Choi, C. H. / Kim, J. M. / Park, J. H. / Ha, J. S. et al. | 2005
- 723
-
Noise and emission characteristics of field emittersCharbonnier, F. M. / Southall, L. A. / Mackie, W. A. et al. | 2005
- 731
-
Ion-beam morphological conditioning of carbon field emission cathode surfacesHunt, Charles E. / Chakhovskoi, Andrei G. / Wang, Yu et al. | 2005
- 735
-
Observation of electron emission pattern from nanosplit emitter fabricated using beam assisted processMurakami, K. / Yamasaki, N. / Abo, S. / Wakaya, F. / Takai, M. et al. | 2005
- 741
-
Scanning tunneling microscopy observations of hafnium carbide thin films as a field emission materialSato, T. / Saida, M. / Horikawa, K. / Sasaki, M. / Nagao, M. / Kanemaru, S. / Matsukawa, T. / Itoh, J. / Yamamoto, S. et al. | 2005
- 745
-
Low temperature burnable carbon nanotube paste component for carbon nanotube field emitter backlight unitLee, Sora / Im, Won Bin / Kang, Jong Hyuk / Jeon, Duk Young et al. | 2005
- 749
-
Screen printed carbon nanotube field emitter array for lighting source applicationPark, Jae-Hong / Son, Gil-Hwan / Moon, Jin-San / Han, Jae-Hee / Berdinsky, Alexander S. / Kuvshinov, D. G. / Yoo, Ji-Beom / Park, Chong-Yun / Nam, Joong-Woo / Park, Jonghwan et al. | 2005
- 754
-
Selective growth of carbon nanotubes on silicon protrusionsSato, Hideki / Hata, Koichi / Miyake, Hideto / Hiramatsu, Kazumasa / Saito, Yahachi et al. | 2005
- 759
-
Effect of thermal annealing on emission characteristics of nanoelectron source fabricated using beam-assisted processMurakami, K. / Yamasaki, N. / Abo, S. / Wakaya, F. / Takai, M. et al. | 2005
- 762
-
Influence of gas atmosphere during laser surface treatment of CNT cathodeRochanachirapar, W. / Murakami, K. / Yamasaki, N. / Abo, S. / Wakaya, F. / Takai, M. / Hosono, A. / Okuda, S. et al. | 2005
- 765
-
Laser surface treatment of carbon nanotube cathodes for field emission displays with large diagonal sizeRochanachirapar, W. / Murakami, K. / Yamasaki, N. / Abo, S. / Wakaya, F. / Takai, M. / Hosono, A. / Okuda, S. et al. | 2005
- 769
-
Reduction of the work function on Mo(100) surface covered withNakane, Hideaki / Satoh, Shinya / Adachi, Hiroshi et al. | 2005
- 772
-
Fabrication and field emission characteristics of high density carbon nanotube microarraysChuang, C. C. / Huang, J. H. / Lee, C. C. / Chang, Y. Y. et al. | 2005
- 776
-
High current field emission from carbon nanofiber films grown using electroplated Ni catalystPark, Kyung Ho / Yim, Jong Hyuk / Lee, Soonil / Koh, Ken Ha et al. | 2005
- 781
-
Investigation of a microtriode with a planar field emitter-extractor source fabricated by direct-write nanolithography using electron beam induced depositionSellmair, Josef / Edinger, Klaus / Koops, Hans W. P. et al. | 2005
- 786
-
Growth aspects of nanocrystalline diamond films and their effects on electron field emissionsSubramanian, K. / Kang, W. P. / Davidson, J. L. / Hofmeister, W. H. et al. | 2005
- 793
-
Effects of deposition and synthesis parameters on size, density, structure, and field emission properties of Pd-catalyzed carbon nanotubes synthesized by thermal chemical vapor depositionWei, S. / Kang, W. P. / Hofmeister, W. H. / Davidson, J. L. / Wong, Y. M. / Huang, J. H. et al. | 2005
- 800
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Edge-shaped diamond field emission arraysTakalkar, R. S. / Davidson, J. L. / Kang, W. P. / Wisitsora-at, A. / Kerns, D. V. et al. | 2005
- 805
-
Effect of Ti interlayer on the growth of carbon nanotubes on Si by microwave-heated chemical vapor depositionHuang, J. H. / Chen, Y. S. / Chuang, C. C. / Wong, Y. M. / Kang, W. P. et al. | 2005
- 809
-
Electron field emission from carbon nanotubes on porous aluminaLysenkov, D. / Abbas, H. / Müller, G. / Engstler, J. / Budna, K. P. / Schneider, J. J. et al. | 2005
- 814
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X-ray generation from large area carbon-based field emittersBusta, H. / Lesiak, S. / Zwicker, B. / Montgomery, J. / Wan, Z. / Feinerman, A. et al. | 2005
- 819
-
Desorption/ionization mass spectrometry on array of silicon microtipsGorecka-Drzazga, Anna / Dziuban, Jan / Drzazga, Wlodzimierz / Kraj, Agnieszka / Silberring, Jerzy et al. | 2005
- 824
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Composite-layered solid-state field controlled emitter for a better control of the cathode surface barrierSemet, V. / Binh, Vu Thien / Zhang, J. P. / Yang, J. / Khan, M. Asif / Tsu, R. et al. | 2005
- 831
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High intensity pulse x-ray generation by using graphite-nanocrater cold cathodeMatsumoto, Takahiro / Mimura, Hidenori et al. | 2005
- 836
-
Method and structure for local emission regulation and arc prevention in field emitter arraysShaw, Jonathan L. / Hsu, David S. Y. et al. | 2005
- 840
-
Smith–Purcell radiation using a single-tip field emitterNeo, Yoichiro / Suzuki, Yosuke / Sagae, Katsumi / Shimawaki, Hidetaka / Mimura, Hidenori et al. | 2005
- 843
-
Characterization of nano-size and phosphors by low voltage cathodo- and photoluminescenceKang, Jong Hyuk / Nazarov, Michael / Im, Won Bin / Kim, Jin Young / Jeon, Duk Young et al. | 2005
- 849
-
Field-emission based vacuum device for the generation of terahertz wavesLin, Ming-Chieh / Huang, Kuo-Hua / Lu, Pu-Shih / Lin, Pei-Yi / Jao, Ruei-Fu et al. | 2005
- 853
-
Polysilicon metal-insulator-semiconductor electron emitterGovyadinov, Alexander / Novet, Thomas / Pidwerbecki, David / Ramamoorthi, Sriram / Smith, Jim / Chen, John / Otis, Chuck / Neiman, David / Benning, Paul et al. | 2005
- 864
-
Fabrication of Si field emitter array in local vacuum packageNoda, Daiji / Hatakeyama, Masanori / Kyogoku, Masanori / Ikushima, Kimiya / Sawada, Kazuaki / Ishida, Makoto et al. | 2005
- 868
-
Transistor characteristics of thermal chemical vapor deposition carbon nanotubes field emission triodeWong, Y. M. / Kang, W. P. / Davidson, J. L. / Hofmeister, W. / Wei, S. / Huang, J. H. et al. | 2005
- L1
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Fabrication of gap pillar electrodes by electron-beam depositionGazzadi, Gian Carlo / Frabboni, Stefano et al. | 2005